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1. 发明授权

EP0936291B1 Crystal growth observing apparatus 有权
标题翻译：装置用于监测晶体的生长
公开(公告)号：EP0936291B1
公开(公告)日：2005-04-06
申请号：EP98310092.6
申请日：1998-12-09
申请人： NATIONAL RESEARCH INSTITUTE FOR METALS
发明人： Tsukamoto, Shiro , Koguchi, Noboyuki
IPC分类号： C30B23/02 , G01N27/00
CPC分类号： G01Q60/16 , C30B23/02 , G01Q30/02 , Y10S977/852 , Y10T117/1004

2. 发明授权

EP1269112B1 THICKNESS MEASUREMENT USING AN ATOMIC FORCE MICROSCOPE 有权
标题翻译： WITH A原子力显微镜测量DICK
公开(公告)号：EP1269112B1
公开(公告)日：2004-06-09
申请号：EP01912979.0
申请日：2001-02-21
申请人： ADVANCED MICRO DEVICES INC.
发明人： PHAN, Khoi, A. , RANGARAJAN, Bharath , SINGH, Bhanwar
IPC分类号： G01B7/34 , G01B21/08 , H01L21/66 , G01B21/18 , G01N27/00
CPC分类号： G01B21/18 , G01B7/066 , G01B21/08 , G01Q30/04 , G01Q80/00 , H01L22/12 , Y10S977/852
摘要： The present invention relates to a method (100) of determining a film thickness and comprises identifying (114) a depth associated with a defect (106) in an underlying material (108) and forming (116) the film (130) over the underlying material (108). The method (100) further comprises identifying (118) a depth associated with the defect (106) in the film (108) and then using (124) the identified depths to determine the film thickness. The present invention also relates to a system (200) for determining a film thickness and comprises a defect inspection tool (204) operable to identify a location of one or more defects (106) in an underlying material (108) and a topology measurement tool (208) operable to measure a change in topology of a surface. The system (200) also comprises a controller (206) operably coupled to the defect inspection tool (204) and the topology measurement tool (208). The controller (206) is adapted to receive location information from the defect inspection tool (204) relating to the one or more defects (106) and use the location information to generate and transmit one or more control signals to the topology measurement tool (208) to evaluate a topology of an underlying material (108) and a film (130) at the location corresponding to the one or more defects (106) to thereby generate topology information. Lastly, the controller (206) is adapted to receive the topology information from the topology measurement tool (208) and determine a film thickness using the topology information.

3. 发明授权

EP0890820B1 Scanning probe microscope 失效
标题翻译：扫描探针显微镜
公开(公告)号：EP0890820B1
公开(公告)日：2004-03-24
申请号：EP98305412.3
申请日：1998-07-08
申请人： Jeol Ltd.
发明人： Kitamura, Shinichi , Sueyoshi, Takashi
IPC分类号： G01B7/34 , G01N27/00 , G01N27/22
CPC分类号： G01Q60/32 , G01Q60/30 , Y10S977/851 , Y10S977/852 , Y10S977/86 , Y10S977/873

4. 发明授权

EP0872707B1 Apparatus for measuring exchange force 失效
标题翻译：交易所测力装置
公开(公告)号：EP0872707B1
公开(公告)日：2003-07-02
申请号：EP98302918.2
申请日：1998-04-15
申请人： HOKKAIDO UNIVERSITY
发明人： Mukasa, Koichi , Hayakawa, Kazunobu , Sueoka, Kazuhisa , Nakamura, Kohji , Tazuke, Yuichi , Hasegawa, Hideo , Oguchi, Tamio
IPC分类号： G01B7/34
CPC分类号： G01Q60/08 , G01Q60/32 , G01Q60/38 , G01Q60/54 , Y10S977/852

5. 发明公开

EP0801310A4 ELEMENTARY ANALYSIS METHOD BY SCANNING PROBE MICROSCOPE AND ULTRA-SHORT PULSE HIGH-VOLTAGE APPLICATION METHOD USED FOR SAID METHOD 失效
标题翻译：元素分析方法并网样品显微镜使用一个事实相关步骤短高压脉冲
公开(公告)号：EP0801310A4
公开(公告)日：2000-02-02
申请号：EP95941903
申请日：1995-12-26
申请人： JAPAN RES DEV CORP
发明人： MORI YUZO , SAKAMOTO MASAO
IPC分类号： G01N23/227 , G01Q30/02 , G01Q30/04 , G01Q60/10 , G01N37/00
CPC分类号： G01N23/227 , B82Y35/00 , G01N23/2276 , Y10S977/852
摘要： The present invention makes it possible to conduct the determination of the three-dimensional coordinates of the atomic nucleus for each surface atom of a sample, elementary analysis and analysis of the chemical bond state by combining high spatial resolution of a scanning probe microscope with an Auger electron spectroscopy or an elementary analysis method by an energy analysis method of photons generated by high energy electron irradiation and a chemical bond state analysis method. An A.C. or D.C. ultra-short pulse high voltage is applied either singly or repeatedly between a probe and a sample during the operation of a scanning probe and a sample during the operation of a scanning probe microscope under its original operation condition or while the operation of the microscope is suspended temporarily, so as to excite core electrons of the sample or valence electrons distributed spherically and symmetrically with the atomic nucleus as the center, and energy analysis and counting analysis are carried out for the photons or the Auger electrons thereby emitted so as to decide the three-dimensional coordinates of the atomic nucleus of each surface atom of the sample and to measure surface distribution relating to the elementary analysis and the chemical bond state analysis, and to obtain atomic images containing the elements and chemical bond information.

6. 发明公开

EP0948741A1 METHOD AND APPARATUS FOR HIGH SPATIAL RESOLUTION SPECTROSCOPIC MICROSCOPY 有权
标题翻译：方法和装置用于高速局部分辨率光谱观测
公开(公告)号：EP0948741A1
公开(公告)日：1999-10-13
申请号：EP98950191.0
申请日：1998-10-26
申请人： Claybourn, Michael , Hammiche, Azzedine , Montagu-Pollock, Hubert Murray , Reading, Michael
发明人： Claybourn, Michael , Hammiche, Azzedine , Montagu-Pollock, Hubert Murray , Reading, Michael
IPC分类号： G01Q90 , G01N3 , G01N21 , G01N25
CPC分类号： G01N25/4833 , G01N3/60 , G01N2203/0286 , G01Q30/02 , G01Q60/58 , Y10S977/852 , Y10S977/867
摘要： A sample and a scanning probe microscope system are used as the detector for an infrared spectrometer to circumvent the diffraction limit of conventional infrared microscopy, and to provide spectroscopic images with a greatly improved spatial resolution, potentially as low as a few tens of nanometers. The beam from an infrared spectrometer is directed at the sample. The sample is heated to the extent that it absorbs infrared radiation. Thus the resulting temperature rise of an individual region depends upon the particular molecular species present, as well as the range of wavelengths of the infrared beam. These individual temperature differences are detected by a miniature thermal probe. The thermal probe is mounted in a scanning thermal microscope. The scanning thermal microscope is then operated used to produce multiple surface and sub-surface images of the sample, such that the image contrast corresponds to variations in either thermal diffusivity, surface topography or chemical composition.

7. 发明公开

EP0936291A1 Crystal growth observing apparatus 有权
标题翻译：克里斯蒂尔斯（Vernrichtung zur Beobachtung derZüchtung）
公开(公告)号：EP0936291A1
公开(公告)日：1999-08-18
申请号：EP98310092.6
申请日：1998-12-09
申请人： NATIONAL RESEARCH INSTITUTE FOR METALS
发明人： Tsukamoto, Shiro , Koguchi, Noboyuki
IPC分类号： C30B23/02 , G01N27/00
CPC分类号： G01Q60/16 , C30B23/02 , G01Q30/02 , Y10S977/852 , Y10T117/1004
摘要： A STM drive mechanism (3) capable of moving a scanning tunnelling microscope (STM) (2) incorporated with a molecular beam epitaxy (MBE) device (1) in the MBE device under vacuum and a substrate holder (11) with a wide clearance formed between a substrate heating system (14) and the substrate holder are provided, and the STM is protected by a heat insulating shield (21) from high vapour pressure atmosphere and radiant heat according to substrate heating.
摘要翻译：一种STM驱动机构（3），其能够在真空下将MBE装置中结合有分子束外延（MBE）装置（1）的扫描隧道显微镜（STM）（2））移动到具有宽间隙的基板保持器（11）设置在衬底加热系统（14）和衬底保持器之间，并且根据衬底加热使STM受到高蒸气压气氛和辐射热的隔热屏蔽（21）的保护。

8. 发明公开

EP0890821A1 Scanning probe microscope 失效
标题翻译： Rastersondenmikroskop
公开(公告)号：EP0890821A1
公开(公告)日：1999-01-13
申请号：EP98305530.2
申请日：1998-07-10
申请人： Jeol Ltd.
发明人： Kitamura, Shinichi
IPC分类号： G01B7/34 , G01N27/00 , G01N27/22
CPC分类号： G01Q60/30 , Y10S977/849 , Y10S977/852 , Y10S977/86 , Y10S977/868 , Y10S977/871 , Y10S977/873
摘要： There is disclosed a scanning probe microscope capable of producing a topographic image at a high resolution with a cantilever of a large spring constant and, at the same time, a surface potential image at a high resolution. This microscope can take the form of an atomic force microscope that detects the surface potential of a sample, using a gradient of the force acting between the probe tip and a sample. The gradient is represented by the output from a frequency-to-voltage converter. The frequency of an AC voltage applied across the probe tip and the sample is so set that a z-signal fed back to the cantilever to maintain constant the shift in the resonance frequency of the cantilever can sufficiently follow the AC voltage.
摘要翻译：公开了一种扫描探针显微镜，其能够以高弹性常数的悬臂以高分辨率产生地形图像，同时以高分辨率产生表面电位图像。该显微镜可以采用原子力显微镜的形式，其使用在探针尖端和样品之间作用的力的梯度来检测样品的表面电位。梯度由频率 - 电压转换器的输出表示。跨越探针尖端和样品施加的交流电压的频率被设定为使得反馈到悬臂的z信号保持不变，悬臂的谐振频率的偏移可以充分地跟随交流电压。

9. 发明公开

EP0890820A1 Scanning probe microscope 失效
标题翻译：扫描探针显微镜
公开(公告)号：EP0890820A1
公开(公告)日：1999-01-13
申请号：EP98305412.3
申请日：1998-07-08
申请人： Jeol Ltd.
发明人： Kitamura, Shinichi , Sueyoshi, Takashi
IPC分类号： G01B7/34 , G01N27/00 , G01N27/22
CPC分类号： G01Q60/32 , G01Q60/30 , Y10S977/851 , Y10S977/852 , Y10S977/86 , Y10S977/873
摘要： There is disclosed a scanning probe microscope capable of producing a topographic image at a high resolution with a cantilever of a large spring constant and, at the same time, a surface potential image at a high resolution. This microscope can take the form of an atomic force microscope that detects the surface potential of a sample, using a force gradient acting between the probe tip and a sample. The gradient is represented by the output from a frequency-to-voltage converter.
摘要翻译：公开了一种扫描探针显微镜，其能够以大弹簧常数的悬臂以高分辨率产生地形图像，并且同时以高分辨率产生表面电位图像。这种显微镜可以采用原子力显微镜的形式，使用探针尖端和样品之间的力梯度来检测样品的表面电位。梯度由频率 - 电压转换器的输出表示。

10. 发明授权

EP0551814B1 Surface observing apparatus and method 失效
标题翻译：用于观察表面的方法和装置
公开(公告)号：EP0551814B1
公开(公告)日：1997-04-02
申请号：EP93100055.8
申请日：1993-01-05
申请人： HITACHI, LTD.
发明人： Hosaka, Sumio , Kikugawa, Atsushi , Honda, Yukio , Koyanagi, Hajime , Hosoki, Shigeyuki , Hasegawa, Tsuyoshi
IPC分类号： G01B7/34 , G01N27/00
CPC分类号： G01Q20/02 , G01Q60/02 , G01Q60/08 , G01Q60/26 , G01Q60/32 , G11B5/00 , G11B9/1409 , G11B11/007 , G11B2005/0002 , G11B2005/0005 , Y10S977/849 , Y10S977/851 , Y10S977/852 , Y10S977/873 , Y10S977/953

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