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1. 发明公开

EP1892499A2 Atomic force microscope for generating a small incident beam spot 失效
标题翻译： Atomkraftmikroskop zur Erzeugung eines kleinen Ereignisstrahlenpunktes
公开(公告)号：EP1892499A2
公开(公告)日：2008-02-27
申请号：EP07121018.1
申请日：1997-08-20
申请人： REGENTS OF THE UNIVERSITY OF CALIFORNIA
发明人： Hansma, Paul K. , Schaffer, Tilman E. , Cleveland, Jason P.
IPC分类号： G01B7/34 , G01N13/16
CPC分类号： G01Q20/02 , G01Q60/38 , G01Q70/06 , Y10S977/87
摘要： An atomic force microscope utilizes an optical system having a numerical aperture sufficient with the wavelength of light of an incident beam (44) to form a spot on a cantilever (14) having a size of 8 micrometers or less in at least one dimension. An adjustable aperture (34) can be utilized to control the size and/or shape of the incident beam spot on the cantilever (14). Portions of the incident beam and the beam reflected from the cantilever overlap and are directed so that the plane of focus of the incident beam is parallel to the plane of the cantilever (14). The incident and reflected light beams are separated by polarization using a beamsplitter (40) in conjunction with a quarterwave plate (42). Focussing can be accomplished with a confocal viewing system coupled with a translatable focussing lens common to the optical system and the viewing system.
摘要翻译：原子力显微镜利用具有足够入射光束（44）的光的波长的数值孔径的光学系统，以在至少一个维度上在尺寸为8微米或更小的悬臂（14）上形成点。可以使用可调整的孔（34）来控制悬臂（14）上的入射束斑的尺寸和/或形状。入射光束的一部分和从悬臂反射的光束重叠并被引导，使得入射光束的焦平面平行于悬臂（14）的平面。入射光束和反射光束通过与四分之一波片（42）结合的分束器（40）由极化分离。可以用与光学系统和观察系统共同的可平移聚焦透镜耦合的共焦观察系统来实现聚焦。

2. 发明授权

EP0480136B1 Atomic force microscopy 失效
标题翻译：原子力显微镜
公开(公告)号：EP0480136B1
公开(公告)日：1996-09-25
申请号：EP91112362.8
申请日：1991-07-24
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人： Amer, Nabil Mahmoud , Meyer, Gerhard
IPC分类号： G01B7/34
CPC分类号： G01Q20/02 , Y10S977/87

3. 发明公开

EP0388023A2 Atomic force microscope with optional replaceable fluid cell 失效
标题翻译：原子弹Kraftmikroskop mit Nach Wahl auswechselbarerFlüssigkeitszelle。
公开(公告)号：EP0388023A2
公开(公告)日：1990-09-19
申请号：EP90301688.9
申请日：1990-02-16
申请人： THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
发明人： Hansma, Paul K. , Drake, Barney
IPC分类号： G01B7/34
CPC分类号： G01Q60/38 , G01Q30/025 , G01Q30/14 , G01Q70/02 , G01Q70/04 , Y10S977/863 , Y10S977/87
摘要： An atomic force microscope which is readily useable for researchers for its intended use without extensive lost time for setup and repair. The probe (10,20) used therein is a cantilevered optical lever which imparts surface information in a gentle and reliable manner by reflecting an incident laser beam (24). The probe is carried by a replaceable probe-carrying module (48) which is factory set up and merely inserted and fine tuned by the user. The probe-carrying module also includes the provision for forming a fluid cell (124) around the probe. Fluid can be inserted into and/or be circulated through the fluid cell through incorporated tubes (126,128) in the probe-carrying module. Electrodes (164) are also provided in the fluid cell for various uses including real-time studies of electro-chemical operations taking place in the fluid cell. The piezoelectric scan tube (32) employed includes a voltage shield (60) to prevent scanning voltages to the tube from affecting data readings. Samples (14) are easily mounted, replaced, and horizontally adjusted using a sample stage (58) which is magnetically attached to the top of the scan tube. Calibration tools are provided to make initial set up and fine tuning of the microscope a simple and straightforward operation requiring little or no technical talent.
摘要翻译：一种原子力显微镜，可以很容易地用于研究人员的预期用途，而无需大量的设置和维修时间。其中使用的探针（10,20）是悬臂光学杆，通过反射入射激光束（24）以温和和可靠的方式赋予表面信息。探头由可更换的探头承载模块（48）承载，该模块出厂设置，仅由用户插入和微调。探针承载模块还包括用于在探针周围形成流体池（124）的设置。流体可以插入到和/或通过在探针承载模块中的并入管（126,128）流经细胞循环。电极（164）还设置在流体池中用于各种用途，包括在流体池中进行的电化学操作的实时研究。采用的压电扫描管（32）包括电压屏蔽（60），以防止对管的扫描电压影响数据读数。样品（14）可以容易地安装，更换和水平调整，使用磁性附着到扫描管顶部的样品台（58）。提供校准工具，以便初步设置和微调显微镜简单直观的操作，无需技术人才。

4. 发明授权

EP1012862B1 ATOMIC FORCE MICROSCOPE FOR GENERATING A SMALL INCIDENT BEAM SPOT 失效
标题翻译：原子力显微镜的一小入射光束斑点的产生
公开(公告)号：EP1012862B1
公开(公告)日：2007-11-21
申请号：EP97938447.6
申请日：1997-08-20
申请人： REGENTS OF THE UNIVERSITY OF CALIFORNIA
发明人： HANSMA, Paul, K. , SCHAFFER, Tilman, E. , CLEVELAND, Jason, P.
IPC分类号： G01B7/34 , H01J3/14
CPC分类号： G01Q20/02 , G01Q60/38 , G01Q70/06 , Y10S977/87
摘要： An atomic force microscope utilizes an optical system having a numerical aperture sufficient with the wavelength of light of an incident beam (44) to form a spot on a cantilever (14) having a size of 8 micrometers or less in at least one dimension. An adjustable aperture (34) can be utilized to control the size and/or shape of the incident beam spot on the cantilever (14). Portions of the incident beam and the beam reflected from the cantilever overlap and are directed so that the plane of focus of the incident beam is parallel to the plane of the cantilever (14). The incident and reflected light beams are separated by polarization using a beam splitter (40) in conjuntion with a quarterwave plate (42). Focussing can be accomplished with a confocal viewing system coupled with a translatable focussing lens common to the optical system and the viewing system.

5. 发明公开

EP1247063A4 SCANNING FORCE MICROSCOPE PROBE CANTILEVER WITH REFLECTIVE STRUCTURE 有权
标题翻译： RASTERKRAFTMIKROSKOPHEBELARM MIT REFLEKTIVER STRUKTUR
公开(公告)号：EP1247063A4
公开(公告)日：2005-03-23
申请号：EP00988289
申请日：2000-12-21
申请人： SUSS MICROTEC TEST SYS GMBH
发明人： THOMSON DOUGLAS J , LADA CHRISTOPHER O
IPC分类号： G01B7/34 , G01Q20/02 , G01R1/06 , G01R31/302 , H01L21/66 , G01B5/28 , G12B21/02 , G12B21/22
CPC分类号： G01Q20/02 , Y10S977/87
摘要： A scanning force microscope probe cantilever having a reflective structure. In one embodiment, the described scanning force microscope probe cantilever includes a reflective structure on the cantilever (315). Light (323) from an optical source (303) is directed to the reflective structure on the cantilever (315) in a direction having a directional component from a fixed end of the cantilever (315) to a free end of the cantilever (315). Light (323) is reflected from the reflective structure in a direction having a directional component from the free end of the cantilever (315) to the fixed end of the cantilever (315).
摘要翻译：具有反射结构的扫描力显微镜探针悬臂。在一个实施例中，所描述的扫描力显微镜探针悬臂包括悬臂（315）上的反射结构。来自光源（303）的光（323）在具有从悬臂（315）的固定端到悬臂（315）的自由端的方向分量的方向上被引导到悬臂（315）上的反射结构。。光（323）从反射结构沿具有方向分量的方向从悬臂（315）的自由端（315）到悬臂（315）的固定端反射。

6. 发明公开

EP1377794A1 IMPROVED SCANNING PROBE MICROSCOPE 有权
标题翻译：改进的扫描探针显微镜
公开(公告)号：EP1377794A1
公开(公告)日：2004-01-07
申请号：EP02806801.3
申请日：2002-11-27
申请人： PSIA CORPORATION
发明人： HONG, Jae-Wan,302-404 Sungwon Apartment , KWON, Joon-Hyung,1225-1902 Hanyang Mokryun Apt. , PARK, Sang-Il,102-603 Dongbu Centreville
IPC分类号： G01B7/34
CPC分类号： G01Q20/02 , G01Q10/02 , G01Q10/04 , G01Q70/02 , Y10S977/732 , Y10S977/849 , Y10S977/869 , Y10S977/87 , Y10S977/873 , Y10S977/881
摘要： A scanning probe microscope uses two different scanners (also called 'scanning stages') that are completely detached each from the other, and are physically separated by a stationary frame. One scanner (called 'x-y scanner') scans a sample in a plane (also called 'x-y plane'), while the other scanner (called 'z scanner') scans a probe tip (which is supported at a free end of a cantilever) in a direction (also called 'z direction') perpendicular to the plane. Detachment of the two scanners from one another eliminates crosstalk.

7. 发明公开

EP0862045A3 Atomic force microscope with optional replaceable fluid cell. 失效
标题翻译：原子力显微镜与您所选择互换液晶元件
公开(公告)号：EP0862045A3
公开(公告)日：2000-10-04
申请号：EP98201015.9
申请日：1990-02-16
申请人： THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
发明人： Hansma, Paul K. , Drake, Barney
IPC分类号： G01B7/34
CPC分类号： G01Q60/38 , G01Q30/025 , G01Q30/14 , G01Q70/02 , G01Q70/04 , Y10S977/863 , Y10S977/87
摘要： An atomic force microscope which is readily useable for researchers for its intended use without extensive lost tome for setup and repair. The probe used therein is a cantilevered optical lever which imparts surface information in a gentle and reliable manner by reflecting an incident laser beam. The probe (20) is carried by a replaceable probe-carrying module (48) which is factory set up and merely inserted and fine tuned by the user. Calibration tools are provided to make initial set up and fine tuning of the microscope a simple and straightforward operation requiring little or no technical talent. The probe module (48) is mechanically coupled to a probe module support (38) so that the probe is substantial alignment with a deflection detection system (26, 66).

8. 发明授权

EP0564088B1 Scanning force microscope with integrated optics and cantilever mount and method for operating the same 失效
标题翻译：原子力显微镜用集成光学和臂安装和方法及其使用
公开(公告)号：EP0564088B1
公开(公告)日：1999-08-04
申请号：EP93301418.5
申请日：1993-02-25
申请人： TOPOMETRIX
发明人： Gamble, Ronald C. , West, Paul E.
IPC分类号： G01B7/34 , G01N27/00
CPC分类号： G01Q30/14 , G01Q20/02 , G01Q60/38 , G01Q70/02 , Y10S977/87

9. 发明授权

EP0565227B1 Scanning force microscope 失效
标题翻译： Rasterkraftmikroskop
公开(公告)号：EP0565227B1
公开(公告)日：1999-06-23
申请号：EP93301417.7
申请日：1993-02-25
申请人： TOPOMETRIX
发明人： Gamble, Ronald C. , West, Paul E.
IPC分类号： G01B7/34 , G01N27/00
CPC分类号： G01Q30/08 , G01Q20/02 , G01Q30/14 , G01Q70/02 , Y10S977/87

10. 发明公开

EP0913665A1 Fine movement mechanism and scanning probe microscope 有权
标题翻译： Rastersondenmikroskop mit Feinstellungsvorrichtung
公开(公告)号：EP0913665A1
公开(公告)日：1999-05-06
申请号：EP98203672.5
申请日：1998-10-30
申请人： HITACHI CONSTRUCTION MACHINERY CO., LTD.
发明人： Shirai, Takashi , Murayama, Ken , Morimoto, Takafumi , Kuroda, Hiroshi , Onozato, Harumasa
IPC分类号： G01B7/34 , G01N27/00
CPC分类号： G01Q10/04 , Y10S977/87
摘要： A fine movement mechanism unit is configured by a supporting member (11), two fixed sections (120) fixed to this supporting member, two pairs of parallel-plate flexural sections (121a) disposed between the two fixed sections, an X fine movement mechanism (12), a Y fine movement mechanism (13) and a Z fine movement mechanism (14). The X fine movement mechanism has an X moving section (122) movable in an X direction, connected to each of the two fixed sections (120) through the two pairs of parallel-plate flexural sections (121a), and two X direction piezoelectric actuators (123) causing the X moving section to move. The Y fine movement mechanism arranged to the X moving section, has other two pairs of parallel-plate flexural sections (131a), a Y moving section (132) movable in the Y direction, connected to the X moving section through the other two pairs of parallel-plate flexural sections, and two Y direction piezoelectric actuators (133) causing the Y moving section to move relatively to the X moving section. The Z fine movement mechanism arranged to the Y moving section, has a Z moving section (141) movable in a Z direction perpendicular to both of the X and Y directions, and a Z direction piezoelectric actuator (142) causing the Z moving section to move.
摘要翻译：精细运动机构单元由支撑构件（11）构成，固定在该支撑构件上的两个固定部（120），设置在两个固定部之间的两对平行板弯曲部（121a），X细微移动机构（12），Y精细机构（13）和Z精细机构（14）。 X精细机构具有能够沿着X方向移动的X移动部（122），通过两对平行板弯曲部（121a）与两对平行板弯曲部（121a）连接，两个X方向压电致动器（123）使X移动部移动。设置在X移动部分上的Y细移动机构具有其他两对平行板弯曲部分（131a），Y移动部分（132），其沿Y方向移动，通过另外两对连接到X移动部分平行板弯曲部分和两个Y方向压电致动器（133），使Y移动部分相对于X移动部分移动。配置于Y移动部的Z细移动机构具有能够沿与X方向和Y方向正交的Z方向移动的Z移动部（141），Z方向压电致动器（142）使Z移动部移动。

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