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1. 发明公开

EP3882951A1 CHARGED PARTICLE BEAM DEVICE FOR INSPECTION OF A SPECIMEN WITH A PLURALITY OF CHARGED PARTICLE BEAMLETS 审中-公开
公开(公告)号：EP3882951A1
公开(公告)日：2021-09-22
申请号：EP20164231.1
申请日：2020-03-19
申请人： FEI Company
发明人： Stejskal, Pavel , Sed'a, Bohuslav , Hlavenka, Petr , Novák, Libor , Stopka, Jan
IPC分类号： H01J37/28
摘要： The invention relates to a method of inspecting a specimen with a plurality of charged particle beamlets. The method comprises the steps of providing a specimen 15, providing a plurality of charged particle beamlets and focusing said plurality of charged particle beamlets onto said specimen, and detecting a flux of radiation emanating from the specimen in response to said irradiation by said plurality of charged particle beamlets. Here, the plurality of charged particle beamlets are focused onto said specimen into a beamlet pattern, wherein said beamlet pattern comprises a plurality of spaced apart beamlet spots 3a-3h; 3a'-3h'; 3a"-3h", and wherein said beamlet spots are spaced apart in a first direction [10] and comprise an inter-beamlet spot distance 32 between adjacent beamlet spots. As defined herein, the method comprises the steps of moving said beamlet pattern, in said first direction and over a distance that exceeds said inter-beamlet spot distance, to a plurality of mutually different beamlet pattern positions. By detecting corresponding fluxes of radiation, one or more specimen features 15ab can be assigned to said specimen.

2. 发明公开

EP3614414A1 METHOD OF EXAMINING A SAMPLE USING A CHARGED PARTICLE MICROSCOPE 审中-公开
公开(公告)号：EP3614414A1
公开(公告)日：2020-02-26
申请号：EP18189761.2
申请日：2018-08-20
申请人： FEI Company
发明人： Tuma, Tomas , Hradil, Jan , Hlavenka, Petr
IPC分类号： H01J37/26 , G01N23/00
摘要： The invention relates to a method of examining a sample using a charged particle microscope. The method comprises the steps of detecting using a first detector emissions (54a, 54b) of a first type from the sample in response to the beam scanned over the area (50) of the sample. Then, using spectral information of detected emissions of the first type, at least a part of the scanned area of the sample is divided into multiple segments (51). According to the invention, emissions of the first type at different positions along the scan in at least one of said multiple segments may be combined to produce a combined spectrum of the sample in said one of said multiple segments (154a, 154b). In an embodiment, a second detector is used to detect emissions of a second type, and this is used to divide the area of the sample into multiple regions. The first detector may be an EDS, and the second detector may be based on EM. This way, EDS data and EM data can be effectively combined for producing colored images.

3. 发明授权

EP2487704B1 Detection method for use in charged-particle microscopy 有权
标题翻译：检测方法用在显微镜带电粒子
公开(公告)号：EP2487704B1
公开(公告)日：2014-01-08
申请号：EP12155058.6
申请日：2012-02-13
申请人： FEI Company
发明人： Hlavenka, Petr , Uncovsky, Marek
IPC分类号： H01J37/244 , H01J37/28
CPC分类号： H01J37/244 , G01N21/6447 , G01N2201/08 , H01J37/224 , H01J37/226 , H01J37/28 , H01J2237/2441 , H01J2237/2443 , H01J2237/2445 , H01J2237/26 , H01J2237/2605 , H01J2237/2802 , H01J2237/31749

4. 发明公开

EP2518756A2 In-column detector for particle-optical column 审中-公开
标题翻译： In-Column-Detektorfüreine teilchenoptischeSäule
公开(公告)号：EP2518756A2
公开(公告)日：2012-10-31
申请号：EP12165423.0
申请日：2012-04-25
申请人： FEI Company
发明人： Tuma, Lubomír , Hlavenka, Petr , Sytar, Petr , Ceska, Radek , Sed'a, Bohuslav
IPC分类号： H01J37/145 , H01J37/244 , H01J37/28
CPC分类号： H01J37/26 , H01J37/145 , H01J37/244 , H01J37/28 , H01J2237/04926 , H01J2237/2443 , H01J2237/24465
摘要： The invention relates to an in-column back-scattered electron detector, the detector placed in a combined electrostatic/magnetic objective lens for a SEM. The detector is formed as a charged particle sensitive surface, preferably a scintillator disk (406) that acts as one of the electrode faces (110) forming the electrostatic focusing field. The photons generated in the scintillator are detected by a photon detector (202, 408), such as a photo-diode or a multipixel photon detector. The objective lens may be equipped with another electron detector (116) for detecting secondary electrons that are kept closer to the axis. A light guide (204, 404) may be used to offer electrical insulation between the photon detector and the scintillator.
摘要翻译：本发明涉及一种柱内反向散射电子检测器，该探测器放置在用于SEM的组合静电/磁性物镜中。检测器形成为带电粒子敏感表面，优选地形成用作形成静电聚焦场的电极面（110）之一的闪烁体盘（406）。在闪烁体中产生的光子被光电检测器（202,408）检测，例如光电二极管或多像素光子检测器。物镜可以配备有用于检测保持靠近轴线的二次电子的另一电子检测器（116）。可以使用光导（204,404）来提供光子检测器和闪烁体之间的电绝缘。

5. 发明公开

EP2487704A2 Detection method for use in charged-particle microscopy 有权
标题翻译： Detektionsverfahren zur Verwendung in der Mikroskopie mit geladenen Teilchen
公开(公告)号：EP2487704A2
公开(公告)日：2012-08-15
申请号：EP12155058.6
申请日：2012-02-13
申请人： FEI Company
发明人： Hlavenka, Petr , Uncovsky, Marek
IPC分类号： H01J37/244 , H01J37/28
CPC分类号： H01J37/244 , G01N21/6447 , G01N2201/08 , H01J37/224 , H01J37/226 , H01J37/28 , H01J2237/2441 , H01J2237/2443 , H01J2237/2445 , H01J2237/26 , H01J2237/2605 , H01J2237/2802 , H01J2237/31749
摘要： A method of investigating a sample using a charged-particle microscope, comprising the steps of:
- Providing a charged-particle microscope, having a particle-optical column;
- Using the particle-optical column to direct an imaging beam of charged particles at the sample;
- Irradiating the sample with the imaging beam, as a result of which a flux ("Photon Flux") of output radiation is caused to emanate from the sample;
- Examining at least a portion of said output radiation using a detector, which method comprises the following additional steps:
- Embodying said detector to comprise a Solid State Photo-Multiplier (1) that is connected to a power supply providing an adjustable electrical bias ("MPPC Bias");
- Adjusting said bias so as to adjust a gain value ("MPPC Gain") of the Solid State Photo-Multiplier;
- Matching said gain value to the magnitude of said flux, so as to cause the Solid State Photo-Multiplier to operate below its saturation threshold.
A Solid State Photo-Multiplier is also sometimes referred to as a Silicon Photo-Multiplier (SiPM), on-chip pixelated Avalanche Photodiode array (with shared/common detection circuitry), MPPC®, etc.
摘要翻译：一种使用带电粒子显微镜研究样品的方法，包括以下步骤： - 提供具有粒子 - 光学柱的带电粒子显微镜; - 使用粒子 - 光学柱来引导样品上带电粒子的成像束; - 用成像光束照射样品，结果导致从样品发出输出辐射的通量（“光子通量”）; - 使用检测器检查所述输出辐射的至少一部分，该方法包括以下附加步骤： - 将所述检测器包含固体光电倍增器（1），所述固态光电倍增器（1）连接到提供可调电偏压的电源 “MPPC偏差”）; - 调整所述偏置以调整固态光电倍增器的增益值（“MPPC Gain”）; - 将所述增益值与所述通量的大小相匹配，以使固态光电倍增器工作在其饱和阈值以下。固态光电倍增管有时也被称为硅光电倍增器（SiPM），片上像素化雪崩光电二极管阵列（共享/公共检测电路），MPPC®等。

6. 发明公开

EP3716312A1 CHARGED PARTICLE BEAM DEVICE FOR INSPECTION OF A SPECIMEN WITH A PLURALITY OF CHARGED PARTICLE BEAMLETS 审中-实审
公开(公告)号：EP3716312A1
公开(公告)日：2020-09-30
申请号：EP19165969.7
申请日：2019-03-28
申请人： FEI Company
发明人： Hlavenka, Petr , Sed'a, Bohuslav
IPC分类号： H01J37/244 , H01J37/28
摘要： The invention relates to a charged particle beam device for inspection of a specimen with a plurality of charged particle beamlets. The charged particle beam device comprises a specimen holder for holding a specimen, a source for producing a beam of charged particles, and an illuminator for converting said beam of charged particles into a plurality of charged particle beamlets and focusing said plurality of charged particle beamlets onto said specimen. Furthermore, a detector assembly for detecting a flux of radiation emanating from the specimen in response to said irradiation by said plurality of charged particle beamlets is provided. As defined herein, the charged particle beam device is arranged for directing said plurality of charged particle beamlets onto said specimen in an essentially 1D pattern, wherein said essentially 1D pattern forms part of an edge of an essentially 2D geometric shape. Furthermore, the detector assembly comprises a plurality of detector units arranged in a corresponding essentially 1D pattern.

7. 发明授权

EP2706554B1 Method of using a compound particle-optical lens 有权
标题翻译：使用粒子光学透镜kombnierten的方法
公开(公告)号：EP2706554B1
公开(公告)日：2016-05-25
申请号：EP12183662.1
申请日：2012-09-10
申请人： FEI COMPANY
发明人： Sytar, Petr , Hlavenka, Petr , Tuma, Lubomír
IPC分类号： H01J37/145 , H01J37/28
CPC分类号： H01J37/14 , H01J37/145 , H01J37/28 , H01J2237/1035 , H01J2237/24475 , H01J2237/24485 , H01J2237/248

8. 发明公开

EP2706554A1 Method of using a compound particle-optical lens 有权
标题翻译： Verfahren zur Verwendung einer kombnierten teilchenoptischen Linse
公开(公告)号：EP2706554A1
公开(公告)日：2014-03-12
申请号：EP12183662.1
申请日：2012-09-10
申请人： FEI COMPANY
发明人： Sytar, Petr , Hlavenka, Petr , Tuma, Lubomír
IPC分类号： H01J37/145 , H01J37/28
CPC分类号： H01J37/14 , H01J37/145 , H01J37/28 , H01J2237/1035 , H01J2237/24475 , H01J2237/24485 , H01J2237/248
摘要： A compound objective lens for a Scanning Electron Microscope, the lens comprising a conventional magnetic lens excited by a first lens coil, an immersion magnetic lens excited by a second lens coil, and an immersion electrostatic lens excited by the voltage difference between the sample and the electrostatic lens electrode. For a predetermined excitation of the electrostatic immersion lens the electron beam can be focused on the sample using several combinations of excitations of the first and the second lens coils.
An electron detector is positioned close to the sample to detect backscattered electrons (BSE's). Inventors found that more information of the BSE's can be obtained when the detector distinguishes between BSE's (202) that strike the detector close to the axis and BSE's (204) that strike the detector further removed from the axis, for example by forming the detector as a pixilated detector or a detector showing annuli (205, 206, 207).
Inventors also found that, by tuning the ratio of the excitation of the first and second lens coils, the distance from the axis that the BSE's impinge on the detector can be changed, and thus the compound lens can be made to function as an energy selective detector.
摘要翻译：一种用于扫描电子显微镜的复合物镜，该透镜包括由第一透镜线圈激励的常规磁性透镜，由第二透镜线圈激发的浸没式磁性透镜以及由样品与第二透镜线圈之间的电压差激发的浸没静电透镜静电透镜电极。对于静电浸没透镜的预定激励，可以使用第一和第二透镜线圈的激发的几种组合将电子束聚焦在样品上。电子检测器靠近样品放置以检测反向散射电子（BSE）。发明人发现，当检测器区分穿过接近轴的检测器的BSE（202）和撞击检测器进一步从轴上移除的BSE（204）时，可以获得BSE的更多信息，例如通过将检测器形成为像素化检测器或检测器，显示出环形（205,206,207）。发明人还发现，通过调节第一和第二透镜线圈的激发比例，可以改变从BSE撞击在检测器上的轴线的距离，从而可以使复合透镜作为能量选择探测器。

9. 发明公开

EP2518755A1 In-column detector for particle-optical column 有权
标题翻译：粒子光学柱的柱内检测器
公开(公告)号：EP2518755A1
公开(公告)日：2012-10-31
申请号：EP11163691.6
申请日：2011-04-26
申请人： FEI Company
发明人： Tuma, Lubomír , Hlavenka, Petr , Sytar, Petr , Ceska, Radek , Sed'a, Bohuslav
IPC分类号： H01J37/145 , H01J37/244 , H01J37/28
CPC分类号： H01J37/26 , H01J37/145 , H01J37/244 , H01J37/28 , H01J2237/04926 , H01J2237/2443 , H01J2237/24465
摘要： The invention relates to an in-column back-scattered electron detector, the detector placed in a combined electrostatic/magnetic objective lens for a SEM. The detector is formed as a charged particle sensitive surface, preferably a scintillator disk (406) that acts as one of the electrode faces (110) forming the electrostatic focusing field. The photons generated in the scintillator are detected by a photon detector (202, 408), such as a photo-diode or a multi-pixel photon detector. The objective lens may be equipped with another electron detector (116) for detecting secondary electrons that are kept closer to the axis. A light guide (204, 404) may be used to offer electrical insulation between the photon detector and the scintillator.
摘要翻译：本发明涉及一种列内反向散射电子探测器，探测器置于用于SEM的组合式静电/磁性物镜中。检测器被形成为带电粒子敏感表面，优选地闪烁体盘（406）充当形成静电聚焦场的电极面（110）之一。在闪烁器中产生的光子由诸如光电二极管或多像素光子检测器的光子检测器（202,408）检测。物镜可以配备有另一个电子探测器（116），用于探测保持更靠近轴线的二次电子。光导（204,404）可以用于提供光子探测器和闪烁体之间的电绝缘。

10. 发明公开

EP3255650A1 CATHODOLUMINESCENCE DETECTOR FOR USE IN A CHARGED PARTICLE MICROSCOPE 审中-公开
标题翻译：用于带电粒子显微镜的CATHODOLUMINESCENCE探测器
公开(公告)号：EP3255650A1
公开(公告)日：2017-12-13
申请号：EP16173566.7
申请日：2016-06-08
申请人： FEI Company
发明人： Hlavenka, Petr , Uncovsky, Marek , Wandrol, Petr
IPC分类号： H01J37/22
CPC分类号： H01J37/244 , H01J37/226 , H01J37/28 , H01J2237/2445 , H01J2237/2808
摘要： A charged particle microscope having a vacuum chamber comprising:
- A sample holder, for holding a sample;
- A source, for producing a probing beam of charged particles;
- An illuminator, for directing said beam along an axis so as to irradiate the sample, also comprising:
- A detector, for simultaneous detection of multiple wavelengths in a polychromatic flux of photonic radiation emanating from the sample in response to said irradiation,
which detector comprises:
- A plurality of photosensitive surfaces, each of which produces an output signal in response to detected photonic radiation; and
- A plurality of optical filters, with mutually differing transmission characteristics, each associated with a respective one of said photosensitive surfaces and serving to filter photonic radiation falling thereon.
摘要翻译：一种带有真空室的带电粒子显微镜，包括： - 样品架，用于保持样品; - 用于产生带电粒子的探测束的源; - 照明器，用于沿着轴线引导所述光束以照射样品，还包括： - 检测器，用于同时检测响应于所述照射从样品发出的光子辐射的多色通量中的多个波长，该检测器包括： - 多个光敏表面，每个光敏表面响应于检测到的光子辐射而产生输出信号; 以及 - 多个光学滤波器，具有相互不同的透射特性，每个光学滤波器与所述光敏表面中的相应一个相关联，并且用于过滤掉落在其上的光子辐射。

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