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1. 发明公开

EP3021349A1 Contactless temperature measurement in a charged particle microscope 审中-公开
标题翻译： Kontaktlose Temperaturmessung in einemLadungsträgerteilchenmikroskop
公开(公告)号：EP3021349A1
公开(公告)日：2016-05-18
申请号：EP14192853.1
申请日：2014-11-12
申请人： FEI COMPANY
发明人： Faber, Pybe , Tuma, Lubomír , Burnett, Tim , Novák, Libor
IPC分类号： H01J37/20 , H01J37/244
CPC分类号： H01J37/261 , G01K11/30 , H01J37/20 , H01J37/244 , H01J2237/2001 , H01J2237/2065 , H01J2237/28
摘要： The invention relates to a method of using a charged particle microscope, the charged particle microscope equipped for inspecting a sample (100) mounted on a sample holder (101) with a primary beam of charged particles (200), the charged particle microscope equipped with a solid state detector (202) for detecting secondary particles emanating from the sample in response to irradiation of the sample with the primary beam, the solid state detector in direct optical view of the sample, the method comprising providing the sample on a heater with a fast thermal response time, characterized in that the method comprises a contactless measurement of the temperature of the sample and/or sample holder using the solid state detector.
The heating of the heater (for example a MEMS heater) may be contactless heating caused by a laser, microwave heating, induction or electron beam heating, or may be caused by a metallic heating track.
摘要翻译：本发明涉及一种使用带电粒子显微镜的方法，所述带电粒子显微镜被配备用于检查安装在样本保持器（101）上的带有带电粒子（200）的一次束的样品（100），所述带电粒子显微镜配备有固态检测器（202），用于响应于用所述主光束照射所述样品而检测从所述样品发出的二次粒子，所述固态检测器在所述样品的直接光学视图中，所述方法包括在所述加热器上提供所述样品快速热响应时间，其特征在于该方法包括使用固态检测器对样品和/或样品保持器的温度进行非接触式测量。加热器（例如MEMS加热器）的加热可以是由激光，微波加热，感应或电子束加热引起的非接触加热，或者可以由金属加热轨道引起。

2. 发明公开

EP4202972A3 METHOD AND SYSTEM FOR POSITIONING AND TRANSFERRING A SAMPLE 审中-实审
公开(公告)号：EP4202972A3
公开(公告)日：2023-11-22
申请号：EP23157978.0
申请日：2023-02-22
申请人： FEI Company
发明人： Novák, Libor , Lásko, Jan , Neelisetty, Krishna Kanth , Hammerová, Veronika
IPC分类号： H01J37/20
摘要： A system for positioning a sample in a charged particle apparatus (CPA) or an X-ray photoelectron spectroscopy (XPS) system includes a sample carrier coupled to a stage inside the vacuum chamber of the CPA or XPS system. The system allows transferring of the sample carrier among multiple CPAs, XPS systems and glove boxes in inert gas or in vacuum. The sample carrier is releasably coupled with the stage in the vacuum chamber of the CPA or the XPS. Multiple electrodes in a sample area of the sample carrier are electrically connectable with the stage by multiple spring contacts between the sample carrier and the stage.

3. 发明公开

EP4202972A2 METHOD AND SYSTEM FOR POSITIONING AND TRANSFERRING A SAMPLE 审中-实审
公开(公告)号：EP4202972A2
公开(公告)日：2023-06-28
申请号：EP23157978.0
申请日：2023-02-22
申请人： FEI Company
发明人： Novák, Libor , Lásko, Jan , Neelisetty, Krishna Kanth , Hammerová, Veronika
IPC分类号： H01J37/20
摘要： A system for positioning a sample in a charged particle apparatus (CPA) or an X-ray photoelectron spectroscopy (XPS) system includes a sample carrier coupled to a stage inside the vacuum chamber of the CPA or XPS system. The system allows transferring of the sample carrier among multiple CPAs, XPS systems and glove boxes in inert gas or in vacuum. The sample carrier is releasably coupled with the stage in the vacuum chamber of the CPA or the XPS. Multiple electrodes in a sample area of the sample carrier are electrically connectable with the stage by multiple spring contacts between the sample carrier and the stage.

4. 发明公开

EP3882951A1 CHARGED PARTICLE BEAM DEVICE FOR INSPECTION OF A SPECIMEN WITH A PLURALITY OF CHARGED PARTICLE BEAMLETS 审中-公开
公开(公告)号：EP3882951A1
公开(公告)日：2021-09-22
申请号：EP20164231.1
申请日：2020-03-19
申请人： FEI Company
发明人： Stejskal, Pavel , Sed'a, Bohuslav , Hlavenka, Petr , Novák, Libor , Stopka, Jan
IPC分类号： H01J37/28
摘要： The invention relates to a method of inspecting a specimen with a plurality of charged particle beamlets. The method comprises the steps of providing a specimen 15, providing a plurality of charged particle beamlets and focusing said plurality of charged particle beamlets onto said specimen, and detecting a flux of radiation emanating from the specimen in response to said irradiation by said plurality of charged particle beamlets. Here, the plurality of charged particle beamlets are focused onto said specimen into a beamlet pattern, wherein said beamlet pattern comprises a plurality of spaced apart beamlet spots 3a-3h; 3a'-3h'; 3a"-3h", and wherein said beamlet spots are spaced apart in a first direction [10] and comprise an inter-beamlet spot distance 32 between adjacent beamlet spots. As defined herein, the method comprises the steps of moving said beamlet pattern, in said first direction and over a distance that exceeds said inter-beamlet spot distance, to a plurality of mutually different beamlet pattern positions. By detecting corresponding fluxes of radiation, one or more specimen features 15ab can be assigned to said specimen.

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