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1. 发明公开

EP4024039A1 DATA ACQUISITION AND PROCESSING TECHNIQUES FOR THREE-DIMENSIONAL RECONSTRUCTION 有权
公开(公告)号：EP4024039A1
公开(公告)日：2022-07-06
申请号：EP21214241.8
申请日：2021-12-14
申请人： FEI Company
发明人： Kaplenko, Oleksii , Vystavel, Tomás , Wandrol, Petr , Machek, Ondrej , Van Leer, Brandon , Kaplenko, Mykola
IPC分类号： G01N23/225 , G01N1/32
摘要： Apparatuses and processes for generating data for three-dimensional reconstruction are disclosed herein. An example method at least includes exposing a subsequent surface of a sample, acquiring an image of the subsequent surface, comparing the image of the subsequent surface to an image of a reference surface, based on the comparison exceeding a threshold, acquiring a compositional or crystalline map of the subsequent surface, and based on the comparison not exceeding the threshold, exposing a next surface. Such method of the type slice-and-view allows to reduce the overall processing time of the reconstruction since the compositional or crystalline map of a subsequent surface is measured only if the corresponding image shows significant changes. Artificial neural networks are used to propagate the compositional or crystalline map information for slices where no map has been measured.

2. 发明公开

EP3255650A1 CATHODOLUMINESCENCE DETECTOR FOR USE IN A CHARGED PARTICLE MICROSCOPE 审中-公开
标题翻译：用于带电粒子显微镜的CATHODOLUMINESCENCE探测器
公开(公告)号：EP3255650A1
公开(公告)日：2017-12-13
申请号：EP16173566.7
申请日：2016-06-08
申请人： FEI Company
发明人： Hlavenka, Petr , Uncovsky, Marek , Wandrol, Petr
IPC分类号： H01J37/22
CPC分类号： H01J37/244 , H01J37/226 , H01J37/28 , H01J2237/2445 , H01J2237/2808
摘要： A charged particle microscope having a vacuum chamber comprising:
- A sample holder, for holding a sample;
- A source, for producing a probing beam of charged particles;
- An illuminator, for directing said beam along an axis so as to irradiate the sample, also comprising:
- A detector, for simultaneous detection of multiple wavelengths in a polychromatic flux of photonic radiation emanating from the sample in response to said irradiation,
which detector comprises:
- A plurality of photosensitive surfaces, each of which produces an output signal in response to detected photonic radiation; and
- A plurality of optical filters, with mutually differing transmission characteristics, each associated with a respective one of said photosensitive surfaces and serving to filter photonic radiation falling thereon.
摘要翻译：一种带有真空室的带电粒子显微镜，包括： - 样品架，用于保持样品; - 用于产生带电粒子的探测束的源; - 照明器，用于沿着轴线引导所述光束以照射样品，还包括： - 检测器，用于同时检测响应于所述照射从样品发出的光子辐射的多色通量中的多个波长，该检测器包括： - 多个光敏表面，每个光敏表面响应于检测到的光子辐射而产生输出信号; 以及 - 多个光学滤波器，具有相互不同的透射特性，每个光学滤波器与所述光敏表面中的相应一个相关联，并且用于过滤掉落在其上的光子辐射。

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