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    • 10. 发明公开
    • ELECTRON SPECTROMETER AND MEASUREMENT METHOD
    • ELEKTRONENSPEKTROMETER UND MESSVERFAHREN
    • EP3067916A1
    • 2016-09-14
    • EP16159727.3
    • 2016-03-10
    • JEOL LTD.
    • NAKAGAWA, Yasuhide
    • H01J49/44
    • H01J49/48G01N23/2273H01J37/224H01J37/285H01J49/0004H01J49/44H01J2237/057H01J2237/24485
    • An electron spectrometer (100) includes: an energy analyzer section (20) that energy-analyzes electrons emitted from a specimen; a micro-channel plate (30) that amplifies the electrons analyzed by the energy analyzer section (20); a fluorescent screen (40) that converts the electrons amplified by the micro-channel plate (30) into light; a camera (50) that photographs the fluorescent screen (40); and an effective range calculation section (74) that calculates an effective range of the fluorescent screen (40) within a camera image photographed by the camera (50), the effective range calculation section (74) performing a process that acquires a plurality of the camera images photographed while causing the energy analyzer section (20) to analyze the electrons with a different center energy, a process that converts the plurality of camera images respectively into a plurality of spectra, and a process that calculates the effective range of the fluorescent screen (40) within the camera image based on the plurality of spectra.
    • 电子分光计(100)包括:能量分析器(20),其能量分析从样本发射的电子; 微通道板(30),其放大由能量分析器部分(20)分析的电子; 荧光屏(40),其将由所述微通道板(30)放大的电子转换成光; 拍摄荧光屏(40)的相机(50); 以及有效范围计算部(74),其计算由所述照相机(50)拍摄的照相机图像内的荧光屏(40)的有效范围,所述有效范围计算部(74)执行获取所述荧光屏 在使能量分析部(20)以不同的中心能分析电子的同时拍摄相机图像,将多个摄像机图像分别转换为多个光谱的处理以及计算荧光屏的有效范围的处理 (40)基于所述多个光谱。