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    • 20. 发明公开
    • DIAMOND SINGLE CRYSTAL AND PRODUCTION METHOD THEREOF, AND SINGLE CRYSTAL DIAMOND TOOL
    • DIAMANTEINKRISTALL UND HERSTELLUNGSVERFAHRENDAFÜRSOWIE EINKRISTALLDIAMANTWERKZEUG
    • EP2868780A1
    • 2015-05-06
    • EP13809060.0
    • 2013-06-27
    • Sumitomo Electric Industries, Ltd.
    • UEDA, AkihikoNISHIBAYASHI, YoshikiSUMIYA, Hitoshi
    • C30B29/04C01B31/06C23C16/27
    • A diamond single crystal according to the present invention is a diamond single crystal synthesized using a chemical vapor synthesis method and has an absorption coefficient of 25 cm -1 or more and 80 cm -1 or less for light having a wavelength of 350 nm. A method for producing a diamond single crystal according to the present invention includes implanting an ion other than carbon into a main surface of a diamond single crystal seed substrate and thereby decreasing the transmittance of light having a wavelength of 800 nm, the main surface having an off-angle of 7 degrees or less with respect to a {100} plane, and homoepitaxially growing a diamond single crystal on the ion-implanted main surface of the seed substrate using a chemical vapor synthesis method under synthesis conditions where the ratio N C /N H of the number of carbon-containing molecules N C to the number of hydrogen molecules N H in a gas phase is 10% or more and 40% or less, the ratio N N /N C of the number of nitrogen molecules N N to the number of carbon-containing molecules N C in the gas phase is 0.1% or more and 10% or less, and the seed substrate temperature T is 850°C or more and less than 1000°C.
    • 根据本发明的金刚石单晶是使用化学气相合成法合成的金刚石单晶,并且对于波长为350nm的光具有25cm -1以上且80cm -1以下的吸收系数。 根据本发明的制造金刚石单晶的方法包括将不同于碳的离子注入到金刚石单晶种子基片的主表面中,从而降低波长为800nm的光的透射率,主表面具有 使用化学汽相合成法在种子底物的离子注入的主表面上同时外延生长金刚石单晶,其中NC / NH比例为{100}平面为7度以下, 的含碳分子数目相对于气相中的氢分子数NH的数量为10%以上且40%以下,氮分子数NN与NC的数量的比率NN / NC 气相中的分子NC为0.1%以上且10%以下,种子基质温度T为850℃以上且小于1000℃。