会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 2. 发明公开
    • MICROWAVE PLASMA CVD SYSTEM
    • MIKROWELLEN - 等离子体CVD-SYSTEM
    • EP2108714A1
    • 2009-10-14
    • EP07707612.3
    • 2007-01-29
    • Sumitomo Electric Industries, Ltd.
    • UEDA, AkihikoMEGURO, KiichiYAMAMOTO, YoshiyukiNISHIBAYASHI, YoshikiIMAI, Takahiro
    • C23C16/511C30B29/04H01L21/205
    • C30B25/105C23C16/24C23C16/511C30B29/04H01J37/32192H01J37/32238
    • The present invention provides a microwave plasma CVD device that can satisfactorily perform plasma position control under a condition capable of fabricating a large-area high-quality diamond thin film or the like. A microwave plasma CVD device includes: a vacuum chamber 1 having, in the center of its upper portion, an open portion 2 for introducing microwaves 20; a base material support table 11 for supporting a base material inside the vacuum chamber; a waveguide for guiding the microwaves to the open portion; a dielectric window 22 for introducing the microwaves to the inside of the vacuum chamber; and an antenna portion 25 for introducing the microwaves to the vacuum chamber, the antenna portion being configured by a round rod portion 23 that is positioned in the center of the waveguide, the open portion and the dielectric window and an electrode portion 24 that holds the dielectric window between the electrode portion and the upper portion of the vacuum chamber for vacuum retention, wherein an end surface of the electrode portion 24 is formed wider than the dielectric window such that the dielectric window is hidden, and a concave portion of a predetermined size is formed in the surface of the electrode portion 24 that faces the center of the vacuum chamber.
    • 本发明提供一种能够在能够制造大面积高品质金刚石薄膜等的条件下令人满意地进行等离子体位置控制的微波等离子体CVD装置。 微波等离子体CVD装置包括:真空室1,其上部中心具有用于引入微波20的开口部分2; 用于在真空室内支撑基材的基材支撑台11; 用于将微波引导到开口部分的波导; 用于将微波引导到真空室的内部的电介质窗口22; 以及用于将微波引导到真空室的天线部分25,天线部分由位于波导中心的圆棒部分23,开口部分和电介质窗口以及保持 所述电极部与所述真空室的上部之间的电介质窗用于真空保持,其中,所述电极部24的端面形成为比所述电介质窗宽,使得所述电介质窗被隐藏,并且具有预定尺寸的凹部 形成在电极部分24的面对真空室的中心的表面上。