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11. 发明公开

EP2626886A2 Forming a vitrified sample for an electron microscopy 有权
标题翻译：形成用于电子显微镜的冲击冷冻样品
公开(公告)号：EP2626886A2
公开(公告)日：2013-08-14
申请号：EP13154508.9
申请日：2013-02-08
申请人： FEI COMPANY
发明人： Mulders, Johannes , Schampers, Ruud , Piet, Trompenaars
IPC分类号： H01J37/28 , G01N1/42
CPC分类号： H01J37/28 , G01N1/42 , H01J2237/006 , H01J2237/31745
摘要： The invention relates to a method of forming a vitrified sample on a sample holder (112) for inspection in an electron microscope (100, 106). It is known to spray a solution on a grid and then immerse the grid in a cryogenic liquid, such as ethane or liquid nitrogen. The invention proposes to spray (via 118) small droplets of the liquid on a cryogenic surface (112), such as a grid or a sample holder in vacuum. The liquid forms vitrified sample material (200, 202) when hitting the surface due to the low temperature of the grid or sample holder.
A lamella may be excavated from the thus formed sample material, to be studied in a TEM, or the vitrified sample material may be directly observed in a SEM. In an embodiment the material may be sprayed on a cryogenic liquid, to be scooped from the liquid and placed on a grid.

12. 发明公开

EP3249676A1 CHARGED-PARTICLE MICROSCOPE WITH IN SITU DEPOSITION FUNCTIONALITY 有权
标题翻译：具有原位沉积功能的带电粒子显微镜
公开(公告)号：EP3249676A1
公开(公告)日：2017-11-29
申请号：EP16171645.1
申请日：2016-05-27
申请人： FEI Company
发明人： Mitchels, John , Schampers, Ruud , Hrouzek, Michal , Gardelka, Tomas
IPC分类号： H01J37/28 , H01J37/34 , C23C14/35
CPC分类号： H01J37/3405 , C23C14/35 , H01J37/06 , H01J37/08 , H01J37/18 , H01J37/20 , H01J37/26 , H01J37/28 , H01J37/285 , H01J37/32623 , H01J37/3464 , H01J2237/3137
摘要： A charged-particle microscope M, comprising a vacuum chamber in which are provided:
- A specimen holder 7 for holding a specimen in an irradiation position Pi;
- A particle-optical column 1;31, for producing a charged particle beam 3';33 and directing it so as to irradiate the specimen;
- A detector 19, for detecting a flux of radiation emanating from the specimen in response to irradiation by said beam,
wherein:
- Said vacuum chamber comprises an in situ magnetron sputter deposition module D, comprising a magnetron sputter source for producing a vapor stream of target material;
- A stage 7,7' is configured to move a sample comprising at least part of said specimen between said irradiation position and a separate deposition position Pd at said deposition module;
- Said deposition module is configured to deposit a layer of said target material onto said sample when held at said deposition position.
摘要翻译：一个带电粒子显微镜M，包括一个真空室，在其中提供： - 样品架7，用于将样品保持在照射位置Pi; - 用于产生带电粒子束3'的粒子光学镜筒1; 31;并引导它以照射样品; - 检测器19，用于检测响应于所述束照射而从样本发出的辐射通量，其中： - 所述真空室包括原位磁控溅射沉积模块D，其包括磁控溅射源，用于产生目标材料; - 阶段7,7'被配置为在所述沉积模块处将包括所述样本的至少一部分的样本移动到所述照射位置和单独的沉积位置Pd之间; 所述沉积模块被配置成当被保持在所述沉积位置时将所述靶材料层沉积到所述样品上。

13. 发明公开

EP2626886A3 Forming a vitrified sample for an electron microscopy 有权
标题翻译：形成用于电子显微镜的冲击冷冻样品
公开(公告)号：EP2626886A3
公开(公告)日：2016-03-30
申请号：EP13154508.9
申请日：2013-02-08
申请人： FEI COMPANY
发明人： Mulders, Johannes , Schampers, Ruud , Piet, Trompenaars
IPC分类号： H01J37/28 , G01N1/42
CPC分类号： H01J37/28 , G01N1/42 , H01J2237/006 , H01J2237/31745
摘要： The invention relates to a method of forming a vitrified sample on a sample holder (112) for inspection in an electron microscope (100, 106). It is known to spray a solution on a grid and then immerse the grid in a cryogenic liquid, such as ethane or liquid nitrogen. The invention proposes to spray (via 118) small droplets of the liquid on a cryogenic surface (112), such as a grid or a sample holder in vacuum. The liquid forms vitrified sample material (200, 202) when hitting the surface due to the low temperature of the grid or sample holder.
A lamella may be excavated from the thus formed sample material, to be studied in a TEM, or the vitrified sample material may be directly observed in a SEM. In an embodiment the material may be sprayed on a cryogenic liquid, to be scooped from the liquid and placed on a grid.

14. 发明授权

EP2367195B1 Measurement and endpointing of sample thickness 有权
标题翻译：测量样品的厚度和Endpunkbestimmung
公开(公告)号：EP2367195B1
公开(公告)日：2014-03-12
申请号：EP11165381.2
申请日：2009-11-02
申请人： FEI Company
发明人： Young, Richard , Peterson, Brennan , Moriarty, Michael , Schampers, Ruud
IPC分类号： H01J37/304 , H01J37/305 , G01N1/28
CPC分类号： H01J37/3056 , G01N1/286 , H01J37/304 , H01J2237/24455 , H01J2237/30466 , H01J2237/31745 , H01J2237/31749

15. 发明公开

EP2367195A3 Measurement and endpointing of sample thickness 有权
标题翻译：测量样品的厚度和Endpunkbestimmung
公开(公告)号：EP2367195A3
公开(公告)日：2012-11-21
申请号：EP11165381.2
申请日：2009-11-02
申请人： FEI Company
发明人： Young, Richard , Peterson, Brennan , Moriarty, Michael , Schampers, Ruud
IPC分类号： H01J37/304 , H01J37/305 , G01N1/28
CPC分类号： H01J37/3056 , G01N1/286 , H01J37/304 , H01J2237/24455 , H01J2237/30466 , H01J2237/31745 , H01J2237/31749
摘要： An improved method for TEM sample creation. The use of a SEM-STEM detector in the dual-beam FIB/SEM allows a sample to be thinned using the FIB, while the STEM signal is used to monitor sample thickness. A preferred embodiment of the present invention can measure the thickness of or create S/TEM samples by using a precise endpoint detection method that is reproducible and suitable for automation. Preferred embodiments also enable automatic endpointing during TEM lamella creation and provide users with direct feedback on sample thickness during manual thinning. Preferred embodiments of the present invention thus provide improved methods for endpointing sample thinning and methods to partially or fully automate endpointing to increase throughput and reproducibility of TEM sample creation.

16. 发明公开

EP2367195A2 Measurement and endpointing of sample thickness 有权
标题翻译： Messung der Probendicke und Endpunkbestimmung
公开(公告)号：EP2367195A2
公开(公告)日：2011-09-21
申请号：EP11165381.2
申请日：2009-11-02
申请人： FEI Company
发明人： Young, Richard , Peterson, Brennan , Moriarty, Michael , Schampers, Ruud
IPC分类号： H01J37/304 , H01J37/305 , G01N1/28
CPC分类号： H01J37/3056 , G01N1/286 , H01J37/304 , H01J2237/24455 , H01J2237/30466 , H01J2237/31745 , H01J2237/31749
摘要： An improved method for TEM sample creation. The use of a SEM-STEM detector in the dual-beam FIB/SEM allows a sample to be thinned using the FIB, while the STEM signal is used to monitor sample thickness. A preferred embodiment of the present invention can measure the thickness of or create S/TEM samples by using a precise endpoint detection method that is reproducible and suitable for automation. Preferred embodiments also enable automatic endpointing during TEM lamella creation and provide users with direct feedback on sample thickness during manual thinning. Preferred embodiments of the present invention thus provide improved methods for endpointing sample thinning and methods to partially or fully automate endpointing to increase throughput and reproducibility of TEM sample creation.
摘要翻译：一种改进的TEM样品创建方法。在双光束FIB / SEM中使用SEM-STEM检测器允许使用FIB对样品进行稀释，而STEM信号用于监测样品厚度。本发明的一个优选实施例可以通过使用可重复且适合自动化的精确终点检测方法来测量S / TEM样品的厚度或产生S / TEM样品。优选实施例还可以在TEM薄片创建期间实现自动终点，并且在手动稀疏期间向用户提供关于样品厚度的直接反馈。因此，本发明的优选实施例提供了用于终止样品稀释的改进方法以及部分或全部自动化终点以提高TEM样品产生的生产量和再现性的方法。

17. 发明公开

EP3613543A1 CHARGED PARTICLE MICROSCOPE WITH A MANIPULATOR DEVICE, AND METHOD OF PREPARING A SPECIMEN WITH SAID CHARGED PARTICLE MICROSCOPE 审中-公开
公开(公告)号：EP3613543A1
公开(公告)日：2020-02-26
申请号：EP18190045.7
申请日：2018-08-21
申请人： FEI Company
发明人： Persoon, Hans , Engelen, Andre , Schampers, Ruud , Mitchels, John
IPC分类号： B25J7/00 , B25J15/08 , H01J37/20
摘要： The invention relates to a charged particle microscope (CPM) comprising a sample holder, for holding a sample; an ion beam column, for producing an ion beam that propagates along an ion axis onto said sample for creating a lamella in said sample; and a detector, for detecting radiation emanating from said lamella and/or said sample in response to irradiation by said ion beam. The CPM comprises a controller for at least partially controlling operation of said microscope. According to the invention, a manipulator device is provided that is arranged for transferring said lamella created in said sample out of said sample, wherein said manipulator device comprises a first elongated manipulator member with a first outer end, and a second elongated manipulator member with a second outer end. The outer ends are movable for mechanically gripping and releasing said lamella. In embodiments, the elongated manipulator members comprise off-set parts that increase manoeuvrability (accessibility) and monitorability of the manipulator device during use.

18. 发明授权

EP2813835B1 Method of welding a frozen aqueous sample to a microprobe 有权
标题翻译：一种用于焊接一个冷冻的含水样品的微探针法
公开(公告)号：EP2813835B1
公开(公告)日：2016-09-07
申请号：EP13172127.6
申请日：2013-06-14
申请人： FEI COMPANY
发明人： Schampers, Ruud , Persoon, Johannes , Engelen, Andreas
IPC分类号： G01N1/28 , G01N1/42 , G02B21/32 , H01J37/20
CPC分类号： H01J37/20 , G01N1/28 , G01N1/42 , G02B21/32 , H01J37/26 , H01J37/315 , H01J2237/002 , H01J2237/2065 , H01J2237/31744 , H01J2237/31745

19. 发明公开

EP2775338A1 Method of studying a cryogenic sample in an optical microscope 审中-公开
标题翻译： Verfahren zum Untersuchen einer Kryoprobe在einem optisches Mikroskop
公开(公告)号：EP2775338A1
公开(公告)日：2014-09-10
申请号：EP13157564.9
申请日：2013-03-04
申请人： FEI COMPANY
发明人： Daum, Rainer , Mayer, Tobias , Geisbauer, Matthias , Schampers, Ruud , Persoon, Johannes
IPC分类号： G02B27/00 , G02B21/28
CPC分类号： C12Q1/02 , G02B21/28 , G02B27/0006
摘要： A method of studying a sample using an optical microscope, comprising the following steps:
- Providing the sample in a sample holder comprising means to maintain the sample at a temperature T below 273 K;
- Providing a microscope objective lens having an extremal lens element proximal the sample holder;
- Bringing the lens into a focus position proximal the sample, the extremal lens element and sample being separated by an intervening space,

which method comprises the following steps:
- Providing the objective lens in a thermally insulating jacket;
- Providing a transparent window in said intervening space, with a gap between the window and the extremal lens element;
- Providing a flow of substantially dry gas in said gap;
- Tailoring the geometry and velocity of said flow so that, at least in said gap, the flow:
- Is non-laminar;
- Does not excite substantial acoustic vibration in a structure proximal the gap.

Said structure may, for example, be at least one of:
- The window;
- The sample;
- The sample holder.
摘要翻译：一种使用光学显微镜研究样品的方法，包括以下步骤： - 将样品提供在样品架中，其包括将样品保持在低于273K的温度的装置; - 提供具有靠近样品架的极端透镜元件的显微镜物镜; - 将透镜置于样品近端的聚焦位置，极光透镜元件和样品被中间间隔开，该方法包括以下步骤： - 将物镜提供在隔热套中; - 在所述中间空间中提供透明窗口，窗口和极端透镜元件之间具有间隙; - 在所述间隙中提供基本干燥的气体流; - 裁剪所述流的几何形状和速度，使得至少在所述间隙中流动： - 非层流; - 不会在靠近间隙的结构中激发大量的声振动。所述结构可以例如是以下至少之一： - 窗口; - 例子; - 样品架。

20. 发明公开

EP2685234A1 Forming an electron microscope sample from high-pressure frozen material 有权
标题翻译： Bilden einer Elektronenmikroskopprobe aus hochdruckgefrorenem材料
公开(公告)号：EP2685234A1
公开(公告)日：2014-01-15
申请号：EP13176233.8
申请日：2013-07-12
申请人： FEI COMPANY
发明人： Schampers, Ruud , Hayles, Michael , De Winter, Matthijs , Schneijdenberg, Chris
IPC分类号： G01N1/42 , G01N1/28
CPC分类号： B23K15/08 , G01N1/06 , G01N1/42 , G01N2001/2873
摘要： Method of forming a sample from a capillary with high-pressure frozen sample material, the method comprising: a step (102) of providing a high-pressure capillary with vitrified sample material at a temperature T 1 below the glass transition temperature Tg, and a step (104) of cutting the capillary, characterized by a step (106) of warming the capillary to a temperature T 2 between temperature T 1 and temperature Tg, a subsequent step (108) of cooling the capillary to a temperature T 3 below temperature T 2 , as a result of which material is extruded from the capillary, and a step (112) of freeing a sample from the extruded sample material at a temperature below temperature T g . Vitrified biological material could be extruded from a capillary at liquid at a temperature of T = 88 K (liquid nitrogen by raising the temperature to, for example 130 K and then cooling the capillary to 88 K. Not only did this result to extrusion material, but even more surprising is that a repeated temperature cycle often results in further extrusion of sample material. From the thus extruded material a sample can be sliced by, for example, ion beam milling.
摘要翻译：用高压冷冻样品材料从毛细管形成样品的方法，所述方法包括：在低于玻璃化转变温度Tg的温度T 1下向玻璃化样品材料提供高压毛细管的步骤（102），和步骤（104），其特征在于将毛细管温度升至温度T 1和温度Tg之间的温度T 2的步骤（106），将毛细管冷却至低于温度T 3的温度T 3的后续步骤（108） T 2，其结果是从毛细管中挤出材料，以及在低于T g的温度下将样品从挤出的样品材料中释放的步骤（112）。玻璃化的生物材料可以在T = 88K的温度下从液体中的毛细管挤出（液氮通过将温度升高至例如130K，然后将毛细管冷却至88K。不仅对挤出材料产生这种结果，但更令人惊奇的是，重复的温度循环通常导致样品材料的进一步挤出。从这样挤出的材料可以通过例如离子束研磨来切割样品。

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