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1. 发明授权

US07100081B1 Method and apparatus for fault classification based on residual vectors 有权
标题翻译：基于残差向量的故障分类方法和装置
公开(公告)号：US07100081B1
公开(公告)日：2006-08-29
申请号：US10682019
申请日：2003-10-09
申请人： Matthew A. Purdy , Robert J. Chong , Gregory A. Cherry , Richard J. Markle
发明人： Matthew A. Purdy , Robert J. Chong , Gregory A. Cherry , Richard J. Markle
IPC分类号： G06F11/00 , G06F19/00
CPC分类号： G05B23/0254 , G05B19/41875 , G05B2219/37519 , G05B2219/45031 , Y02P90/22
摘要： A method includes receiving a current residual vector. The current residual vector is compared to a plurality of historical residual vectors. Each historical residual vector has an associated fault classification code. At least one of the historical residual vectors is selected responsive to determining that the current residual vector matches at least one of the historical residual vectors. A fault condition is classified based on the fault classification code associated with the selected historical residual vector.
摘要翻译：一种方法包括接收当前残差矢量。将当前残差向量与多个历史残差向量进行比较。每个历史残差向量都有相关的故障分类码。响应于确定当前残差向量与至少一个历史残差向量相匹配来选择至少一个历史残差向量。基于与所选择的历史残差向量相关联的故障分类码，对故障条件进行分类。

2. 发明授权

US06991945B1 Fault detection spanning multiple processes 有权
标题翻译：故障检测跨越多个进程
公开(公告)号：US06991945B1
公开(公告)日：2006-01-31
申请号：US10231911
申请日：2002-08-30
申请人： Howard E. Castle , Matthew A. Purdy , Gregory A. Cherry , Richard J. Markle , Eric O. Green , Michael L. Miller , Brian K. Cusson
发明人： Howard E. Castle , Matthew A. Purdy , Gregory A. Cherry , Richard J. Markle , Eric O. Green , Michael L. Miller , Brian K. Cusson
IPC分类号： H01L21/66
CPC分类号： H01L22/20 , H01L2924/0002 , H01L2924/00
摘要： A method and apparatus is provided for fault detection spanning multiple processes. The method comprises receiving operational data associated with a first process, receiving operational data associated with a second process, which is downstream to the first process and performing fault detection analysis based on the operational data associated with the first process and second process using a common fault detection unit.
摘要翻译：提供了跨越多个过程的故障检测的方法和装置。该方法包括接收与第一过程相关联的操作数据，接收与第一进程相关的操作数据，该第二进程是第一进程的下游，并且基于与第一进程相关联的操作数据和使用公共故障的第二进程来执行故障检测分析检测单元

3. 发明授权

US06871114B1 Updating process controller based upon fault detection analysis 失效
标题翻译：基于故障检测分析更新过程控制器
公开(公告)号：US06871114B1
公开(公告)日：2005-03-22
申请号：US10231713
申请日：2002-08-30
申请人： Eric O. Green , Matthew A. Purdy , Elfido Coss, Jr. , Christopher A. Bode , Robert J. Chong , Gregory A. Cherry
发明人： Eric O. Green , Matthew A. Purdy , Elfido Coss, Jr. , Christopher A. Bode , Robert J. Chong , Gregory A. Cherry
IPC分类号： G05B19/404 , G06F19/00
CPC分类号： G05B19/404 , G05B2219/37252 , G05B2219/37345 , G05B2219/45031
摘要： A method and an apparatus for adjusting a process controller based upon a fault detection analysis. A process step upon a workpiece is performed using a processing tool. Manufacturing data relating to processing of the workpiece is acquired. The manufacturing data may include metrology data relating to the processed workpiece and/or tool state data relating to the tool state of a processing tool. A metrology/tool state data integration process is performed based upon the acquired manufacturing data. The metrology/tool state data integration process includes performing an assessment of a tool health related to the processing tool and adjusting an emphasis of the metrology data based upon the assessment of the tool health.
摘要翻译：一种基于故障检测分析调整过程控制器的方法和装置。使用加工工具进行工件的加工步骤。获取与工件的加工有关的制造数据。制造数据可以包括与处理工具有关的计量学数据和/或与加工工具的工具状态有关的刀具状态数据。基于获取的制造数据执行计量/工具状态数据集成处理。计量/工具状态数据集成过程包括对与处理工具相关的工具健康进行评估，并且基于对工具健康的评估来调整计量数据的重点。

4. 发明授权

US06740534B1 Determination of a process flow based upon fault detection analysis 有权
标题翻译：基于故障检测分析确定过程流程
公开(公告)号：US06740534B1
公开(公告)日：2004-05-25
申请号：US10246341
申请日：2002-09-18
申请人： Ernest D. Adams, III , Matthew A. Purdy , Gregory A. Cherry , Eric O. Green , Elfido Coss, Jr. , Brian K. Cusson , Naomi M. Jenkins , Patrick M. Cowan
发明人： Ernest D. Adams, III , Matthew A. Purdy , Gregory A. Cherry , Eric O. Green , Elfido Coss, Jr. , Brian K. Cusson , Naomi M. Jenkins , Patrick M. Cowan
IPC分类号： G01R3126
CPC分类号： H01L22/20 , G05B19/41875 , G05B2219/32217 , G05B2219/32222 , H01L2223/54453 , Y02P90/14 , Y02P90/22
摘要： A method and an apparatus for the determination of a process flow based upon fault detection. A process step upon a workpiece is performed. Fault detection analysis based upon the process step performed upon the workpiece is performed. A workpiece routing process is performed based upon the fault detection analysis. The wafer routing process includes using a controller to perform one or a rework process routing, a non-standard process routing, a fault verification process routing, a normal process routing, or a termination process routing, based upon the fault detection analysis.
摘要翻译：一种用于基于故障检测来确定处理流程的方法和装置。执行工件上的工艺步骤。执行基于对工件执行的工艺步骤的故障检测分析。基于故障检测分析进行工件布线过程。基于故障检测分析，晶圆路由过程包括使用控制器来执行一个或返工过程路由，非标准过程路由，故障验证过程路由，正常过程路由或终止过程路由。

5. 发明授权

US06959224B2 Probability constrained optimization for electrical fabrication control 失效
标题翻译：概率约束优化电气制造控制
公开(公告)号：US06959224B2
公开(公告)日：2005-10-25
申请号：US10335748
申请日：2003-01-02
申请人： Richard P. Good , Gregory A. Cherry , Jin Wang
发明人： Richard P. Good , Gregory A. Cherry , Jin Wang
IPC分类号： G03F7/20 , G05B19/418 , H01L21/66 , G06F19/00
CPC分类号： G03F7/705 , G05B19/41885 , G05B2219/32015 , G05B2219/50129 , H01L22/20 , Y02P90/26
摘要： A method includes defining a model of a process for manufacturing a device, the process including a plurality of steps. A plurality of inline process targets are defined for at least a subset of the process steps. The model relates the inline process targets to a plurality of process output parameters. A first set of probabilistic constraints for the inline process targets is defined. A second set of probabilistic constraints for the process output parameters is defined. An objective function is defined based on the model and the plurality of process output parameters. A trajectory of the process output parameters is determined by optimizing the objective function subject to the first and second sets of probabilistic constraints for each process step to determine values for the inline process targets at each process step, the optimization being iterated after completion of each process step for the remaining process steps.
摘要翻译：一种方法包括定义用于制造设备的过程的模型，该过程包括多个步骤。为进程步骤的至少一个子集定义了多个内联过程目标。该模型将内联过程目标与多个过程输出参数相关联。定义了内联流程目标的第一组概率约束。定义了过程输出参数的第二组概率约束。基于模型和多个过程输出参数定义目标函数。过程输出参数的轨迹通过优化目标函数来确定，该目标函数受制于每个处理步骤的第一和第二组概率约束，以确定每个处理步骤中的内联过程目标的值，优化在每个过程完成之后重复步骤剩下的过程步骤。

6. 发明授权

US07248939B1 Method and apparatus for multivariate fault detection and classification 有权
标题翻译：多变量故障检测和分类方法与装置
公开(公告)号：US07248939B1
公开(公告)日：2007-07-24
申请号：US11035276
申请日：2005-01-13
申请人： Kevin Andrew Chamness , Daniel Kadosh , Gregory A. Cherry , Jason Williams
发明人： Kevin Andrew Chamness , Daniel Kadosh , Gregory A. Cherry , Jason Williams
IPC分类号： G06F19/00
CPC分类号： H01L21/67288 , H01L21/67276
摘要： The present invention provides a method and apparatus for multivariate fault identification and classification. The method includes accessing data indicative of a plurality of physical parameters associated with a plurality of processed semiconductor wafers and providing at least one summary report including information indicative of at least one univariate representation of the accessed data and at least one multivariate representation of the accessed data.
摘要翻译：本发明提供了一种用于多变量故障识别和分类的方法和装置。该方法包括访问指示与多个处理的半导体晶片相关联的多个物理参数的数据，并且提供包括指示所访问数据的至少一个单变量表示的信息的至少一个概要报告和所访问数据的至少一个多变量表示。

7. 发明授权

US07043403B1 Fault detection and classification based on calculating distances between data points 失效
标题翻译：基于计算数据点之间的距离的故障检测和分类
公开(公告)号：US07043403B1
公开(公告)日：2006-05-09
申请号：US10234755
申请日：2002-09-04
申请人： Jin Wang , Gregory A. Cherry
发明人： Jin Wang , Gregory A. Cherry
IPC分类号： G06F19/00
CPC分类号： G05B23/024
摘要： A method and apparatus is provided for fault detection and classification based on calculating distances between data points. The method comprises receiving a data sample representative of measurements of one or more variables associated with a process operation, determining a distance between the data sample and one or more data points of a history data of the process operation and detecting a fault associated with the process operation based on the distance between the data sample and the one or more data points of the history data.
摘要翻译：提供了一种基于计算数据点之间距离的故障检测和分类方法和装置。该方法包括接收表示与过程操作相关联的一个或多个变量的测量的数据样本，确定数据样本与处理操作的历史数据的一个或多个数据点之间的距离并检测与该过程相关联的故障基于数据样本与历史数据的一个或多个数据点之间的距离进行操作。

8. 发明申请

US20080172189A1 Determining Die Health by Expanding Electrical Test Data to Represent Untested Die 审中-公开
标题翻译：通过扩大电测试数据来代表未检测的模具来确定模具的健康状况
公开(公告)号：US20080172189A1
公开(公告)日：2008-07-17
申请号：US11623530
申请日：2007-01-16
申请人： Daniel Kadosh , Gregory A. Cherry , Carl Bowen , Luis De La Fuente , Rajesh Vijayaraghavan
发明人： Daniel Kadosh , Gregory A. Cherry , Carl Bowen , Luis De La Fuente , Rajesh Vijayaraghavan
IPC分类号： G01R31/26
CPC分类号： H01L22/10 , H01L2924/0002 , H01L2924/00
摘要： A method includes receiving a first set of parameters associated with a subset of a plurality of die on a wafer subjected to testing. The first set of data is expanded to generate estimated values for the first set of parameters for at least one untested die not included in the subset. A die health metric is determined for at least a portion of the plurality of die based on the first set of parameters including the estimated values.
摘要翻译：一种方法包括在经受测试的晶片上接收与多个管芯的子集相关联的第一组参数。第一组数据被扩展以产生用于未包括在子集中的至少一个未测试管芯的第一组参数的估计值。基于包括估计值的第一组参数来确定针对多个管芯的至少一部分的管芯健康度量。

9. 发明授权

US07050879B1 Adjusting a sampling protocol in an adaptive control process 有权
标题翻译：在自适应控制过程中调整采样协议
公开(公告)号：US07050879B1
公开(公告)日：2006-05-23
申请号：US10406463
申请日：2003-04-03
申请人： Jin Wang , Gregory A. Cherry
发明人： Jin Wang , Gregory A. Cherry
IPC分类号： G06F19/00
CPC分类号： G06Q10/00
摘要： A method and an apparatus are provided for adjusting a sampling protocol in an adaptive control process. The method comprises determining a performance value based on a measurement associated with at least one or more previously processed workpieces, adjusting a sampling protocol for one or more processed workpieces based on the determined performance value, and measuring the one or more processed workpieces according to the sampling protocol to provide one or more measurements. The method further comprises adjusting at least one of a process model and a control parameter based on at least a portion of the one or more measurements.
摘要翻译：提供了一种用于在自适应控制过程中调整采样协议的方法和装置。该方法包括基于与至少一个或多个先前处理的工件相关联的测量来确定性能值，基于所确定的性能值调整一个或多个经处理的工件的采样协议，以及根据所确定的性能值测量所述一个或多个经处理的工件采样协议提供一个或多个测量。该方法还包括基于一个或多个测量的至少一部分来调整过程模型和控制参数中的至少一个。

10. 发明授权

US08190391B2 Determining die performance by incorporating neighboring die performance metrics 有权
标题翻译：通过结合相邻的模具性能指标来确定模具性能
公开(公告)号：US08190391B2
公开(公告)日：2012-05-29
申请号：US11692989
申请日：2007-03-29
申请人： Daniel Kadosh , Gregory A. Cherry , Carl I. Bowen , Luis De La Fuente , Rajesh Vijayaraghavan
发明人： Daniel Kadosh , Gregory A. Cherry , Carl I. Bowen , Luis De La Fuente , Rajesh Vijayaraghavan
IPC分类号： G01R15/00 , G01R29/00 , G01R31/26 , G01N37/00 , H01L21/66 , G06F19/00
CPC分类号： G01R31/287
摘要： A method includes receiving a first set of parameters associated with a plurality of die. A first die performance metric associated with a selected die is determined based on the first set of parameters. At least one neighborhood die performance metric associated with a set comprised of a plurality of die that neighbor the selected die is determined based on the first set of parameters. A second die performance metric is determined for the selected die based on the first die performance metric and the neighborhood die performance metric.
摘要翻译：一种方法包括接收与多个管芯相关联的第一组参数。基于第一组参数来确定与所选择的管芯相关联的第一管芯性能度量。基于第一组参数来确定与由与选定的管芯相邻的多个管芯组成的组相关联的至少一个邻近管芯性能度量。基于第一管芯性能度量和邻近管芯性能度量，为所选择的管芯确定第二管芯性能度量。

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