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1. 发明授权

US06960774B2 Fault detection and control methodologies for ion implantation processes, and system for performing same 失效
公开(公告)号：US06960774B2
公开(公告)日：2005-11-01
申请号：US10700175
申请日：2003-11-03
申请人： Elfido Coss, Jr. , Patrick M. Cowan , Richard J. Markle , Tom Tse
发明人： Elfido Coss, Jr. , Patrick M. Cowan , Richard J. Markle , Tom Tse
IPC分类号： H01J37/302 , H01J37/304 , H01J37/317
CPC分类号： H01J37/3171 , H01J37/3023 , H01J37/304
摘要： The present invention is generally directed to fault detection and control methodologies for ion implant processes, and a system for performing same. In one illustrative embodiment, the method comprises performing a tuning process for an ion implant tool, the tuning process resulting in at least one tool parameter for the ion implant tool, selecting or creating a fault detection model for an ion implant process to be performed in the ion implant tool based upon the tool parameter resulting from the tuning process, and monitoring an ion implant process performed in the ion implant tool using the selected or created fault detection model. In another illustrative embodiment, the method comprises performing a tuning process for an ion implant tool, the tuning process resulting in at least one tool parameter for the ion implant tool, and determining if the tool parameter resulting from the tuning process is acceptable based on historical metrology data for implant regions formed in at least one substrate subjected to an ion implant process performed in the ion implant tool.

2. 发明授权

US06594589B1 Method and apparatus for monitoring tool health 有权
标题翻译：用于监测工具健康的方法和装置
公开(公告)号：US06594589B1
公开(公告)日：2003-07-15
申请号：US09863822
申请日：2001-05-23
申请人： Elfido Coss, Jr. , Richard J. Markle , Patrick M. Cowan
发明人： Elfido Coss, Jr. , Richard J. Markle , Patrick M. Cowan
IPC分类号： G01B344
CPC分类号： G05B19/4184 , G05B2219/31357 , G05B2219/45031 , Y02P80/15 , Y02P90/14
摘要： A method for monitoring health of a tool includes receiving at least one tool parameter related to the processing of a workpiece in a tool; receiving a model selection trigger; selecting a tool health model based on the model selection trigger; generating at least one predicted tool parameter based on the selected tool health model; and generating a tool health rating for the tool based on a comparison between the measured tool parameter and the predicted tool parameter. A tool health monitor includes a library of tool health models, a model selector, and a fault detection and classification unit. The model selector is adapted to receive a model selection trigger and select a tool health model based on the model selection trigger. The fault detection and classification unit is adapted to receive at least one tool parameter related to the processing of a workpiece in a tool, generate at least one predicted tool parameter based on the selected tool health model, and generate a tool health rating for the tool based on a comparison between the received tool parameter and the predicted tool parameter.
摘要翻译：用于监测工具健康的方法包括：接收与工具中的工件的处理有关的至少一个工具参数; 接收模型选择触发; 基于模型选择触发选择工具健康模型; 基于所选择的工具健康模型生成至少一个预测的工具参数; 并且基于所测量的工具参数和所预测的工具参数之间的比较，为所述工具生成工具健康评级。工具健康监测器包括工具健康模型库，模型选择器和故障检测和分类单元。模型选择器适于接收模型选择触发，并根据模型选择触发选择工具健康模型。所述故障检测和分类单元适于接收与工具中的工件的处理有关的至少一个刀具参数，基于所选择的刀具健康模型生成至少一个预测刀具参数，并为所述刀具生成刀具健康等级基于所接收的刀具参数与预测刀具参数之间的比较。

3. 发明授权

US06925347B1 Process control based on an estimated process result 有权
标题翻译：基于估计过程结果的过程控制
公开(公告)号：US06925347B1
公开(公告)日：2005-08-02
申请号：US10223174
申请日：2002-08-19
申请人： Michael L. Miller , Thomas J. Sonderman , Alexander J. Pasadyn , Richard J. Markle , Brian K. Cusson , Patrick M. Cowan , Timothy L. Jackson , Naomi M. Jenkins
发明人： Michael L. Miller , Thomas J. Sonderman , Alexander J. Pasadyn , Richard J. Markle , Brian K. Cusson , Patrick M. Cowan , Timothy L. Jackson , Naomi M. Jenkins
IPC分类号： G05B19/418 , G06F19/00
CPC分类号： G05B19/41875 , G05B2219/45031 , Y02P90/22
摘要： A method and apparatus is provided for a process control based on an estimated process result. The method comprises processing a workpiece using a processing tool, receiving trace data associated with the processing of the workpiece from the processing tool and estimating at least one process result of the workpiece based on at least a portion of the received trace data. The method further comprises adjusting processing of a next workpiece based on the estimated at least one process result.
摘要翻译：基于估计的处理结果提供了用于过程控制的方法和装置。该方法包括使用处理工具处理工件，从处理工具接收与工件的处理相关联的跟踪数据，并基于所接收的跟踪数据的至少一部分估计工件的至少一个处理结果。该方法还包括基于估计的至少一个处理结果来调整下一个工件的处理。

4. 发明授权

US06740534B1 Determination of a process flow based upon fault detection analysis 有权
标题翻译：基于故障检测分析确定过程流程
公开(公告)号：US06740534B1
公开(公告)日：2004-05-25
申请号：US10246341
申请日：2002-09-18
申请人： Ernest D. Adams, III , Matthew A. Purdy , Gregory A. Cherry , Eric O. Green , Elfido Coss, Jr. , Brian K. Cusson , Naomi M. Jenkins , Patrick M. Cowan
发明人： Ernest D. Adams, III , Matthew A. Purdy , Gregory A. Cherry , Eric O. Green , Elfido Coss, Jr. , Brian K. Cusson , Naomi M. Jenkins , Patrick M. Cowan
IPC分类号： G01R3126
CPC分类号： H01L22/20 , G05B19/41875 , G05B2219/32217 , G05B2219/32222 , H01L2223/54453 , Y02P90/14 , Y02P90/22
摘要： A method and an apparatus for the determination of a process flow based upon fault detection. A process step upon a workpiece is performed. Fault detection analysis based upon the process step performed upon the workpiece is performed. A workpiece routing process is performed based upon the fault detection analysis. The wafer routing process includes using a controller to perform one or a rework process routing, a non-standard process routing, a fault verification process routing, a normal process routing, or a termination process routing, based upon the fault detection analysis.
摘要翻译：一种用于基于故障检测来确定处理流程的方法和装置。执行工件上的工艺步骤。执行基于对工件执行的工艺步骤的故障检测分析。基于故障检测分析进行工件布线过程。基于故障检测分析，晶圆路由过程包括使用控制器来执行一个或返工过程路由，非标准过程路由，故障验证过程路由，正常过程路由或终止过程路由。

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