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1. 发明授权

US06740534B1 Determination of a process flow based upon fault detection analysis 有权
标题翻译：基于故障检测分析确定过程流程
公开(公告)号：US06740534B1
公开(公告)日：2004-05-25
申请号：US10246341
申请日：2002-09-18
申请人： Ernest D. Adams, III , Matthew A. Purdy , Gregory A. Cherry , Eric O. Green , Elfido Coss, Jr. , Brian K. Cusson , Naomi M. Jenkins , Patrick M. Cowan
发明人： Ernest D. Adams, III , Matthew A. Purdy , Gregory A. Cherry , Eric O. Green , Elfido Coss, Jr. , Brian K. Cusson , Naomi M. Jenkins , Patrick M. Cowan
IPC分类号： G01R3126
CPC分类号： H01L22/20 , G05B19/41875 , G05B2219/32217 , G05B2219/32222 , H01L2223/54453 , Y02P90/14 , Y02P90/22
摘要： A method and an apparatus for the determination of a process flow based upon fault detection. A process step upon a workpiece is performed. Fault detection analysis based upon the process step performed upon the workpiece is performed. A workpiece routing process is performed based upon the fault detection analysis. The wafer routing process includes using a controller to perform one or a rework process routing, a non-standard process routing, a fault verification process routing, a normal process routing, or a termination process routing, based upon the fault detection analysis.
摘要翻译：一种用于基于故障检测来确定处理流程的方法和装置。执行工件上的工艺步骤。执行基于对工件执行的工艺步骤的故障检测分析。基于故障检测分析进行工件布线过程。基于故障检测分析，晶圆路由过程包括使用控制器来执行一个或返工过程路由，非标准过程路由，故障验证过程路由，正常过程路由或终止过程路由。

2. 发明授权

US08359494B2 Parallel fault detection 有权
标题翻译：并行故障检测
公开(公告)号：US08359494B2
公开(公告)日：2013-01-22
申请号：US10323272
申请日：2002-12-18
申请人： Elfido Coss, Jr. , Ernest D. Adams, III , Robert J. Chong , Howard E. Castle , Thomas J. Sonderman , Alexander J. Pasadyn
发明人： Elfido Coss, Jr. , Ernest D. Adams, III , Robert J. Chong , Howard E. Castle , Thomas J. Sonderman , Alexander J. Pasadyn
IPC分类号： G06F11/00
CPC分类号： H01L22/20 , H01L2924/0002 , H01L2924/00
摘要： A method and an apparatus are provided for parallel fault detection. The method comprises receiving data associated with processing of a workpiece by a first processing tool, receiving data associated with processing of a workpiece by a second processing tool and comparing at least a portion of the received data to a common fault model to determine if a fault associated with at least one of the processing of the workpiece by the first processing tool and processing of the workpiece by the second processing tool occurred.
摘要翻译：提供了用于并行故障检测的方法和装置。该方法包括接收与第一处理工具处理工件有关的数据，通过第二处理工具接收与工件的处理有关的数据，并将至少一部分接收到的数据与常见故障模型进行比较，以确定是否存在故障与通过第一处理工具处理工件和由第二处理工具处理工件的至少一个相关联。

3. 发明授权

US07340318B1 Method and apparatus for assessing controller performance 失效
标题翻译：评估控制器性能的方法和装置
公开(公告)号：US07340318B1
公开(公告)日：2008-03-04
申请号：US10325611
申请日：2002-12-20
申请人： Gregory A. Cherry , Ernest D. Adams, III
发明人： Gregory A. Cherry , Ernest D. Adams, III
IPC分类号： G06F19/00
CPC分类号： G05B19/4184 , G05B2219/45031 , Y02P90/14
摘要： A method includes providing a process controller for controlling a process tool. The process tool is controlled in accordance with a process parameter. Measurements associated with the processing parameter for a plurality of runs of the process tool are accessed. A performance measure for the process controller is generated based on the process parameter and the measurements. A system includes a process tool, a process controller, and a performance monitor. The process controller is configured to control the process tool in accordance with a process parameter. The performance monitor is configured to retrieve measurements associated with the processing parameter for a plurality of runs of the process tool and generate a performance measure for the process controller based on the measured processing parameters.
摘要翻译：一种方法包括提供用于控制处理工具的过程控制器。过程工具根据过程参数进行控制。访问与处理工具的多个运行的处理参数相关联的测量。基于过程参数和测量值生成过程控制器的性能指标。系统包括处理工具，过程控制器和性能监视器。过程控制器被配置为根据过程参数来控制过程工具。性能监视器被配置为检索与用于多个处理工具运行的处理参数相关联的测量，并且基于所测量的处理参数生成过程控制器的性能测量。

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