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1. 发明授权

US06871114B1 Updating process controller based upon fault detection analysis 失效
标题翻译：基于故障检测分析更新过程控制器
公开(公告)号：US06871114B1
公开(公告)日：2005-03-22
申请号：US10231713
申请日：2002-08-30
申请人： Eric O. Green , Matthew A. Purdy , Elfido Coss, Jr. , Christopher A. Bode , Robert J. Chong , Gregory A. Cherry
发明人： Eric O. Green , Matthew A. Purdy , Elfido Coss, Jr. , Christopher A. Bode , Robert J. Chong , Gregory A. Cherry
IPC分类号： G05B19/404 , G06F19/00
CPC分类号： G05B19/404 , G05B2219/37252 , G05B2219/37345 , G05B2219/45031
摘要： A method and an apparatus for adjusting a process controller based upon a fault detection analysis. A process step upon a workpiece is performed using a processing tool. Manufacturing data relating to processing of the workpiece is acquired. The manufacturing data may include metrology data relating to the processed workpiece and/or tool state data relating to the tool state of a processing tool. A metrology/tool state data integration process is performed based upon the acquired manufacturing data. The metrology/tool state data integration process includes performing an assessment of a tool health related to the processing tool and adjusting an emphasis of the metrology data based upon the assessment of the tool health.
摘要翻译：一种基于故障检测分析调整过程控制器的方法和装置。使用加工工具进行工件的加工步骤。获取与工件的加工有关的制造数据。制造数据可以包括与处理工具有关的计量学数据和/或与加工工具的工具状态有关的刀具状态数据。基于获取的制造数据执行计量/工具状态数据集成处理。计量/工具状态数据集成过程包括对与处理工具相关的工具健康进行评估，并且基于对工具健康的评估来调整计量数据的重点。

2. 发明授权

US06740534B1 Determination of a process flow based upon fault detection analysis 有权
标题翻译：基于故障检测分析确定过程流程
公开(公告)号：US06740534B1
公开(公告)日：2004-05-25
申请号：US10246341
申请日：2002-09-18
申请人： Ernest D. Adams, III , Matthew A. Purdy , Gregory A. Cherry , Eric O. Green , Elfido Coss, Jr. , Brian K. Cusson , Naomi M. Jenkins , Patrick M. Cowan
发明人： Ernest D. Adams, III , Matthew A. Purdy , Gregory A. Cherry , Eric O. Green , Elfido Coss, Jr. , Brian K. Cusson , Naomi M. Jenkins , Patrick M. Cowan
IPC分类号： G01R3126
CPC分类号： H01L22/20 , G05B19/41875 , G05B2219/32217 , G05B2219/32222 , H01L2223/54453 , Y02P90/14 , Y02P90/22
摘要： A method and an apparatus for the determination of a process flow based upon fault detection. A process step upon a workpiece is performed. Fault detection analysis based upon the process step performed upon the workpiece is performed. A workpiece routing process is performed based upon the fault detection analysis. The wafer routing process includes using a controller to perform one or a rework process routing, a non-standard process routing, a fault verification process routing, a normal process routing, or a termination process routing, based upon the fault detection analysis.
摘要翻译：一种用于基于故障检测来确定处理流程的方法和装置。执行工件上的工艺步骤。执行基于对工件执行的工艺步骤的故障检测分析。基于故障检测分析进行工件布线过程。基于故障检测分析，晶圆路由过程包括使用控制器来执行一个或返工过程路由，非标准过程路由，故障验证过程路由，正常过程路由或终止过程路由。

3. 发明授权

US08321048B1 Associating data with workpieces and correlating the data with yield data 有权
标题翻译：将数据与工件相关联并将数据与收益数据相关联
公开(公告)号：US08321048B1
公开(公告)日：2012-11-27
申请号：US10185468
申请日：2002-06-28
申请人： Elfido Coss, Jr. , Anastasia O. Peterson , Christopher A. Bode
发明人： Elfido Coss, Jr. , Anastasia O. Peterson , Christopher A. Bode
IPC分类号： G06F19/00
CPC分类号： G05B19/41875 , G05B2219/37224 , Y02P90/22
摘要： A method and apparatus is provided for associating operational data with workpieces and correlating the operational data with yield data. The method comprises processing a workpiece using a processing tool, associating the operational data with the workpiece during the processing of the workpiece and measuring the yield data associated with the processed workpiece. The method further comprises correlating the operational data with the yield data to make one or more determinations.
摘要翻译：提供了一种用于将操作数据与工件相关联并将操作数据与产量数据相关联的方法和装置。该方法包括使用处理工具处理工件，在工件加工期间将操作数据与工件相关联，并测量与加工的工件相关的屈服数据。该方法还包括将操作数据与产量数据相关联以进行一个或多个确定。

4. 发明授权

US06778873B1 Identifying a cause of a fault based on a process controller output 失效
标题翻译：根据过程控制器输出识别出故障的原因
公开(公告)号：US06778873B1
公开(公告)日：2004-08-17
申请号：US10210640
申请日：2002-07-31
申请人： Jin Wang , Elfido Coss, Jr. , Brian K. Cusson , Alexander J. Pasadyn , Michael L. Miller , Naomi M. Jenkins , Christopher A. Bode
发明人： Jin Wang , Elfido Coss, Jr. , Brian K. Cusson , Alexander J. Pasadyn , Michael L. Miller , Naomi M. Jenkins , Christopher A. Bode
IPC分类号： G06F1900
CPC分类号： G05B19/4184 , G05B23/0281 , G05B2219/31357 , G05B2219/31363 , G05B2219/32201 , Y02P90/14 , Y02P90/22
摘要： A method and apparatus is provided for identifying a cause of a fault based on controller output. The method comprises processing at least one workpiece under a direction of the controller and detecting a fault associated with the processing of the at least one workpiece. The method further includes determining a plurality of possible causes of the detected fault, identifying a more likely possible cause out of the plurality of possible causes, providing fault information associated with the identified more likely possible cause to the controller. The method further includes providing fault information associated with the identified more likely possible cause to the controller. The method further comprises adjusting the processing of one or more workpieces to be processed next based on the fault information provided to the controller. The method further includes generating prediction data associated with processing of the next workpieces, and comparing the prediction data to processing data associated with the processing of the next workpieces to identify a possible cause of the fault.
摘要翻译：提供了一种基于控制器输出来识别故障原因的方法和装置。该方法包括在控制器的方向上处理至少一个工件，并检测与至少一个工件的处理相关的故障。该方法还包括确定检测到的故障的多个可能的原因，从多个可能的原因中识别更可能的可能原因，将与所识别的更可能的可能原因相关联的故障信息提供给控制器。该方法还包括向控制器提供与所识别的更可能的可能原因相关联的故障信息。该方法还包括基于提供给控制器的故障信息来调整接下来要处理的一个或多个待处理工件的处理。该方法还包括生成与下一个工件的处理相关联的预测数据，以及将预测数据与与下一个工件的处理相关联的处理数据进行比较，以识别故障的可能原因。

5. 发明授权

US08359494B2 Parallel fault detection 有权
标题翻译：并行故障检测
公开(公告)号：US08359494B2
公开(公告)日：2013-01-22
申请号：US10323272
申请日：2002-12-18
申请人： Elfido Coss, Jr. , Ernest D. Adams, III , Robert J. Chong , Howard E. Castle , Thomas J. Sonderman , Alexander J. Pasadyn
发明人： Elfido Coss, Jr. , Ernest D. Adams, III , Robert J. Chong , Howard E. Castle , Thomas J. Sonderman , Alexander J. Pasadyn
IPC分类号： G06F11/00
CPC分类号： H01L22/20 , H01L2924/0002 , H01L2924/00
摘要： A method and an apparatus are provided for parallel fault detection. The method comprises receiving data associated with processing of a workpiece by a first processing tool, receiving data associated with processing of a workpiece by a second processing tool and comparing at least a portion of the received data to a common fault model to determine if a fault associated with at least one of the processing of the workpiece by the first processing tool and processing of the workpiece by the second processing tool occurred.
摘要翻译：提供了用于并行故障检测的方法和装置。该方法包括接收与第一处理工具处理工件有关的数据，通过第二处理工具接收与工件的处理有关的数据，并将至少一部分接收到的数据与常见故障模型进行比较，以确定是否存在故障与通过第一处理工具处理工件和由第二处理工具处理工件的至少一个相关联。

6. 发明授权

US07200779B1 Fault notification based on a severity level 失效
标题翻译：基于严重性级别的故障通知
公开(公告)号：US07200779B1
公开(公告)日：2007-04-03
申请号：US10133097
申请日：2002-04-26
申请人： Elfido Coss, Jr. , Susan Hickey , Michael R. Conboy
发明人： Elfido Coss, Jr. , Susan Hickey , Michael R. Conboy
IPC分类号： G06F11/00
CPC分类号： G06F11/0769 , G06F11/0709 , G06F11/076 , G06F11/0781
摘要： A method and apparatus is provided for fault notification based on a severity level. The method comprises detecting a fault associated with a processing tool that is adapted to process one or more workpieces, determining a fault severity level of the detected fault and selecting at least one user to notify of the fault based on the severity level of the fault.
摘要翻译：基于严重性级别提供了用于故障通知的方法和装置。该方法包括检测与处理一个或多个工件的处理工具相关联的故障，确定检测到的故障的故障严重性级别，并且基于故障的严重性级别选择至少一个用户通知故障。

7. 发明授权

US07051250B1 Routing workpieces based upon detecting a fault 有权
标题翻译：基于检测到故障来路由工件
公开(公告)号：US07051250B1
公开(公告)日：2006-05-23
申请号：US10164091
申请日：2002-06-06
申请人： Sam H. Allen, Jr. , Michael R. Conboy , Michael L. Miller , Elfido Coss, Jr.
发明人： Sam H. Allen, Jr. , Michael R. Conboy , Michael L. Miller , Elfido Coss, Jr.
IPC分类号： G06F11/00
CPC分类号： G05B19/4184 , G05B2219/31355 , G05B2219/31365 , G05B2219/32243 , G05B2219/32254 , Y02P90/14 , Y02P90/20
摘要： A method and apparatus is provided for routing workpieces based upon detecting a fault. The method comprises routing a workpiece to a first processing tool identified by a dispatch system, detecting a fault condition associated with the first processing tool and notifying the dispatch system of the detected fault condition. The method further comprises routing a second workpiece to a second processing tool in response to the dispatch system being notified of the fault condition.
摘要翻译：提供了一种基于检测故障来路由工件的方法和装置。该方法包括将工件路由到由调度系统识别的第一处理工具，检测与第一处理工具相关联的故障状况并通知调度系统检测到的故障状况。该方法还包括响应于调度系统被通知故障状况而将第二工件路由到第二处理工具。

8. 发明授权

US06928333B1 Scheduling method for automated work-cell transfer system 失效
标题翻译：自动化工作单元传输系统的调度方法
公开(公告)号：US06928333B1
公开(公告)日：2005-08-09
申请号：US09387174
申请日：1999-08-31
申请人： Michael R. Conboy , Patrick J. Ryan , Elfido Coss, Jr.
发明人： Michael R. Conboy , Patrick J. Ryan , Elfido Coss, Jr.
IPC分类号： G06F19/00 , G06Q10/00
CPC分类号： G06Q10/06 , Y02P90/86
摘要： According to an example embodiment, the present invention is directed to a new and efficient method for bringing at least two items together from independent locations via separate paths in a computer controlled manufacturing environment. Using the computer, the probabilities for pickup and delivery of each of the two items are generated and used to determine an efficient manner in which to bring the items together via the separate paths.
摘要翻译：根据示例性实施例，本发明涉及一种用于在计算机控制的制造环境中通过独立路径将独立位置带入至少两个项目的新的和有效的方法。使用计算机，产生并且使用两个项目中的每一个的拾取和递送的概率来确定通过分开的路径将项目合在一起的有效方式。

9. 发明授权

US06905895B1 Predicting process excursions based upon tool state variables 失效
标题翻译：基于工具状态变量预测过程偏移
公开(公告)号：US06905895B1
公开(公告)日：2005-06-14
申请号：US10185495
申请日：2002-06-28
申请人： Elfido Coss, Jr. , Mark K. Sze-To
发明人： Elfido Coss, Jr. , Mark K. Sze-To
IPC分类号： H01L21/66 , G01R31/26 , G06F19/00 , H01L21/00
CPC分类号： H01L22/20 , H01L2223/54453
摘要： A method and an apparatus for predicting excursions based upon tool state variables. At least one semiconductor wafer is processed in a processing tool. Tool state data relating to the processing tool is acquired. The tool state data comprises at least one tool state variable. A determination is made whether an excursion of the tool health related to the processing tool has occurred based upon the tool state data. The tool state variable is modified to reduce the excursion of the tool health in response to the determination that the excursion of the tool health has occurred.
摘要翻译：一种基于工具状态变量预测偏移的方法和装置。在处理工具中处理至少一个半导体晶片。获取与处理工具相关的工具状态数据。刀具状态数据包括至少一个刀具状态变量。根据工具状态数据确定是否发生了与处理工具相关的工具健康的偏移。修改工具状态变量以减少工具健康的偏差，以响应确定工具健康发生偏移的确定。

10. 发明授权

US06871112B1 Method for requesting trace data reports from FDC semiconductor fabrication processes 失效
标题翻译：从FDC半导体制造工艺请求跟踪数据报告的方法
公开(公告)号：US06871112B1
公开(公告)日：2005-03-22
申请号：US09479852
申请日：2000-01-07
申请人： Elfido Coss, Jr. , Michael R. Conboy , Bryce A. Hendrix
发明人： Elfido Coss, Jr. , Michael R. Conboy , Bryce A. Hendrix
IPC分类号： H01L21/02 , H01L21/66 , G06F19/00
CPC分类号： H01L22/20 , H01L2924/0002 , H01L2924/00
摘要： The invention is, in its various aspects, a method and apparatus for dynamically generating trace data reports in a semiconductor fabrication process employing fault detection control. The method comprises specifying data including at least one of a parameter, a trigger, and a frequency, for a trace data report; automatically generating from a fault detection controller a request including the specified data to a report generator; formulating the trace data report responsive to the request; and returning the formulated trace data report from the report generator based on the request. The apparatus is a semiconductor fabrication processing system, comprising: a fabrication tool capable of providing at least one of specified data and a trace data report; a fault detection controller capable of automatically generating a request for the trace data report, the request including the specified data; a report generator capable of requesting at least one of the specified data and the trace data report from the fabrication tool and capable of, if the specified data is requested from the fabrication tool, providing the trace data report; and an operator interface for receiving data specified for the trace data report, the specified data including at least one of a parameter, a trigger, and a frequency for the trace data report, and to which the trace data report may be returned from at least one of the report generator and the fabrication tool.
摘要翻译：本发明在其各个方面是一种用于在采用故障检测控制的半导体制造过程中动态产生跟踪数据报告的方法和装置。该方法包括指定用于跟踪数据报告的包括参数，触发和频率中的至少一个的数据; 从故障检测控制器自动生成包括指定数据的请求到报告生成器; 根据请求制定跟踪数据报告; 并根据请求从报告生成器返回已制定的跟踪数据报告。该装置是半导体制造处理系统，包括：能够提供指定数据和跟踪数据报告中的至少一个的制造工具; 一个故障检测控制器，能够自动产生跟踪数据报告的请求，该请求包括指定的数据; 报告发生器，其能够从所述制造工具请求所述指定数据和跟踪数据报告中的至少一个，并且如果从所述制造工具请求指定的数据，则能够提供所述跟踪数据报告; 以及用于接收为跟踪数据报告指定的数据的操作者界面，所述指定数据包括用于跟踪数据报告的参数，触发和频率中的至少一个，并且跟踪数据报告至少可以从其返回报告生成器和制作工具之一。

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