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    • 3. 发明授权
    • Magnetoresistive head with a CPP structure having suppressed side reading
    • 具有抑制侧读的CPP结构的磁阻头
    • US09230574B2
    • 2016-01-05
    • US12631295
    • 2009-12-04
    • Nobuo YoshidaKatsuro WatanabeMasahiro OusugiAtsushi Kato
    • Nobuo YoshidaKatsuro WatanabeMasahiro OusugiAtsushi Kato
    • G11B5/39B82Y10/00B82Y25/00
    • G11B5/3909B82Y10/00B82Y25/00G11B5/3932G11B2005/3996Y10T29/49032
    • According to one embodiment, a CPP structure magnetoresistive head includes a magnetoresistive sensor film between a lower shield layer and an upper shield layer and a longitudinal biasing layer disposed at each side of the magnetoresistive sensor film via a read track width defining insulator film. In the stripe height direction, the length of the longitudinal biasing layer is longer than the length of a second ferromagnetic layer in which its magnetization rotates in response to the external magnetic field. The second ferromagnetic layer is one of the layers comprising the magnetoresistive sensor film. At a stripe height, the surface of each longitudinal biasing layer has a step to change the thickness thereof across the step so that the air bearing surface section thereof has a larger thickness than any other section. Other structures using a magnetoresistive head and methods of production thereof are described as well.
    • 根据一个实施例,CPP结构磁阻头包括在下屏蔽层和上屏蔽层之间的磁阻传感器膜和经由读磁道宽度限定绝缘膜设置在磁阻传感器膜的每一侧的纵向偏置层。 在条带高度方向上,纵向偏置层的长度长于其磁化响应于外部磁场而旋转的第二铁磁层的长度。 第二铁磁层是包括磁阻传感器膜的层之一。 在条带高度处,每个纵向偏置层的表面具有改变其横跨该台阶的厚度的步骤,使得其空气轴承表面部分具有比任何其它部分更大的厚度。 还描述了使用磁阻头的其它结构及其生产方法。
    • 7. 发明申请
    • Magnetoresistive Head With A CPP Structure Having Suppressed Side Reading
    • 具有抑制侧读的CPP结构的磁阻头
    • US20100142100A1
    • 2010-06-10
    • US12631295
    • 2009-12-04
    • Nobuo YoshidaKatsuro WatanabeMasahiro OusugiAtsushi Kato
    • Nobuo YoshidaKatsuro WatanabeMasahiro OusugiAtsushi Kato
    • G11B5/127
    • G11B5/3909B82Y10/00B82Y25/00G11B5/3932G11B2005/3996Y10T29/49032
    • According to one embodiment, a CPP structure magnetoresistive head includes a magnetoresistive sensor film between a lower shield layer and an upper shield layer and a longitudinal biasing layer disposed at each side of the magnetoresistive sensor film via a read track width defining insulator film. In the stripe height direction, the length of the longitudinal biasing layer is longer than the length of a second ferromagnetic layer in which its magnetization rotates in response to the external magnetic field. The second ferromagnetic layer is one of the layers comprising the magnetoresistive sensor film. At a stripe height, the surface of each longitudinal biasing layer has a step to change the thickness thereof across the step so that the air bearing surface section thereof has a larger thickness than any other section. Other structures using a magnetoresistive head and methods of production thereof are described as well.
    • 根据一个实施例,CPP结构磁阻头包括在下屏蔽层和上屏蔽层之间的磁阻传感器膜和经由读磁道宽度限定绝缘膜设置在磁阻传感器膜的每一侧的纵向偏置层。 在条带高度方向上,纵向偏置层的长度长于其磁化响应于外部磁场而旋转的第二铁磁层的长度。 第二铁磁层是包括磁阻传感器膜的层之一。 在条带高度处,每个纵向偏置层的表面具有改变其横跨该台阶的厚度的步骤,使得其空气轴承表面部分具有比任何其它部分更大的厚度。 还描述了使用磁阻头的其它结构及其生产方法。
    • 8. 发明授权
    • Magnetic recording head and method for manufacturing
    • 磁记录头及制造方法
    • US07333301B2
    • 2008-02-19
    • US10650832
    • 2003-08-29
    • Kimitoshi EtohNobuo YoshidaMoriaki FuyamaMakoto MorijiriKenichi MeguroIchiro OodakeKazue KudoYohji MaruyamaKatsuro Watanabe
    • Kimitoshi EtohNobuo YoshidaMoriaki FuyamaMakoto MorijiriKenichi MeguroIchiro OodakeKazue KudoYohji MaruyamaKatsuro Watanabe
    • G11B5/127
    • B82Y25/00B82Y10/00G11B5/3136G11B5/3909G11B5/3912Y10T29/49044
    • A thin-film magnetic head having little temperature rise in the element, good heat dissipation and a short magnetic path length (narrow coil pitch) and manufacturing method for same is provided. To form the coil of the thin-film magnetic head, a lower coil is first formed and after forming alumina and an inorganic compound containing alumina, a trench is formed for the upper coil by reactive ion etching. The lower coil allows uniform etching at this time and functions as a film to prevent loading effects occurring during reactive ion etching. This trench is then plated in copper and chemical mechanical planarization performed to form the upper layer coil as the dual-layer coil of the present invention. Heat from the coil is efficiently radiated towards the substrate by alumina and an inorganic compound containing alumina with good heat propagation. The ratio of alumina or inorganic compound containing alumina in the lower coil can be selected by reactive ion etching so that an upper coil trench functioning as an etching stopper can be securely formed to allow forming a stable coil film thickness and a short magnetic path length.
    • 提供元件温度上升较小,散热好,磁路长度短(窄线圈间距)及其制造方法的薄膜磁头。 为了形成薄膜磁头的线圈,首先形成下线圈,在形成氧化铝和含有氧化铝的无机化合物之后,通过反应离子蚀刻形成用于上部线圈的沟槽。 此时,下线圈允许均匀刻蚀,起到膜的作用,以防止在反应离子蚀刻期间发生的负载效应。 然后将该沟槽镀铜并进行化学机械平面化以形成上层线圈作为本发明的双层线圈。 来自线圈的热量通过氧化铝和含有良好热传播的氧化铝的无机化合物有效地朝向基板辐射。 可以通过反应离子蚀刻来选择下层线圈中的氧化铝或含有氧化铝的无机化合物的比例,从而可以可靠地形成用作蚀刻停止层的上部线圈沟槽,以形成稳定的线圈膜厚度和短的磁路长度。
    • 9. 发明授权
    • Sensor shape of a CPP magnetic head for improving the MR ratio
    • 用于改善MR比的CPP磁头的传感器形状
    • US08355224B2
    • 2013-01-15
    • US12011904
    • 2008-01-29
    • Satoru OkamotoKoji OkazakiShuuichi KojimaNobuo YoshidaKatsuro WatanabeHiroyuki Katada
    • Satoru OkamotoKoji OkazakiShuuichi KojimaNobuo YoshidaKatsuro WatanabeHiroyuki Katada
    • G11B5/33
    • G11B5/398B82Y25/00G01R33/093G11B5/3163H01L43/08
    • Embodiments of the present invention help to prevent a head characteristic from being deteriorated by re-deposition or damage which occurs when a sensor film is etched, a track width is narrowed, and the head characteristic is stabilized. According to one embodiment, when it is assumed that the thickness of the sensor film on an air bearing surface is T, and a distance between an end of a medium layer that is interposed between a free layer and a pinned layer which comprise the sensor film and an end of the sensor film lowest portion, a relationship of 1.2×T≦X≦2.5×T is satisfied, and the ends of a pair of magnetic films which are in contact with both sides in the track-width direction through an insulator do not exist in the track central portion from the free layer end. The sensor film is etched while an incident angle of an etching beam is changed over, and when it is assumed that a direction normal to the sensor film surface is the incident angle of 0, etching is conducted under the condition where the incident angle of the etching beam becomes smaller with time.
    • 本发明的实施例有助于通过在传感器膜被蚀刻,轨道宽度变窄并且头部特性稳定时发生的再沉积或损伤来防止头部特性劣化。 根据一个实施例,当假设空气轴承表面上的传感器膜的厚度为T时,介于介于包含传感器膜的自由层和被钉扎层之间的介质层的端部之间的距离 和传感器膜最低部分的一端,满足1.2×T≦̸ X≦̸ 2.5×T的关系,并且通过绝缘体在轨道宽度方向上与两侧接触的一对磁性膜的端部 不存在于自由层末端的轨道中心部分。 在蚀刻光束的入射角变化的同时蚀刻传感器膜,并且当假定与传感器膜表面垂直的方向为入射角为0时,在其入射角 刻蚀光束随时间变小。
    • 10. 发明申请
    • VERTICAL-CURRENT-TYPE REPRODUCING MAGNETIC HEAD AND METHOD OF MANUFACTURING THE SAME
    • 垂直电流型复制磁头及其制造方法
    • US20100123977A1
    • 2010-05-20
    • US12615222
    • 2009-11-09
    • Kenichi AkitaNobuo YoshidaKatsuro Watanabe
    • Kenichi AkitaNobuo YoshidaKatsuro Watanabe
    • G11B5/33
    • G11B5/3909B82Y10/00B82Y25/00G11B5/3912G11B2005/3996
    • In one embodiment, a vertical-current-type reproducing magnetic head includes a sensor film, an upper shield paired with a lower shield that together flow a current into the sensor film in a thickness direction of the sensor film, and magnetic-domain control magnetic films provided above both sides of the sensor film in a track width direction of the sensor film. The shield is formed via a nonmagnetic adhesion layer including a discontinuous region near the sensor film, and the sensor film contacts the upper shield. In another embodiment, a method includes forming a resist layer, etching a sensor film while using the resist layer as a mask, forming first insulating films, domain-control magnetic films, and nonmagnetic adhesion layers in a stacked manner, lifting-off the resist layer, and forming an upper shield that together with a lower shield flow current into the sensor film in a thickness direction of the sensor film.
    • 在一个实施例中,垂直电流型再现磁头包括传感器膜,与屏蔽层成对的上屏蔽层,其一起沿传感器膜的厚度方向将电流流入传感器膜,以及磁畴控制磁 在传感器膜的轨道宽度方向上设置在传感器膜两侧的膜。 屏蔽是通过包括传感器膜附近的不连续区域的非磁性粘合层形成的,并且传感器膜接触上屏蔽。 在另一个实施例中,一种方法包括形成抗蚀剂层,在使用抗蚀剂层作为掩模的同时蚀刻传感器膜,以堆叠的方式形成第一绝缘膜,域控制磁性膜和非磁性粘合层,提升抗蚀剂 并且在传感器膜的厚度方向上形成与屏蔽流动电流一起下降到传感器膜中的上屏蔽。