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1. 发明授权

US07333301B2 Magnetic recording head and method for manufacturing 失效
标题翻译：磁记录头及制造方法
公开(公告)号：US07333301B2
公开(公告)日：2008-02-19
申请号：US10650832
申请日：2003-08-29
申请人： Kimitoshi Etoh , Nobuo Yoshida , Moriaki Fuyama , Makoto Morijiri , Kenichi Meguro , Ichiro Oodake , Kazue Kudo , Yohji Maruyama , Katsuro Watanabe
发明人： Kimitoshi Etoh , Nobuo Yoshida , Moriaki Fuyama , Makoto Morijiri , Kenichi Meguro , Ichiro Oodake , Kazue Kudo , Yohji Maruyama , Katsuro Watanabe
IPC分类号： G11B5/127
CPC分类号： B82Y25/00 , B82Y10/00 , G11B5/3136 , G11B5/3909 , G11B5/3912 , Y10T29/49044
摘要： A thin-film magnetic head having little temperature rise in the element, good heat dissipation and a short magnetic path length (narrow coil pitch) and manufacturing method for same is provided. To form the coil of the thin-film magnetic head, a lower coil is first formed and after forming alumina and an inorganic compound containing alumina, a trench is formed for the upper coil by reactive ion etching. The lower coil allows uniform etching at this time and functions as a film to prevent loading effects occurring during reactive ion etching. This trench is then plated in copper and chemical mechanical planarization performed to form the upper layer coil as the dual-layer coil of the present invention. Heat from the coil is efficiently radiated towards the substrate by alumina and an inorganic compound containing alumina with good heat propagation. The ratio of alumina or inorganic compound containing alumina in the lower coil can be selected by reactive ion etching so that an upper coil trench functioning as an etching stopper can be securely formed to allow forming a stable coil film thickness and a short magnetic path length.
摘要翻译：提供元件温度上升较小，散热好，磁路长度短（窄线圈间距）及其制造方法的薄膜磁头。为了形成薄膜磁头的线圈，首先形成下线圈，在形成氧化铝和含有氧化铝的无机化合物之后，通过反应离子蚀刻形成用于上部线圈的沟槽。此时，下线圈允许均匀刻蚀，起到膜的作用，以防止在反应离子蚀刻期间发生的负载效应。然后将该沟槽镀铜并进行化学机械平面化以形成上层线圈作为本发明的双层线圈。来自线圈的热量通过氧化铝和含有良好热传播的氧化铝的无机化合物有效地朝向基板辐射。可以通过反应离子蚀刻来选择下层线圈中的氧化铝或含有氧化铝的无机化合物的比例，从而可以可靠地形成用作蚀刻停止层的上部线圈沟槽，以形成稳定的线圈膜厚度和短的磁路长度。

2. 发明授权

US06723449B2 Structure and plating method of thin film magnetic head and magnetic storage apparatus 失效
标题翻译：薄膜磁头和磁存储装置的结构和电镀方法
公开(公告)号：US06723449B2
公开(公告)日：2004-04-20
申请号：US09917892
申请日：2001-07-31
申请人： Kazue Kudo , Yasuyuki Okada , Nobuo Yoshida , Moriaki Fuyama , Noriyuki Saiki , Gen Oikawa , Takashi Kawabe , Makoto Morijiri
发明人： Kazue Kudo , Yasuyuki Okada , Nobuo Yoshida , Moriaki Fuyama , Noriyuki Saiki , Gen Oikawa , Takashi Kawabe , Makoto Morijiri
IPC分类号： G11B5127
CPC分类号： G11B5/3109 , G11B5/3153 , G11B5/3163 , Y10T29/49032 , Y10T428/11 , Y10T428/1121 , Y10T428/115 , Y10T428/12931
摘要： A material for magnetic pole for attaining a writing head generating an intense recording magnetic field, and a structure and a manufacturing method therefor. The thin film magnetic head includes a magnetic pole layer having a plated magnetic layer containing Co, Ni and Fe formed on a plated underlayer of a sputtered magnetic layer containing Co, Ni and Fe. The CoNiFe magnetic layer having a composition: 40 wt %≦Co≦70 wt %, 10 wt %≦Ni≦25 wt % and 10 wt %≦Fe≦30 wt % and a peak intensity ratio in the X-ray diffraction of I(200)/I(111)≧0.5 and I(110)/I(111)≧1 (defining peak intensities for the face-centered cubic fcc (111) face, fcc (200) face and the body-centered cubic bcc (119) face as: I(111), I(200), I(110)).
摘要翻译：用于获得产生强烈记录磁场的写入头的用于磁极的材料及其结构及其制造方法。薄膜磁头包括具有包含Co，Ni和Fe的镀覆磁性层的磁极层，其形成在包含Co，Ni和Fe的溅射磁性层的镀覆底层上。 CoNiFe磁性层的组成为：40重量％<= Co <= 70重量％，10重量％<= Ni <= 25重量％，10重量％<= Fe <= 30重量％（111）= 0.5（I（110）/ I（111）> = 1（定义面心立方fcc（111）面的峰强度，fcc（200））的X射线衍射面部和体心立方体bcc（119）面为：I（111），I（200），I（110））。

3. 发明授权

US07150819B2 Structure and plating method of thin film magnetic head and magnetic storage apparatus 失效
公开(公告)号：US07150819B2
公开(公告)日：2006-12-19
申请号：US10795542
申请日：2004-03-09
申请人： Kazue Kudo , Yasuyuki Okada , Nobuo Yoshida , Moriaki Fuyama , Noriyuki Saiki , Gen Oikawa , Takashi Kawabe , Makoto Morijiri
发明人： Kazue Kudo , Yasuyuki Okada , Nobuo Yoshida , Moriaki Fuyama , Noriyuki Saiki , Gen Oikawa , Takashi Kawabe , Makoto Morijiri
IPC分类号： C23C28/02
CPC分类号： G11B5/3109 , G11B5/3153 , G11B5/3163 , Y10T29/49032 , Y10T428/11 , Y10T428/1121 , Y10T428/115 , Y10T428/12931
摘要： A material for magnetic pole for attaining a writing head generating an intense recording magnetic field, and a structure and a manufacturing method therefor. The thin film magnetic head includes a magnetic pole layer having a plated magnetic layer containing Co, Ni and Fe formed on a plated underlayer of a sputtered magnetic layer containing Co, Ni and Fe. The CoNiFe magnetic layer having a composition: 40 wt %≦Co≦70 wt %, 10 wt %≦Ni≦25 wt % and 10 wt %≦Fe≦30 wt % and a peak intensity ratio in the X-ray diffraction of I(200)/I(111)≧0.5 and I(110)/I(111)≧1 (defining peak intensities for the face-centered cubic fcc (111) face, fcc (200) face and the body-centered cubic bcc (119) face as: I(111), I(200), I(110)).

4. 发明授权

US4543573A Display panel 失效
标题翻译：显示面板
公开(公告)号：US4543573A
公开(公告)日：1985-09-24
申请号：US363458
申请日：1982-03-30
申请人： Moriaki Fuyama , Katsumi Tamura , Makoto Morijiri , Mamoru Sawahata , Hiroaki Hachino
发明人： Moriaki Fuyama , Katsumi Tamura , Makoto Morijiri , Mamoru Sawahata , Hiroaki Hachino
IPC分类号： G09F9/30 , B23K35/00 , G02F1/1333 , G02F1/1343 , G02F1/1345 , H01L31/18 , H05K3/24 , G09G3/00
CPC分类号： B23K35/001 , G02F1/13439 , G02F1/1345 , H01L31/1884 , H05K3/24 , H01J2211/225 , H05K2201/0326 , Y02E10/50
摘要： A display panel includes a pair of substrates arranged face to face with each other with a predetermined gap therebetween, at least a pair of electrodes each provided on a corresponding one of facing surfaces of the substrates, and a display substance provided between the electrodes. A picture element is made up of a pair of facing portions of the electrodes and a portion of the display substance situated between the facing portions. At least one of the electrodes is made up of a multiplicity of picture element electrodes formed of a transparent conductive film and juxtaposed to each other and a contact metal member for substantially making an electrical connection of a plurality of ones of the picture element electrodes. The contact metal member is made up of a first layer made of chromium or a chromium alloy and a second layer formed on the first layer and made of nickel or gold.
摘要翻译：显示面板包括彼此面对地布置的一对基板，其间设置有至少一对电极，每对电极设置在基板的相对应的一个相对表面上，以及设置在电极之间的显示物质。图像元素由电极的一对相对部分和位于相对部分之间的显示物质的一部分组成。电极中的至少一个由多个彼此并置的透明导电膜形成的像素电极和用于基本上形成多个像素电极的电连接的接触金属部件构成。接触金属构件由由铬或铬合金制成的第一层和形成在第一层上并由镍或金制成的第二层构成。

5. 发明授权

US5245493A Magnetic information storage apparatus including magnetic head and method for making magnetic head 失效
标题翻译：包括磁头的磁信息存储装置及制造磁头的方法
公开(公告)号：US5245493A
公开(公告)日：1993-09-14
申请号：US495908
申请日：1990-03-20
申请人： Takashi Kawabe , Moriaki Fuyama , Shinji Narishige , Eizi Ashida , Makoto Morijiri , Masanori Tanabe , Hiroshi Fukui , Yutaka Sugita , Hiroshi Ikeda , Masaaki Hayashi , Kazuo Nakagoshi , Kanji Kawakami , Yokuo Saitoh , Shunichiro Kuwatsuka
发明人： Takashi Kawabe , Moriaki Fuyama , Shinji Narishige , Eizi Ashida , Makoto Morijiri , Masanori Tanabe , Hiroshi Fukui , Yutaka Sugita , Hiroshi Ikeda , Masaaki Hayashi , Kazuo Nakagoshi , Kanji Kawakami , Yokuo Saitoh , Shunichiro Kuwatsuka
IPC分类号： G11B5/012 , G11B5/31 , G11B5/39
CPC分类号： G11B5/3919 , G11B5/012 , G11B5/3116 , G11B5/313 , G11B5/3163 , G11B5/3903 , G11B5/3967
摘要： A magnetic head for reading from and/or writing to a magnetic information storage medium has a substrate on which a plurality of thin films are formed in sequence. The films provide a magnetic circuit having a magnetic gap, a bottom pole piece and a top pole piece overlying said bottom pole piece. The top pole piece is formed as a tip portion adjoining the magnetic gap and a rear portion which makes magnetic contact with the tip portion. The rear portion is formed in the sequence after the tip portion. To ensure accurate thickness and width of the tip portion, a non-magnetic protective film is formed on the tip portion after the tip portion is formed and before the rear portion is formed.

6. 发明授权

US5296979A Magnetic disc apparatus with thin film head suitable for high-density recording 失效
标题翻译：具有适用于高密度记录的薄膜头的磁盘装置
公开(公告)号：US5296979A
公开(公告)日：1994-03-22
申请号：US963039
申请日：1992-10-19
申请人： Takashi Kawabe , Moriaki Fuyama , Shinji Narishige , Masatoshi Tsuchiya , Eiji Ashida , Makoto Morijiri , Hideki Yamazaki , Yutaka Sugita , Hiroshi Fukui , Tadayuki Iwakura , Makoto Aihara , Makoto Saito , Shunichiro Kuwatsuka , Hiroshi Ikeda , Yokuo Saitoh
发明人： Takashi Kawabe , Moriaki Fuyama , Shinji Narishige , Masatoshi Tsuchiya , Eiji Ashida , Makoto Morijiri , Hideki Yamazaki , Yutaka Sugita , Hiroshi Fukui , Tadayuki Iwakura , Makoto Aihara , Makoto Saito , Shunichiro Kuwatsuka , Hiroshi Ikeda , Yokuo Saitoh
IPC分类号： G11B5/012 , G11B5/31
CPC分类号： G11B5/012 , G11B5/3116
摘要： A magnetic disc apparatus includes a magnetic disc for recording information; a thin film magnetic head including a magnetic pole structure having an upper magnetic pole tip and a lower magnetic pole tip arranged to provide a magnetic gap at respective end portions thereof for writing and reading information in and from the magnetic disc; a device for rotating the magnetic disc; and a device for positioning the thin film magnetic head; the upper and lower magnetic pole tips having different contours at the respective end portions as viewed from a side confronting the magnetic disc wherein the difference (.DELTA.CW in .mu.m) in the width, along the magnetic gap, of the upper magnetic pole tip and the width, along the magnetic gap, of the lower magnetic pole tip satisfies the relation0
摘要翻译：磁盘装置包括用于记录信息的磁盘; 包括具有上磁极端头和下磁极端头的磁极结构的薄膜磁头，其布置成在其各个端部处提供磁隙以在磁盘中写入和读取信息; 用于旋转磁盘的装置; 以及用于定位薄膜磁头的装置; 所述上磁极尖端和下磁极尖在相应端部处具有不同的轮廓，从与磁盘相对的一侧观察，其中沿着上部的磁隙的宽度（（delta）CW）（（m）））磁极尖端和下磁极尖端的磁隙的宽度满足磁道密度Tr为每英寸1800或更多磁道的磁盘的关系0 <（Delta）CW <= 5000 / Tr。

7. 发明授权

US5241440A Thin film magnetic head and manufacturing method therefor 失效
标题翻译：薄膜磁头及其制造方法
公开(公告)号：US5241440A
公开(公告)日：1993-08-31
申请号：US908607
申请日：1992-06-29
申请人： Eizi Ashida , Moriaki Fuyama , Hideki Yamazaki , Shinji Narishige , Makoto Morijiri , Takashi Kawabe , Shunichiro Kuwatsuka , Saburo Suzuki , Eisei Togawa
发明人： Eizi Ashida , Moriaki Fuyama , Hideki Yamazaki , Shinji Narishige , Makoto Morijiri , Takashi Kawabe , Shunichiro Kuwatsuka , Saburo Suzuki , Eisei Togawa
IPC分类号： G11B5/31
CPC分类号： G11B5/313 , G11B5/3163
摘要： A thin film magnetic head including conductor coils, a plurality of insulating layers to interpose and insulate the conductor coils and a magnetic gap layer between upper and lower magnetic cores, in which another insulating layer is provided on a stepped region formed by end faces of the plurality of insulating layers.
摘要翻译：一种薄膜磁头，包括导体线圈，多个绝缘层，用于将导体线圈插入并绝缘，以及在上下磁芯之间的磁隙层，其中另一绝缘层设置在由多个绝缘层。

8. 发明授权

US4971896A Method for forming thin film pattern and method for fabricating thin film magnetic head using the same 失效
标题翻译：用于形成薄膜图案的方法和使用其制造薄膜磁头的方法
公开(公告)号：US4971896A
公开(公告)日：1990-11-20
申请号：US280828
申请日：1988-12-07
申请人： Takashi Kawabe , Ataru Kobayashi , Moriaki Fuyama , Makoto Morijiri , Eiji Ashida , Masatoshi Tsuchiya , Tetsuya Okai , Masanobu Hanazono , Shinichi Hara , Shinji Narishige , Hiroshi Ikeda
发明人： Takashi Kawabe , Ataru Kobayashi , Moriaki Fuyama , Makoto Morijiri , Eiji Ashida , Masatoshi Tsuchiya , Tetsuya Okai , Masanobu Hanazono , Shinichi Hara , Shinji Narishige , Hiroshi Ikeda
IPC分类号： G03F7/00 , G11B5/31
CPC分类号： G11B5/3163 , G03F7/0035 , Y10S430/165
摘要： A method of forming a thin film pattern on a base having a step portion. This method comprises a first step of forming a thin film of given material on the base, a second step of forming a predetermined pattern of a first photoresist film on said thin film at one of a first portion including a lower part of the step portion and a second portion including an upper part of the step portion, a third step of forming a predetermined pattern of a second photoresist film on said thin film at the other of the first and second portions and a fourth step of applying ion-milling to said thin film of given material using masks said first and second photoresist film patterns formed on said thin film at the first and second portions.
摘要翻译：在具有台阶部的基底上形成薄膜图案的方法。该方法包括在基底上形成给定材料的薄膜的第一步骤，第二步骤，在包括台阶部分的下部的第一部分中的一个上形成在所述薄膜上的第一光致抗蚀剂膜的预定图案，以及第二部分，包括台阶部分的上部;第三步骤，在所述第一和第二部分中的另一个上在所述薄膜上形成第二光致抗蚀剂膜的预定图案;以及第四步骤，将所述薄片给定材料的膜使用掩模，所述第一和第二部分形成在所述薄膜上形成的第一和第二光致抗蚀剂图案。

9. 发明授权

US06898057B2 Thin film magnetic head having multiple layered films determining track width imbedded in an insulating film and method of manufacturing the same 失效
标题翻译：具有确定嵌入绝缘膜中的轨道宽度的多层膜的薄膜磁头及其制造方法
公开(公告)号：US06898057B2
公开(公告)日：2005-05-24
申请号：US10372803
申请日：2003-02-26
申请人： Tetsuya Okai , Makoto Morijiri , Yoji Maruyama , Kimitoshi Etoh
发明人： Tetsuya Okai , Makoto Morijiri , Yoji Maruyama , Kimitoshi Etoh
IPC分类号： G11B5/31 , G11B5/127 , G11B5/39 , G11B5/147
CPC分类号： G11B5/3906 , G11B5/1278 , Y10T29/49046
摘要： The present invention is to provide a thin film magnetic head intended to increase precision of and to narrow a width which determines a track width of a write thin film magnetic head and to supply a stably high output substantially free from write blurring on a disk, and a method for manufacturing the same. The thin film magnetic head consisting of a magnetic circuit comprising a read head to read information, a lower magnetic film, a magnetic gap and an upper magnetic film formed with a magnetic gap between it and the lower magnetic film; and of a write head comprising a coil positioned between the upper magnetic film and the lower magnetic film and an insulating film for insulting the coil and the upper magnetic film from each other, wherein the upper magnetic film is configured of an upper first magnetic film, an upper second magnetic film and an upper third magnetic film, and the upper first magnetic film is connected to the upper third magnetic film via the upper second magnetic film.
摘要翻译：本发明提供一种薄膜磁头，其旨在提高确定写入薄膜磁头的磁道宽度的精度并缩小宽度，并提供基本上没有写入模糊的稳定的高输出，并且其制造方法。由包括用于读取信息的读取头的磁路，下部磁性膜，磁隙和在其与下部磁性膜之间形成有磁隙的上部磁性膜组成的薄膜磁头; 以及包括位于上磁性膜和下磁性膜之间的线圈的写入头和用于使线圈和上磁性膜彼此污染的绝缘膜，其中上磁性膜由上部第一磁性膜构成，上部第二磁性膜和上部第三磁性膜，并且上部第一磁性膜经由上部第二磁性膜连接到上部第三磁性膜。

10. 发明授权

US07460335B2 Magnetic head having first and second protective films with different coefficients of linear expansion 失效
标题翻译：磁头具有不同线性膨胀系数的第一和第二保护膜
公开(公告)号：US07460335B2
公开(公告)日：2008-12-02
申请号：US11415572
申请日：2006-05-01
申请人： Yohji Maruyama , Tadayuki Iwakura , Takashi Kawabe , Makoto Morijiri , Hiroshi Fukui
发明人： Yohji Maruyama , Tadayuki Iwakura , Takashi Kawabe , Makoto Morijiri , Hiroshi Fukui
IPC分类号： G11B5/60
CPC分类号： G11B5/3136 , G11B5/3106 , G11B5/6005
摘要： A magnetic head comprises a retrieving unit for converting magnetic information output from a recording medium into an electric signal, a writing unit having the function of electromagnetic conversion for writing the magnetic information in the recording medium in response to the electric signal, and a first protective film formed on the retrieving unit. A second protective film is formed on the first protective film. The coefficient of linear expansion of the second protective film is reduced in comparison with that of the first protective film. Furthermore, the first protective film is an alumina film; in contrast, the second protective film is a film made of an alumina film containing silicon oxide therein.
摘要翻译：磁头包括用于将从记录介质输出的磁信息转换为电信号的检索单元，具有电磁转换功能的写入单元，用于响应于电信号将磁信息写入记录介质中;以及第一保护在检索单元上形成的胶片。在第一保护膜上形成第二保护膜。与第一保护膜相比，第二保护膜的线膨胀系数降低。此外，第一保护膜是氧化铝膜; 相反，第二保护膜是由其中含有氧化硅的氧化铝膜制成的膜。

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