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1. 发明授权

US07333301B2 Magnetic recording head and method for manufacturing 失效
标题翻译：磁记录头及制造方法
公开(公告)号：US07333301B2
公开(公告)日：2008-02-19
申请号：US10650832
申请日：2003-08-29
申请人： Kimitoshi Etoh , Nobuo Yoshida , Moriaki Fuyama , Makoto Morijiri , Kenichi Meguro , Ichiro Oodake , Kazue Kudo , Yohji Maruyama , Katsuro Watanabe
发明人： Kimitoshi Etoh , Nobuo Yoshida , Moriaki Fuyama , Makoto Morijiri , Kenichi Meguro , Ichiro Oodake , Kazue Kudo , Yohji Maruyama , Katsuro Watanabe
IPC分类号： G11B5/127
CPC分类号： B82Y25/00 , B82Y10/00 , G11B5/3136 , G11B5/3909 , G11B5/3912 , Y10T29/49044
摘要： A thin-film magnetic head having little temperature rise in the element, good heat dissipation and a short magnetic path length (narrow coil pitch) and manufacturing method for same is provided. To form the coil of the thin-film magnetic head, a lower coil is first formed and after forming alumina and an inorganic compound containing alumina, a trench is formed for the upper coil by reactive ion etching. The lower coil allows uniform etching at this time and functions as a film to prevent loading effects occurring during reactive ion etching. This trench is then plated in copper and chemical mechanical planarization performed to form the upper layer coil as the dual-layer coil of the present invention. Heat from the coil is efficiently radiated towards the substrate by alumina and an inorganic compound containing alumina with good heat propagation. The ratio of alumina or inorganic compound containing alumina in the lower coil can be selected by reactive ion etching so that an upper coil trench functioning as an etching stopper can be securely formed to allow forming a stable coil film thickness and a short magnetic path length.
摘要翻译：提供元件温度上升较小，散热好，磁路长度短（窄线圈间距）及其制造方法的薄膜磁头。为了形成薄膜磁头的线圈，首先形成下线圈，在形成氧化铝和含有氧化铝的无机化合物之后，通过反应离子蚀刻形成用于上部线圈的沟槽。此时，下线圈允许均匀刻蚀，起到膜的作用，以防止在反应离子蚀刻期间发生的负载效应。然后将该沟槽镀铜并进行化学机械平面化以形成上层线圈作为本发明的双层线圈。来自线圈的热量通过氧化铝和含有良好热传播的氧化铝的无机化合物有效地朝向基板辐射。可以通过反应离子蚀刻来选择下层线圈中的氧化铝或含有氧化铝的无机化合物的比例，从而可以可靠地形成用作蚀刻停止层的上部线圈沟槽，以形成稳定的线圈膜厚度和短的磁路长度。

2. 发明授权

US07310203B2 Thin film magnetic head having magnetic pole edge layer for achieving both improvement of recording magnetic field and reduction of unnecessary leakage magnetic field, and method of manufacturing same 失效
标题翻译：具有用于实现记录磁场的改善和不必要的泄漏磁场的减少的磁极边缘层的薄膜磁头及其制造方法
公开(公告)号：US07310203B2
公开(公告)日：2007-12-18
申请号：US10237860
申请日：2002-09-10
申请人： Nobuo Yoshida , Ichiro Oodake , Moriaki Fuyama , Kazue Kudo , Kimitoshi Etoh , Shigekazu Ohtomo , Hiroshi Fukui
发明人： Nobuo Yoshida , Ichiro Oodake , Moriaki Fuyama , Kazue Kudo , Kimitoshi Etoh , Shigekazu Ohtomo , Hiroshi Fukui
IPC分类号： G11B5/47
CPC分类号： G11B5/3967 , G11B5/3116 , G11B5/313 , G11B5/3163 , Y10T29/49046
摘要： There is provided a thin film magnetic head, with letting a distance of a portion, where a width of a track portion in an upper magnetic pole changes, from a flying plane from a medium be Ly, and letting a distance of a portion, where a distance between right and left of a surface portion in a lower magnetic pole in a track width direction is wider than the width of the upper magnetic pole in the track width direction, from the flying plane from a medium be Tp, by creating a thin film magnetic head that is equipped with a recording head that has a relation of Tp≦Ly, it becomes possible to reduce a needless leakage magnetic field in the track width direction with securing magnetic field strength.
摘要翻译：提供了一种薄膜磁头，其中使上部磁极中的轨道部分的宽度从介质的飞行平面改变的部分的距离为Ly，并且使一部分的距离在其中在轨道宽度方向上的下磁极中的表面部分的左右之间的距离比通过轨道宽度方向上的上磁极的宽度，从介质的飞行平面变为Tp，通过产生薄的配备有具有Tp <= Ly关系的记录头的胶片磁头，可以确保磁场强度而减小轨道宽度方向上不必要的泄漏磁场。

3. 发明授权

US08300358B2 Magnetic head having write pole, first soft magnetic films separately disposed on both sides of the main pole, and a second soft magnetic film disposed on a trailing side of the main pole 有权
标题翻译：具有写极的磁头，分别设置在主极两侧的第一软磁膜和设置在主极的后侧的第二软磁膜
公开(公告)号：US08300358B2
公开(公告)日：2012-10-30
申请号：US12070155
申请日：2008-02-15
申请人： Yohji Maruyama , Tadayuki Iwakura , Kimitoshi Etoh , Hiromi Shiina , Kazue Kudo
发明人： Yohji Maruyama , Tadayuki Iwakura , Kimitoshi Etoh , Hiromi Shiina , Kazue Kudo
IPC分类号： G11B5/127
CPC分类号： G11B5/1278 , G11B5/112 , G11B5/3116 , G11B5/3146 , G11B5/315 , G11B5/3163
摘要： Embodiments of the present invention help to suppress broadening of a write field of a main pole of a perpendicular recording head and realize high-quality write operation. According to one embodiment, a main pole of a write head extends to an air bearing surface or a medium-facing surface and has an inverted trapezoid in cross-section. First soft magnetic films called side shields are separately disposed through a nonmagnetic film on both sides of the main pole. The air bearing surface side end of the first soft magnetic film is provided to recede from the air bearing surface. The first soft magnetic film and the main pole are formed in the same layer. A second soft magnetic film called a trailing shield is provided above the main pole on the air bearing surface side via a nonmagnetic film.
摘要翻译：本发明的实施例有助于抑制垂直记录头的主极的写入场的扩展，并且实现高质量的写入操作。根据一个实施例，写入头的主极延伸到空气轴承表面或中等的表面，并且具有横截面的倒梯形。称为侧屏的第一软磁膜通过主极两侧的非磁性膜分开设置。第一软磁性膜的空气轴承面侧端设置为从空气轴承面退回。第一软磁膜和主极形成在同一层中。被称为后挡板的第二软磁膜通过非磁性膜设置在空气支承面侧的主极上方。

4. 发明授权

US07054106B2 Magnetic head and magnetic storage apparatus 失效
标题翻译：磁头和磁存储设备
公开(公告)号：US07054106B2
公开(公告)日：2006-05-30
申请号：US10354989
申请日：2003-01-31
申请人： Kazue Kudo , Yoshiaki Kawato , Kazuhiro Nakamoto , Nobuo Yoshida , Kimitoshi Etoh
发明人： Kazue Kudo , Yoshiaki Kawato , Kazuhiro Nakamoto , Nobuo Yoshida , Kimitoshi Etoh
IPC分类号： G11B5/147
CPC分类号： B82Y25/00 , B82Y10/00 , G11B5/024 , G11B5/313 , G11B5/3156 , G11B5/3163 , G11B5/3967 , G11B5/465 , G11B2005/0008 , G11B2005/0013 , G11B2005/3996
摘要： Disclosed herein is a magnetic head for perpendicular recording in which the main magnetic pole has reduced remanent magnetization and is less liable to cause erasure after recording. These characteristic properties were realized by constructing the magnetic head such that the recording magnetic pole and the yoke are separate from each other and the main magnetic pole is formed from a material with a high saturation magnetic flux density and the yoke is formed from a material having a negative magnetostriction constant.
摘要翻译：这里公开了一种用于垂直记录的磁头，其中主磁极具有降低的剩磁，并且在记录之后不易引起擦除。这些特性是通过构造磁头来实现的，使得记录磁极和磁轭彼此分离，并且主磁极由具有高饱和磁通密度的材料形成，并且磁轭由具有负磁致伸缩常数。

5. 发明授权

US07681303B2 Method for manufacturing a magnetic head slider 失效
标题翻译：磁头滑块的制造方法
公开(公告)号：US07681303B2
公开(公告)日：2010-03-23
申请号：US11897674
申请日：2007-08-30
申请人： Akira Kondo , Koji Tanaka , Kimitoshi Etoh , Ichiro Oodake
发明人： Akira Kondo , Koji Tanaka , Kimitoshi Etoh , Ichiro Oodake
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/1278 , G11B5/315 , G11B5/3163 , G11B5/3169 , G11B5/3173 , G11B5/3196 , G11B5/6011 , Y10T29/49021 , Y10T29/49036 , Y10T29/49041 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052 , Y10T29/49798
摘要： Embodiments of the present invention provide a method of manufacturing a magnetic head slider, the method being adapted so that throat height of a main magnetic pole piece of a perpendicular recording magnetic head can be controlled with high accuracy. According to one embodiment, a first Electrical Lapping Guide element (ELG) is disposed on the same layer as a plated underlayer of a shield of one write head in a row bar, and other ELGs are disposed on the same layer as that of a main magnetic pole piece of another write head. Front end positions (Tops) are detected from changes in resistance values of the other ELGs and an ending position of lapping is calculated. Since the front end positions (Tops) of the other ELGs are accurate, it is possible to assign a correlation to throat height “Th” of the main magnetic pole piece and the resistance value of the first ELG by detecting this resistance value existing when the front end positions (Tops) are detected.
摘要翻译：本发明的实施例提供一种制造磁头滑块的方法，该方法适于使得可以高精度地控制垂直记录磁头的主磁极片的喉部高度。根据一个实施例，第一电研磨导向元件（ELG）设置在与行杆中的一个写头的屏蔽的电镀底层相同的层上，并且其它ELG设置在与主体相同的层上磁极片另一个写头。根据其他ELG的电阻值的变化来检测前端位置（Tops），并计算研磨的结束位置。由于其他ELG的前端位置（Tops）是准确的，所以可以通过检测存在的电阻值来分配与主磁极片的喉部高度“Th”和第一ELG的电阻值的相关性检测到前端位置（上）。

6. 发明申请

US20080072418A1 Method for manufacturing a magnetic head slider 失效
标题翻译：磁头滑块的制造方法
公开(公告)号：US20080072418A1
公开(公告)日：2008-03-27
申请号：US11897674
申请日：2007-08-30
申请人： Akira Kondo , Koji Tanaka , Kimitoshi Etoh , Ichiro Oodake
发明人： Akira Kondo , Koji Tanaka , Kimitoshi Etoh , Ichiro Oodake
IPC分类号： G11B5/127 , B23P17/00 , H04R31/00
CPC分类号： G11B5/1278 , G11B5/315 , G11B5/3163 , G11B5/3169 , G11B5/3173 , G11B5/3196 , G11B5/6011 , Y10T29/49021 , Y10T29/49036 , Y10T29/49041 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052 , Y10T29/49798
摘要： Embodiments of the present invention provide a method of manufacturing a magnetic head slider, the method being adapted so that throat height of a main magnetic pole piece of a perpendicular recording magnetic head can be controlled with high accuracy. According to one embodiment, a first Electrical Lapping Guide element (ELG) is disposed on the same layer as a plated underlayer of a shield of one write head in a row bar, and other ELGs are disposed on the same layer as that of a main magnetic pole piece of another write head. Front end positions (Tops) are detected from changes in resistance values of the other ELGs and an ending position of lapping is calculated. Since the front end positions (Tops) of the other ELGs are accurate, it is possible to assign a correlation to throat height “Th” of the main magnetic pole piece and the resistance value of the first ELG by detecting this resistance value existing when the front end positions (Tops) are detected.
摘要翻译：本发明的实施例提供一种制造磁头滑块的方法，该方法适于使得可以高精度地控制垂直记录磁头的主磁极片的喉部高度。根据一个实施例，第一电研磨导向元件（ELG）设置在与行杆中的一个写头的屏蔽的电镀底层相同的层上，并且其它ELG设置在与主体相同的层上磁极片另一个写头。根据其他ELG的电阻值的变化来检测前端位置（Tops），并计算研磨的结束位置。由于其他ELG的前端位置（Tops）是准确的，所以可以通过检测存在的电阻值来分配与主磁极片的喉部高度“Th”和第一ELG的电阻值的相关性检测到前端位置（上）。

7. 发明申请

US20080198507A1 Magnetic head and method of manufacturing the same 有权
标题翻译：磁头及其制造方法
公开(公告)号：US20080198507A1
公开(公告)日：2008-08-21
申请号：US12070155
申请日：2008-02-15
申请人： Yoji Maruyama , Tadayuki Iwakura , Kimitoshi Etoh , Hiromi Shiina , Kazue Kudo
发明人： Yoji Maruyama , Tadayuki Iwakura , Kimitoshi Etoh , Hiromi Shiina , Kazue Kudo
IPC分类号： G11B5/17
CPC分类号： G11B5/1278 , G11B5/112 , G11B5/3116 , G11B5/3146 , G11B5/315 , G11B5/3163
摘要： Embodiments of the present invention help to suppress broadening of a write field of a main pole of a perpendicular recording head and realize high-quality write operation. According to one embodiment, a main pole of a write head extends to an air bearing surface or a medium-facing surface and has an inverted trapezoid in cross-section. First soft magnetic films called side shields are separately disposed through a nonmagnetic film on both sides of the main pole. The air bearing surface side end of the first soft magnetic film is provided to recede from the air bearing surface. The first soft magnetic film and the main pole are formed in the same layer. A second soft magnetic film called a trailing shield is provided above the main pole on the air bearing surface side via a nonmagnetic film.
摘要翻译：本发明的实施例有助于抑制垂直记录头的主极的写入场的扩展，并且实现高质量的写入操作。根据一个实施例，写入头的主极延伸到空气轴承表面或中等的表面，并且具有横截面的倒梯形。称为侧屏的第一软磁膜通过主极两侧的非磁性膜分开设置。第一软磁性膜的空气轴承面侧端设置为从空气轴承面退回。第一软磁膜和主极形成在同一层中。被称为后挡板的第二软磁膜通过非磁性膜设置在空气支承面侧的主极上方。

8. 发明授权

US06898057B2 Thin film magnetic head having multiple layered films determining track width imbedded in an insulating film and method of manufacturing the same 失效
标题翻译：具有确定嵌入绝缘膜中的轨道宽度的多层膜的薄膜磁头及其制造方法
公开(公告)号：US06898057B2
公开(公告)日：2005-05-24
申请号：US10372803
申请日：2003-02-26
申请人： Tetsuya Okai , Makoto Morijiri , Yoji Maruyama , Kimitoshi Etoh
发明人： Tetsuya Okai , Makoto Morijiri , Yoji Maruyama , Kimitoshi Etoh
IPC分类号： G11B5/31 , G11B5/127 , G11B5/39 , G11B5/147
CPC分类号： G11B5/3906 , G11B5/1278 , Y10T29/49046
摘要： The present invention is to provide a thin film magnetic head intended to increase precision of and to narrow a width which determines a track width of a write thin film magnetic head and to supply a stably high output substantially free from write blurring on a disk, and a method for manufacturing the same. The thin film magnetic head consisting of a magnetic circuit comprising a read head to read information, a lower magnetic film, a magnetic gap and an upper magnetic film formed with a magnetic gap between it and the lower magnetic film; and of a write head comprising a coil positioned between the upper magnetic film and the lower magnetic film and an insulating film for insulting the coil and the upper magnetic film from each other, wherein the upper magnetic film is configured of an upper first magnetic film, an upper second magnetic film and an upper third magnetic film, and the upper first magnetic film is connected to the upper third magnetic film via the upper second magnetic film.
摘要翻译：本发明提供一种薄膜磁头，其旨在提高确定写入薄膜磁头的磁道宽度的精度并缩小宽度，并提供基本上没有写入模糊的稳定的高输出，并且其制造方法。由包括用于读取信息的读取头的磁路，下部磁性膜，磁隙和在其与下部磁性膜之间形成有磁隙的上部磁性膜组成的薄膜磁头; 以及包括位于上磁性膜和下磁性膜之间的线圈的写入头和用于使线圈和上磁性膜彼此污染的绝缘膜，其中上磁性膜由上部第一磁性膜构成，上部第二磁性膜和上部第三磁性膜，并且上部第一磁性膜经由上部第二磁性膜连接到上部第三磁性膜。

9. 发明申请

US20110222188A1 PERPENDICULAR RECORDING MAGNETIC HEAD, MANUFACTURING METHOD THEREOF AND MAGNETIC DISK DRIVE 审中-公开
标题翻译：全磁记录磁头及其制造方法及磁盘驱动
公开(公告)号：US20110222188A1
公开(公告)日：2011-09-15
申请号：US13020679
申请日：2011-02-03
申请人： Kimitoshi Etoh , Masayoshi Ishibashi , Katsuro Watanabe , Junichi Hashimoto
发明人： Kimitoshi Etoh , Masayoshi Ishibashi , Katsuro Watanabe , Junichi Hashimoto
IPC分类号： G11B5/11 , H04R31/00
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , Y10T29/49052
摘要： The reduction in a recording magnetic field due to the narrowing of recording track width along with the improved surface recording density is prevented and the increasing of accuracy in the track width is achieved, enabling an improvement in recording performance. In a perpendicular magnetic recording head, a main pole 13 includes a first main pole portion 131 having an inverse trapezoidal shape with a bevel angle and a second main pole portion 132 laminated on the first main pole portion. The second main pole portion 132 has no bevel angle, is generally rectangular and defines track width. The second main pole portion has a tapered shape extending from the predetermined position of a flare portion toward an air bearing surface.
摘要翻译：防止由于记录磁道宽度变窄而导致的记录磁场的减少以及改进的表面记录密度，并且实现了磁道宽度的精度的提高，从而能够提高记录性能。在垂直磁记录头中，主极13包括具有斜梯角的倒梯形形状的第一主极部131和层叠在第一主极部上的第二主极部132。第二主极部分132没有斜角，通常是矩形并且限定轨道宽度。第二主极部具有从喇叭口部分的预定位置向空气支承表面延伸的锥形形状。

10. 发明授权

US07535675B2 Magnetic recording head with shaped pole 失效
标题翻译：带磁极的磁记录头和制造工艺
公开(公告)号：US07535675B2
公开(公告)日：2009-05-19
申请号：US11046356
申请日：2005-01-27
申请人： Hisashi Kimura , Nobuo Yoshida , Isao Nunokawa , Kimitoshi Etoh
发明人： Hisashi Kimura , Nobuo Yoshida , Isao Nunokawa , Kimitoshi Etoh
IPC分类号： G11B5/147 , G11B5/127
CPC分类号： G11B5/1278 , G11B5/3163 , Y10T29/49021
摘要： Embodiments of the invention provide a thin film magnetic recording head that can reduce the round portion of the track restriction part of the main pole and has excellent track width accuracy, as well as its fabrication method. In one embodiment, the main pole is etched in the following three processes. (1) An ion beam is injected into the substrate at an angle of about 50°±20° while vibrating the substrate horizontally within a range of about ±(30° to 150°) in a reference direction in which the ion beam is oriented from the medium to the air bearing surface. (2) The ion beam is injected into the substrate at an angle of about 60°±20° while vibrating the substrate around a predetermined angle of about 90° to 135° from a direction in which the ion beam is oriented from the medium to the air bearing surface. (3) The ion beam is injected into the substrate at an angle of about 60°±20° while vibrating the substrate horizontally at a predetermined angle within about ±45° around a predetermined angle within about −90° to −135° from a direction in which the ion beam is oriented from the medium to the air bearing surface.
摘要翻译：本发明的实施例提供一种薄膜磁记录头，其可以减小主极的轨道限制部分的圆形部分，并且具有优异的轨道宽度精度及其制造方法。在一个实施例中，主极在以下三个过程中被蚀刻。（1）离子束以约50°±20°的角度注入基板，同时在离子束取向的基准方向上在约±（30°〜150°）的范围内水平振动基板从介质到空气轴承表面。（2）离子束以大约60°±20°的角度注入到基片中，同时使离子束从介质取向的方向围绕约90°至135°的预定角度振动，空气轴承表面。（3）将离子束以大约60°±20°的角度注入到基片中，同时以大约±45°的预定角度水平地振动衬底，大约在-90°至-135°的预定角度离子束从介质定向到空气轴承表面的方向。

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