会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 2. 发明专利
    • F2 laser with visible red and ir control
    • F2激光与可见的红色和红外控制
    • JP2007281517A
    • 2007-10-25
    • JP2007181874
    • 2007-07-11
    • Cymer Incサイマー, インコーポレイテッドCymer, Inc.
    • ECKHARDT D ONKERUSUSANDSTROM RICHARD LTHOMAS P DAFFY
    • H01S3/097H01S3/225H01L21/027H01S3/036
    • PROBLEM TO BE SOLVED: To provide an F2 excimer laser capable of producing laser pulses with pulse energies greater than 10 mJ at wavelength in the range of 157 nm, at repetition rates in the range of 1,000 to 2,000 Hz. SOLUTION: Using a laser, which is operated in the range of 1000 to 4000 Hz with energies, or pulse energies in the range of 10 to 5 mJ, as an illumination source, a stepper or a scanner equipment can produce integrated circuit resolution of 0.1 μm or less. In a preferred embodiment, the laser was tuned to the Fluorine 157.6 nm line using a set of two external prisms. In a second preferred embodiment, the laser is operated broad band and the 157.6 nm line is selected external to the resonance cavity. In a preferred embodiment, a line width of 0.2 pm is provided using injection seeding. COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:提供能够产生在157nm范围内的波长下具有大于10mJ的脉冲能量的激光脉冲的F2准分子激光器,其重复率在1,000至2,000Hz的范围内。 解决方案:使用在能量范围为1000至4000Hz范围内的激光器或10至5mJ范围内的脉冲能量作为照明源,步进器或扫描仪设备可以产生集成电路 分辨率为0.1μm以下。 在优选实施例中,使用一组两个外部棱镜将激光器调谐到氟157.6nm线。 在第二优选实施例中,激光器被操作为宽带,并且157.6nm线选择在谐振腔外部。 在优选实施例中,使用注射接种提供0.2μm的线宽。 版权所有(C)2008,JPO&INPIT