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JP2007281517A F2 laser with visible red and ir control 审中-公开
标题翻译： F2激光与可见的红色和红外控制
公开(公告)号：JP2007281517A
公开(公告)日：2007-10-25
申请号：JP2007181874
申请日：2007-07-11
申请人： Cymer Inc , サイマー, インコーポレイテッドCymer, Inc.
发明人： ECKHARDT D ONKERUSU , SANDSTROM RICHARD L , THOMAS P DAFFY
IPC分类号： H01S3/097 , H01S3/225 , H01L21/027 , H01S3/036
摘要： PROBLEM TO BE SOLVED: To provide an F2 excimer laser capable of producing laser pulses with pulse energies greater than 10 mJ at wavelength in the range of 157 nm, at repetition rates in the range of 1,000 to 2,000 Hz. SOLUTION: Using a laser, which is operated in the range of 1000 to 4000 Hz with energies, or pulse energies in the range of 10 to 5 mJ, as an illumination source, a stepper or a scanner equipment can produce integrated circuit resolution of 0.1 μm or less. In a preferred embodiment, the laser was tuned to the Fluorine 157.6 nm line using a set of two external prisms. In a second preferred embodiment, the laser is operated broad band and the 157.6 nm line is selected external to the resonance cavity. In a preferred embodiment, a line width of 0.2 pm is provided using injection seeding. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供能够产生在157nm范围内的波长下具有大于10mJ的脉冲能量的激光脉冲的F2准分子激光器，其重复率在1,000至2,000Hz的范围内。解决方案：使用在能量范围为1000至4000Hz范围内的激光器或10至5mJ范围内的脉冲能量作为照明源，步进器或扫描仪设备可以产生集成电路分辨率为0.1μm以下。在优选实施例中，使用一组两个外部棱镜将激光器调谐到氟157.6nm线。在第二优选实施例中，激光器被操作为宽带，并且157.6nm线选择在谐振腔外部。在优选实施例中，使用注射接种提供0.2μm的线宽。版权所有（C）2008，JPO＆INPIT

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