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1. 发明专利

JP2008022026A Reliable, modular, production-quality narrow-band high repetition-rate f2 laser 审中-公开
标题翻译：可靠，模块化，生产质量窄带高反射率F2激光
公开(公告)号：JP2008022026A
公开(公告)日：2008-01-31
申请号：JP2007236405
申请日：2007-09-12
申请人： Cymer Inc , サイマー, インコーポレイテッドCymer, Inc.
发明人： HOFMANN THOMAS , HUEBER JEAN-MARC , DAS PALASH P , ISHIHARA TOSHIHIKO , THOMAS P DAFFY , JOHN T MELCHIOR , BESAUCELE HERVE A , MORTON RICHARD G , NESS RICHARD M , NEWMAN PETER C , PARTLO WILLIAM N , ROTHWEIL DANIEL A , SANDSTROM RICHARD L
IPC分类号： H01S3/03 , H01S3/097 , G03F7/20 , H01S3/137 , H01S3/225
CPC分类号： G03F7/70575
摘要： PROBLEM TO BE SOLVED: To provide a reliable, modular, production-quality narrow-band high repetition-rate F 2 laser. SOLUTION: A reliable, modular, production-quality excimer laser capable of producing 10 mJ laser pulses in the range of 1,000 Hz to 2,000 Hz or greater is provided. Replaceable modules include a laser chamber, a pulse power system including three modules, an optical resonator comprised of a line narrowing module and an output coupler module, a wavemeter module, an electrical control module, a cooling water module, and a gas control module. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供可靠的模块化生产质量窄带高重复率F 2 激光器。
解决方案：提供了一种可靠，模块化，生产质量准分子激光器，能够产生1,000 Hz至2,000 Hz或更大范围内的10 mJ激光脉冲。可替代模块包括激光室，包括三个模块的脉冲电力系统，包括线路窄化模块和输出耦合器模块的光学谐振器，波形计模块，电气控制模块，冷却水模块和气体控制模块。版权所有（C）2008，JPO＆INPIT

2. 发明专利

JP2002057386A DISCHARGE LASER HAVING SPUTTERING CAVITY AND ELECTRODE INCLUDING DISCHARGE PEAK 失效
公开(公告)号：JP2002057386A
公开(公告)日：2002-02-22
申请号：JP2001175359
申请日：2001-06-11
申请人： CYMER INC
发明人： MORTON RICHARD G , BOR ZSOLT , ONKELS ECKEHARD D
IPC分类号： B01J19/12 , G03F7/20 , H01S3/036 , H01S3/038
摘要： PROBLEM TO BE SOLVED: To provide a laser having a chamber including long lifetime electrodes in an electric discharge laser. SOLUTION: A gas discharge laser comprises the laser chamber including two slender electrode members each having a discharge zone which has an optimum array of discharge peaks and sputtering cavities. Each cavity supplies sputtering metal ion contributing to a plasma between the electrodes, and supports a glow discharge. The peak brings about a high electric field for creating many filament discharges. Though the electrodes are gradually eroded, a discharge region is confined in the array of the peaks and the cavities. Accordingly, the shape of the discharge is substantially constant for pulses of billions. A pulse power system supplies electric pulses of at least 2 joules in a number of repetition of at least 1 kilohertz.

3. 发明专利

JP2000058944A HIGHLY RELIABLE MODULAR MANUFACTURE HIGH-QUALITY NARROW BAND HIGH REPEAT RATE F2 LASER 失效
公开(公告)号：JP2000058944A
公开(公告)日：2000-02-25
申请号：JP17729599
申请日：1999-05-20
申请人： CYMER INC
发明人： HOFMANN THOMAS , HUEBER JEAN-MARC , DAS PALASH P , ISHIHARA TOSHIHIKO , THOMAS P DAFFY , JOHN T MELCHIOR , BESAUCELE HERVE A , MORTON RICHARD G , NESS RICHARD M , NEWMAN PETER C , PARTLO WILLIAM N , ROTHWEIL DANIEL A , SANDSTROM RICHARD L
IPC分类号： H01S3/03 , G03F7/20 , H01S3/137 , H01S3/225
摘要： PROBLEM TO BE SOLVED: To provide a highly reliable modular high-quality narrow band F2 laser with high repeat rate. SOLUTION: A module includes a laser chamber 211, a pulse power system including three modules, an optical resonator consisting of a line band narrowing module and an output coupler module, a wave meter module, an electric control module, a cooling water module, and a gas control module. important reform is performed for the pulse power unit for making out shorter start up time and reformed pulse energy control. These reforms are performed inclusive of an increased capacity high-voltage power source 208 which is equipped with a voltage bleed down circuit related to accurate trimming; and a reformed commutator module 209 which generates high voltage pulses from a capacitor charged by a high-voltage power source, and amplifies the pulse voltage to about twenty three times with a very quick voltage transformer having secondary winding consisting of the stainless steel rod of single four segments.

4. 发明专利

JP2000091684A EXCIMER LASER PROVIDED WITH PULSE AND BEAM MULTIPLIER 失效
公开(公告)号：JP2000091684A
公开(公告)日：2000-03-31
申请号：JP29144699
申请日：1999-09-06
申请人： CYMER INC
发明人： MORTON RICHARD G
IPC分类号： H01S3/225 , H01S3/00 , H01S3/10
摘要： PROBLEM TO BE SOLVED: To generate high energy with the pulse of low intensity by dividing a laser beam into a plurality of beams and increasing the pulse frequencies of the respective beams. SOLUTION: A laser beam is divided into a plurality of beams and pulse frequencies are increased in the respective beams. It is desirable that a CaF2 flat is used along a maximum reflecting mirror for dividing the laser beam into four beams and the respective beams are increased to four times as much as the pulse frequency. A low loss optical pulse multiplier 52 makes the valid number of the pulse repetition times of an ArF laser source 50 to four times without considerably reducing total energy output. In such a case, all pulses emitting a multiplexer are transmitted along the same beam line with almost complete overlap. The ArF laser 50 emits plane polarized light with the number of pulse repetition times of 193 nm and 100 Hz.

5. 发明专利

JPH10223955A DESIGN OF AERODYNAMIC CHAMBER FOR HIGH PULSE REPETITION RATE EXCIMER LASER 失效
公开(公告)号：JPH10223955A
公开(公告)日：1998-08-21
申请号：JP2958498
申请日：1998-02-12
申请人： CYMER INC
发明人： MORTON RICHARD G , FOMENKOV IGOR V , PARTLO WILLIAM N
IPC分类号： H01S3/097 , H01S3/036 , H01S3/225
摘要： PROBLEM TO BE SOLVED: To increase the number of oscillations of an excimer laser by providing insulating members on both sides of a cathode and a pre-ionizer assembly by increasing the flow rate of a gas by reducing the disturbance of the gas flow in a discharging area. SOLUTION: A housing is constituted of a pair of half parts 102, etc., and a gas is enclosed in the housing. In the housing, in addition, a cathode 108 and an anode are arranged on both sides of a discharge area 112. On both sides of the cathode 108, pre-ionizers 130 and the insulators 307 of insulating members are arranged. When a voltage pulse is impressed upon the cathode 108, discharge occurs in the discharge area 112 and discharged as light to the outside through a window. While the gas in the housing is circulated by means of a fan 138, the gas is heated through the discharge area 113 and cooled through a water-cooled heat exchanger 154. Since the insulators 307 are arranged on both sides of the discharge area 112, the disturbance of the gas flow is reduced and the gas flow forms a smooth flow. Therefore, flow rate of the gas increases.

6. 发明专利

JP2007311824A Halogen gas discharge laser electrode 审中-公开
标题翻译：卤化物放电激光电极
公开(公告)号：JP2007311824A
公开(公告)日：2007-11-29
申请号：JP2007195677
申请日：2007-07-27
申请人： Cymer Inc , サイマーインコーポレイテッド
发明人： STEIGER THOMAS D , UJAZDOWSKI RICHARD C , DYER TIMOTHY S , DUFFEY THOMAS P , GILLESPIE WALTER D , MOOSMAN BRYAN G , MORTON RICHARD G , STRATE BRIAN D
IPC分类号： H01S3/038 , H01S20060101 , H01S3/097 , H01S3/0971 , H01S3/22 , H01S3/225
CPC分类号： H01S3/225 , H01S3/0381 , H01S3/0385 , H01S3/0388 , H01S3/0971 , H01S3/09713
摘要： PROBLEM TO BE SOLVED: To provide a gas discharge laser light source electrode having a high repetition rate and high power. SOLUTION: A gas discharge laser light source electrode can include a laser chamber and an electrode element forming a cathode and an anode. Each of cathode and anode has a discharge acceptance region. The discharge acceptance region forms two longitudinal edges. The anode includes a first long and slender anode portion, which is entirely located in the discharge acceptance region of the anode and includes first anode material specifying an erosion rate of the first anode material, a pair of second long and slender anode portions, which are located at each side and at least a part of the first anode portion in the discharge acceptance region, respectively, and includes a second anode material specifying the erosion rate of the second anode material, and a long and slender electrode center base portion integrated with the first long and slender anode portion. Each pair of the second long and slender anode portions is mechanically joined to the center base portion. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供具有高重复率和高功率的气体放电激光光源电极。解决方案：气体放电激光光源电极可以包括激光室和形成阴极和阳极的电极元件。阴极和阳极都具有放电接受区域。放电接收区域形成两个纵向边缘。阳极包括第一长且细长的阳极部分，其完全位于阳极的放电接收区域中，并且包括指定第一阳极材料的侵蚀速率的第一阳极材料，一对第二长而细长的阳极部分分别位于放电接受区域中的第一阳极部分的每一侧和至少一部分，并且包括指定第二阳极材料的侵蚀速率的第二阳极材料和与该第二阳极材料整体形成的长而细长的电极中心基部第一长而细长的阳极部分。每对第二长而细长的阳极部分机械地连接到中心基部。版权所有（C）2008，JPO＆INPIT

7. 发明专利

JP2001358386A LASER DISCHARGE CHAMBER PASSIVATION BY PLASMA 失效
公开(公告)号：JP2001358386A
公开(公告)日：2001-12-26
申请号：JP2001111974
申请日：2001-03-06
申请人： CYMER INC
发明人： WATSON TOM A , SANDSTROM RICHARD L , MORTON RICHARD G , WEEKS ROBERT E , QUITTER JOHN P , LEWIS MARK R
IPC分类号： H01L21/027 , B08B7/00 , G03F7/20 , H01S3/03 , H01S3/036 , H01S3/225
摘要： PROBLEM TO BE SOLVED: To provide a method and device for cleaning and passivating a laser discharge chamber by plasma. SOLUTION: Oxygen-based plasma is formed at an external plasma source by guiding and applying a high-frequency signal to a gas containing oxygen. The oxygen-based plasma is drawn into a laser discharge chamber, reacts with a contaminant, and cleans the internal surface. After cleaning, fluorine-based plasma is formed at the plasma source, and is drawn into the laser discharge chamber to passivate the inner surface. In another embodiment, the oxygen-based plasma and fluorine-based plasma are formed in the laser discharge chamber by applying a high-frequency signal to a laser discharge chamber electrode, thus exciting the gas containing oxygen and that containing fluorine.

8. 发明专利

JP2000077762A HIGH-RELIABILITY MODULAR PRODUCTION HIGH-QUALITY NARROW- BAND HIGH-REPETITION RATE ArF EXCIMER LASER 审中-公开
标题翻译：高可靠性模块化生产高品质窄带高回复率ArF EXCIMER激光
公开(公告)号：JP2000077762A
公开(公告)日：2000-03-14
申请号：JP17729499
申请日：1999-05-20
申请人： Cymer Inc , サイマーインコーポレイテッド
发明人： ISHIHARA TOSHIHIKO , THOMAS P DAFFY , JOHN T MELCHIOR , BESAUCELE HERVE A , MORTON RICHARD G , NESS RICHARD M , NEWMAN PETER C , PARTLO WILLIAM N , ROTHWEIL DANIEL A , SANDSTROM RICHARD L
IPC分类号： C23C14/06 , C23C14/16 , C23C14/22 , C23C14/24 , G01J9/00 , G02B1/10 , G02B5/18 , G03F7/20 , H01S3/02 , H01S3/03 , H01S3/036 , H01S3/08 , H01S3/097 , H01S3/0971 , H01S3/1055 , H01S3/134 , H01S3/137 , H01S3/139 , H01S3/223 , H01S3/225 , H03K3/57 , H03K17/80
CPC分类号： G03F7/70025 , C23C14/0694 , C23C14/16 , C23C14/225 , C23C14/24 , G01J9/00 , G02B1/105 , G02B5/1852 , G03F7/70041 , G03F7/70358 , G03F7/70558 , G03F7/70575 , H01S3/03 , H01S3/036 , H01S3/08009 , H01S3/097 , H01S3/0971 , H01S3/09713 , H01S3/1055 , H01S3/134 , H01S3/1392 , H01S3/223 , H01S3/225 , H01S3/2251 , H01S3/2256 , H03K3/57 , H03K17/80
摘要： PROBLEM TO BE SOLVED: To obtain a laser pulse provided with a specified pulse energy for an exchange of a laser chamber, a modular pulse power system and a line band narrowing module at the repair of an excimer laser by a method wherein modules, which can be exchanged for the chamber, the power system and the module, are formed. SOLUTION: A pulse power system is formed into four separate modules of a high-voltage power supply module 20, a rectifier module 40, a compression head module 60 and a laser chamber module 80, each of the modules is used as the important parts of an excimer laser system, and on the occurrence of a breakdown of some parts of the parts of the system, each of the modules can be rapidly with the broken parts. An optical resonance chamber is constituted of an output coupler 88 along with two prism wavelength selectors and an R-max mirror. The laser pulse of the excimer laser system is a narrow-band laser pulse, is a pulse of 20 to 50 ns, a pulse of 157 nm of about 10 mJ and a pulse of a hertz ending 2000 pulse/second, and an excimer laser can produce a laser pulse provided with a pulse energy larger than a pulse energy of 5 mJ provided with a half width of a wavelength stability.
摘要翻译：要解决的问题：为了获得具有指定脉冲能量的激光脉冲，用于交换激光室，模拟脉冲电源系统和线频带变窄模块，通过一种方法修复准分子激光器，其中模块可以形成了房间，电力系统和模块的交换。解决方案：脉冲电力系统形成为高压电源模块20，整流模块40，压缩头模块60和激光室模块80的四个独立模块，每个模块用作重要部件准分子激光系统，并且在发生系统部件的某些部件的故障的情况下，每个模块可以迅速地与破碎的部件一起。光共振室由输出耦合器88以及两个棱镜波长选择器和R-max镜组成。准分子激光系统的激光脉冲是窄带激光脉冲，是20至50ns的脉冲，157nm的脉冲为约10mJ，脉冲为2000Hz脉冲/秒的赫兹，准分子激光可以产生具有大于具有波长稳定性的一半宽度的5mJ的脉冲能量的脉冲能量的激光脉冲。

9. 发明专利

JP2002185061A DISCHARGE LASER HAVING POROUS INSULATING LAYER COVERING ANODE DISCHARGE SURFACE 审中-公开
公开(公告)号：JP2002185061A
公开(公告)日：2002-06-28
申请号：JP2001336704
申请日：2001-11-01
申请人： CYMER INC
发明人： MORTON RICHARD G
IPC分类号： H01S3/03 , G03F7/20 , H01S3/036 , H01S3/038 , H01S3/041 , H01S3/097 , H01S3/0979 , H01S3/22 , H01S3/223 , H01S3/225
摘要： PROBLEM TO BE SOLVED: To provide a discharge laser having a chamber with a long service life electrode. SOLUTION: A gas discharge laser has slender cathode and anode, and a porous insulation layer for covering an anode discharge surface. A pulse electric power device provides an electric pulse with a repetition rate of at least 1 kHz. A blower circulates a laser gas between the electrodes at least at 5 meters/ second, and a heat exchanger is provided to remove heat generated by the blower and discharge. In a preferable embodiment, at least one portion of the anode is made of lead, and the insulation layer (for covering the discharge surface of the anode), where the greater part is made of lead fluoride is formed by fluorine ion sputtering on an anode surface.

10. 发明专利

JP2001015831A GAS DISCHARGE LASER WITH GAS TEMPERATURE CONTROL 失效
公开(公告)号：JP2001015831A
公开(公告)日：2001-01-19
申请号：JP2000180563
申请日：2000-05-12
申请人： CYMER INC
发明人： SHANNON ROBERT A , BERGER DMITRY , PARTLO WILLIAM N , WATSON TOM A , THOMPSON PAUL S , ISHIHARA TOSHIHIKO , TEDESCO CARL E II , LARSON DONALD G , HARRINGTON STEVEN M , MORTON RICHARD G , AZZOLA JAMES H , OLIVER I ROGER , THOMAS P DAFFY , FOMENKOV IGOR V
IPC分类号： H01S3/225 , G03F7/20 , H01S3/036 , H01S3/041 , H01S3/134
摘要： PROBLEM TO BE SOLVED: To maintain laser gas temperature within desired limits during burst mode operation by providing a gas discharge laser with high response gas temperature control. SOLUTION: To maintain temperature near an average gas temperature, a structural body 61 equipped with passive fins is provided, and is located downstream of an electrode. Each fin has an equal surface area of about 135 cm2, for example. A total of, e.g. about 225 fins are arranged such that 8 fins are spaced apart from each other per inch. This unit gives a total surface area to a gas flow path of about 3 m3. It is estimated that this unit reduces cyclic short-term temperature variations by at least about 1/4. Although a temperature stabilizer having a longer or shorter surface area can be utilized, a surface area of at least 1 m2 is recommended. Other satisfactory empirical rules indicate that 1 to 4 times of the product of the area of a stabilizer and the surface area of a heat exchanger can be specified.

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