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1. 发明授权

US07313958B2 Rotational rate sensor 有权
标题翻译：转速传感器
公开(公告)号：US07313958B2
公开(公告)日：2008-01-01
申请号：US10471635
申请日：2002-09-25
申请人： Rainer Willig , Jochen Franz , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Dieter Maurer , Christian Doering , Wolfram Bauer , Udo Bischof , Reinhard Neul , Johannes Classen , Christoph Lang , Jens Frey
发明人： Rainer Willig , Jochen Franz , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Dieter Maurer , Christian Doering , Wolfram Bauer , Udo Bischof , Reinhard Neul , Johannes Classen , Christoph Lang , Jens Frey
IPC分类号： G01C19/00
CPC分类号： G01C19/5747
摘要： A rotational rate sensor having a substrate and a Coriolis element is proposed, the Coriolis element being situated over a surface of a substrate; a driving arrangement being provided, by which the Coriolis element is induced to vibrations parallel to a first axis; a detection arrangement being provided, by which an excursion of the Coriolis elements is detectable on the basis of a Coriolis force in a second axis that is provided to be essentially perpendicular to the first axis; the first and second axis being parallel to the surface of the substrate; sensor elements that are designated to be at least partially movable with respect to the substrate being provided; a force-conveying arrangement being provided; the force-conveying arrangement being provided to convey a static force effect between the substrate and at least one of the sensor elements.
摘要翻译：提出了具有基板和科里奥利元件的旋转速率传感器，科里奥利元件位于基板的表面上方; 提供了一种驱动装置，通过该驱动装置将科里奥利元件引入平行于第一轴线的振动; 提供了一种检测装置，通过该检测装置可以基于设置成基本上垂直于第一轴线的第二轴线中的科里奥利力检测科里奥利元件的偏移; 所述第一和第二轴平行于所述基板的表面; 指定为相对于所述基板至少部分移动的传感器元件; 提供力传递装置; 所述力输送装置被提供以在所述基底和所述传感器元件中的至少一个之间传递静态力效应。

2. 发明授权

US07316161B2 Rotation rate sensor 有权
标题翻译：转速传感器
公开(公告)号：US07316161B2
公开(公告)日：2008-01-08
申请号：US10471832
申请日：2002-09-25
申请人： Rainer Willig , Jochen Franz , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Dieter Maurer , Christian Doering , Wolfram Bauer , Udo Bischof , Reinhard Neul , Johannes Classen , Christoph Lang , Jens Frey
发明人： Rainer Willig , Jochen Franz , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Dieter Maurer , Christian Doering , Wolfram Bauer , Udo Bischof , Reinhard Neul , Johannes Classen , Christoph Lang , Jens Frey
IPC分类号： G01C19/00
CPC分类号： G01C19/5747
摘要： A rotation rate sensor having a substrate and a Coriolis element is proposed, the Coriolis element being situated above a surface of a substrate; the Coriolis element being able to be induced to vibrate in parallel to a first axis (X); an excursion of the Coriolis element being detectable, based on a Coriolis force in a second axis (Y), which is provided to be essentially perpendicular to the first axis (X); the first and second axes (X, Y) being provided parallel to the surface of the substrate, wherein force-conveying means are provided, the means being provided to convey a dynamic force effect between the substrate and the Coriolis element.
摘要翻译：提出了具有基板和科里奥利元件的旋转速率传感器，科里奥利元件位于基板的表面之上; 所述科里奥利元件能够被诱导以平行于第一轴线（X）振动; 基于在第二轴线（Y）上的科里奥利力，基本上垂直于第一轴线（X）提供可检测的科里奥利元件的偏移; 所述第一和第二轴线（X，Y）平行于所述基板的表面设置，其中设置有力传递装置，所述装置被提供以在所述基板和所述科里奥利元件之间传递动态力效应。

3. 发明授权

US06691571B2 Rotational speed sensor 有权
标题翻译：转速传感器
公开(公告)号：US06691571B2
公开(公告)日：2004-02-17
申请号：US10258218
申请日：2003-05-29
申请人： Rainer Willig , Andreas Thomae , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Siegbert Goetz , Christian Doering , Michael Fehrenbach , Wolfram Bauer , Udo Bischof , Reinhard Neul , Karsten Funk , Markus Lutz , Gerhard Wucher , Jochen Franz
发明人： Rainer Willig , Andreas Thomae , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Siegbert Goetz , Christian Doering , Michael Fehrenbach , Wolfram Bauer , Udo Bischof , Reinhard Neul , Karsten Funk , Markus Lutz , Gerhard Wucher , Jochen Franz
IPC分类号： G01C1900
CPC分类号： G01C19/5747
摘要： An rate-of-rotation sensor having a Coriolis element, which is arranged over a surface of a substrate, is described. The Coriolis element is induced to oscillate in parallel to a first axis. In response to a Coriolis force, the Coriolis element is deflected in a second axis, which is perpendicular to the first axis. A proof element is provided to prove the deflection.
摘要翻译：描述了布置在基板的表面上的具有科里奥利元件的旋转速率传感器。诱导科里奥利元件平行于第一轴振荡。响应于科里奥利力，科里奥利元件在垂直于第一轴线的第二轴线上偏转。提供证明元件以证明偏转。

4. 发明授权

US07134337B2 Micromechanical rotational rate sensor 有权
公开(公告)号：US07134337B2
公开(公告)日：2006-11-14
申请号：US11328755
申请日：2006-01-09
申请人： Rainer Willig , Andreas Thomae , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Siegbert Goetz , Christian Doering , Michael Fehrenbach , Wolfram Bauer , Udo Bischof , Reinhard Neul , Karsten Funk , Markus Lutz , Gerhard Wucher , Jochen Franz
发明人： Rainer Willig , Andreas Thomae , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Siegbert Goetz , Christian Doering , Michael Fehrenbach , Wolfram Bauer , Udo Bischof , Reinhard Neul , Karsten Funk , Markus Lutz , Gerhard Wucher , Jochen Franz
IPC分类号： G01P9/04
CPC分类号： G01C19/5747
摘要： An exemplary embodiment of the present invention creates a micromechanical rotational rate sensor having a first Coriolis mass element and a second Coriolis mass element which may be situated over a surface of a substrate. An exemplary embodiment of a micromechanical rotational rate sensor may have an activating device by which the first Coriolis mass element and the second Coriolis mass element are able to have vibrations activated along a first axis. An exemplary embodiment of a micromechanical rotational rate sensor may have a detection device by which deflections of the first Coriolis mass elements and of the second Coriolis element are able to be detected along a second axis, which is perpendicular to the first axis, on the basis of a correspondingly acting Coriolis force. The first axis and second axis may run parallel to the surface of the substrate. The detecting device may have a first detection mass device and a second detection mass device. The centers of gravity of the first Coriolis mass element, the second Coriolis mass element, the first detection mass device and the second detection mass device may coincide at a common mass center of gravity when they are at rest.

5. 发明授权

US06752017B2 Rotation speed sensor 有权
标题翻译：转速传感器
公开(公告)号：US06752017B2
公开(公告)日：2004-06-22
申请号：US10258339
申请日：2003-03-19
申请人： Rainer Willig , Andreas Thomae , Burkhard Kuhlmann , Joerg Hauer , Udo Martin Gomez , Siegbert Goetz , Christian Doering , Michael Fehrenbach , Wolfram Bauer , Udo Bischof , Reinhard Neul , Karsten Funk , Markus Lutz , Gerhard Wucher , Jochen Franz
发明人： Rainer Willig , Andreas Thomae , Burkhard Kuhlmann , Joerg Hauer , Udo Martin Gomez , Siegbert Goetz , Christian Doering , Michael Fehrenbach , Wolfram Bauer , Udo Bischof , Reinhard Neul , Karsten Funk , Markus Lutz , Gerhard Wucher , Jochen Franz
IPC分类号： G01P1514
CPC分类号： G01C19/5747
摘要： A yaw-rate sensor is proposed having a first and a second Coriolis element (100, 200) which are arranged side-by-side above a surface (1) of a substrate. The Coriolis elements (100, 200) are induced to oscillate parallel to a first axis. Due to a Coriolis force, the Coriolis elements (100, 200) are deflected in a second axis which is perpendicular to the first axis. The first and second Coriolis elements (100, 200) are coupled by a spring (52) which is designed to be yielding in the first and in the second axis. Thus, the frequencies of the oscillations in the two axes are developed differently for the in-phase and antiphase oscillation.
摘要翻译：一种偏转速率传感器，包括在衬底表面上并排布置的第一和第二科里奥利元件。诱导科里奥利元件平行于第一轴振荡。由于科里奥利力，科里奥利元件在垂直于第一轴线的第二轴线上偏转。第一和第二科里奥利元件通过被配置为在第一轴线和第二轴线中屈服的弹簧联接。因此，对于同相和反相振荡，两轴的振荡频率不同。

6. 发明授权

US06705164B2 Rotation rate sensor 有权
标题翻译：转速传感器
公开(公告)号：US06705164B2
公开(公告)日：2004-03-16
申请号：US10258336
申请日：2003-03-19
申请人： Rainer Willig , Andreas Thomae , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Siegbert Goetz , Christian Doering , Michael Fehrenbach , Wolfram Bauer , Udo Bischof , Reinhard Neul , Karsten Funk , Markus Lutz , Gerhard Wucher , Jochen Franz
发明人： Rainer Willig , Andreas Thomae , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Siegbert Goetz , Christian Doering , Michael Fehrenbach , Wolfram Bauer , Udo Bischof , Reinhard Neul , Karsten Funk , Markus Lutz , Gerhard Wucher , Jochen Franz
IPC分类号： G01C1900
CPC分类号： G01C19/5747
摘要： A yaw-rate sensor including a first and a second Coriolis element that are arranged side-by-side above a surface of a substrate. The Coriolis elements are induced to oscillate parallel to a first axis Y. Due to a Coriolis force, the Coriolis elements are deflected in a second axis X which is perpendicular to the first axis Y. The oscillations of the first and second Coriolis elements occur in phase opposition to each other on paths which, without the effect of a Coriolis force, are two straight lines parallel to each other.
摘要翻译：一种偏转速率传感器，包括在衬底表面上并排布置的第一和第二科里奥利元件。诱导科里奥利元件平行于第一轴线Y振荡。由于科里奥利力，科里奥利元件在垂直于第一轴线Y的第二轴线X中偏转。第一和第二科里奥利元件的振荡发生在在没有科里奥利力的作用下彼此平行的两条直线的路径上相互相反。

7. 发明申请

US20060107738A1 Micromechanical rotational rate sensor 有权
标题翻译：微机电转速传感器
公开(公告)号：US20060107738A1
公开(公告)日：2006-05-25
申请号：US11328755
申请日：2006-01-09
申请人： Rainer Willig , Andreas Thomae , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Siegbert Goetz , Christian Doering , Michael Fehrenbach , Wolfram Bauer , Udo Bischof , Reinhard Neul , Karsten Funk , Markus Lutz , Gerhard Wucher , Jochen Franz
发明人： Rainer Willig , Andreas Thomae , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Siegbert Goetz , Christian Doering , Michael Fehrenbach , Wolfram Bauer , Udo Bischof , Reinhard Neul , Karsten Funk , Markus Lutz , Gerhard Wucher , Jochen Franz
IPC分类号： G01P15/08
CPC分类号： G01C19/5747
摘要： An exemplary embodiment of the present invention creates a micromechanical rotational rate sensor having a first Coriolis mass element and a second Coriolis mass element which may be situated over a surface of a substrate. An exemplary embodiment of a micromechanical rotational rate sensor may have an activating device by which the first Coriolis mass element and the second Coriolis mass element are able to have vibrations activated along a first axis. An exemplary embodiment of a micromechanical rotational rate sensor may have a detection device by which deflections of the first Coriolis mass elements and of the second Coriolis element are able to be detected along a second axis, which is perpendicular to the first axis, on the basis of a correspondingly acting Coriolis force. The first axis and second axis may run parallel to the surface of the substrate. The detecting device may have a first detection mass device and a second detection mass device. The centers of gravity of the first Coriolis mass element, the second Coriolis mass element, the first detection mass device and the second detection mass device may coincide at a common mass center of gravity when they are at rest.
摘要翻译：本发明的示例性实施例创建了具有第一科里奥利质量元件和可位于衬底表面上的第二科里奥利质量元件的微机械转速传感器。微机电转速传感器的示例性实施例可以具有激活装置，第一科里奥利质量元件和第二科里奥利质量元件可以通过该激活装置具有沿第一轴线激活的振动。微机电转速传感器的示例性实施例可以具有检测装置，通过该检测装置，第一科里奥利质量元件和第二科里奥利元件的偏转能够沿着垂直于第一轴线的第二轴线被检测的相应的科里奥利力量。第一轴线和第二轴线可以平行于基板的表面延伸。检测装置可以具有第一检测质量装置和第二检测质量装置。当第一科里奥利质量元件，第二科里奥利质量元件，第一检测质量装置和第二检测质量装置的重心在静止时可以在共同的重心处重合。

8. 发明授权

US07270868B2 Micromechanical component 有权
标题翻译：微机械部件
公开(公告)号：US07270868B2
公开(公告)日：2007-09-18
申请号：US10618791
申请日：2003-07-14
申请人： Thorsten Pannek , Udo Bischof , Silvia Kronmueller , Jens Frey , Ulf Wilhelm
发明人： Thorsten Pannek , Udo Bischof , Silvia Kronmueller , Jens Frey , Ulf Wilhelm
IPC分类号： B32B3/00 , B32B3/10 , B32B3/18 , H01L21/00 , H01L29/84
CPC分类号： B81C1/00595 , Y10T428/24612 , Y10T428/24628
摘要： A component having a surface micromechanical structure containing both movable elements and immovable elements, and a method of manufacturing same are described. The surface micromechanical structure of the component is produced in a functional layer, which is connected to a substrate via at least one electrically non-conductive first insulation layer and at least one first sacrificial layer. The movable elements of the surface micromechanical structure are exposed by removing the first sacrificial layer. The first insulation layer is made of a material which is not substantially attacked by the process of removing the first sacrificial layer. Thus the removal of the sacrificial layer may be limited in a design-controlled manner. At the same time, a reliable electrical insulation of the surface micromechanical structure with respect to the substrate of the component and a reliable mechanical fastening of the immovable elements of the surface micromechanical structure to the substrate are ensured.
摘要翻译：描述了具有包含可移动元件和不可移动元件的表面微机械结构的部件及其制造方法。组件的表面微机械结构在功能层中产生，功能层通过至少一个不导电的第一绝缘层和至少一个第一牺牲层连接到基板。通过去除第一牺牲层来暴露表面微机械结构的可移动元件。第一绝缘层由不会被去除第一牺牲层的过程基本上受到攻击的材料制成。因此，可以以设计控制的方式限制牺牲层的去除。同时，确保表面微机械结构相对于部件的基板的可靠的电绝缘以及表面微机械结构的不动元件到基板的可靠的机械紧固。

9. 发明授权

US06187607B1 Manufacturing method for micromechanical component 有权
标题翻译：微机械部件的制造方法
公开(公告)号：US06187607B1
公开(公告)日：2001-02-13
申请号：US09292282
申请日：1999-04-15
申请人： Michael Offenberg , Udo Bischof , Markus Lutz
发明人： Michael Offenberg , Udo Bischof , Markus Lutz
IPC分类号： H01L21302
CPC分类号： G01C19/5769 , B81B2201/025 , B81B2203/0136 , B81C1/00571 , B81C2201/014 , B81C2201/053
摘要： A manufacturing method for a micromechanical component, and in particular for a micromechanical rotation rate sensor, which has a supporting first layer, an insulating second layer that is arranged on the first layer, and a conductive third layer that is arranged on the second layer. The method includes the following steps: provide the second layer, in the form of patterned first and second insulation regions, on the first layer; provide a first protective layer on an edge region of the first insulation regions and on a corresponding boundary region of the first layer; provide the third layer on the structure resulting from the previous steps; pattern out a structure of conductor paths running on the first insulation regions, and a functional structure of the micromechanical component above the second insulation regions, from the third layer; and remove the second layer in the second insulation regions, the second layer being protected in the first insulation regions by the first protective layer in such a way that it is essentially not removed there.
摘要翻译：具有支撑第一层，布置在第一层上的绝缘第二层和布置在第二层上的导电第三层的微机械组件的制造方法，特别是用于微机械转速传感器的制造方法。该方法包括以下步骤：在第一层上提供呈图案化的第一和第二绝缘区域的形式的第二层; 在所述第一绝缘区域的边缘区域和所述第一层的对应边界区域上提供第一保护层; 提供由上述步骤导致的结构上的第三层; 形成在第一绝缘区域上运行的导体路径的结构以及来自第三层的第二绝缘区域上方的微机械部件的功能结构; 并且在所述第二绝缘区域中移除所述第二层，所述第二层在所述第一绝缘区域中被所述第一保护层保护，使得其基本上不被去除。

10. 发明申请

US20090174148A1 Method for Sealing an Opening 有权
标题翻译：密封方法
公开(公告)号：US20090174148A1
公开(公告)日：2009-07-09
申请号：US12086893
申请日：2006-11-24
申请人： Udo Bischof , Holger Hoefer , Volker Schmitz , Axel Grosse , Lutz Mueller , Ralf Hausner
发明人： Udo Bischof , Holger Hoefer , Volker Schmitz , Axel Grosse , Lutz Mueller , Ralf Hausner
IPC分类号： F16J15/02
CPC分类号： B81C1/00293 , B81C2203/0145
摘要： An integrated component having a substrate, the substrate having a cavity which surrounds a mechanical structure. The cavity is filled by a fluid of a specific composition under a specific pressure, and the mechanical properties of the mechanical structure are influenced by the fluid.
摘要翻译：具有基板的集成部件，该基板具有围绕机械结构的空腔。空腔由特定组成的流体在特定压力下填充，机械结构的机械性能受到流体的影响。

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