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1. 发明申请

US20140326070A1 YAW-RATE SENSOR 审中-公开
标题翻译： YAW-RATE传感器
公开(公告)号：US20140326070A1
公开(公告)日：2014-11-06
申请号：US14334407
申请日：2014-07-17
申请人： Reinhard Neul , Johannes Classen , Torsten Ohms , Burkhard Kuhlmann , Axel Franke , Oliver Kohn , Daniel Christoph Meisel , Joerg Hauer , Udo-Martin Gomez , Kersten Kehr
发明人： Reinhard Neul , Johannes Classen , Torsten Ohms , Burkhard Kuhlmann , Axel Franke , Oliver Kohn , Daniel Christoph Meisel , Joerg Hauer , Udo-Martin Gomez , Kersten Kehr
IPC分类号： G01P3/44 , F16F1/02 , G01C19/574
CPC分类号： G01C19/574 , F16F1/025 , G01C19/5747 , G01P3/44
摘要： A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.
摘要翻译：具有基板和多个可移动子结构的偏转速率传感器，其安装在所述基板的表面上，所述可移动子结构联接到共享的，特别是中心的弹簧元件，所述装置用于将所述可移动子结构激励为在平行于衬底表面延伸的平面中的耦合振荡，具有科里奥利元件的可移动子结构被提供用于检测由科里奥利力引起的科里奥利元件的偏转，第一科里奥利元件用于检测围绕第一轴线，第二科里奥利元件被提供用于检测围绕第二轴线的横摆率，所述第二轴线垂直于所述第一轴线定向。

2. 发明申请

US20120060604A1 YAW-RATE SENSOR 有权
标题翻译： YAW-RATE传感器
公开(公告)号：US20120060604A1
公开(公告)日：2012-03-15
申请号：US12734228
申请日：2008-10-02
申请人： Reinhard Neul , Johannes Classen , Torsten Ohms , Burkhard Kuhlmann , Axel Franke , Oliver Kohn , Daniel Christoph Meisel , Joerg Hauer , Udo-Martin Gomez , Kersten Kehr
发明人： Reinhard Neul , Johannes Classen , Torsten Ohms , Burkhard Kuhlmann , Axel Franke , Oliver Kohn , Daniel Christoph Meisel , Joerg Hauer , Udo-Martin Gomez , Kersten Kehr
IPC分类号： G01P3/44 , F16F3/00
CPC分类号： G01C19/574 , F16F1/025 , G01C19/5747 , G01P3/44
摘要： A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.
摘要翻译：具有基板和多个可移动子结构的偏转速率传感器，其安装在所述基板的表面上，所述可移动子结构联接到共享的，特别是中心的弹簧元件，所述装置用于将所述可移动子结构激励为在平行于衬底表面延伸的平面中的耦合振荡，具有科里奥利元件的可移动子结构被提供用于检测由科里奥利力引起的科里奥利元件的偏转，第一科里奥利元件用于检测围绕第一轴线，第二科里奥利元件被提供用于检测围绕第二轴线的横摆率，所述第二轴线垂直于所述第一轴线定向。

3. 发明授权

US09081027B2 Yaw-rate sensor 有权
标题翻译：偏光率传感器
公开(公告)号：US09081027B2
公开(公告)日：2015-07-14
申请号：US12734228
申请日：2008-10-02
申请人： Reinhard Neul , Johannes Classen , Torsten Ohms , Burkhard Kuhlmann , Axel Franke , Oliver Kohn , Daniel Christoph Meisel , Joerg Hauer , Udo-Martin Gomez , Kersten Kehr
发明人： Reinhard Neul , Johannes Classen , Torsten Ohms , Burkhard Kuhlmann , Axel Franke , Oliver Kohn , Daniel Christoph Meisel , Joerg Hauer , Udo-Martin Gomez , Kersten Kehr
IPC分类号： G01C19/56 , G01P3/44 , G01C19/574 , F16F1/02
CPC分类号： G01C19/574 , F16F1/025 , G01C19/5747 , G01P3/44
摘要： A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, where the movable substructures are excitable into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, where deflections of the Coriolis elements induced by a Coriolis force are detectable, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.
摘要翻译：具有衬底和多个可移动子结构的偏转速率传感器，其安装在衬底的表面上，可移动子结构耦合到共享的，特别是中心弹簧元件，其中可移动子结构可激发成耦合振荡在平行于衬底的表面延伸的平面中，具有科里奥利元件的可移动子结构，其中可检测科里奥利力引起的科里奥利元件的偏转，第一科里奥利元件用于检测围绕第一轴线的偏航率，提供了用于检测围绕第二轴线的偏航率的第二科里奥利元件，所述第二轴线垂直于所述第一轴线定向。

4. 发明授权

US08490483B2 Micromechanical yaw-rate sensor 有权
标题翻译：微机械偏航率传感器
公开(公告)号：US08490483B2
公开(公告)日：2013-07-23
申请号：US12834953
申请日：2010-07-13
申请人： Martin Wrede , Johannes Classen , Torsten Ohms , Carsten Geckeler , Burkhard Kuhlmann , Jens Frey , Daniel Christoph Meisel , Joerg Hauer , Thorsten Balslink
发明人： Martin Wrede , Johannes Classen , Torsten Ohms , Carsten Geckeler , Burkhard Kuhlmann , Jens Frey , Daniel Christoph Meisel , Joerg Hauer , Thorsten Balslink
IPC分类号： G01C19/56
CPC分类号： G01C19/5712 , G01C19/5747
摘要： A micromechanical yaw-rate sensor comprising a first yaw-rate sensor element, which outputs a first sensor signal, which contains information about a rotation around a first rotational axis, a second yaw-rate sensor element, which outputs a second sensor signal, which contains information about a rotation around a second rotational axis, which is perpendicular to the first rotational axis, a drive, which drives the first yaw-rate sensor element, and a coupling link, which mechanically couples the first yaw-rate sensor element and the second yaw-rate sensor element to one another, so that driving of the first yaw-rate sensor element also causes driving of the second yaw-rate sensor element.
摘要翻译：一种微机械摆动速率传感器，包括第一偏转速率传感器元件，该第一偏转速率传感器元件输出包含关于围绕第一旋转轴线的旋转的信息的第一传感器信号，输出第二传感器信号的第二偏转速度传感器元件，包含关于围绕垂直于第一旋转轴线的第二旋转轴线的旋转的信息，驱动第一偏转速率传感器元件的驱动器和耦合连杆，其将第一横摆速率传感器元件和第二偏转速率传感器元件彼此之间，使得第一偏转速率传感器元件的驱动也引起第二偏转速率传感器元件的驱动。

5. 发明申请

US20110023600A1 MICROMECHANICAL YAW-RATE SENSOR 有权
标题翻译：微电子传感器
公开(公告)号：US20110023600A1
公开(公告)日：2011-02-03
申请号：US12834953
申请日：2010-07-13
申请人： Martin WREDE , Johannes Classen , Torsten Ohms , Carsten Geckeler , Burkhard Kuhlmann , Jens Frey , Daniel Christoph Meisel , Joerg Hauer , Thorsten Balslink
发明人： Martin WREDE , Johannes Classen , Torsten Ohms , Carsten Geckeler , Burkhard Kuhlmann , Jens Frey , Daniel Christoph Meisel , Joerg Hauer , Thorsten Balslink
IPC分类号： G01C19/56
CPC分类号： G01C19/5712 , G01C19/5747
摘要： A micromechanical yaw-rate sensor comprising a first yaw-rate sensor element, which outputs a first sensor signal, which contains information about a rotation around a first rotational axis, a second yaw-rate sensor element, which outputs a second sensor signal, which contains information about a rotation around a second rotational axis, which is perpendicular to the first rotational axis, a drive, which drives the first yaw-rate sensor element, and a coupling link, which mechanically couples the first yaw-rate sensor element and the second yaw-rate sensor element to one another, so that driving of the first yaw-rate sensor element also causes driving of the second yaw-rate sensor element.
摘要翻译：一种微机械摆动速率传感器，包括第一偏转速率传感器元件，该第一偏转速率传感器元件输出包含关于围绕第一旋转轴线的旋转的信息的第一传感器信号，输出第二传感器信号的第二偏转速度传感器元件，包含关于围绕垂直于第一旋转轴线的第二旋转轴线的旋转的信息，驱动第一偏转速率传感器元件的驱动器和耦合连杆，其将第一横摆速率传感器元件和第二偏转速率传感器元件彼此之间，使得第一偏转速率传感器元件的驱动也引起第二偏转速率传感器元件的驱动。

6. 发明授权

US08561465B2 Rotation rate sensor 有权
标题翻译：转速传感器
公开(公告)号：US08561465B2
公开(公告)日：2013-10-22
申请号：US12587487
申请日：2009-10-06
申请人： Johannes Classen , Torsten Ohms , Daniel Christoph Meisel , Joerg Hauer
发明人： Johannes Classen , Torsten Ohms , Daniel Christoph Meisel , Joerg Hauer
IPC分类号： G01C19/00
CPC分类号： G01C19/5755 , G01C19/574 , G01C19/5747 , G01C19/5762
摘要： A rotation rate sensor includes: a mounting device; a first drive frame having a drive, which is designed to set the first drive frame into a first oscillatory motion along an axis of oscillation relative to the mounting device; a first stator electrode; a first actuator electrode coupled to the first drive frame in such a way that in a rotary motion of the rotation rate sensor due to a Coriolis force, the first actuator electrode being displaceable in a first deflection direction relative to the first stator electrode; and an evaluation device configured to determine a voltage applied between the first stator electrode and the first actuator electrode, and to specify information regarding the rotary motion of the rotation rate sensor while taking the determined voltage value into account.
摘要翻译：旋转速率传感器包括：安装装置; 具有驱动器的第一驱动框架，其被设计成将第一驱动框架相对于安装装置沿着振荡轴线设置为第一振荡运动; 第一定子电极; 第一致动器电极，其以这样的方式联接到第一驱动框架，使得在旋转速度传感器由于科里奥利力的旋转运动中，第一致动器电极可相对于第一定子电极在第一偏转方向上移位; 以及评估装置，被配置为确定施加在第一定子电极和第一致动器电极之间的电压，并且在考虑所确定的电压值的同时指定关于旋转速率传感器的旋转运动的信息。

7. 发明申请

US20100122576A1 Rotation rate sensor 有权
标题翻译：转速传感器
公开(公告)号：US20100122576A1
公开(公告)日：2010-05-20
申请号：US12587487
申请日：2009-10-06
申请人： Johannes Classen , Torsten Ohms , Daniel Christoph Meisel , Joerg Hauer
发明人： Johannes Classen , Torsten Ohms , Daniel Christoph Meisel , Joerg Hauer
IPC分类号： G01C19/56
CPC分类号： G01C19/5755 , G01C19/574 , G01C19/5747 , G01C19/5762
摘要： A rotation rate sensor includes: a mounting device; a first drive frame having a drive, which is designed to set the first drive frame into a first oscillatory motion along an axis of oscillation relative to the mounting device; a first stator electrode; a first actuator electrode coupled to the first drive frame in such a way that in a rotary motion of the rotation rate sensor due to a Coriolis force, the first actuator electrode being displaceable in a first deflection direction relative to the first stator electrode; and an evaluation device configured to determine a voltage applied between the first stator electrode and the first actuator electrode, and to specify information regarding the rotary motion of the rotation rate sensor while taking the determined voltage value into account.
摘要翻译：旋转速率传感器包括：安装装置; 具有驱动器的第一驱动框架，其被设计成将第一驱动框架相对于安装装置沿着振荡轴线设置为第一振荡运动; 第一定子电极; 第一致动器电极，其以这样的方式联接到第一驱动框架，使得在旋转速度传感器由于科里奥利力的旋转运动中，第一致动器电极可相对于第一定子电极在第一偏转方向上移位; 以及评估装置，被配置为确定施加在第一定子电极和第一致动器电极之间的电压，并且在考虑所确定的电压值的同时指定关于旋转速率传感器的旋转运动的信息。

8. 发明授权

US08915137B2 Yaw rate sensor, yaw rate sensor system, and method for operating a yaw rate sensor 有权
标题翻译：偏航速率传感器，偏航率传感器系统和用于操作偏航率传感器的方法
公开(公告)号：US08915137B2
公开(公告)日：2014-12-23
申请号：US12897367
申请日：2010-10-04
申请人： Johannes Classen , Torsten Ohms , Daniel Christoph Meisel , Joerg Hauer
发明人： Johannes Classen , Torsten Ohms , Daniel Christoph Meisel , Joerg Hauer
IPC分类号： G01P3/44 , G01C19/574 , G01C19/5755
CPC分类号： G01C19/5755 , G01C19/574
摘要： A yaw rate sensor having a substrate which has a main plane of extension, and a Coriolis element is proposed. The Coriolis element is excitable to a vibration along a third direction which is perpendicular to the main plane of extension. A Coriolis deflection of the Coriolis element along a first direction which is parallel to the main plane of extension may be detected using a detection arrangement. The detection arrangement includes a Coriolis electrode which is connected to the Coriolis element, and a corresponding counterelectrode. Both the Coriolis electrode and the counterelectrode may be excited to a vibration along the third direction.
摘要翻译：提出了具有具有主平面延伸的基板和科里奥利元件的偏航率传感器。科里奥利元件可以沿垂直于主延伸平面的第三方向振动。可以使用检测装置检测Coriolis元件沿着与主延伸平面平行的第一方向的科里奥利偏转。检测装置包括连接到科里奥利元件的科里奥利电极和相应的反电极。科里奥利电极和对电极都可以沿着第三个方向激发振动。

9. 发明申请

US20120272735A1 Micromechanical Rotary Acceleration Sensor and Method for Detecting a Rotary Acceleration 有权
标题翻译：微机械旋转加速度传感器和检测旋转加速度的方法
公开(公告)号：US20120272735A1
公开(公告)日：2012-11-01
申请号：US13453425
申请日：2012-04-23
申请人： Reinhard Neul , Torsten Ohms , Mirko Hattass , Daniel Christoph Meisel
发明人： Reinhard Neul , Torsten Ohms , Mirko Hattass , Daniel Christoph Meisel
IPC分类号： G01P15/00
CPC分类号： G01P15/097
摘要： The disclosure relates to a micromechanical rotary acceleration sensor including a substrate with at least one anchoring device and at least two flywheel masses. At least one of the flywheel masses is connected to at least one anchoring device by means of a coupling element. The at least one anchoring device is designed in such a manner that the at least two flywheel masses are elastically deflectable from a respective rest position about at least one axis of rotation. The at least two flywheel masses is designed in such a manner that they have different natural frequencies.
摘要翻译：本公开涉及一种微机械式旋转加速度传感器，其包括具有至少一个锚固装置和至少两个飞轮块的基板。至少一个飞轮质量通过联接元件连接到至少一个锚定装置。所述至少一个锚定装置被设计成使得所述至少两个飞轮块可以围绕至少一个旋转轴线从相应的静止位置弹性偏转。至少两个飞轮质量被设计成使得它们具有不同的固有频率。

10. 发明授权

US08950258B2 Micromechanical angular acceleration sensor and method for measuring an angular acceleration 有权
标题翻译：微机械角加速度传感器和角加速度测量方法
公开(公告)号：US08950258B2
公开(公告)日：2015-02-10
申请号：US13479746
申请日：2012-05-24
申请人： Reinhard Neul , Torsten Ohms , Mirko Hattass , Daniel Christoph Meisel
发明人： Reinhard Neul , Torsten Ohms , Mirko Hattass , Daniel Christoph Meisel
IPC分类号： G01P15/10 , G01P15/12 , G01P15/09 , H01L41/113
CPC分类号： G01P15/0922 , H01L41/1132
摘要： A micromechanical angular acceleration sensor for measuring an angular acceleration is disclosed. The sensor includes a substrate, a seismic mass, at least one suspension, which fixes the seismic mass to the substrate in a deflectable manner, and at least one piezoresistive and/or piezoelectric element for measuring the angular acceleration. The piezoresistive and/or piezoelectric element is arranged in a cutout of the seismic mass. A corresponding method and uses of the sensor are also disclosed.
摘要翻译：公开了一种用于测量角加速度的微机械角加速度传感器。传感器包括基板，抗震块，至少一个悬架，其以可偏转的方式将地震质量固定到基板，以及用于测量角加速度的至少一个压阻和/或压电元件。压阻和/或压电元件布置在地震块的切口中。还公开了传感器的相应方法和用途。

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