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    • 5. 发明授权
    • Method of making spiral-type RF inductors having a high quality factor
(Q)
    • 制造具有高品质因数(Q)的螺旋型RF电感器的方法
    • US6140197A
    • 2000-10-31
    • US385525
    • 1999-08-30
    • Shau-Fu Sanford ChuKok Wai Johnny ChewChee Tee ChuaCher Liang Cha
    • Shau-Fu Sanford ChuKok Wai Johnny ChewChee Tee ChuaCher Liang Cha
    • H01L21/02H01L27/08H01L21/20
    • H01L28/10H01L27/08
    • A new method of fabricating an inductor utilizing air as an underlying barrier in the manufacture of integrated circuits is described. A metal line is provided overlying a dielectric layer on a semiconductor substrate. An intermetal dielectric layer is deposited overlying the metal line and the dielectric layer. The intermetal dielectric layer is patterned whereby a plurality of openings are made through the intermetal dielectric layer to the semiconductor substrate. Thereafter, an oxide layer is deposited overlying the intermetal dielectric layer and capping the plurality of openings thereby forming air gaps within the intermetal dielectric layer. A metal plug is formed through the oxide layer and the intermetal dielectric layer to the metal line. A metal layer is deposited overlying the oxide layer and patterned to form an inductor wherein a portion of the inductor contacts the metal line through the metal plug to complete formation of an inductor utilizing air as an underlying barrier in the fabrication of an integrated circuit.
    • 描述了在制造集成电路中制造利用空气作为下层屏障的电感器的新方法。 提供了覆盖半导体衬底上的电介质层的金属线。 覆盖在金属线和电介质层上的金属间电介质层。 金属间电介质层被图案化,由此通过金属间电介质层制造多个开口到半导体衬底。 此后,将氧化物层沉积在金属间电介质层上并覆盖多个开口,从而在金属间电介质层内形成气隙。 通过氧化物层和金属间电介质层形成金属插塞到金属线。 将金属层沉积在氧化物层上并被图案化以形成电感器,其中电感器的一部分通过金属插塞接触金属线,以在集成电路的制造中利用空气作为潜在的阻挡层来形成电感器。
    • 9. 发明授权
    • Integrated helix coil inductor on silicon
    • 在硅上集成螺旋线圈电感
    • US06803848B2
    • 2004-10-12
    • US10271006
    • 2002-10-15
    • Kiat Seng YeoHai Peng TanJian Guo MaManh Anh DoKok Wai Johnny Chew
    • Kiat Seng YeoHai Peng TanJian Guo MaManh Anh DoKok Wai Johnny Chew
    • H01F500
    • H01L28/10H01L27/08
    • A new structure and method is provided for the creation of an inductor on the surface of a silicon semiconductor substrate. The inductor is of a helix coil design having upper level and lower level conductors further having an axis whereby the axis of the helix coil of the inductor is parallel to the plane of the underlying substrate. Under the first embodiment of the invention, the height of the helix coil that is created on the surface of a silicon substrate is uniform. Under the second embodiment of the invention the height of the helix coil of the inductor of the invention is uniform while a ferromagnetic core is inserted between the upper and the lower level conductors of the helix coil. Under the third embodiment of the invention, the height of the helix coil that is created on the surface of a silicon substrate is non-uniform. Under the fourth embodiment of the invention the height of the helix coil of the inductor of the invention is non-uniform while a ferromagnetic core is inserted between the upper and the lower level conductors of the helix coil.
    • 提供了一种新的结构和方法,用于在硅半导体衬底的表面上形成电感器。 电感器具有螺旋线圈设计,其具有上层和下层导体,其还具有轴线,由此电感器的螺旋线圈的轴线平行于下层衬底的平面。 在本发明的第一实施例中,在硅衬底的表面上产生的螺旋线圈的高度是均匀的。 在本发明的第二实施例中,本发明的电感器的螺旋线圈的高度是均匀的,而铁磁芯插入在螺旋线圈的上层和下层导体之间。 在本发明的第三实施例中,在硅衬底的表面上产生的螺旋线圈的高度是不均匀的。 在本发明的第四实施例中,本发明的电感器的螺旋线圈的高度是不均匀的,而铁磁芯被插入螺旋线圈的上层和下层导体之间。