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1. 发明申请

US20130340522A1 YAM RATE SENSOR 有权
标题翻译： YAM速率传感器
公开(公告)号：US20130340522A1
公开(公告)日：2013-12-26
申请号：US13922801
申请日：2013-06-20
申请人： Burkhard KUHLMANN , Rolf SCHEBEN , Daniel Christoph MEISEL , Benjamin SCHMIDT , Thorten BALSLINK
发明人： Burkhard KUHLMANN , Rolf SCHEBEN , Daniel Christoph MEISEL , Benjamin SCHMIDT , Thorten BALSLINK
IPC分类号： G01C19/56
CPC分类号： G01C19/56 , G01C19/5747
摘要： A yaw rate sensor, including a substrate and a main extension plane, for detecting a yaw rate around a first direction in parallel to the main extension plane, a first Coriolis mass, and a second Coriolis mass, and a drive device configured to drive the first and second Coriolis masses in parallel to a drive direction perpendicular to the first direction, the first and second Coriolis masses, for a yaw rate around the first direction, experiencing a Coriolis acceleration in parallel to a detection direction, which is perpendicular to the drive and first directions, the first and second Coriolis masses having first/second partial areas and third/fourth partial areas, respectively. The first and third partial areas are farther from the axis of symmetry in parallel to the first direction, and the second and fourth partial areas are closer to the axis of symmetry in parallel to the first direction.
摘要翻译：包括基板和主延伸平面的横摆角速度传感器，用于检测平行于主延伸平面的第一方向的横摆率，第一科里奥利质量和第二科里奥利质量，驱动装置被配置为驱动第一和第二科里奥利质量平行于垂直于第一方向的驱动方向，第一和第二科里奥利质量，对于围绕第一方向的横摆率，经历与垂直于驱动器的检测方向平行的科里奥利加速度和第一方向，分别具有第一/第二部分区域和第三/第四部分区域的第一和第二科里奥利群体。第一和第三部分区域平行于第一方向距离对称轴更远，并且第二和第四部分区域平行于第一方向更靠近对称轴。

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