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1. 发明申请

US20130298672A1 YAW-RATE SENSOR 有权
标题翻译： YAW-RATE传感器
公开(公告)号：US20130298672A1
公开(公告)日：2013-11-14
申请号：US13889791
申请日：2013-05-08
申请人： Burkhard KUHLMANN , Rolf SCHEBEN , Daniel Christoph MEISEL , Benjamin SCHMIDT , Thorsten BALSLINK
发明人： Burkhard KUHLMANN , Rolf SCHEBEN , Daniel Christoph MEISEL , Benjamin SCHMIDT , Thorsten BALSLINK
IPC分类号： G01C19/56
CPC分类号： G01C19/56 , G01C19/5747
摘要： A yaw-rate sensor, having a substrate which has a main extension plane, for detecting a yaw rate about a first direction extending either parallel to the main extension plane or perpendicular to the main extension plane. The yaw-rate sensor has a drive device, a first Coriolis mass and a second Coriolis mass, the drive device being configured to drive at least one part of the first Coriolis mass and at least one part of the second Coriolis mass in a direction parallel to a drive direction extending perpendicular to the first direction.
摘要翻译：一种偏转速率传感器，具有具有主延伸面的基板，用于检测围绕主延伸面平行延伸或垂直于主延伸面延伸的第一方向的横摆率。所述偏航速率传感器具有驱动装置，第一科里奥利质量块和第二科里奥利质量块，所述驱动装置被配置成驱动所述第一科里奥利质量的至少一部分和所述第二科里奥利质量的至少一部分在平行方向上到垂直于第一方向延伸的驱动方向。

2. 发明申请

US20130340522A1 YAM RATE SENSOR 有权
标题翻译： YAM速率传感器
公开(公告)号：US20130340522A1
公开(公告)日：2013-12-26
申请号：US13922801
申请日：2013-06-20
申请人： Burkhard KUHLMANN , Rolf SCHEBEN , Daniel Christoph MEISEL , Benjamin SCHMIDT , Thorten BALSLINK
发明人： Burkhard KUHLMANN , Rolf SCHEBEN , Daniel Christoph MEISEL , Benjamin SCHMIDT , Thorten BALSLINK
IPC分类号： G01C19/56
CPC分类号： G01C19/56 , G01C19/5747
摘要： A yaw rate sensor, including a substrate and a main extension plane, for detecting a yaw rate around a first direction in parallel to the main extension plane, a first Coriolis mass, and a second Coriolis mass, and a drive device configured to drive the first and second Coriolis masses in parallel to a drive direction perpendicular to the first direction, the first and second Coriolis masses, for a yaw rate around the first direction, experiencing a Coriolis acceleration in parallel to a detection direction, which is perpendicular to the drive and first directions, the first and second Coriolis masses having first/second partial areas and third/fourth partial areas, respectively. The first and third partial areas are farther from the axis of symmetry in parallel to the first direction, and the second and fourth partial areas are closer to the axis of symmetry in parallel to the first direction.
摘要翻译：包括基板和主延伸平面的横摆角速度传感器，用于检测平行于主延伸平面的第一方向的横摆率，第一科里奥利质量和第二科里奥利质量，驱动装置被配置为驱动第一和第二科里奥利质量平行于垂直于第一方向的驱动方向，第一和第二科里奥利质量，对于围绕第一方向的横摆率，经历与垂直于驱动器的检测方向平行的科里奥利加速度和第一方向，分别具有第一/第二部分区域和第三/第四部分区域的第一和第二科里奥利群体。第一和第三部分区域平行于第一方向距离对称轴更远，并且第二和第四部分区域平行于第一方向更靠近对称轴。

3. 发明申请

US20120011933A1 YAW RATE SENSOR 有权
标题翻译： YAW RATE传感器
公开(公告)号：US20120011933A1
公开(公告)日：2012-01-19
申请号：US13116821
申请日：2011-05-26
申请人： Torsten OHMS , Burkhard KUHLMANN , Daniel Christoph MEISEL , Rolf SCHEBEN
发明人： Torsten OHMS , Burkhard KUHLMANN , Daniel Christoph MEISEL , Rolf SCHEBEN
IPC分类号： G01P15/14
CPC分类号： G01C19/5747
摘要： A yaw rate sensor is described which includes a drive device, at least one Coriolis element, and a detection device having at least two detection elements which are coupled to one another with the aid of a coupling device, the drive device being connected to the Coriolis element for driving a vibration of the Coriolis element, and an additional coupling device which is connected to the detection device and to the Coriolis element for coupling a deflection in the plane of vibration of the Coriolis element to the detection device in a direction orthogonal to the vibration.
摘要翻译：描述了一种横摆速度传感器，其包括驱动装置，至少一个科里奥利元件和具有至少两个检测元件的检测装置，该至少两个检测元件借助耦合装置相互耦合，驱动装置连接到科里奥利用于驱动科里奥利元件的振动的元件，以及连接到检测装置和科里奥利斯元件的附加耦合装置，用于将Coriolis元件的振动平面中的偏转与检测装置沿垂直于振动。

4. 发明申请

US20150063608A1 Capacitive mems element including a pressure-sensitive diaphragm 有权
标题翻译：电容元件包括压敏膜
公开(公告)号：US20150063608A1
公开(公告)日：2015-03-05
申请号：US14470619
申请日：2014-08-27
申请人： Christoph SCHELLING , Rolf SCHEBEN , Ricardo EHRENPFORDT
发明人： Christoph SCHELLING , Rolf SCHEBEN , Ricardo EHRENPFORDT
IPC分类号： H04R23/00 , H04R7/00
CPC分类号： H04R23/00 , H04R7/00 , H04R19/005 , H04R19/01 , H04R19/016 , H04R31/00 , H04R2201/003
摘要： An implementation for an electret in a capacitive MEMS element including a pressure-sensitive diaphragm, which is produce-able using standard methods of semiconductor technology for easy integration into the manufacturing process of MEMS semiconductor elements. Such MEMS elements include at least one pressure-sensitive diaphragm including at least one deflectable diaphragm electrode of a capacitor system for signal detection and one fixed non-pressure-sensitive counter-element including at least one counter-electrode of this capacitor system, at least one electrode of the capacitor system being provided with an electrically charged electret, so that there is a potential difference between the two electrodes of the capacitor system. The electret includes at least two adjacent layers made from different dielectric materials, electrical charges being stored on their boundary surface.
摘要翻译：包括压敏膜的电容式MEMS元件中的驻极体的实施方案，其可以使用标准的半导体技术方法产生，以便于集成到MEMS半导体元件的制造过程中。这样的MEMS元件包括至少一个压敏膜，其包括用于信号检测的电容器系统的至少一个可偏转膜片电极和至少包括该电容器系统的至少一个对电极的固定非压敏平衡元件，至少电容器系统的一个电极设置有带电荷的驻极体，使得电容器系统的两个电极之间存在电位差。驻极体包括由不同介电材料制成的至少两个相邻层，电荷存储在其边界表面上。

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