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21. 发明申请

US20130298672A1 YAW-RATE SENSOR 有权
标题翻译： YAW-RATE传感器
公开(公告)号：US20130298672A1
公开(公告)日：2013-11-14
申请号：US13889791
申请日：2013-05-08
申请人： Burkhard KUHLMANN , Rolf SCHEBEN , Daniel Christoph MEISEL , Benjamin SCHMIDT , Thorsten BALSLINK
发明人： Burkhard KUHLMANN , Rolf SCHEBEN , Daniel Christoph MEISEL , Benjamin SCHMIDT , Thorsten BALSLINK
IPC分类号： G01C19/56
CPC分类号： G01C19/56 , G01C19/5747
摘要： A yaw-rate sensor, having a substrate which has a main extension plane, for detecting a yaw rate about a first direction extending either parallel to the main extension plane or perpendicular to the main extension plane. The yaw-rate sensor has a drive device, a first Coriolis mass and a second Coriolis mass, the drive device being configured to drive at least one part of the first Coriolis mass and at least one part of the second Coriolis mass in a direction parallel to a drive direction extending perpendicular to the first direction.
摘要翻译：一种偏转速率传感器，具有具有主延伸面的基板，用于检测围绕主延伸面平行延伸或垂直于主延伸面延伸的第一方向的横摆率。所述偏航速率传感器具有驱动装置，第一科里奥利质量块和第二科里奥利质量块，所述驱动装置被配置成驱动所述第一科里奥利质量的至少一部分和所述第二科里奥利质量的至少一部分在平行方向上到垂直于第一方向延伸的驱动方向。

22. 发明申请

US20130042664A1 Method for the functional checking of an inertial sensor and inertial sensor 审中-公开
标题翻译：惯性传感器和惯性传感器的功能检查方法
公开(公告)号：US20130042664A1
公开(公告)日：2013-02-21
申请号：US13586282
申请日：2012-08-15
申请人： Martin Wrede , Klaus Petzold , Burkhard Kuhlmann , Uwe Tellermann , Markus Brockmann , Marian Keck , Thorsten Balslink
发明人： Martin Wrede , Klaus Petzold , Burkhard Kuhlmann , Uwe Tellermann , Markus Brockmann , Marian Keck , Thorsten Balslink
IPC分类号： G01P15/097 , G01P21/00
CPC分类号： G01P15/097 , G01C19/5762 , G01C25/005 , G01P15/125 , G01P21/00
摘要： A method for providing functional checking of an inertial sensor, a first test signal having a first frequency being fed in at a test electrode of the inertial sensor for exciting a vibration of a vibration mass and a first response signal corresponding to the vibration mass is recorded, a second test signal having a second frequency different from the first frequency being fed in at the test electrode, a second response signal corresponding to the vibration mass being recorded, and the two response signals being evaluated. Also described is an inertial sensor.
摘要翻译：一种用于提供惯性传感器的功能检查的方法，记录了在惯性传感器的测试电极处馈送第一频率的第一测试信号，用于激发振动质量的振动和对应于振动质量的第一响应信号第二测试信号具有不同于在测试电极处馈入的第一频率的第二频率，对应于所记录的振动质量的第二响应信号，并且评估两个响应信号。还描述了惯性传感器。

23. 发明申请

US20120247206A1 YAW-RATE SENSOR 有权
标题翻译： YAW-RATE传感器
公开(公告)号：US20120247206A1
公开(公告)日：2012-10-04
申请号：US13365740
申请日：2012-02-03
申请人： Torsten Ohms , Burkhard Kuhlmann , Robert Sattler
发明人： Torsten Ohms , Burkhard Kuhlmann , Robert Sattler
IPC分类号： G01C19/00
CPC分类号： G01C19/5747
摘要： A yaw-rate sensor and a method for operating a yaw-rate sensor having a first Coriolis element and a second Coriolis element are proposed, the yaw-rate sensor having a substrate having a main plane of extension, the yaw-rate sensor having a first drive element for driving the first Coriolis element in parallel to a second axis, the yaw-rate sensor having a second drive element for driving the second Coriolis element in parallel to the second axis, the yaw-rate sensor having detection means for detecting deflections of the first Coriolis element and of the second Coriolis element in parallel to a first axis due to a Coriolis force, the second axis being situated perpendicularly to the first axis, the first and second axis being situated in parallel to the main plane of extension, the first and second drive elements being mechanically coupled to each other via a drive coupling element.
摘要翻译：提出了一种摆动速率传感器和用于操作具有第一科里奥利元件和第二科里奥利元件的偏航率传感器的方法，所述偏航速率传感器具有具有主平面延伸的基板，偏航速率传感器具有用于与第二轴平行地驱动第一科里奥利元件的第一驱动元件，所述偏航速率传感器具有用于平行于所述第二轴驱动所述第二科里奥利元件的第二驱动元件，所述偏航率传感器具有用于检测偏转的检测装置的第一科里奥利元件和由于科里奥利力而与第一轴平行的第二科里奥利元件，第二轴线垂直于第一轴线定位，第一和第二轴线平行于主平面延伸，所述第一和第二驱动元件经由驱动联接元件彼此机械耦合。

24. 发明申请

US20110296913A1 Yaw rate sensor 有权
标题翻译：偏航率传感器
公开(公告)号：US20110296913A1
公开(公告)日：2011-12-08
申请号：US13134024
申请日：2011-05-25
申请人： Torsten Ohms , Burkhard Kuhlmann , Daniel Christoph Meisel , Rolf Scheben
发明人： Torsten Ohms , Burkhard Kuhlmann , Daniel Christoph Meisel , Rolf Scheben
IPC分类号： G01C19/56
CPC分类号： G01C19/5755
摘要： A yaw rate sensor includes: at least one Coriolis element; a drive device connected to the Coriolis element and configured to drive a vibration of the Coriolis element; a detection device having at least one rotor; and a coupling device connected to the detection device and to the Coriolis element. The coupling device is configured to couple a deflection in the plane of vibration of the Coriolis element to the detection device in a direction orthogonal to the vibration, so that when the Coriolis element is deflected a torque for driving the at least one rotor is transmitted from the Coriolis element to the at least one rotor.
摘要翻译：横摆率传感器包括：至少一个科里奥利元件; 连接到科里奥利元件并被配置为驱动科里奥利元件的振动的驱动装置; 具有至少一个转子的检测装置; 以及连接到检测装置和科里奥利元件的耦合装置。联接装置被配置成将Coriolis元件的振动平面中的偏转与垂直于振动的方向耦合到检测装置，使得当科里奥利元件偏转时，用于驱动至少一个转子的转矩从科里奥利元件至少一个转子。

25. 发明申请

US20110185813A1 MICROMECHANICAL YAW RATE SENSOR HAVING TWO SENSITIVE AXES AND COUPLED DETECTION MODES 有权
标题翻译：具有两个敏感轴和耦合检测模式的微生物速率传感器
公开(公告)号：US20110185813A1
公开(公告)日：2011-08-04
申请号：US12987732
申请日：2011-01-10
申请人： Johannes Classen , Burkhard Kuhlmann , Daniel Christoph Meisel
发明人： Johannes Classen , Burkhard Kuhlmann , Daniel Christoph Meisel
IPC分类号： G01C19/56
CPC分类号： G01C19/5747
摘要： In a yaw rate sensor with a substrate having a main extent plane and with a first and second partial structure disposed parallel to the main extent plane, the first partial structure includes a first driving structure and the second partial structure includes a second driving structure, the first and second partial structure being excitable by a driving device, via the first and second driving structure, into oscillation parallel to a first axis parallel to the main extent plane, the first partial structure having a first Coriolis element and the second partial structure having a second Coriolis element, the yaw rate sensor being characterized in that the first and second Coriolis elements are displaceable by a Coriolis force parallel to a second axis, which is perpendicular to the first axis, and parallel to a third axis, which is perpendicular to the first and second axis, the second axis extending parallel to the main extent plane, and the first Coriolis element being connected to the second Coriolis element via a coupling element.
摘要翻译：在具有主范围平面并具有平行于主范围平面布置的第一和第二部分结构的基板的偏航率传感器中，第一部分结构包括第一驱动结构，第二部分结构包括第二驱动结构，第一和第二部分结构可被驱动装置通过第一和第二驱动结构激发成与平行于主范围平面的第一轴平行的振荡，第一部分结构具有第一科里奥利元件，第二部分结构具有第二科里奥利元件，所述横摆率传感器的特征在于，所述第一和第二科里奥利元件可通过平行于垂直于所述第一轴线的第二轴线的科里奥利力移动，并且平行于垂直于所述第一轴线的第三轴线第一和第二轴，第二轴平行于主范围平面延伸，第一科里奥利元件连接到t 他通过耦合元件第二个科里奥利元件。

26. 发明授权

US07316161B2 Rotation rate sensor 有权
标题翻译：转速传感器
公开(公告)号：US07316161B2
公开(公告)日：2008-01-08
申请号：US10471832
申请日：2002-09-25
申请人： Rainer Willig , Jochen Franz , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Dieter Maurer , Christian Doering , Wolfram Bauer , Udo Bischof , Reinhard Neul , Johannes Classen , Christoph Lang , Jens Frey
发明人： Rainer Willig , Jochen Franz , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Dieter Maurer , Christian Doering , Wolfram Bauer , Udo Bischof , Reinhard Neul , Johannes Classen , Christoph Lang , Jens Frey
IPC分类号： G01C19/00
CPC分类号： G01C19/5747
摘要： A rotation rate sensor having a substrate and a Coriolis element is proposed, the Coriolis element being situated above a surface of a substrate; the Coriolis element being able to be induced to vibrate in parallel to a first axis (X); an excursion of the Coriolis element being detectable, based on a Coriolis force in a second axis (Y), which is provided to be essentially perpendicular to the first axis (X); the first and second axes (X, Y) being provided parallel to the surface of the substrate, wherein force-conveying means are provided, the means being provided to convey a dynamic force effect between the substrate and the Coriolis element.
摘要翻译：提出了具有基板和科里奥利元件的旋转速率传感器，科里奥利元件位于基板的表面之上; 所述科里奥利元件能够被诱导以平行于第一轴线（X）振动; 基于在第二轴线（Y）上的科里奥利力，基本上垂直于第一轴线（X）提供可检测的科里奥利元件的偏移; 所述第一和第二轴线（X，Y）平行于所述基板的表面设置，其中设置有力传递装置，所述装置被提供以在所述基板和所述科里奥利元件之间传递动态力效应。

27. 发明授权

US07287427B2 Rate-of-rotation sensor having frequency adjustment 有权
标题翻译：具有频率调节的转速传感器
公开(公告)号：US07287427B2
公开(公告)日：2007-10-30
申请号：US11137977
申请日：2005-05-25
申请人： Rainer Willig , Burkhard Kuhlmann , Udo-Martin Gomez , Wolfram Bauer , Christoph Lang
发明人： Rainer Willig , Burkhard Kuhlmann , Udo-Martin Gomez , Wolfram Bauer , Christoph Lang
IPC分类号： G01P19/00
CPC分类号： G01C19/56
摘要： A yaw-rate sensor having a resonant driving frequency and a resonant Coriolis frequency. In addition, the yaw-rate sensor has at least one operating voltage, of which the resonant Coriolis frequency is a function. The resonant Coriolis frequency is adjusted to the resonant driving frequency with the aid of an adjustment voltage. A change in the resonant Coriolis frequency as a result of a change in the operating voltage may be compensated for, in that a suitably changed adjusting voltage may be produced from a compensation circuit.
摘要翻译：具有谐振驱动频率和谐振科里奥利频率的偏航率传感器。此外，偏航率传感器具有至少一个工作电压，其中共振科里奥利频率是函数。谐振科里奥利频率通过调整电压调节到谐振驱动频率。可以补偿作为工作电压变化的结果的共振科里奥利频率的变化，因为可以从补偿电路产生适当改变的调节电压。

28. 发明申请

US20060107738A1 Micromechanical rotational rate sensor 有权
标题翻译：微机电转速传感器
公开(公告)号：US20060107738A1
公开(公告)日：2006-05-25
申请号：US11328755
申请日：2006-01-09
申请人： Rainer Willig , Andreas Thomae , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Siegbert Goetz , Christian Doering , Michael Fehrenbach , Wolfram Bauer , Udo Bischof , Reinhard Neul , Karsten Funk , Markus Lutz , Gerhard Wucher , Jochen Franz
发明人： Rainer Willig , Andreas Thomae , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Siegbert Goetz , Christian Doering , Michael Fehrenbach , Wolfram Bauer , Udo Bischof , Reinhard Neul , Karsten Funk , Markus Lutz , Gerhard Wucher , Jochen Franz
IPC分类号： G01P15/08
CPC分类号： G01C19/5747
摘要： An exemplary embodiment of the present invention creates a micromechanical rotational rate sensor having a first Coriolis mass element and a second Coriolis mass element which may be situated over a surface of a substrate. An exemplary embodiment of a micromechanical rotational rate sensor may have an activating device by which the first Coriolis mass element and the second Coriolis mass element are able to have vibrations activated along a first axis. An exemplary embodiment of a micromechanical rotational rate sensor may have a detection device by which deflections of the first Coriolis mass elements and of the second Coriolis element are able to be detected along a second axis, which is perpendicular to the first axis, on the basis of a correspondingly acting Coriolis force. The first axis and second axis may run parallel to the surface of the substrate. The detecting device may have a first detection mass device and a second detection mass device. The centers of gravity of the first Coriolis mass element, the second Coriolis mass element, the first detection mass device and the second detection mass device may coincide at a common mass center of gravity when they are at rest.
摘要翻译：本发明的示例性实施例创建了具有第一科里奥利质量元件和可位于衬底表面上的第二科里奥利质量元件的微机械转速传感器。微机电转速传感器的示例性实施例可以具有激活装置，第一科里奥利质量元件和第二科里奥利质量元件可以通过该激活装置具有沿第一轴线激活的振动。微机电转速传感器的示例性实施例可以具有检测装置，通过该检测装置，第一科里奥利质量元件和第二科里奥利元件的偏转能够沿着垂直于第一轴线的第二轴线被检测的相应的科里奥利力量。第一轴线和第二轴线可以平行于基板的表面延伸。检测装置可以具有第一检测质量装置和第二检测质量装置。当第一科里奥利质量元件，第二科里奥利质量元件，第一检测质量装置和第二检测质量装置的重心在静止时可以在共同的重心处重合。

29. 发明申请

US20060021433A1 Rate-of-rotation sensor having frequency adjustment 有权
标题翻译：具有频率调节的转速传感器
公开(公告)号：US20060021433A1
公开(公告)日：2006-02-02
申请号：US11137977
申请日：2005-05-25
申请人： Rainer Willig , Burkhard Kuhlmann , Udo-Martin Gomez , Wolfram Bauer , Christoph Lang
发明人： Rainer Willig , Burkhard Kuhlmann , Udo-Martin Gomez , Wolfram Bauer , Christoph Lang
IPC分类号： G01P15/14
CPC分类号： G01C19/56
摘要： A yaw-rate sensor having a resonant driving frequency and a resonant Coriolis frequency. In addition, the yaw-rate sensor has at least one operating voltage, of which the resonant Coriolis frequency is a function. The resonant Coriolis frequency is adjusted to the resonant driving frequency with the aid of an adjustment voltage. A change in the resonant Coriolis frequency as a result of a change in the operating voltage may be compensated for, in that a suitably changed adjusting voltage may be produced from a compensation circuit.
摘要翻译：具有谐振驱动频率和谐振科里奥利频率的偏航率传感器。此外，偏航率传感器具有至少一个工作电压，其中共振科里奥利频率是函数。谐振科里奥利频率通过调整电压调节到谐振驱动频率。可以补偿作为工作电压变化的结果的共振科里奥利频率的变化，因为可以从补偿电路产生适当改变的调节电压。

30. 发明授权

US09081027B2 Yaw-rate sensor 有权
标题翻译：偏光率传感器
公开(公告)号：US09081027B2
公开(公告)日：2015-07-14
申请号：US12734228
申请日：2008-10-02
申请人： Reinhard Neul , Johannes Classen , Torsten Ohms , Burkhard Kuhlmann , Axel Franke , Oliver Kohn , Daniel Christoph Meisel , Joerg Hauer , Udo-Martin Gomez , Kersten Kehr
发明人： Reinhard Neul , Johannes Classen , Torsten Ohms , Burkhard Kuhlmann , Axel Franke , Oliver Kohn , Daniel Christoph Meisel , Joerg Hauer , Udo-Martin Gomez , Kersten Kehr
IPC分类号： G01C19/56 , G01P3/44 , G01C19/574 , F16F1/02
CPC分类号： G01C19/574 , F16F1/025 , G01C19/5747 , G01P3/44
摘要： A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, where the movable substructures are excitable into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, where deflections of the Coriolis elements induced by a Coriolis force are detectable, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.
摘要翻译：具有衬底和多个可移动子结构的偏转速率传感器，其安装在衬底的表面上，可移动子结构耦合到共享的，特别是中心弹簧元件，其中可移动子结构可激发成耦合振荡在平行于衬底的表面延伸的平面中，具有科里奥利元件的可移动子结构，其中可检测科里奥利力引起的科里奥利元件的偏转，第一科里奥利元件用于检测围绕第一轴线的偏航率，提供了用于检测围绕第二轴线的偏航率的第二科里奥利元件，所述第二轴线垂直于所述第一轴线定向。

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