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21. 发明授权

US08875575B2 Yaw rate sensor 有权
标题翻译：偏航率传感器
公开(公告)号：US08875575B2
公开(公告)日：2014-11-04
申请号：US13134024
申请日：2011-05-25
申请人： Torsten Ohms , Burkhard Kuhlmann , Daniel Christoph Meisel , Rolf Scheben
发明人： Torsten Ohms , Burkhard Kuhlmann , Daniel Christoph Meisel , Rolf Scheben
IPC分类号： G01C19/56 , G01C19/5755
CPC分类号： G01C19/5755
摘要： A yaw rate sensor includes: at least one Coriolis element; a drive device connected to the Coriolis element and configured to drive a vibration of the Coriolis element; a detection device having at least one rotor; and a coupling device connected to the detection device and to the Coriolis element. The coupling device is configured to couple a deflection in the plane of vibration of the Coriolis element to the detection device in a direction orthogonal to the vibration, so that when the Coriolis element is deflected a torque for driving the at least one rotor is transmitted from the Coriolis element to the at least one rotor.
摘要翻译：横摆率传感器包括：至少一个科里奥利元件; 连接到科里奥利元件并被配置为驱动科里奥利元件的振动的驱动装置; 具有至少一个转子的检测装置; 以及连接到检测装置和科里奥利元件的耦合装置。联接装置被配置成将Coriolis元件的振动平面中的偏转与垂直于振动的方向耦合到检测装置，使得当科里奥利元件偏转时，用于驱动至少一个转子的转矩从科里奥利元件至少一个转子。

22. 发明授权

US08844357B2 Yaw-rate sensor and method for operating a yaw-rate sensor 有权
标题翻译：偏航速率传感器和操作偏航率传感器的方法
公开(公告)号：US08844357B2
公开(公告)日：2014-09-30
申请号：US13294752
申请日：2011-11-11
申请人： Rolf Scheben , Burkhard Kuhlmann , Thorsten Balslink , Daniel Christoph Meisel , Benjamin Schmidt
发明人： Rolf Scheben , Burkhard Kuhlmann , Thorsten Balslink , Daniel Christoph Meisel , Benjamin Schmidt
IPC分类号： G01C19/56 , G01C19/5747
CPC分类号： G01C19/5747
摘要： A yaw-rate sensor includes: a substrate having a main extension plane for detecting a yaw rate about a first axis extending parallel to the main extension plane; a first Coriolis element; a second Coriolis element; a third Coriolis element; and a fourth Coriolis element. The first Coriolis element and the fourth Coriolis element are drivable in the same direction parallel to a second axis extending parallel to the main extension plane and perpendicularly to the first axis. The first Coriolis element and the second Coriolis element are drivable in opposite directions parallel to the second axis. The first Coriolis element and the third Coriolis element are drivable in opposite directions parallel to the second axis.
摘要翻译：偏航率传感器包括：具有用于检测围绕平行于主延伸平面延伸的第一轴线的横摆率的主延伸面的基板; 第一个科里奥利元素; 第二个科里奥利元素; 第三科里奥利元素; 和第四个科里奥利元素。第一科里奥利元件和第四科里奥利元件可以在平行于平行于主延伸平面并垂直于第一轴线延伸的第二轴线的相同方向上驱动。第一科里奥利元件和第二科里奥利元件可以在平行于第二轴线的相反方向上驱动。第一科里奥利元件和第三科里奥利元件可以在平行于第二轴线的相反方向上驱动。

23. 发明授权

US08683863B2 Micromechanical yaw rate sensor having two sensitive axes and coupled detection modes 有权
标题翻译：具有两个敏感轴和耦合检测模式的微机械偏航率传感器
公开(公告)号：US08683863B2
公开(公告)日：2014-04-01
申请号：US12987732
申请日：2011-01-10
申请人： Johannes Classen , Burkhard Kuhlmann , Daniel Christoph Meisel
发明人： Johannes Classen , Burkhard Kuhlmann , Daniel Christoph Meisel
IPC分类号： G01C19/56
CPC分类号： G01C19/5747
摘要： In a yaw rate sensor with a substrate having a main extent plane and with a first and second partial structure disposed parallel to the main extent plane, the first partial structure includes a first driving structure and the second partial structure includes a second driving structure, the first and second partial structure being excitable by a driving device, via the first and second driving structure, into oscillation parallel to a first axis parallel to the main extent plane, the first partial structure having a first Coriolis element and the second partial structure having a second Coriolis element, the yaw rate sensor being characterized in that the first and second Coriolis elements are displaceable by a Coriolis force parallel to a second axis, which is perpendicular to the first axis, and parallel to a third axis, which is perpendicular to the first and second axis, the second axis extending parallel to the main extent plane, and the first Coriolis element being connected to the second Coriolis element via a coupling element.
摘要翻译：在具有主范围平面并具有平行于主范围平面布置的第一和第二部分结构的基板的偏航率传感器中，第一部分结构包括第一驱动结构，第二部分结构包括第二驱动结构，第一和第二部分结构可被驱动装置通过第一和第二驱动结构激发成与平行于主范围平面的第一轴平行的振荡，第一部分结构具有第一科里奥利元件，第二部分结构具有第二科里奥利元件，所述横摆率传感器的特征在于，所述第一和第二科里奥利元件可通过平行于垂直于所述第一轴线的第二轴线的科里奥利力移动，并且平行于垂直于所述第一轴线的第三轴线第一和第二轴，第二轴平行于主范围平面延伸，第一科里奥利元件连接到t 他通过耦合元件第二个科里奥利元件。

24. 发明授权

US08490483B2 Micromechanical yaw-rate sensor 有权
标题翻译：微机械偏航率传感器
公开(公告)号：US08490483B2
公开(公告)日：2013-07-23
申请号：US12834953
申请日：2010-07-13
申请人： Martin Wrede , Johannes Classen , Torsten Ohms , Carsten Geckeler , Burkhard Kuhlmann , Jens Frey , Daniel Christoph Meisel , Joerg Hauer , Thorsten Balslink
发明人： Martin Wrede , Johannes Classen , Torsten Ohms , Carsten Geckeler , Burkhard Kuhlmann , Jens Frey , Daniel Christoph Meisel , Joerg Hauer , Thorsten Balslink
IPC分类号： G01C19/56
CPC分类号： G01C19/5712 , G01C19/5747
摘要： A micromechanical yaw-rate sensor comprising a first yaw-rate sensor element, which outputs a first sensor signal, which contains information about a rotation around a first rotational axis, a second yaw-rate sensor element, which outputs a second sensor signal, which contains information about a rotation around a second rotational axis, which is perpendicular to the first rotational axis, a drive, which drives the first yaw-rate sensor element, and a coupling link, which mechanically couples the first yaw-rate sensor element and the second yaw-rate sensor element to one another, so that driving of the first yaw-rate sensor element also causes driving of the second yaw-rate sensor element.
摘要翻译：一种微机械摆动速率传感器，包括第一偏转速率传感器元件，该第一偏转速率传感器元件输出包含关于围绕第一旋转轴线的旋转的信息的第一传感器信号，输出第二传感器信号的第二偏转速度传感器元件，包含关于围绕垂直于第一旋转轴线的第二旋转轴线的旋转的信息，驱动第一偏转速率传感器元件的驱动器和耦合连杆，其将第一横摆速率传感器元件和第二偏转速率传感器元件彼此之间，使得第一偏转速率传感器元件的驱动也引起第二偏转速率传感器元件的驱动。

25. 发明申请

US20120186345A1 SELF-TEST FOR YAW RATE SENSORS 有权
标题翻译：自动检测传感器
公开(公告)号：US20120186345A1
公开(公告)日：2012-07-26
申请号：US13266408
申请日：2010-04-06
申请人： Wolfram Bauer , Johannes Classen , Rainer Willig , Matthias Meier , Burkhard Kuhlmann , Matthias Mathias Reimann , Ermin Esch , Hans-Dieter Schwarz , Michael Veith , Christoph Lang , Udo-Martin Gomez
发明人： Wolfram Bauer , Johannes Classen , Rainer Willig , Matthias Meier , Burkhard Kuhlmann , Matthias Mathias Reimann , Ermin Esch , Hans-Dieter Schwarz , Michael Veith , Christoph Lang , Udo-Martin Gomez
IPC分类号： G01C19/00
CPC分类号： G01C25/00 , G01C19/56 , G01C19/5726
摘要： A yaw rate sensor (10) includes a movable mass structure (12) and a drive component (13) which is suitable for setting the movable mass structure (12) in motion (14), and an analysis component (15) which is suitable for detecting a response (40) of the movable mass structure (12) to a yaw rate (Ω). A method for functional testing of a yaw rate sensor (10) includes the following steps: driving a movable mass structure (12), feeding a test signal (42) into a quadrature control loop (44) at a feed point (48) of the quadrature control loop (44), feeding back a deflection (40) of the movable mass structure (12), detecting a measure of the feedback of the movable mass structure (12), and reading out the response signal (47) from the quadrature control loop (44). In the yaw rate sensor (10) and also in the method, the readout of the response signal (47) in relation to a processing direction (45) of the test signal (42) is provided between a feed point (48) for a test signal (42) and an actuator (38) for feeding back a deflection (40) of the movable mass structure (12).
摘要翻译：横摆率传感器（10）包括可移动质量结构（12）和适于设置可移动质量结构（12）运动（14）的驱动部件（13），以及适合的分析部件（15）用于将所述可移动质量结构（12）的响应（40）检测到偏航率（＆lt; OHgr）。一种用于横摆角速度传感器（10）的功能测试的方法包括以下步骤：驱动可移动质量结构（12），将测试信号（42）馈送到正交控制回路（44）正交控制回路（44），反馈可移动质量结构（12）的偏转（40），检测可移动质量结构（12）的反馈的测量值，并从正交控制回路（44）。在偏航率传感器（10）中，并且在该方法中，响应信号（47）相对于测试信号（42）的处理方向（45）的读出被提供在用于测试信号（42）和用于反馈可移动质量结构（12）的偏转（40）的致动器（38）。

26. 发明申请

US20120152019A1 Yaw-rate sensor and method for operating a yaw-rate sensor 有权
标题翻译：偏航速率传感器和操作偏航率传感器的方法
公开(公告)号：US20120152019A1
公开(公告)日：2012-06-21
申请号：US13305292
申请日：2011-11-28
申请人： Burkhard Kuhlmann , Rolf Scheben , Daniel Christoph Meisel , Benjamin Schmidt , Thorsten Balslink
发明人： Burkhard Kuhlmann , Rolf Scheben , Daniel Christoph Meisel , Benjamin Schmidt , Thorsten Balslink
IPC分类号： G01C19/56
CPC分类号： G01C19/5712
摘要： A yaw-rate sensor is described as having a substrate which has a main plane of extension for detecting a yaw rate about a first axis extending parallel to the main plane of extension is provided, the yaw-rate sensor having a first rotation element and a second rotation element, the first rotation element being drivable about a first axis of rotation, the second rotation element being drivable about a second axis of rotation, the first axis of rotation being situated perpendicularly to the main plane of extension, the second axis of rotation being situated perpendicularly to the main plane of extension, the first rotation element and the second rotation element being drivable in opposite directions.
摘要翻译：横摆率传感器被描述为设置有具有用于检测围绕平行于主平面延伸的第一轴延伸的横摆率的主扩展平面的基板，该偏航率传感器具有第一旋转元件和第二旋转元件，第一旋转元件围绕第一旋转轴线驱动，第二旋转元件围绕第二旋转轴线驱动，第一旋转轴线垂直于主平面延伸，第二旋转轴线垂直于延伸主平面定位，第一旋转元件和第二旋转元件可沿相反方向驱动。

27. 发明申请

US20110088469A1 ROTATION-RATE SENSOR HAVING TWO SENSITIVE AXES 审中-公开
标题翻译：具有两个敏感轴的转速传感器
公开(公告)号：US20110088469A1
公开(公告)日：2011-04-21
申请号：US12513834
申请日：2007-11-08
申请人： Reinhard Neul , Johannes Classen , Sebastian Gracki , Burkhard Kuhlmann , Axel Franke , Oliver Kohn , Kersten Kehr , Christian Gerhardt
发明人： Reinhard Neul , Johannes Classen , Sebastian Gracki , Burkhard Kuhlmann , Axel Franke , Oliver Kohn , Kersten Kehr , Christian Gerhardt
IPC分类号： G01C19/56
CPC分类号： G01C19/5712
摘要： A method and system are provided including a rotation-rate sensor having a substrate, a bearing, a vibrating structure suspended on the bearing by springs in a rotatable manner for performing a planar driving vibration motion, and drive means for producing the planar driving vibration motion of the vibrating structure. The rotation-rate sensor has first evaluation means for detecting a rotation in a first axis of rotation and second evaluation means for detecting a rotation in a second axis of rotation.
摘要翻译：提供了一种方法和系统，其包括旋转速率传感器，其具有基板，轴承，以可旋转的方式由弹簧悬挂在轴承上的振动结构，用于执行平面驱动振动运动;以及驱动装置，用于产生平面驱动振动运动的振动结构。旋转速率传感器具有用于检测第一旋转轴线的旋转的第一评估装置和用于检测第二旋转轴线的旋转的第二评估装置。

28. 发明授权

US07313958B2 Rotational rate sensor 有权
标题翻译：转速传感器
公开(公告)号：US07313958B2
公开(公告)日：2008-01-01
申请号：US10471635
申请日：2002-09-25
申请人： Rainer Willig , Jochen Franz , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Dieter Maurer , Christian Doering , Wolfram Bauer , Udo Bischof , Reinhard Neul , Johannes Classen , Christoph Lang , Jens Frey
发明人： Rainer Willig , Jochen Franz , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Dieter Maurer , Christian Doering , Wolfram Bauer , Udo Bischof , Reinhard Neul , Johannes Classen , Christoph Lang , Jens Frey
IPC分类号： G01C19/00
CPC分类号： G01C19/5747
摘要： A rotational rate sensor having a substrate and a Coriolis element is proposed, the Coriolis element being situated over a surface of a substrate; a driving arrangement being provided, by which the Coriolis element is induced to vibrations parallel to a first axis; a detection arrangement being provided, by which an excursion of the Coriolis elements is detectable on the basis of a Coriolis force in a second axis that is provided to be essentially perpendicular to the first axis; the first and second axis being parallel to the surface of the substrate; sensor elements that are designated to be at least partially movable with respect to the substrate being provided; a force-conveying arrangement being provided; the force-conveying arrangement being provided to convey a static force effect between the substrate and at least one of the sensor elements.
摘要翻译：提出了具有基板和科里奥利元件的旋转速率传感器，科里奥利元件位于基板的表面上方; 提供了一种驱动装置，通过该驱动装置将科里奥利元件引入平行于第一轴线的振动; 提供了一种检测装置，通过该检测装置可以基于设置成基本上垂直于第一轴线的第二轴线中的科里奥利力检测科里奥利元件的偏移; 所述第一和第二轴平行于所述基板的表面; 指定为相对于所述基板至少部分移动的传感器元件; 提供力传递装置; 所述力输送装置被提供以在所述基底和所述传感器元件中的至少一个之间传递静态力效应。

29. 发明授权

US06705164B2 Rotation rate sensor 有权
标题翻译：转速传感器
公开(公告)号：US06705164B2
公开(公告)日：2004-03-16
申请号：US10258336
申请日：2003-03-19
申请人： Rainer Willig , Andreas Thomae , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Siegbert Goetz , Christian Doering , Michael Fehrenbach , Wolfram Bauer , Udo Bischof , Reinhard Neul , Karsten Funk , Markus Lutz , Gerhard Wucher , Jochen Franz
发明人： Rainer Willig , Andreas Thomae , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Siegbert Goetz , Christian Doering , Michael Fehrenbach , Wolfram Bauer , Udo Bischof , Reinhard Neul , Karsten Funk , Markus Lutz , Gerhard Wucher , Jochen Franz
IPC分类号： G01C1900
CPC分类号： G01C19/5747
摘要： A yaw-rate sensor including a first and a second Coriolis element that are arranged side-by-side above a surface of a substrate. The Coriolis elements are induced to oscillate parallel to a first axis Y. Due to a Coriolis force, the Coriolis elements are deflected in a second axis X which is perpendicular to the first axis Y. The oscillations of the first and second Coriolis elements occur in phase opposition to each other on paths which, without the effect of a Coriolis force, are two straight lines parallel to each other.
摘要翻译：一种偏转速率传感器，包括在衬底表面上并排布置的第一和第二科里奥利元件。诱导科里奥利元件平行于第一轴线Y振荡。由于科里奥利力，科里奥利元件在垂直于第一轴线Y的第二轴线X中偏转。第一和第二科里奥利元件的振荡发生在在没有科里奥利力的作用下彼此平行的两条直线的路径上相互相反。

30. 发明授权

US09081027B2 Yaw-rate sensor 有权
标题翻译：偏光率传感器
公开(公告)号：US09081027B2
公开(公告)日：2015-07-14
申请号：US12734228
申请日：2008-10-02
申请人： Reinhard Neul , Johannes Classen , Torsten Ohms , Burkhard Kuhlmann , Axel Franke , Oliver Kohn , Daniel Christoph Meisel , Joerg Hauer , Udo-Martin Gomez , Kersten Kehr
发明人： Reinhard Neul , Johannes Classen , Torsten Ohms , Burkhard Kuhlmann , Axel Franke , Oliver Kohn , Daniel Christoph Meisel , Joerg Hauer , Udo-Martin Gomez , Kersten Kehr
IPC分类号： G01C19/56 , G01P3/44 , G01C19/574 , F16F1/02
CPC分类号： G01C19/574 , F16F1/025 , G01C19/5747 , G01P3/44
摘要： A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, where the movable substructures are excitable into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, where deflections of the Coriolis elements induced by a Coriolis force are detectable, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.
摘要翻译：具有衬底和多个可移动子结构的偏转速率传感器，其安装在衬底的表面上，可移动子结构耦合到共享的，特别是中心弹簧元件，其中可移动子结构可激发成耦合振荡在平行于衬底的表面延伸的平面中，具有科里奥利元件的可移动子结构，其中可检测科里奥利力引起的科里奥利元件的偏转，第一科里奥利元件用于检测围绕第一轴线的偏航率，提供了用于检测围绕第二轴线的偏航率的第二科里奥利元件，所述第二轴线垂直于所述第一轴线定向。

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