专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

WO00052973A2 PLASMA REACTOR HAVING A HELICON WAVE HIGH DENSITY PLASMA SOURCE 审中-公开
标题翻译：具有HELICON WAVE高密度等离子体源的等离子体反应器
公开(公告)号：WO00052973A2
公开(公告)日：2000-09-08
申请号：PCT/US2000/005797
申请日：2000-03-06
IPC分类号： C23C16/00 , H01J37/32 , H05H20060101 , H05H1/00 , H05H1/24 , H05H
CPC分类号： H01J37/321 , H01J37/32678
摘要： A helicon wave, high density RF plasma reactor having improved plasma and contaminant control. The reactor contains a well defined anode electrode that is heated above a polymer condensation temperature to ensure that deposits of material that would otherwise alter the ground plane characteristics do not form on the anode. The reactor also contains a magnetic bucket for axially confining the plasma in the chamber using a plurality of vertically oriented magnetic strips or horizontally oriented magnetic toroids that circumscribe the chamber. The reactor may utilize a temperature control system to maintain a constant temperature on the surface of the chamber.
摘要翻译：具有改进的等离子体和污染物控制的螺旋波，高密度RF等离子体反应器。反应器包含明确定义的阳极电极，其被加热到聚合物冷凝温度以上，以确保否则会改变接地平面特性的材料沉积物不会在阳极上形成。反应器还包含磁性桶，用于使用多个垂直取向的磁条或围绕室的水平取向的磁环将轴向限制在室中的等离子体。反应器可以利用温度控制系统来维持室的表面上恒定的温度。

2. 发明申请

WO0052973A3 PLASMA REACTOR HAVING A HELICON WAVE HIGH DENSITY PLASMA SOURCE 审中-公开
标题翻译：具有HELICON WAVE高密度等离子体源的等离子体反应器
公开(公告)号：WO0052973A3
公开(公告)日：2001-01-11
申请号：PCT/US0005797
申请日：2000-03-06
申请人： APPLIED MATERIALS INC
发明人： YIN GERALD ZHEYAO , LEE CHII GUANG , KHOLODENKO ARNOLD , LOEWENHARDT PETER K , SHAN HONGCHING , MA DIANA XIAOBING , KATZ DAN
IPC分类号： C23C16/00 , H01J37/32 , H05H20060101 , H05H1/00 , H05H1/24
CPC分类号： H01J37/321 , H01J37/32678
摘要： A helicon wave, high density RF plasma reactor having improved plasma and contaminant control. The reactor contains a well defined anode electrode that is heated above a polymer condensation temperature to ensure that deposits of material that would otherwise alter the ground plane characteristics do not form on the anode. The reactor also contains a magnetic bucket for axially confining the plasma in the chamber using a plurality of vertically oriented magnetic strips or horizontally oriented magnetic toroids that circumscribe the chamber. The reactor may utilize a temperature control system to maintain a constant temperature on the surface of the chamber.
摘要翻译：具有改进的等离子体和污染物控制的螺旋波，高密度RF等离子体反应器。反应器包含明确定义的阳极电极，其被加热到聚合物冷凝温度以上，以确保否则会改变接地平面特性的材料沉积物不会在阳极上形成。反应器还包含磁性桶，用于使用多个垂直取向的磁条或围绕室的水平取向的磁环将轴向限制在室中的等离子体。反应器可以利用温度控制系统来维持室的表面上恒定的温度。

3. 发明申请

WO2005004556A3 VORTEX REACTOR AND METHOD OF USING IT 审中-公开
标题翻译： VORTEX反应器及其使用方法
公开(公告)号：WO2005004556A3
公开(公告)日：2005-06-02
申请号：PCT/US2004019590
申请日：2004-06-18
申请人： UNIV DREXEL , UNIV ILLINOIS , FRIDMAN ALEXANDER , GUTSOL ALEXANDER F , CHO YOUNG I , KENNEDY LAWRENCE , SAVELIEV ALEXEI , ROMANETS ANDREY , MATVEEV IGOR , BLANK KENNETH
发明人： FRIDMAN ALEXANDER , GUTSOL ALEXANDER F , CHO YOUNG I , KENNEDY LAWRENCE , SAVELIEV ALEXEI , ROMANETS ANDREY , MATVEEV IGOR , BLANK KENNETH
IPC分类号： B01J19/08 , H05H20060101 , H05H1/24
CPC分类号： F23C10/007 , B01F5/0068 , B01J8/008 , B01J8/085 , B01J8/14 , B01J8/245 , B01J19/006 , B01J19/088 , B01J2208/0084 , B01J2219/0809 , B01J2219/0824 , B01J2219/0879 , B01J2219/0894 , B01J2219/1946 , B22F9/22 , B22F2998/00 , H05H1/48 , B22F2202/13 , B22F2202/15
摘要： A vortex reactor is provided. The vortex reactor includes a reaction chamber formed by a frustum-shaped portion, the narrower part of which is downwardly oriented. Proximate to the narrower part of the frustum-shaped portion, the vortex reactor includes apparatus for creating an axial gas flow and apparatus for creating a circumferential gas flow. The vortex reactor also includes a particulate solid inlet for feeding particulate solids to the reaction chamber. The vortex reactor may optionally include apparatus for generating plasma in the reaction chamber by providing a gliding arc electrical discharge in the reaction chamber. Also provided is a method of processing particulate solids using the vortex reactor of the invention. A reverse vortex plasma reactor (TSAPG) is also provided.
摘要翻译：提供涡流反应器。涡流反应器包括由截头锥形部分形成的反应室，其较窄的部分向下定向。近似于截头锥形部分的较窄部分，涡流反应器包括用于产生轴向气流的装置和用于产生圆周气流的装置。涡流反应器还包括用于将颗粒固体供给到反应室的颗粒状固体入口。涡流反应器可以可选地包括通过在反应室中提供滑动电弧放电来在反应室中产生等离子体的装置。还提供了使用本发明的涡流反应器处理颗粒固体的方法。还提供了反涡流等离子体反应器（TSAPG）。

4. 发明申请

WO2005020646A2 SYSTEMS AND METHODS UTILIZING AN APERTURE WITH A REACTIVE ATOM PLASMA TORCH 审中-公开
标题翻译：使用反应性ATOM等离子体转鼓使用孔的系统和方法
公开(公告)号：WO2005020646A2
公开(公告)日：2005-03-03
申请号：PCT/US2004025410
申请日：2004-08-06
申请人： RAPT IND INC , CHANG ANDREW , CARR JEFFREY W , KELLEY JUDE , FISKE PETER
发明人： CHANG ANDREW , CARR JEFFREY W , KELLEY JUDE , FISKE PETER
IPC分类号： B23K10/00 , H05H20060101 , H05H
CPC分类号： H05H1/30
摘要： The footprint of a reactive atom plasma processing tool can be modified using an aperture device. A flow of reactive gas can be injected into the center of an annular plasma. An aperture can be positioned relative to the plasma such that the effective footprint of the plasma can be changed without adjusting the gas flows or swapping out the tool. Once the aperture and tool are in position relative to a workpiece, reactive atom plasma processing can be used to modify the surface of the workpiece, such as to etch, smooth, polish, clean, and/or deposit material onto the workpiece. If necessary, a coolant can be circulated about the aperture. Multiple apertures can also be used to provide a variety of footprint sizes and/or shapes. This description is not intended to be a complete description of, or limit the scope of, the invention. Other features, aspects, and objects of the invention can be obtained from a review of the specification, the figures, and the claims.
摘要翻译：可以使用孔径装置修改反应性原子等离子体处理工具的占地面积。反应气体流可以注入环形等离子体的中心。可以相对于等离子体定位孔，使得等离子体的有效占地面积可以在不调节气流或换出工具的情况下改变。一旦孔和工具相对于工件就位，反应性原子等离子体处理可用于改变工件的表面，例如蚀刻，光滑，抛光，清洁和/或沉积材料到工件上。如果需要，可以在孔周围循环冷却剂。也可以使用多个孔来提供各种尺寸和/或形状。本说明书不是对本发明的完整描述或限制本发明的范围。本发明的其它特征，方面和目的可以通过对说明书，附图和权利要求的评论来获得。

5. 发明申请

WO2004112447A3 INDUCTIVELY COUPLED PLASMA/PARTIAL OXIDATION REFORMATION OF CARBONACEOUS COMPOUNDS TO PRODUCE FUEL FOR ENERGY PRODUCTION 审中-公开
标题翻译：感应耦合等离子体/部分氧化碳酸盐化合物生产燃料以实现能源生产
公开(公告)号：WO2004112447A3
公开(公告)日：2007-08-23
申请号：PCT/US2004018407
申请日：2004-06-10
申请人： NUVOTEC INC , BLUTKE ANDREAS , VAVRUSKA JOHN , HENDERSON MARK , FERGUSON ROBERT
发明人： BLUTKE ANDREAS , VAVRUSKA JOHN , HENDERSON MARK , FERGUSON ROBERT
IPC分类号： B23K10/00 , C01B3/34 , C01B3/36 , C10J1/00 , C10J3/18 , C10J3/78 , C10K1/00 , H01M8/04 , H01M8/06 , H01M8/12 , H01M8/14 , H01M16/00 , H05H20060101
CPC分类号： C01B3/342 , C01B3/36 , C01B2203/0255 , C01B2203/066 , C01B2203/0838 , C01B2203/0861 , C01B2203/1241 , C01B2203/1247 , C01B2203/84 , C10J3/18 , C10J3/723 , C10J3/78 , C10J2300/093 , C10J2300/0959 , C10J2300/0969 , C10J2300/0989 , C10J2300/1238 , C10J2300/1646 , C10J2300/165 , C10J2300/1671 , C10J2300/1675 , C10J2300/1678 , C10J2300/1884 , H01M8/04022 , H01M8/0643 , H01M16/003 , H01M2008/1293 , H01M2008/147 , H01M2250/402 , Y02B90/12 , Y02E20/16 , Y02E60/526
摘要： Inductively coupled plasma (ICP) reforming converts carbonaceous compounds into a fuel for use in generating electrical power. Energy rich hydrocarbon fuels, such as coal, marine diesel, oils, and hydrocarbon wastes are employed as a feedstock for the ICP, which transforms the feedstock into a fuel that can be used by fuel cells and gas turbines for the production of electricity. Overall efficiency of an ICP based electrical power system can be increased by providing partial oxidation within the reaction vessel. Partial oxidation conditions consume a small amount of the reformed fuel gas, thereby liberating sufficient thermal energy to reduce the electrical power requirements of the ICP to maintain desired reactor temperatures, and providing an increase in the overall net electrical power production. Integrated power production system can also adjust to meet an increased requirement for process heat and steam by balancing the effect of partial oxidation.
摘要翻译：电感耦合等离子体（ICP）重整将碳质化合物转化成用于产生电力的燃料。使用能量丰富的碳氢化合物燃料，如煤，船用柴油，油和烃类废物作为ICP的原料，其将原料转化为可被燃料电池和燃气轮机用于生产电力的燃料。通过在反应容器内提供部分氧化，可以提高基于ICP的电力系统的整体效率。部分氧化条件消耗少量的重整燃料气体，由此释放足够的热能，以减少ICP的电力需求以维持所需的反应器温度，并提供总的净电力产量的增加。综合电力生产系统也可以通过平衡部分氧化的影响来调整以满足对工艺热和蒸汽的增加的需求。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式