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    • 1. 发明申请
    • METHOD AND APPARATUS FOR SPECIFIC SPECTROSCOPIC ATOMIC IMAGING USING COMPLEMENTARY WAVELENGTH SPECIFIC PHOTON BIASING WITH ELECTRONIC AND TEMPERATURE BIASING ON A SCANNING TUNNELING MICROSCOPE
    • 在扫描隧道显微镜上使用电子和温度偏移的补充波长特定光子偏转的特定光谱原子成像的方法和装置
    • WO1990010304A1
    • 1990-09-07
    • PCT/US1990000098
    • 1990-01-08
    • MIDWEST RESEARCH INSTITUTEKAZMERSKI, Lawrence, L.
    • MIDWEST RESEARCH INSTITUTE
    • H01J37/285
    • G01Q60/12G01Q30/02G01Q30/10Y10S977/852Y10S977/861Y10S977/868
    • A method and apparatus (10) for specific spectroscopic atomic-imaging is disclosed for spatial resolution and imaging for display not only individual atoms on a sample (5) surface, but also bonding and the specific atomic species in such bond. The apparatus (10) includes a scanning tunneling microscope (STM) that is modified to include photon biasing, preferably a tuneable laser (54), modulating electronic surface biasing for the sample (5), and temperature biasing, preferably a vibration-free refrigerated sample mounting stage (12). Computer control (100) and data processing and visual display components (102) are also included. The method includes modulating the electronic bias voltage with and without selected photon wavelengths and frequency biasing under a stabilizing (usually cold) bias temperature to detect bonding and specific atomic species in the bonds as the STM rasters the sample (5). This data is processed along with atomic spatial topography data obtained from the STM raster scan to create a real-time visual image of the atoms on the sample (5) surface.
    • 公开了用于特定光谱原子成像的方法和装置(10)用于空间分辨率和成像,用于不仅显示样品(5)表面上的单个原子,而且还可以键合和这种键中的特定原子物质。 该装置(10)包括扫描隧道显微镜(STM),其被修改为包括光子偏置,优选可调谐激光器(54),调制用于样品(5)的电子表面偏置,以及温度偏置,优选无振动的冷冻 样品安装台(12)。 还包括计算机控制(100)和数据处理和视觉显示组件(102)。 该方法包括在稳定(通常为冷)偏压温度下调制具有和不具有所选择的光子波长和频率偏置的电子偏置电压,以在STM栅极对样品(5)进行栅格扫描时检测键中的键合和特定原子物质。 将该数据与从STM光栅扫描获得的原子空间地形数据一起处理,以创建样品(5)表面上的原子的实时视觉图像。
    • 4. 发明申请
    • INSTALLATION FOR THE STUDY OR TRANSFORMATION OF SAMPLE SURFACES IN A VACUUM OR CONTROLLED ATMOSPHERE
    • 安装在真空或控制的大气中的样品表面的研究或转换
    • WO1991017429A1
    • 1991-11-14
    • PCT/FR1991000378
    • 1991-05-07
    • SPIRAL RECHERCHE ET DEVELOPPEMENT (SARL)GOUDONNET, Jean-PierreLACROUTE, Yvon
    • SPIRAL RECHERCHE ET DEVELOPPEMENT (SARL)
    • G01N27/00
    • G01Q30/16G02B21/24H01J37/20Y10S977/86Y10S977/861Y10S977/869Y10S977/871Y10S977/881Y10S977/888
    • An installation for the study of the surface of samples in a vacuum or controlled atmosphere, of the type comprising a main chamber in which is placed a microscopy stage support for at least one device, known as SXM, for microscopy, spectroscopy or engraving a sample surface, according to a process for carrying out the scanning of said surface using an electrically or light conducting microprobe, said installation being characterized in that the stage support can be disconnected from the main chamber and rotated around a central axis in order for an assembly of SXM devices arranged on the periphery of said stage to be used. The invention is applicable, in particular, to electron scanning tunnelling microscopy and/or spectroscopy, especially in ultrahigh vacuums, optic scanning tunnelling microscopy and/or spectroscopy, or to the engraving of nanometric structures using microlithographic optic and/or electronic processes.
    • PCT No.PCT / FR91 / 00378 Sec。 371日期:1993年1月5日 102(e)日期1993年1月5日PCT提交1991年5月7日PCT公布。 公开号WO91 / 17429 日期为1991年11月14日。用于分析或转化放置在真空或受控气氛中的样品表面的装置,包括主壳体,其中定位有至少一个称为SXM的装置的支撑板,其中, 例如光或电导电尖端定位为接近待检测样品的表面,无论是在空气中还是在真空中。 该器件旨在通过微探针扫描表面进行显微镜,光谱或样品表面的蚀刻。 支撑板配备有用于将其与主壳体断开的元件以及用于使支撑板围绕中心轴线旋转的元件,允许使用装配在支撑板的周边中的一系列SXM装置。 主外壳由用于样品表面的洗涤外壳和样品的引入和储存外壳完成,样品可以通过传送杆端部的安装进行处理,该输送杆可纵向移动并沿轴向旋转 外壳的对齐轴。
    • 5. 发明申请
    • SCANNING TUNNELING MICROSCOPE, ITS PROBE, PROCESSING METHOD FOR THE PROBE AND PRODUCTION METHOD FOR FINE STRUCTURE
    • 扫描隧道显微镜及其探针,精细结构探针和生产方法的处理方法
    • WO00070325A1
    • 2000-11-23
    • PCT/JP1999/006385
    • 1999-11-16
    • B82B3/00G01B7/34G01Q60/10G01Q60/16G01Q80/00G01N13/12G12B21/04
    • B82B3/00G01Q60/16Y10S977/861Y10S977/869Y10S977/875Y10S977/879
    • A scanning tunneling microscope capable of constructing a continuous fine structure, its probe, a processing method for the probe and a production method for a fine structure. A probe (2) for a scanning tunneling microscope made of inonic conductive and electronic conductive Ag2S single crystal is provided, a voltage and a tunnel current (6) is applied to between the probe (2) and a substrate (3) to move the above Ag ions and grow a protrusion (mini-chip) consisting of Ag ions or Ag atoms at the tip end of the probe (2), after the growth of the protrusion, the applied voltage polarity is reversed to allow Ag ions or Ag atoms constituting the grown protrusion to re-dissolve into the Ag2S single crystal and shrink the protrusion, and a probe (2) having a shaped protrusion consisting of the Ag ions or Ag atoms is formed. Movable ions in a mixed conductive material or atoms constituting a mixed conductive material are applied to a substrate to form a fine structure on the substrate.
    • 能够构造连续精细结构的扫描隧道显微镜,其探针,探针的处理方法和精细结构的制造方法。 提供用于由异性导电和电子导电Ag2S单晶构成的扫描隧道显微镜的探针(2),在探针(2)和基底(3)之间施加电压和隧道电流(6)以移动 在Ag离子之上并在探针(2)的尖端处生长由Ag离子或Ag原子组成的突起(微型芯片),在突起生长之后,施加的电压极性反转以允许Ag离子或Ag原子 构成生长的突起以再溶解到Ag2S单晶中并收缩突起,并且形成具有由Ag离子或Ag原子组成的成形突起的探针(2)。 混合导电材料中的可动离子或构成混合导电材料的原子被施加到衬底上以在衬底上形成精细结构。
    • 7. 发明申请
    • INTEGRATED SCANNING TUNNELING MICROSCOPE
    • 集成扫描隧道显微镜
    • WO1989007258A2
    • 1989-08-10
    • PCT/US1989000243
    • 1989-01-26
    • THE BOARD OF TRUSTEES OF THE LELAND STANFORD ...
    • THE BOARD OF TRUSTEES OF THE LELAND STANFORD ...ALBRECHT, Thomas, R.ZDEBLICK, Mark, J.
    • G01N27/00
    • H01L41/0966G01Q10/045G01Q60/16G01Q80/00G11B9/14G11B9/1418G11B9/1436G11B9/1472H01J37/20H01L41/316Y10S977/837Y10S977/861Y10S977/872Y10S977/873Y10S977/943Y10S977/947Y10T29/42
    • There is disclosed herein an integrated scanning tunneling microscope and an integrated piezoelectric transducer and methods for making both. The device consists of one or two arm piezoelectric bimorph cantilevers (42, 46) formed by micromachining using standard integrated circuit processing steps. These cantilevers are attached to the substrate (32) at one area (80) and are free to move under the influence of piezoelectric forces which are caused by the application of appropriate voltages generated by control circuitry (88) and applied to pairs of electrodes (48, 36, 44; 52, 49, 44) formed as an integral part of the bimorph cantilever structure. The electric fields caused by the control voltages cause the piezoelectric bimorphs to move in any desired fashion within ranges determined by the design. The bimorph cantilevers have tips (66) with very sharp points formed thereon which are moved by the action of the control circuit (88) and the piezoelectric bimorphs so to stay within a very small distance of a conducting surface (84). The movements of the tip can be tracked to yield an image of the surface at atomic resolution.
    • 本发明公开了一种集成扫描隧道显微镜和集成压电换能器以及制造它们的方法。 该装置由一个或两个使用标准印刷电路处理操作通过微加工制造的双压电晶片支架(42,46)组成。 这些支架通过区域(80)附着在基板(32)上,并且在施加由控制电路(88)产生的适当电压产生的压电力的作用下自由移动并施加到 成对的电极(48,36,44; 52,49,44)形成双压电晶片托架结构的组成部分。 由控制电压产生的电场使双压电晶体控制台以任何期望的方式在由设备设计所确定的限制内移动。 双压电晶片控制台具有尖端(66),以非常AIGUEES端部,其中,所述控制电路(88)和压电双晶片控制台的作用下移动,从而将保持在导电表面的一个非常短的距离( 84)。 可以跟踪尖端的运动以产生具有原子阶数分辨率的表面图像。
    • 8. 发明申请
    • SCANNING TUNNELING MICROSCOPE ASSEMBLY, REACTOR, AND SYSTEM
    • 扫描隧道微波组件,反应器和系统
    • WO2011014315A1
    • 2011-02-03
    • PCT/US2010/039506
    • 2010-06-22
    • REGENTS OF THE UNIVERSITY OF CALIFORNIATAO, FengSALMERON, MiquelSOMORJAI, Gabor
    • TAO, FengSALMERON, MiquelSOMORJAI, Gabor
    • G01Q60/10
    • G01Q60/16B82Y35/00G01Q30/12G01Q30/16Y10S977/86Y10S977/861Y10S977/869Y10S977/871
    • An embodiment of a scanning tunneling microscope (STM) reactor includes a pressure vessel, an STM assembly, and three spring coupling objects. The pressure vessel includes a sealable port, an interior, and an exterior. An embodiment of an STM system includes a vacuum chamber, an STM reactor, and three springs. The three springs couple the STM reactor to the vacuum chamber and are operable to suspend the scanning tunneling microscope reactor within the interior of the vacuum chamber during operation of the STM reactor. An embodiment of an STM assembly includes a coarse displacement arrangement, a piezoelectric fine displacement scanning tube coupled to the coarse displacement arrangement, and a receiver. The piezoelectric fine displacement scanning tube is coupled to the coarse displacement arrangement. The receiver is coupled to the piezoelectric scanning tube and is operable to receive a tip holder, and the tip holder is operable to receive a tip.
    • 扫描隧道显微镜(STM)反应器的一个实施例包括压力容器,STM组件和三个弹簧联接件。 压力容器包括可密封的端口,内部和外部。 STM系统的实施例包括真空室,STM反应器和三个弹簧。 三个弹簧将STM反应器耦合到真空室,并且可操作以在STM反应器的操作期间将扫描隧道显微镜反应器悬挂在真空室内部。 STM组件的实施例包括粗排列布置,耦合到粗位移布置的压电精细位移扫描管和接收器。 压电精细位移扫描管耦合到粗排位置。 接收器耦合到压电扫描管并且可操作以接收尖端保持器,并且尖端保持器可操作以接收尖端。