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1. 发明申请

WO1990010304A1 METHOD AND APPARATUS FOR SPECIFIC SPECTROSCOPIC ATOMIC IMAGING USING COMPLEMENTARY WAVELENGTH SPECIFIC PHOTON BIASING WITH ELECTRONIC AND TEMPERATURE BIASING ON A SCANNING TUNNELING MICROSCOPE 审中-公开
标题翻译：在扫描隧道显微镜上使用电子和温度偏移的补充波长特定光子偏转的特定光谱原子成像的方法和装置
公开(公告)号：WO1990010304A1
公开(公告)日：1990-09-07
申请号：PCT/US1990000098
申请日：1990-01-08
申请人： MIDWEST RESEARCH INSTITUTE , KAZMERSKI, Lawrence, L.
发明人： MIDWEST RESEARCH INSTITUTE
IPC分类号： H01J37/285
CPC分类号： G01Q60/12 , G01Q30/02 , G01Q30/10 , Y10S977/852 , Y10S977/861 , Y10S977/868
摘要： A method and apparatus (10) for specific spectroscopic atomic-imaging is disclosed for spatial resolution and imaging for display not only individual atoms on a sample (5) surface, but also bonding and the specific atomic species in such bond. The apparatus (10) includes a scanning tunneling microscope (STM) that is modified to include photon biasing, preferably a tuneable laser (54), modulating electronic surface biasing for the sample (5), and temperature biasing, preferably a vibration-free refrigerated sample mounting stage (12). Computer control (100) and data processing and visual display components (102) are also included. The method includes modulating the electronic bias voltage with and without selected photon wavelengths and frequency biasing under a stabilizing (usually cold) bias temperature to detect bonding and specific atomic species in the bonds as the STM rasters the sample (5). This data is processed along with atomic spatial topography data obtained from the STM raster scan to create a real-time visual image of the atoms on the sample (5) surface.
摘要翻译：公开了用于特定光谱原子成像的方法和装置（10）用于空间分辨率和成像，用于不仅显示样品（5）表面上的单个原子，而且还可以键合和这种键中的特定原子物质。该装置（10）包括扫描隧道显微镜（STM），其被修改为包括光子偏置，优选可调谐激光器（54），调制用于样品（5）的电子表面偏置，以及温度偏置，优选无振动的冷冻样品安装台（12）。还包括计算机控制（100）和数据处理和视觉显示组件（102）。该方法包括在稳定（通常为冷）偏压温度下调制具有和不具有所选择的光子波长和频率偏置的电子偏置电压，以在STM栅极对样品（5）进行栅格扫描时检测键中的键合和特定原子物质。将该数据与从STM光栅扫描获得的原子空间地形数据一起处理，以创建样品（5）表面上的原子的实时视觉图像。

2. 发明申请

WO8907258A3 INTEGRATED SCANNING TUNNELING MICROSCOPE 审中-公开
标题翻译：集成扫描隧道显微镜
公开(公告)号：WO8907258A3
公开(公告)日：1989-09-08
申请号：PCT/US8900243
申请日：1989-01-26
申请人： UNIV LELAND STANFORD JUNIOR
发明人： ALBRECHT THOMAS R , ZDEBLICK MARK J
IPC分类号： G01B7/34 , B44C1/22 , G01N23/00 , G01N23/225 , G01N27/00 , G01N37/00 , G01Q10/06 , G01Q20/04 , G01Q30/04 , G01Q60/10 , G01Q60/16 , G01Q70/16 , G01Q80/00 , G11B9/00 , G11B9/04 , G11B9/14 , G11C13/00 , G11C13/04 , H01J37/20 , H01J37/28 , H01L41/09 , H01L41/22 , H02N2/00 , H01J37/00 , H01L41/00
CPC分类号： H01L41/0966 , G01Q10/045 , G01Q60/16 , G01Q80/00 , G11B9/14 , G11B9/1418 , G11B9/1436 , G11B9/1472 , H01J37/20 , H01L41/316 , Y10S977/837 , Y10S977/861 , Y10S977/872 , Y10S977/873 , Y10S977/943 , Y10S977/947 , Y10T29/42
摘要： There is disclosed herein an integrated scanning tunneling microscope and an integrated piezoelectric transducer and methods for making both. The device consists of one or two arm piezoelectric bimorph cantilevers (42, 46) formed by micromachining using standard integrated circuit processing steps. These cantilevers are attached to the substrate (32) at one area (80) and are free to move under the influence of piezoelectric forces which are caused by the application of appropriate voltages generated by control circuitry (88) and applied to pairs of electrodes (48, 36, 44; 52, 49, 44) formed as an integral part of the bimorph cantilever structure. The electric fields caused by the control voltages cause the piezoelectric bimorphs to move in any desired fashion within ranges determined by the design. The bimorph cantilevers have tips (66) with very sharp points formed thereon which are moved by the action of the control circuit (88) and the piezoelectric bimorphs so to stay within a very small distance of a conducting surface (84). The movements of the tip can be tracked to yield an image of the surface at atomic resolution.

3. 发明申请

WO1992014250A1 MICROSTRUCTURE ARRAY AND ACTIVATION SYSTEM THEREFOR 审中-公开
标题翻译：微结构阵列及其激活体系
公开(公告)号：WO1992014250A1
公开(公告)日：1992-08-20
申请号：PCT/US1992000719
申请日：1992-01-29
申请人： SPITZER, Richard
IPC分类号： G11C07/00
CPC分类号： G11B5/00 , G01Q80/00 , G11B5/09 , G11B5/35 , G11B5/4969 , G11B5/4992 , G11B9/1418 , G11B19/02 , G11B20/10 , G11B21/00 , G11B21/003 , G11B2005/0002 , G11B2005/0005 , G11B2005/0016 , G11C11/14 , G11C13/02 , Y10S977/85 , Y10S977/852 , Y10S977/861 , Y10S977/872 , Y10S977/874 , Y10S977/947
摘要： An electronic transducer array and transfer device and method which provides for activation of selected transducers at selected times. In one application, the device performs data transfer by a combination of suitably interconnected submillimeter transducers (4) capable of sensing and/or actuating microscopic data-storage cells, and electronic switching (402, 602, 702) to activate selected individual transducers. One embodiment of the invention provides for magnetic transducers for reading (304) and writing (302) on a magnetic medium (8). Another embodiment of the invention provides tunneling electron transducers (10) arranged in an array.

4. 发明申请

WO1991017429A1 INSTALLATION FOR THE STUDY OR TRANSFORMATION OF SAMPLE SURFACES IN A VACUUM OR CONTROLLED ATMOSPHERE 审中-公开
标题翻译：安装在真空或控制的大气中的样品表面的研究或转换
公开(公告)号：WO1991017429A1
公开(公告)日：1991-11-14
申请号：PCT/FR1991000378
申请日：1991-05-07
申请人： SPIRAL RECHERCHE ET DEVELOPPEMENT (SARL) , GOUDONNET, Jean-Pierre , LACROUTE, Yvon
发明人： SPIRAL RECHERCHE ET DEVELOPPEMENT (SARL)
IPC分类号： G01N27/00
CPC分类号： G01Q30/16 , G02B21/24 , H01J37/20 , Y10S977/86 , Y10S977/861 , Y10S977/869 , Y10S977/871 , Y10S977/881 , Y10S977/888
摘要： An installation for the study of the surface of samples in a vacuum or controlled atmosphere, of the type comprising a main chamber in which is placed a microscopy stage support for at least one device, known as SXM, for microscopy, spectroscopy or engraving a sample surface, according to a process for carrying out the scanning of said surface using an electrically or light conducting microprobe, said installation being characterized in that the stage support can be disconnected from the main chamber and rotated around a central axis in order for an assembly of SXM devices arranged on the periphery of said stage to be used. The invention is applicable, in particular, to electron scanning tunnelling microscopy and/or spectroscopy, especially in ultrahigh vacuums, optic scanning tunnelling microscopy and/or spectroscopy, or to the engraving of nanometric structures using microlithographic optic and/or electronic processes.
摘要翻译： PCT No.PCT / FR91 / 00378 Sec。 371日期：1993年1月5日 102（e）日期1993年1月5日PCT提交1991年5月7日PCT公布。公开号WO91 / 17429 日期为1991年11月14日。用于分析或转化放置在真空或受控气氛中的样品表面的装置，包括主壳体，其中定位有至少一个称为SXM的装置的支撑板，其中，例如光或电导电尖端定位为接近待检测样品的表面，无论是在空气中还是在真空中。该器件旨在通过微探针扫描表面进行显微镜，光谱或样品表面的蚀刻。支撑板配备有用于将其与主壳体断开的元件以及用于使支撑板围绕中心轴线旋转的元件，允许使用装配在支撑板的周边中的一系列SXM装置。主外壳由用于样品表面的洗涤外壳和样品的引入和储存外壳完成，样品可以通过传送杆端部的安装进行处理，该输送杆可纵向移动并沿轴向旋转外壳的对齐轴。

5. 发明申请

WO00070325A1 SCANNING TUNNELING MICROSCOPE, ITS PROBE, PROCESSING METHOD FOR THE PROBE AND PRODUCTION METHOD FOR FINE STRUCTURE 审中-公开
标题翻译：扫描隧道显微镜及其探针，精细结构探针和生产方法的处理方法
公开(公告)号：WO00070325A1
公开(公告)日：2000-11-23
申请号：PCT/JP1999/006385
申请日：1999-11-16
IPC分类号： B82B3/00 , G01B7/34 , G01Q60/10 , G01Q60/16 , G01Q80/00 , G01N13/12 , G12B21/04
CPC分类号： B82B3/00 , G01Q60/16 , Y10S977/861 , Y10S977/869 , Y10S977/875 , Y10S977/879
摘要： A scanning tunneling microscope capable of constructing a continuous fine structure, its probe, a processing method for the probe and a production method for a fine structure. A probe (2) for a scanning tunneling microscope made of inonic conductive and electronic conductive Ag2S single crystal is provided, a voltage and a tunnel current (6) is applied to between the probe (2) and a substrate (3) to move the above Ag ions and grow a protrusion (mini-chip) consisting of Ag ions or Ag atoms at the tip end of the probe (2), after the growth of the protrusion, the applied voltage polarity is reversed to allow Ag ions or Ag atoms constituting the grown protrusion to re-dissolve into the Ag2S single crystal and shrink the protrusion, and a probe (2) having a shaped protrusion consisting of the Ag ions or Ag atoms is formed. Movable ions in a mixed conductive material or atoms constituting a mixed conductive material are applied to a substrate to form a fine structure on the substrate.
摘要翻译：能够构造连续精细结构的扫描隧道显微镜，其探针，探针的处理方法和精细结构的制造方法。提供用于由异性导电和电子导电Ag2S单晶构成的扫描隧道显微镜的探针（2），在探针（2）和基底（3）之间施加电压和隧道电流（6）以移动在Ag离子之上并在探针（2）的尖端处生长由Ag离子或Ag原子组成的突起（微型芯片），在突起生长之后，施加的电压极性反转以允许Ag离子或Ag原子构成生长的突起以再溶解到Ag2S单晶中并收缩突起，并且形成具有由Ag离子或Ag原子组成的成形突起的探针（2）。混合导电材料中的可动离子或构成混合导电材料的原子被施加到衬底上以在衬底上形成精细结构。

6. 发明申请

WO1995012882A1 METHOD AND APPARATUS FOR RETRIEVING DIGITAL DATA FROM A MAGNETIC STORAGE MEDIUM 审中-公开
标题翻译：用于从磁存储介质检索数字数据的方法和装置
公开(公告)号：WO1995012882A1
公开(公告)日：1995-05-11
申请号：PCT/EP1993003079
申请日：1993-11-03
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION , IBM DEUTSCHLAND INFORMATIONS SYSTEME GMBH , DUERIG, Urs, Th. , ALLENSPACH, Rolf , GRUETTER, Peter
发明人： INTERNATIONAL BUSINESS MACHINES CORPORATION , IBM DEUTSCHLAND INFORMATIONS SYSTEME GMBH
IPC分类号： G11B11/00
CPC分类号： G11B5/33 , B82Y10/00 , G11B11/007 , G11B11/10 , Y10S977/86 , Y10S977/861
摘要： An apparatus and a method for retrieving data stored on a magnetic medium with a high resolution is described. It is characterized by measuring a tunneling current which is partly depending on the magnetization of the medium (1). This dependence is caused by irradiating the medium (1) with polarized non-ionizing light. The tunneling current can be measured with a high lateral resolution by applying a probing tip (2) as known from conventional scanning tunneling microscopy or related techniques.
摘要翻译：描述了一种用于以高分辨率检索存储在磁介质上的数据的装置和方法。其特征在于测量部分取决于介质（1）的磁化的隧道电流。这种依赖性是通过用极化的非电离光照射介质（1）引起的。通过应用传统扫描隧道显微镜或相关技术已知的探测尖端（2），可以以高横向分辨率测量隧道电流。

7. 发明申请

WO1989007258A2 INTEGRATED SCANNING TUNNELING MICROSCOPE 审中-公开
标题翻译：集成扫描隧道显微镜
公开(公告)号：WO1989007258A2
公开(公告)日：1989-08-10
申请号：PCT/US1989000243
申请日：1989-01-26
申请人： THE BOARD OF TRUSTEES OF THE LELAND STANFORD ...
发明人： THE BOARD OF TRUSTEES OF THE LELAND STANFORD ... , ALBRECHT, Thomas, R. , ZDEBLICK, Mark, J.
IPC分类号： G01N27/00
CPC分类号： H01L41/0966 , G01Q10/045 , G01Q60/16 , G01Q80/00 , G11B9/14 , G11B9/1418 , G11B9/1436 , G11B9/1472 , H01J37/20 , H01L41/316 , Y10S977/837 , Y10S977/861 , Y10S977/872 , Y10S977/873 , Y10S977/943 , Y10S977/947 , Y10T29/42
摘要： There is disclosed herein an integrated scanning tunneling microscope and an integrated piezoelectric transducer and methods for making both. The device consists of one or two arm piezoelectric bimorph cantilevers (42, 46) formed by micromachining using standard integrated circuit processing steps. These cantilevers are attached to the substrate (32) at one area (80) and are free to move under the influence of piezoelectric forces which are caused by the application of appropriate voltages generated by control circuitry (88) and applied to pairs of electrodes (48, 36, 44; 52, 49, 44) formed as an integral part of the bimorph cantilever structure. The electric fields caused by the control voltages cause the piezoelectric bimorphs to move in any desired fashion within ranges determined by the design. The bimorph cantilevers have tips (66) with very sharp points formed thereon which are moved by the action of the control circuit (88) and the piezoelectric bimorphs so to stay within a very small distance of a conducting surface (84). The movements of the tip can be tracked to yield an image of the surface at atomic resolution.
摘要翻译：本发明公开了一种集成扫描隧道显微镜和集成压电换能器以及制造它们的方法。该装置由一个或两个使用标准印刷电路处理操作通过微加工制造的双压电晶片支架（42,46）组成。这些支架通过区域（80）附着在基板（32）上，并且在施加由控制电路（88）产生的适当电压产生的压电力的作用下自由移动并施加到成对的电极（48,36,44; 52,49,44）形成双压电晶片托架结构的组成部分。由控制电压产生的电场使双压电晶体控制台以任何期望的方式在由设备设计所确定的限制内移动。双压电晶片控制台具有尖端（66），以非常AIGUEES端部，其中，所述控制电路（88）和压电双晶片控制台的作用下移动，从而将保持在导电表面的一个非常短的距离（ 84）。可以跟踪尖端的运动以产生具有原子阶数分辨率的表面图像。

8. 发明申请

WO2011014315A1 SCANNING TUNNELING MICROSCOPE ASSEMBLY, REACTOR, AND SYSTEM 审中-公开
标题翻译：扫描隧道微波组件，反应器和系统
公开(公告)号：WO2011014315A1
公开(公告)日：2011-02-03
申请号：PCT/US2010/039506
申请日：2010-06-22
申请人： REGENTS OF THE UNIVERSITY OF CALIFORNIA , TAO, Feng , SALMERON, Miquel , SOMORJAI, Gabor
发明人： TAO, Feng , SALMERON, Miquel , SOMORJAI, Gabor
IPC分类号： G01Q60/10
CPC分类号： G01Q60/16 , B82Y35/00 , G01Q30/12 , G01Q30/16 , Y10S977/86 , Y10S977/861 , Y10S977/869 , Y10S977/871
摘要： An embodiment of a scanning tunneling microscope (STM) reactor includes a pressure vessel, an STM assembly, and three spring coupling objects. The pressure vessel includes a sealable port, an interior, and an exterior. An embodiment of an STM system includes a vacuum chamber, an STM reactor, and three springs. The three springs couple the STM reactor to the vacuum chamber and are operable to suspend the scanning tunneling microscope reactor within the interior of the vacuum chamber during operation of the STM reactor. An embodiment of an STM assembly includes a coarse displacement arrangement, a piezoelectric fine displacement scanning tube coupled to the coarse displacement arrangement, and a receiver. The piezoelectric fine displacement scanning tube is coupled to the coarse displacement arrangement. The receiver is coupled to the piezoelectric scanning tube and is operable to receive a tip holder, and the tip holder is operable to receive a tip.
摘要翻译：扫描隧道显微镜（STM）反应器的一个实施例包括压力容器，STM组件和三个弹簧联接件。压力容器包括可密封的端口，内部和外部。 STM系统的实施例包括真空室，STM反应器和三个弹簧。三个弹簧将STM反应器耦合到真空室，并且可操作以在STM反应器的操作期间将扫描隧道显微镜反应器悬挂在真空室内部。 STM组件的实施例包括粗排列布置，耦合到粗位移布置的压电精细位移扫描管和接收器。压电精细位移扫描管耦合到粗排位置。接收器耦合到压电扫描管并且可操作以接收尖端保持器，并且尖端保持器可操作以接收尖端。

9. 发明申请

WO1997004451A1 MICROELECTROMECHANICAL STRUCTURE AND PROCESS OF MAKING SAME 审中-公开
标题翻译：微电子结构及其制备方法
公开(公告)号：WO1997004451A1
公开(公告)日：1997-02-06
申请号：PCT/US1996012003
申请日：1996-07-19
申请人： CARNEGIE MELLON UNIVERSITY
发明人： CARNEGIE MELLON UNIVERSITY , CARLEY, L., Richard , REED, Michael, L. , FEDDER, Gary, K. , SANTHANAM, Suresh
IPC分类号： G11B09/00
CPC分类号： H02N1/006 , B81B2201/07 , B81B2201/12 , B81B2203/0361 , B81C1/0015 , B81C2201/0109 , B81C2201/0132 , G11B9/14 , G11B9/1409 , G11B9/1418 , G11B9/1445 , G11B2005/0002 , Y10S977/861 , Y10S977/881 , Y10S977/888 , Y10S977/89
摘要： The device (10) is comprised of a cantilevered beam (22, 58) positioned above, and free to move relative to, a substrate (24). The beam (22) may carry a plurality of conductors (44, 50) which are insulated from one another. One or more tips (28) is positioned on the beam with each tip being in electrical contact with one of the conductors. A memory device may be constructed by providing an array of such cantilevered beams proximate to a layer of media (16). Devices for positioning the beam in x and y directions (30, 32, 34, 36) perpendicular to each other and parallel to the layer of media and in a z direction (26, 68, 70) perpendicular to the media are provided. A control circuit (14) generates control signals input to the positioning devices for positioning the tips according to x, y and z coordinates. A read/write circuit (14) which is in electrical communication with the conductors of the beam, provide signals to the tips to cause the tips to write those signals to the layer of media in a write mode and to read previously written signals sensed by the tips in a read mode. A fabrication method is also disclosed.
摘要翻译：装置（10）包括位于衬底（24）上方并自由移动的悬臂梁（22,58）。梁（22）可以承载彼此绝缘的多个导体（44,45）。一个或多个尖端（28）定位在梁上，每个尖端与一个导体电接触。可以通过提供靠近介质层（16）的这种悬臂梁的阵列来构造存储器件。提供了用于将光束在x和y方向（30,32,34,36）上垂直定位并平行于介质层并且垂直于介质的z方向（26,68,70）的装置。控制电路（14）产生输入到定位装置的控制信号，用于根据x，y和z坐标定位尖端。与光束的导体电连通的读/写电路（14）向尖端提供信号，以使尖端以写模式将这些信号写入介质层，并读取由读取模式中的提示。还公开了一种制造方法。

10. 发明申请

WO8907259A3 INTEGRATED SCANNING TUNNELING MICROSCOPE 审中-公开
标题翻译：集成扫描隧道显微镜
公开(公告)号：WO8907259A3
公开(公告)日：1989-09-08
申请号：PCT/US8900244
申请日：1989-01-26
申请人： UNIV LELAND STANFORD JUNIOR
发明人： ALBRECHT THOMAS R , ZDEBLICK MARK J
IPC分类号： G01B7/34 , B44C1/22 , G01N23/00 , G01N23/225 , G01N27/00 , G01N37/00 , G01Q10/06 , G01Q20/04 , G01Q30/04 , G01Q60/10 , G01Q60/16 , G01Q70/16 , G01Q80/00 , G11B9/00 , G11B9/04 , G11B9/14 , G11C13/00 , G11C13/04 , H01J37/20 , H01J37/28 , H01L41/09 , H01L41/22 , H02N2/00 , H01L37/00 , H01L41/00
CPC分类号： H01L41/0966 , G01Q10/045 , G01Q60/16 , G01Q80/00 , G11B9/14 , G11B9/1418 , G11B9/1436 , G11B9/1472 , H01J37/20 , H01L41/316 , Y10S977/837 , Y10S977/861 , Y10S977/872 , Y10S977/873 , Y10S977/943 , Y10S977/947 , Y10T29/42
摘要： There is disclosed herein an integrated scanning tunneling microscope and an integrated piezoelectric transducer and methods for making both. The device consists of one or two arm piezoelectric bimorph cantilevers (42, 46) formed by micromachining using standard integrated circuit processing steps. These cantilevers are attached to the substrate (32) at one area (80) and are free to move under the influence of piezoelectric forces which are caused by the application of appropriate voltages generated by control circuitry (88) and applied to pairs of electrodes (48, 36, 44; 52, 49, 44) formed as an integral part of the bimorph cantilever structure. The electric fields caused by the control voltages cause the piezoelectric bimorphs to move in any desired fashion within ranges determined by the design. The bimorph cantilevers have tips (66) with very sharp points formed thereon which are moved by the action of the control circuit (88) and the piezoelectric bimorphs so to stay within a very small distance of a conducting surface (84). The movements of the tip can be tracked to yield an image of the surface at atomic resolution.
摘要翻译：这里公开了一种集成扫描隧道显微镜和集成压电换能器以及用于制造这两者的方法。该器件由一个或两个臂式压电双晶片悬臂梁组成，该悬臂梁通过使用标准集成电路处理步骤的微加工而形成。这些悬臂在一个区域附着在基板上，并且在施加由控制电路产生的适当电压引起的压电力的作用下自由移动，并施加到作为双压电晶片悬臂结构的组成部分而形成的电极对。由控制电压引起的电场导致压电双晶片以任何期望的方式在由设计确定的范围内移动。双压电晶片悬臂具有形成在其上的非常尖锐的尖端，所述尖端通过控制电路和压电双晶片的作用而移动，从而保持在导电表面的非常小的距离内。可以跟踪尖端的运动以产生原子分辨率下的表面图像。

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