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    • 9. 发明申请
    • DIGITAL GREY TONE LITHOGRAPHY FOR 3D PATTERN FORMATION
    • 用于3D图案形成的数字灰度色调
    • WO2016018598A1
    • 2016-02-04
    • PCT/US2015/040121
    • 2015-07-13
    • APPLIED MATERIALS, INC.
    • BENCHER, Christopher Dennis
    • H01L21/027
    • G03F7/203G03F7/0037
    • A method of processing a substrate is described herein. The method includes positioning a substrate on a stage associated with a maskless direct writing pattern generator. The substrate has an undeveloped, unexposed photoresist layer formed thereon. The photoresist layer has a plurality of writing pixel locations. The method includes delivering predetermined doses of electromagnetic energy from the pattern generator to each writing pixel location. A first predetermined dose is a full tone dose, and the first predetermined dose is delivered to at least one writing pixel location. A second predetermined is a fractional tone dose, and the second predetermined dose is delivered to at least one writing pixel location. A third predetermined dose is either a fractional dose or a zero tone dose. The third predetermined dose is delivered to at least one writing pixel location, and the third predetermined dose is different from the second predetermined dose.
    • 本文描述了处理衬底的方法。 该方法包括将衬底定位在与无掩模直接写入图案发生器相关联的台上。 衬底具有形成在其上的未显影未曝光光致抗蚀剂层。 光致抗蚀剂层具有多个写入像素位置。 该方法包括将预定剂量的电磁能量从图案发生器传送到每个写入像素位置。 第一预定剂量是全音调剂量,并且第一预定剂量被递送至至少一个写入像素位置。 第二预定是分数色调剂量,并且第二预定剂量被递送到至少一个写入像素位置。 第三预定剂量是分数剂量或零音量。 第三预定剂量被递送到至少一个写入像素位置,并且第三预定剂量不同于第二预定剂量。