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    • 2. 发明申请
    • 固定器具および金属メッシュデバイス
    • 固定工具和金属丝网设备
    • WO2016009806A1
    • 2016-01-21
    • PCT/JP2015/068324
    • 2015-06-25
    • 株式会社村田製作所
    • 岡本 好司神波 誠治
    • G01N21/01G01N21/3581
    • G02B7/00F16B2/06G01J3/0202G01J3/0229G01J3/4412G01N21/3581
    •  空隙配置構造体を、挟み込んで固定するための第1枠部材(2)および第2枠部材(3)を備える固定器具。第1基準面(22a)と第1内周側嵌合面(21a)との距離をA1、第1基準面(22a)と第1外周側嵌合面(21b)との距離をA2、第2基準面(32a)と第2内周側嵌合面(31a)との距離をB1、第2基準面(32a)と第2外周側嵌合面(31b)との距離をB2、空隙配置構造体1の外周部(102)の厚みをCとしたときに、以下の式1:A1+C>B1および式2:A2+C>B2の少なくともいずれかの条件を満たす。
    • 一种固定工具,其具有用于夹持和固定空心阵列结构的第一框架构件(2)和第二框架构件(3)。 给定第一参考表面(22a)和第一内周侧嵌合表面(21a)之间的距离(A1),第一参考表面(22a)和第一外圆周侧配件 表面(21b),第二参考表面(32a)和第二内周侧配合表面(31a)之间的距离(B1),第二参考表面(32a)和第二外周侧配件表面(31a)之间的距离(B2) 圆周侧配合表面(31b)和空心阵列结构(1)的外周部分(102)的厚度(C),满足以下方程中的至少一个:(等式1)A1 + C> B1,(等式2)A2 + C> B2。
    • 6. 发明申请
    • SPECTRAL MICROSCOPY DEVICE
    • 光谱显微镜装置
    • WO2014192257A1
    • 2014-12-04
    • PCT/JP2014/002674
    • 2014-05-21
    • CANON KABUSHIKI KAISHA
    • KYOGAKU, Masafumi
    • G01N21/27G01N21/65
    • G01J3/4412G01J3/06G01N21/3151G01N21/65G01N2021/653G02B21/002
    • A spectral microscopy device includes a spectral detecting unit including a light source that is capable of controlling an output wavelength, a microscope section that is provided with an observation area that is illuminated with light output from the light source, and a signal detector that detects light from the observation area as spectral data; a moving unit configured to move the observation area; and a controller that performs a control operation to allow the spectral detecting unit and the moving unit to move in response to each other. The spectral microscopy device is controlled so that switching between different measurement conditions based on the number of measurement points is performed at an observation area movement time in which the observation area is moved by the moving unit and measurement is performed and at a observation area movement stoppage time in which the observation area is fixed and measurement is performed, and spectral data is detected.
    • 光谱显微镜装置包括:光谱检测单元,其包括能够控制输出波长的光源;显微镜部分,其设置有从光源输出的光照射的观察区域;以及信号检测器,其检测光 从观测区作为光谱数据; 移动单元,被配置为移动所述观察区域; 以及控制器,其执行控制操作以允许所述光谱检测单元和所述移动单元彼此响应地移动。 控制光谱显微镜装置,使得在观察区域移动时间中,通过移动单元移动观察区域并进行测量并且在观察区域移动停止时执行基于测量点的数量的不同测量条件之间的切换 观察区域固定和测量的时间,并检测光谱数据。
    • 7. 发明申请
    • OPTICAL CHEMICAL ANALYSER AND LIQUID DEPTH SENSOR
    • 光学化学分析仪和液体深度传感器
    • WO2014108683A3
    • 2014-09-04
    • PCT/GB2014050050
    • 2014-01-09
    • INTERNAT MOISTURE ANALYSERS LTD
    • STOCKWELL PAULWIDDUP DAVIDFOSTER MICHAELSTOREY JONATHAN
    • G01N21/85
    • G01N21/45G01J3/4412G01J3/45G01N21/65G01N21/85G01N21/8507
    • An optical chemical analyser comprises a source of a first amount of radiation (46), an optics module configured to direct the first amount of radiation such that it is incident on or passes though a target (14) at a target location, the optics module further being configured to receive a second amount of Raman scattered radiation from the target and direct the second amount of radiation (206) to a Spatial Interference Fourier Transform (SIFT) module, the SIFT module including a first dispersive element (216) and a second dispersive element (218), the SIFT module being configured such that a portion of the second amount of radiation is received by the first dispersive element and interferes with a portion of the second amount of radiation received by the second dispersive element to form an interference pattern; the SIFT module further comprising a detector (48) configured to capture an image of at least a portion of the interference pattern and produce a detector signal (226)based on the captured image; and a processor configured to receive the detector signal from the detector and perform a Fourier transform on the detector signal to thereby obtain a frequency spectrum of the second amount of radiation.
    • 光学化学分析仪包括第一辐射量(46)的光源,光学模块,被配置为引导第一辐射量,使得其入射到目标位置上或通过靶(14),光学模块 进一步被配置为从所述目标接收第二量的拉曼散射辐射,并将所述第二辐射量(206)引导到空间干涉傅立叶变换(SIFT)模块,所述SIFT模块包括第一色散元件(216)和第二色散元件 色散元件(218),SIFT模块被配置为使得第二量的辐射的一部分被第一色散元件接收并且干扰由第二色散元件接收的第二数量的辐射的一部分以形成干涉图案 ; 所述SIFT模块还包括检测器(48),其被配置为捕获所述干扰图案的至少一部分的图像,并且基于所捕获的图像产生检测器信号(226); 以及处理器,被配置为从所述检测器接收所述检测器信号,并对所述检测器信号执行傅里叶变换,从而获得所述第二辐射量的频谱。
    • 9. 发明申请
    • INSPECTION APPARATUS AND METHOD
    • 检查装置和方法
    • WO2013124131A2
    • 2013-08-29
    • PCT/EP2013/051878
    • 2013-01-31
    • ASML NETHERLANDS B.V.
    • DEN BOEF, Arie
    • G01J3/4412G01J3/44G01N21/4788G01N21/9501G01N21/956G01N21/95607G02B5/205G03F7/70591G03F7/70625G03F7/70633G03F9/7026
    • A spectroscopic scatterometer detects both zero order and higher order radiation diffracted from an illuminated spot on a target grating. The apparatus forms and detects a spectrum of zero order (reflected) radiation, and separately forms and detects a spectrum of the higher order diffracted radiation. Each spectrum is formed using a symmetrical phase grating, so as to form and detect a symmetrical pair of spectra. The pair of spectra can be averaged to obtain a single spectrum with reduced focus sensitivity. Comparing the two spectra can yield information for improving height measurements in a subsequent lithographic step. The target grating is oriented obliquely so that the zero order and higher order radiation emanate from the spot in different planes. Two scatterometers can operate simultaneously, illuminating the target from different oblique directions. A radial transmission filter reduces sidelobes in the spot and reduces product crosstalk.
    • 光谱散射仪检测从目标光栅上的照明光点衍射的零级和高阶辐射。 该装置形成和检测零级(反射)辐射的光谱,并分别形成和检测高阶衍射辐射的光谱。 每个光谱使用对称相位光栅形成,以便形成和检测对称的光谱对。 这对光谱可以被平均以获得具有降低的聚焦灵敏度的单个光谱。 比较两个光谱可以产生用于在随后的光刻步骤中改善高度测量的信息。 目标光栅倾斜定向,使得零级和高阶辐射从不同平面中的光点发出。 两个散射仪可以同时操作,从不同的倾斜方向照射目标。 径向传输过滤器可减少现场的旁瓣并减少产品串扰。