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    • 5. 发明申请
    • SYSTEM AND METHOD FOR CONTROLLING DEFLECTION OF A CHARGED PARTICLE BEAM WITHIN A GRADED ELECTROSTATIC LENS
    • 控制抛光静电镜中带电粒子束的偏移的系统和方法
    • WO2011082163A1
    • 2011-07-07
    • PCT/US2010/062225
    • 2010-12-28
    • VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.KELLERMAN, Peter, L.SINCLAIR, FrankBENVENISTE, Victor, M.LU, Jun
    • KELLERMAN, Peter, L.SINCLAIR, FrankBENVENISTE, Victor, M.LU, Jun
    • H01J37/12H01J37/147H01J37/317
    • H01J37/3171H01J37/1477H01J2237/053H01J2237/12H01J2237/24514
    • A method and apparatus for controlling deflection, deceleration, and focus of an ion beam are disclosed. The apparatus may include a graded deflection/decleration lens including a plurality of upper and lower electrodes disposed on opposite sides of an ion beam, as well as a control system for adjusting the voltages applied to the electrodes. The difference in potential between pairs of upper and lower electrodes are varied using a set of "virtual knobs" that are operable to independently control deflection and deceleration of the ion beam. The virtual knobs include control of beam focus and residual energy contamination, control of upstream electron suppression, control of beam deflection, and fine timing of the final deflection angle of the beam while constraining the beam's position at the exit of the lens. In one embodiment, this is done by fine tuning beam deflection while constraining the beam position at the exit of the VEEF. In another embodiment, this is done by fine tuning beam deflection while measuring the beam position and angle at the wafer plane. In a further embodiment, this is done by tuning a deflection factor to achieve a centered beam at the wafer plane.
    • 公开了一种用于控制离子束的偏转,减速和聚焦的方法和装置。 该装置可以包括分级偏转/去晶化透镜,其包括设置在离子束的相对侧上的多个上下电极,以及用于调整施加到电极的电压的控制系统。 使用一组“虚拟旋钮”来改变上下电极对之间的电位差,可以独立地控制离子束的偏转和减速。 虚拟旋钮包括光束聚焦和剩余能量污染的控制,上游电子抑制的控制,光束偏转的控制以及光束的最终偏转角的精细定时,同时约束光束在透镜出射处的位置。 在一个实施例中,这是通过微调光束偏转来实现的,同时约束在VEEF的出口处的光束位置。 在另一个实施例中,这是通过在测量晶片平面处的光束位置和角度的同时微调光束偏转来完成的。 在另一个实施例中,这通过调整偏转因子来实现在晶圆平面处的中心束。