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1. 发明申请

WO2007022359A3 VERTICAL INTEGRATED SILICON NANOWIRE FIELD EFFECT TRANSISTORS AND METHODS OF FABRICATION 审中-公开
标题翻译：垂直集成硅纳米管场效应晶体管及其制造方法
公开(公告)号：WO2007022359A3
公开(公告)日：2009-05-14
申请号：PCT/US2006032153
申请日：2006-08-16
申请人： UNIV CALIFORNIA , YANG PEIDONG , GOLDBERGER JOSHUA , HOCHBAUM ALLON , FAN RONG , HE RONGRUI
发明人： YANG PEIDONG , GOLDBERGER JOSHUA , HOCHBAUM ALLON , FAN RONG , HE RONGRUI
IPC分类号： H01L29/06 , H01L29/76 , H01L31/0328
CPC分类号： H01L29/78642 , B82Y10/00 , H01L21/823487 , H01L21/84 , H01L27/1203 , H01L27/1292 , H01L29/045 , H01L29/0665 , H01L29/0673 , H01L29/0676 , H01L29/42392 , H01L29/66772 , H01L29/78684 , H01L29/78687 , H01L29/78696
摘要： Vertical integrated field effect transistor circuits and methods are described which are fabricated from Silicon, Germanium, or a combination Silicon and Germanium based on nanowires grown in place on the substrate. By way of example, vertical integrated transistors are formed from one or more nanowires which have been insulated, had a gate deposited thereon, and to which a drain is coupled to the exposed tips of one or more of the nanowires. The nanowires are preferably grown over a surface or according to a desired pattern in response to dispersing metal nanoclusters over the desired portions of the substrate. In one preferred implementation, SiCI4 is utilized as a gas phase precursor during the nanowire growth process. In place nanowire growth is also taught in conjunction with structures, such as trenches, while bridging forms of nanowires are also described.
摘要翻译：描述了基于硅，锗或基于在衬底上生长的纳米线的硅和锗的组合制造的垂直集成场效应晶体管电路和方法。作为示例，垂直集成晶体管由已经绝缘的一个或多个纳米线形成，栅极沉积在其上，并且漏极耦合到一个或多个纳米线的暴露尖端。响应于将金属纳米簇分散在基底的所需部分上，纳米线优选在表面上或根据期望的图案生长。在一个优选的实施方案中，SiCl 4在纳米线生长过程中用作气相前体。就纳米线生长而言，还结合诸如沟槽的结构教导，同时还描述了纳米线的桥接形式。

2. 发明申请

WO2005004197A3 FLUIDIC NANOTUBES AND DEVICES 审中-公开
标题翻译：流体纳米管和器件
公开(公告)号：WO2005004197A3
公开(公告)日：2005-11-10
申请号：PCT/US2004010854
申请日：2004-04-08
申请人： UNIV CALIFORNIA , YANG PEIDONG , HE RONGRUI , GOLDBERGER JOSHUA , FAN RONG , WU YIWING , LI DEYU , MAJUMDAR ARUN
发明人： YANG PEIDONG , HE RONGRUI , GOLDBERGER JOSHUA , FAN RONG , WU YIWING , LI DEYU , MAJUMDAR ARUN
IPC分类号： B32B1/08 , B32B5/02 , B41J2/14 , B82B1/00 , B82B3/00 , C30B25/02 , C30B29/60 , C30B33/00 , G01N27/447 , H01L20060101 , H01L21/00 , H01L21/205 , H01L29/06 , H01L29/772 , H01L31/0328 , H01L31/109 , H01L33/00 , H01L47/00
CPC分类号： C30B29/602 , B82Y10/00 , B82Y30/00 , C30B25/02 , C30B29/605 , C30B33/00 , H01L21/0242 , H01L21/02433 , H01L21/02458 , H01L21/02472 , H01L21/0254 , H01L21/02603 , H01L21/02606 , H01L21/0262 , H01L21/02639 , H01L21/02653 , H01L21/02664 , H01L29/0676 , H01L29/068 , H01L2924/0002 , Y10S977/734 , Y10S977/742 , Y10S977/762 , Y10S977/855 , H01L2924/00
摘要： Fluidic nanotube devices (29) are described in which a hydrophilic, non-carbon nanotube (152), has its ends fluidly coupled to reservoirs (154 and 156). Source and drain contacts (164 and 166) are connected to opposing ends of the nanotube, or within each reservoir near the opening of the nanotube. The passage of molecular species can be sensed by measuring current flow (source-drain, ionic, or combination). The tube interior can be functionalized by joining binding molecules (160) so that different molecular species can be sensed by detecting current changes. The nanotube may be a semiconductor (132), wherein a tubular transistor (130) is formed. A gate electrode (146) can be attached between source (136) and drain (138) to control current flow and ionic flow. By way of example an electrophoretic array embodiment is described, integrating MEMs switches. A variety of applications are described, such as: nanopores, nanocapillary devices, nanoelectrophoretic, DNA sequence detectors, immunosensors, thermoelectric devices, photonic devices, nanoscale fluidic bioseparators, imaging devices, and so forth.
摘要翻译：描述了流体性纳米管装置（29），其中亲水性非碳纳米管（152）的端部流体地联接到储存器（154和156）。源极和漏极触点（164和166）连接到纳米管的相对端，或者在靠近纳米管开口的每个储存器内。可以通过测量电流（源 - 漏，离子或组合）来感测分子种类的通过。管内部可以通过结合结合分子（160）来官能化，使得可以通过检测电流变化来感测不同的分子种类。纳米管可以是半导体（132），其中形成管状晶体管（130）。栅极电极（146）可以连接在源极（136）和漏极（138）之间，以控制电流和离子流。作为示例，描述了集成MEMs开关的电泳阵列实施例。描述了各种应用，例如：纳米孔，纳米毛细管装置，纳米电泳，DNA序列检测器，免疫传感器，热电装置，光子器件，纳米流体生物分离器，成像装置等。

3. 发明申请

WO2004111319A3 SACRIFICIAL TEMPLATE METHOD OF FABRICATING A NANOTUBE 审中-公开
标题翻译：制备纳米管的极限模板方法
公开(公告)号：WO2004111319A3
公开(公告)日：2005-07-07
申请号：PCT/US0339200
申请日：2003-12-08
申请人： UNIV CALIFORNIA , YANG PEIDONG , HE RONGRUI , GOLDBERGER JOSHUA , FAN RONG , WU YIYING , LI DEYU , MAJUMDAR ARUN
发明人： YANG PEIDONG , HE RONGRUI , GOLDBERGER JOSHUA , FAN RONG , WU YIYING , LI DEYU , MAJUMDAR ARUN
IPC分类号： B82B3/00 , C30B23/00 , C30B23/02 , C30B25/04 , C30B25/12 , C30B25/18 , C30B29/06 , C30B29/08 , C30B29/16 , C30B29/40 , C30B29/60 , D01F20060101 , D06C3/00 , H01L21/00 , H01L31/109 , H04Q7/00
CPC分类号： C30B29/602 , B82Y30/00 , C30B29/16 , C30B29/406 , H01L2924/0002 , H01L2924/00
摘要： Methods of fabricating uniform nanotubes are described in which nanotubes were synthesized as sheaths over nanowire templates, such as using a chemical vapor deposition process. For example, single-crystalline zinc oxide (ZnO) nanowires are utilized as templates over which gallium nitride (GaN) is epitaxially grown. The ZnO templates are then removed, such as by thermal reduction and evaporation. The completed single-crystalline GaN nanotubes preferably have inner diameters ranging from 30 nm to 200 nm, and wall thicknesses between 5 and 50 nm. Transmission electron microscopy studies show that the resultant nanotubes are single-crystalline with a wurtzite structure, and are oriented along the direction. The present invention exemplifies single-crystalline nanotubes of materials with a non-layered crystal structure. Similar "epitaxial-casting" approaches could be used to produce arrays and single-crystalline nanotubes of other solid materials and semiconductors. Furthermore, the fabrication of multi-sheath nanotubes are described as well as nanotubes having multiple longitudinal segments.
摘要翻译：描述了制造均匀纳米管的方法，其中纳米管在纳米线模板上合成为鞘，例如使用化学气相沉积工艺。例如，单晶氧化锌（ZnO）纳米线被用作在其上外延生长氮化镓（GaN）的模板。然后去除ZnO模板，例如通过热还原和蒸发。完成的单晶GaN纳米管的内径优选为30nm至200nm，壁厚为5至50nm。透射电子显微镜研究表明，所得纳米管是具有纤锌矿结构的单晶，沿着<001>方向取向。本发明例示了具有非层状晶体结构的材料的单晶纳米管。可以使用类似的“外延铸造”方法来生产其他固体材料和半导体的阵列和单晶纳米管。此外，还描述了多皮纳米管的制造以及具有多个纵向段的纳米管。

4. 发明申请

WO2004042785A3 FUNCTIONAL BIMORPH COMPOSITE NANOTAPES AND METHODS OF FABRICATION 审中-公开
标题翻译：功能双峰复合纳米材料及其制备方法
公开(公告)号：WO2004042785A3
公开(公告)日：2004-12-16
申请号：PCT/US0325628
申请日：2003-08-15
申请人： UNIV CALIFORNIA , YANG PEIDONG , LAW MATTHEW , HE RONGRUI , FAN RONG , KIM FRANKLIN
发明人： YANG PEIDONG , LAW MATTHEW , HE RONGRUI , FAN RONG , KIM FRANKLIN
IPC分类号： B81B3/00 , C30B23/00 , C30B29/60 , H01L21/203 , H01L21/363 , B32B3/26 , B32B15/04 , B32B18/00
CPC分类号： B81B3/0035 , B82Y20/00 , B82Y25/00 , B82Y30/00 , C30B23/00 , C30B29/605 , H01L21/02414 , H01L21/02428 , H01L21/02521 , H01L21/02554 , H01L21/02565 , H01L21/02581 , H01L21/0259 , H01L21/02631 , Y10S977/755 , Y10S977/81 , Y10S977/811 , Y10T428/125 , Y10T428/29 , Y10T428/2973 , Y10T428/298
摘要： A two-layer nanotape that includes a nanoribbon substrate and an oxide that is epitaxially deposited on a flat surface of the nanoribbon substrate is described. A method for making the nanotape that includes providing plural substrates and placing the substrates in a quartz tube is also described. The oxide is deposited on the substrate using a pulsed laser ablation deposition process. The nanoribbons can be made from materials such as SnO2, ZnO, MgO, AI2O3, Si, GaN, or CdS. Also, the sintered oxide target can be made from materials such as TiO2, transition metal doped TiO2 (e.g., Co0.05Ti0.95O2), BaTiO3, ZnO, transition metal doped ZnO (e.g., Mn0.1Zn0.9O and Ni0.1Zn0.9O), LaMnO3, BaTiO3, PbTiO3, Yba2Cu3Oz, or SrCu2O2 and other p-type oxides. Additionally, temperature sensitive nanoribbon/metal bilayers and their method of fabrication by thermal evaporation are described. Metals such as Cu, Au, Ti, AI, Pt, Ni and others can be deposited on top of the nanoribbon surface. Such devices bend significantly as a function of temperature and are suitable as, for example, thermally activated nanoscale actuators.
摘要翻译：描述了包括纳米带基底和外延沉积在纳米带基底的平坦表面上的氧化物的两层纳米带。还描述了用于制造包括提供多个衬底并将衬底放置在石英管中的纳米带的方法。使用脉冲激光烧蚀沉积工艺将氧化物沉积在衬底上。纳米带可以由诸如SnO 2，ZnO，MgO，Al 2 O 3，Si，GaN或CdS的材料制成。而且，烧结氧化物靶可以由诸如TiO 2，掺杂过渡金属的TiO 2（例如，Co 0.05 TiO 0.925），BaTiO 3，ZnO，过渡金属掺杂的ZnO（例如，Mn 0.1 Zn 0.9 O和Ni 0.1 ZnO）等材料制成。 9O），LaMnO3，BaTiO3，PbTiO3，Yba2Cu3Oz或SrCu2O2和其他p型氧化物。此外，还描述了温度敏感的纳米带/金属双层及其通过热蒸发制造的方法。诸如Cu，Au，Ti，Al，Pt，Ni等的金属可以沉积在纳米带表面的顶部。这些装置作为温度的函数显着弯曲并且适合用作例如热激活的纳米级致动器。

5. 发明申请

WO2005067547A2 DILUTED MAGNETIC SEMICONDUCTOR NANOWIRES EXHIBITING MAGNETORESISTANCE 审中-公开
标题翻译：稀释磁性半导体纳米光栅展示磁性材料
公开(公告)号：WO2005067547A2
公开(公告)日：2005-07-28
申请号：PCT/US2005001415
申请日：2005-01-14
申请人： UNIV CALIFORNIA , YANG PEIDONG , CHOI HEON-JIN , LEE SANG-KWON , HE RONGRUI , ZHANG YANGFENG , KUYKENDAL TEVYE , PAUZAUSKIE PETER
发明人： YANG PEIDONG , CHOI HEON-JIN , LEE SANG-KWON , HE RONGRUI , ZHANG YANGFENG , KUYKENDAL TEVYE , PAUZAUSKIE PETER
IPC分类号： H01L33/18
CPC分类号： C01B21/0602 , B82Y25/00 , B82Y30/00 , C01B21/0632 , C01P2002/01 , C01P2002/54 , C01P2002/85 , C01P2004/03 , C01P2004/16 , C01P2006/40 , C01P2006/42 , H01L33/18 , Y10S438/931 , Y10S977/762
摘要： A method for is disclosed for fabricating diluted magnetic semiconductor (DMS) nanowires by providing a catalyst-coated substrate and subjecting at least a portion of the substrate to a semiconductor, and dopant via chloride-based vapor transport to synthesize the nanowires. Using this novel chloride-based chemical vapor transport process, single crystalline diluted magnetic semiconductor nanowires Ga1-xMnxN (x=0.07) were synthesized. The nanowires, which have diameters of ~ 10 nm to 100 nm and lengths of up to tens of micrometers, show ferromagnetism with Curie temperature above room temperature, and magnetoresistance up to 250 Kelvin.
摘要翻译：公开了一种用于通过提供催化剂涂覆的基底并使基底的至少一部分经受半导体制造稀磁半导体（DMS）纳米线的方法，以及通过基于氯化物的蒸汽输运的掺杂剂来合成纳米线。使用这种新型的基于氯化物的化学气相传输方法，合成了单晶稀释磁半导体纳米线Ga1-xMnxN（x = 0.07）。具有约10nm至100nm直径和高达几十微米的直径的纳米线显示出具有高于室温的居里温度的铁磁性，高达250开尔德的磁致电阻。

6. 发明申请

WO2007127631A3 MONOLITHIC MULTINOZZLE EMITTERS FOR NANOELECTROSPRAY MASS SPECTROMETRY 审中-公开
标题翻译：用于纳米电喷雾质谱分析的单晶多孔发射体
公开(公告)号：WO2007127631A3
公开(公告)日：2008-07-17
申请号：PCT/US2007066678
申请日：2007-04-15
申请人： UNIV CALIFORNIA , WANG DAOJING , YANG PEIDONG , KIM WOONG , FAN RONG
发明人： WANG DAOJING , YANG PEIDONG , KIM WOONG , FAN RONG
IPC分类号： B01D59/44
CPC分类号： H01J49/165 , B01L3/5027 , B82Y15/00 , H01J49/0018
摘要： Novel and significantly simplified procedures for fabrication of fully integrated nanoelectrospray emitters have been described. For nanofabricated monolithic multinozzle emitters (NM 2 emitters), a bottom up approach using silicon nanowires on a silicon sliver is used. For microfabricated monolithic multinozzle emitters (M 3 emitters), a top down approach using MEMS techniques on silicon wafers is used. The emitters have performance comparable to that of commercially-available silica capillary emitters for nanoelectrospray mass spectrometry.
摘要翻译：已经描述了用于制造完全集成的纳米电喷雾发射器的新颖且显着简化的程序。对于纳米制单体多喷嘴发射体（NM ^{2发射体），使用在硅片上使用硅纳米线的自底向上方法。对于微制造的单片多喷嘴（M 3 O 3发射体），使用在硅晶片上使用MEMS技术的自上而下的方法。发射器具有与用于纳米电喷雾质谱法的市售二氧化硅毛细管发射体相当的性能。}

7. 发明申请

WO2008039579A2 INORGANIC NANOTUBES AND DEVICES FABRICATED THEREFROM 审中-公开
标题翻译：无机纳米管及由此制造的器件
公开(公告)号：WO2008039579A2
公开(公告)日：2008-04-03
申请号：PCT/US2007071300
申请日：2007-06-15
申请人： UNIV CALIFORNIA , YANG PEIDONG , MAJUMDAR ARUNAVA , FAN RONG , KARNIK ROHIT , CASTELINO KENNETH
发明人： YANG PEIDONG , MAJUMDAR ARUNAVA , FAN RONG , KARNIK ROHIT , CASTELINO KENNETH
IPC分类号： C12M3/00
CPC分类号： G01N27/4146 , B01L3/5027 , G01N27/4145
摘要： Nanofluidic devices are taught incorporating inorganic nanotubes fluidly coupled to channels or nanopores for supplying a fluid containing chemical or biochemical species. In one aspect, two channels are fluidly interconnected with a nanotube. Electrodes on opposing sides of the nanotube establish electrical contact with the fluid therein. A bias current is passed between the electrodes through the fluid, and current changes are detected to ascertain the passage of select molecules, such as DNA, through the nanotube. In another inventive aspect, a gate electrode is located proximal the nanotube between the two electrodes thus forming a nanofluidic transistor. The voltage applied to the gate controls the passage of ionic species through the nanotube selected as either or both ionic polarities. In either of these aspects the nanotube can be modified, or functionalized, to control the selectivity of detection or passage.
摘要翻译：教导纳米流体装置，其结合流体耦合到通道或纳米孔的无机纳米管，用于供应含有化学或生物化学物质的流体。在一个方面，两个通道与纳米管流体相互连接。纳米管相对侧上的电极与其中的流体建立电接触。偏置电流通过流体在电极之间传递，并且检测电流变化以确定选择分子（例如DNA）通过纳米管的通过。在另一发明方面，栅电极位于两个电极之间的纳米管附近，从而形成纳米流体晶体管。施加到栅极的电压控制离子物质通过选择为或者两个离子极性的纳米管。在这些方面中的任一方面中，纳米管都可以被改性或官能化，以控制检测或通过的选择性。

8. 发明申请

WO2008048209A3 FUNCTIONALIZATION OF NANOFLUIDIC CHANNELS 审中-公开
标题翻译：纳米通道的功能化
公开(公告)号：WO2008048209A3
公开(公告)日：2009-03-19
申请号：PCT/US2006026318
申请日：2006-07-06
申请人： UNIV CALIFORNIA , YANG PEIDONG , KARNIK ROHIT , CASTELINO KENNETH , FAN RONG , MANJUMDAR ARUN
发明人： YANG PEIDONG , KARNIK ROHIT , CASTELINO KENNETH , FAN RONG , MANJUMDAR ARUN
IPC分类号： C12M1/34
CPC分类号： G01N33/54373
摘要： A functionalized nanofluidic channel and method for functionalization that provides control over the ionic environment and geometry of the nanofluidic channel with the immobilization of biomolecules on the inner surface of the channel and use of high ionic concentration solutions. In one embodiment, the surface charge of the nanochannel is controlled with the immobilization of a protein such as streptavidin in the nanochannel. In another embodiment, the biomolecules are receptors and changes in nanochannel conductance indicates ligand binding events. The functionalized nanofluidic channel can be easily adapted for use with microchannel arrays.
摘要翻译：功能化纳米流体通道和功能化方法，其通过在通道的内表面上固定生物分子并使用高离子浓度溶液来提供对纳米流体通道的离子环境和几何形状的控制。在一个实施方案中，通过在纳米通道中固定蛋白质例如链霉亲和素来控制纳米通道的表面电荷。在另一个实施方案中，生物分子是受体，并且纳米通道电导的变化表示配体结合事件。功能化纳米流体通道可以容易地适用于微通道阵列。

9. 发明申请

WO2008033763A3 NANOWIRES AND NANORIBBONS AS SUBWAVELENGTH OPTICAL WAVEGUIDES AND THEIR USE AS COMPONENTS IN PHOTONIC CIRCUITS AND DEVICES 审中-公开
标题翻译：纳米级和纳米比亚作为亚光波长波长及其作为光电路和器件中的组件使用
公开(公告)号：WO2008033763A3
公开(公告)日：2009-04-16
申请号：PCT/US2007078021
申请日：2007-09-10
申请人： UNIV CALIFORNIA , YANG PEIDONG , SIRBULY DONALD J , FAN RONG , LAW MATT , TAO ANDREA
发明人： YANG PEIDONG , SIRBULY DONALD J , FAN RONG , LAW MATT , TAO ANDREA
IPC分类号： G01N21/00
CPC分类号： G01N21/05 , B01L3/5027 , B82Y20/00 , G01N21/552 , G01N21/648 , G01N21/6489 , G01N21/658 , G01N2021/0346 , G02B6/107
摘要： A microfluidic optical sensor utilizes at least one subwavelength nanowire or nanoribbon waveguide coupled to a fluidic structure having at least one nanofluidic channel through which one or more molecular species are conveyed. In response to optical pumping (e.g., a laser source) the waveguide optically interrogates nearby molecular species retained within said fluidic structure to detect chemical species in response to optical characterization of small (on the order of sub-picoliter) volumes of solution. Characterization is performed in response to evanescent wave sensing. In one aspect, optical characterization is selected from the group of optical characterizations consisting of absorbance, fluorescence and surface enhanced Raman spectroscopy (SERS).
摘要翻译：微流体光学传感器利用至少一个亚波长纳米线或纳米波导波导耦合到具有至少一个纳流体通道的流体结构，一个或多个分子物质通过该纳米流体通道传送。响应于光学泵浦（例如，激光源），波导光学地询问保留在所述流体结构内的附近的分子物质，以响应于小的（大约次级皮升）体积的溶液的光学表征来检测化学物质。响应于ev逝波感测执行表征。在一个方面，光学表征选自由吸光度，荧光和表面增强拉曼光谱（SERS）组成的光学表征组。

10. 发明申请

WO2007079411A3 ALIGNMENT, TRANSPORTATION AND INTEGRATION OF NANOWIRES USING OPTICAL TRAPPING 审中-公开
标题翻译：使用光学跟踪的纳米光束的对准，运输和集成
公开(公告)号：WO2007079411A3
公开(公告)日：2007-10-18
申请号：PCT/US2006062727
申请日：2006-12-29
申请人： UNIV CALIFORNIA , PAUZAUSKIE PETER , REDENOVIC ALEXANDRA , TREPAGNIER ELIANE , LIPHARDT JAN , YANG PEIDONG
发明人： PAUZAUSKIE PETER , REDENOVIC ALEXANDRA , TREPAGNIER ELIANE , LIPHARDT JAN , YANG PEIDONG
IPC分类号： G02B27/30
CPC分类号： G02B21/32 , B82B3/00 , B82Y20/00 , B82Y30/00 , B82Y40/00
摘要： Individually trapping, transferring, and assembling high-aspect-ratio semiconductor nanowires into arbitrary structures in a fluid environment. Nanowires with diameters as small as 20 nm and aspect ratios of above 100 can be trapped and transported in three dimensions, enabling the construction of nanowire architectures which may function as active photonic devices. Moreover, nanowire structures can now be assembled in physiological environments. In one aspect, nanowires are positioned to direct light to remote samples, reducing exposure of the overall sample to intense source illumination. A tunable nanowire probe for subwavelength imaging is also described utilizing efficient second harmonic generation (SHG) whose optical frequency conversion allows implementing subwavelength microscopes.
摘要翻译：将高纵横比半导体纳米线单独捕获，转移和组装成流体环境中的任意结构。直径小到20nm的纳米线和高于100的纵横比可以在三维中被捕获和传输，从而能够构建可用作有源光子器件的纳米线结构。此外，纳米线结构现在可以在生理环境中组装。在一个方面，纳米线被定位成将光引导到远程样品，减少了整个样品暴露于强光源照射。还描述了用于亚波长成像的可调谐纳米线探针，其利用有效的二次谐波生成（SHG），其光学频率转换允许实现亚波长显微镜。

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