专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

WO2008149298A1 PRESSURE GAUGE 审中-公开
标题翻译：压力计
公开(公告)号：WO2008149298A1
公开(公告)日：2008-12-11
申请号：PCT/IB2008/052184
申请日：2008-06-04
申请人： NXP B.V. , PHAN LE, Kim , VAN BEEK, Jozef, T., M.
发明人： PHAN LE, Kim , VAN BEEK, Jozef, T., M.
IPC分类号： G01L9/00 , G01L21/00 , G01D5/00 , H03H3/00
CPC分类号： G01L21/22 , G01L9/0022 , H03H9/02259 , H03H9/2452 , H03H2009/02496
摘要： A pressure/vacuum sensor and method, comprising: driving a MEMS piezoresistive resonator (8) into resonant vibration, applying Joule heating to the resonator (8); and sensing a variable parameter that varies in response to the tendency of the resonant frequency (fo) to depend upon the temperature of the resonator (8), the temperature thereof depending upon the pressure. The variable parameter may be the resonant frequency of the resonator (8), or a change therein, or may be derived from a feedback loop, being for example a time integrated feedback signal (82) or a reading (94) of the sense current (22), the loop keeping the resonant frequency constant in opposition to the above mentioned tendency. A reference MEMS capacitive resonator (62) may be located in the vicinity of the resonator (8) for compensating purposes.
摘要翻译：一种压力/真空传感器和方法，包括：将MEMS压阻谐振器（8）驱动到共振振动中，对谐振器（8）施加焦耳加热; 以及感测响应谐振频率（fo）的趋势而变化的可变参数取决于谐振器（8）的温度，其温度取决于压力。可变参数可以是谐振器（8）的谐振频率或其中的变化，或者可以从反馈回路导出，例如时间积分反馈信号（82）或感测电流的读数（94）（22），保持谐振频率与上述趋势相反的环路的回路。参考MEMS电容谐振器（62）可以位于谐振器（8）附近用于补偿目的。

2. 发明申请

WO2007072409A2 A MEMS RESONATOR, A METHOD OF MANUFACTURING THEREOF, AND A MEMS OSCILLATOR 审中-公开
标题翻译： MEMS谐振器，其制造方法以及MEMS振荡器
公开(公告)号：WO2007072409A2
公开(公告)日：2007-06-28
申请号：PCT/IB2006/054931
申请日：2006-12-18
申请人： NXP B.V. , VAN BEEK, Jozef, T., M. , LOEBL, Hans-Peter , VANHELMONT, Frederik, W., M.
发明人： VAN BEEK, Jozef, T., M. , LOEBL, Hans-Peter , VANHELMONT, Frederik, W., M.
IPC分类号： H03H9/02 , H03H3/007
CPC分类号： H03H9/02448 , H03H3/0072 , H03H9/2447 , H03H2009/02496 , Y10T29/42
摘要： The invention relates to a MEMS resonator comprising a movable element (48), the movable element (48) comprising a first part (A) having a first Young's modulus and a first temperature coefficient of the first Young's modulus, and the movable element (48) further comprising a second part (B) having a second Young's modulus and a second temperature coefficient of the second Young's modulus, a sign of the second temperature coefficient being opposite to a sign of the first temperature coefficient, at least, at operating conditions of the MEMS resonator, and a cross-sectional area of the first part (A) and the cross-sectional area of the second part (B) being such that the absolute temperature coefficient of the Young's modulus of the first part (A) multiplied by the cross-sectional area of the first part (A) does not deviate more than 20% from the absolute temperature coefficient of the Young's modulus of the second part (B) multiplied by the cross-sectional area of the second part (B), the cross-sectional areas being measured locally and perpendicularly to the movable element (48).
摘要翻译：本发明涉及一种包括可移动元件（48）的MEMS谐振器，可移动元件（48）包括具有第一杨氏模量和第一杨氏模量的第一温度系数的第一部分（A）并且所述可移动元件（48）还包括具有第二杨氏模量和第二杨氏模量的第二温度系数的第二部分（B），所述第二温度系数的符号与所述第一温度系数的符号相反至少在MEMS谐振器的操作条件下，第一部分（A）的横截面积和第二部分（B）的横截面积使得杨氏模量的绝对温度系数第一部分（A）乘以第一部分（A）的横截面积与第二部分（B）的杨氏模量的绝对温度系数乘以横截面积的偏差不超过20％的秒（B），所述横截面积局部地且垂直于所述可移动元件（48）测量。

3. 发明申请

WO2007072408A2 A MEMS RESONATOR, A METHOD OF MANUFACTURING THEREOF, AND A MEMS OSCILLATOR 审中-公开
标题翻译： MEMS谐振器，其制造方法以及MEMS振荡器
公开(公告)号：WO2007072408A2
公开(公告)日：2007-06-28
申请号：PCT/IB2006/054930
申请日：2006-12-18
申请人： NXP B.V. , VAN BEEK, Jozef, T., M. , VAN VELZEN, Bart
发明人： VAN BEEK, Jozef, T., M. , VAN VELZEN, Bart
IPC分类号： H03H9/02 , H03H3/007
CPC分类号： H03H3/0072 , H03H9/02244 , H03H2009/02496
摘要： The invention relates to a MEMS resonator comprising a first electrode, a movable element (48) comprising a second electrode, the movable element (48) at least being movable towards the first electrode, the first electrode and the movable element (48) being separated by a gap (46, 47) having sidewalls. According to the invention, the MEMS resonator is characterized in that the gap (46, 47) has been provided with a dielectric layer (60) on at least one of the sidewalls.
摘要翻译：本发明涉及一种MEMS谐振器，其包括第一电极，包括第二电极的可移动元件（48），所述可移动元件（48）至少可朝所述第一电极移动，所述第一电极和可移动元件（48）由具有侧壁的间隙（46,47）隔开。根据本发明，MEMS谐振器的特征在于，间隙（46,47）在至少一个侧壁上设置有电介质层（60）。

4. 发明申请

WO2008001252A2 METHOD FOR MANUFACTURING MEMS DEVICES WITH MOVEABLE STRUCTURE 审中-公开
标题翻译：制造具有可移动结构的MEMS器件的方法
公开(公告)号：WO2008001252A2
公开(公告)日：2008-01-03
申请号：PCT/IB2007/052269
申请日：2007-06-14
申请人： NXP B.V. , VAN VELZEN, Bart , VAN BEEK, Jozef, T., M. , KNOTTER, Dirk, M.
发明人： VAN VELZEN, Bart , VAN BEEK, Jozef, T., M. , KNOTTER, Dirk, M.
IPC分类号： B81C1/00
CPC分类号： B81C1/00952 , B81B3/001 , B81C2201/0109
摘要： After the release etch of MEMS structures stiction is a well-known problem. Especially for the buried oxide etch on SOI wafers because of the very flat surfaces. Methods to prevent stiction are etching with an etch liquid but the wafers are dried in a CPD tool or alternatively etching with a vapor. However these methods require special equipment and are only effective for the release etch. A simple method for the formation of anti-stiction structures is described in order to prevent direct mechanical contact. The buried oxide is etched in a controlled way and stopped before the buried oxide is totally etched away. The buried oxide residues form anti-stiction structures and prevent direct contact between the resonator and the substrate. For this method no special equipment is required and the process complexity is not increased.
摘要翻译：在MEMS结构的释放蚀刻之后，静摩擦是一个众所周知的问题。特别是对于SOI晶片上的掩埋氧化物蚀刻，因为其表面非常平坦。防止静摩擦的方法是用蚀刻液进行蚀刻，但晶片在CPD工具中干燥或用蒸气蚀刻。然而这些方法需要特殊的设备，并且只对释放蚀刻有效。描述了形成防粘结构的简单方法，以防止直接的机械接触。掩埋氧化物以受控方式蚀刻，并在掩埋氧化物完全蚀刻掉之前停止。掩埋的氧化物残余物形成抗静摩擦结构并防止谐振器和衬底之间的直接接触。对于这种方法，不需要特殊的设备，工艺复杂性也不会增加。

5. 发明申请

WO2007072407A2 ARRANGEMENT OF MEMS DEVICES HAVING SERIES COUPLED CAPACITORS 审中-公开
标题翻译：具有串联电容器的MEMS器件的布置
公开(公告)号：WO2007072407A2
公开(公告)日：2007-06-28
申请号：PCT/IB2006/054929
申请日：2006-12-18
申请人： NXP B.V. , STEENEKEN, Peter, G. , BOYLE, Kevin, R. , DE GRAAUW, Antonius, J., M. , RIJKS, Theodoor, G., S., M. , VAN BEEK, Jozef, T., M.
发明人： STEENEKEN, Peter, G. , BOYLE, Kevin, R. , DE GRAAUW, Antonius, J., M. , RIJKS, Theodoor, G., S., M. , VAN BEEK, Jozef, T., M.
CPC分类号： H01G5/38
摘要： A tuneable capacitor arrangement for RF use has two series coupled MEMS variable capacitors (C1,C2;C4,C5,C6,C7), varied according to a control signal. The series coupling enables the capacitor to withstand a higher voltage since this is shared by the individual capacitors in a series coupled arrangement. An increase in size of electrodes for each capacitor is compensated by a reduction in size of the springs supporting movable electrodes. These springs can have a larger stiffness value since the capacitance is larger. This means shorter springs, which can also result in a reduction in problems of stiction, resistance, and slow switching. The capacitances have a fixed and a movable electrode, with the RF signal coupled to the fixed electrode to avoid the springs needing to carry an RF signal. This can reduce the problems of inductance and resistance in the springs.
摘要翻译：用于RF使用的可调电容器布置具有根据控制信号而变化的两个串联耦合的MEMS可变电容器（C1，C2; C4，C5，C6，C7）。串联耦合使得电容器能够承受更高的电压，因为这是由串联耦合布置中的各个电容器共享的。通过减少支撑可移动电极的弹簧的尺寸来补偿每个电容器的电极尺寸的增加。这些弹簧可以具有较大的刚度值，因为电容较大。这意味着较短的弹簧，这也可能导致静电，电阻和慢速切换的问题的减少。电容具有固定和可移动电极，RF信号耦合到固定电极，以避免弹簧需要携带RF信号。这可以减少弹簧中的电感和电阻的问题。

6. 发明申请

WO2005025057A3 ELECTROMECHANICAL TRANSDUCER AND ELECTRICAL DEVICE 审中-公开
公开(公告)号：WO2005025057A3
公开(公告)日：2005-03-17
申请号：PCT/IB2004/051524
申请日：2004-08-23
申请人： KONINKLIJKE PHILIPS ELECTRONICS N.V. , VAN BEEK, Jozef, T., M. , STEENEKEN, Peter, G.
发明人： VAN BEEK, Jozef, T., M. , STEENEKEN, Peter, G.
IPC分类号： H03H9/02
摘要： The electromechanical transducer (1) has a resonator element (20) and an actuator (30) for inducing an elastic deformation of the resonator element (20) dependent on the electrical input signal. For temperature stabilization, the electromechanical transducer (1) has a sensing element (40) for providing an electrical sensing signal has a function of a temperature of the resonator element (20), and a heating element (50) for heating the resonator element to reduce the temperature dependent frequency deviation to keep the resonance frequency equal to the nominal frequency at operating temperature. The heating element (50) is controlled by an electrical heating signal based on the electrical sensing signal. The resonator element may have the hating element or the sensing element; it may be part of a wheatstone bridge; it may consist of two longitudinally extendable parts (201, 202) extending in opposite directions, being attached in a support area (204) in a deformation free part (203).

7. 发明申请

WO2003017479A2 ELECTRONIC DEVICE AND METHOD OF TESTING AND OF MANUFACTURING 审中-公开
标题翻译：电子设备及其制造和制造方法
公开(公告)号：WO2003017479A2
公开(公告)日：2003-02-27
申请号：PCT/IB2002/003230
申请日：2002-08-14
申请人： KONINKLIJKE PHILIPS ELECTRONICS N.V. , VAN BEEK, Jozef, T., M. , RIJKS, Theodoor, G., S., M. , MATTERS-KAMMERER, Marion, K. , VAN ESCH, Henricus, A.
发明人： VAN BEEK, Jozef, T., M. , RIJKS, Theodoor, G., S., M. , MATTERS-KAMMERER, Marion, K. , VAN ESCH, Henricus, A.
IPC分类号： H03H7/01
CPC分类号： G01R27/2617 , G01R27/26 , H01F17/0006 , H01F17/0013 , H01F27/2804 , H01L27/08 , H01L28/10 , H01L28/40 , H01L2924/0002 , H03H7/0115 , H01L2924/00
摘要： The electronic device (10) comprises a capacitor (12) and an inductor (11) and is present on a substrate (1) with an unplanarized surface (2). This is realized in winding (21) of the inductor (11) has a thickness of at least 1 micron and has a planarized upper surface (81). The upper electrode (32) of the capacitor is present in a second electrode layer (6) and has a lower surface (82) which is spaced from the substrate (1) by a larger distance than the upper surface (81) of the lower electrode (31). The second electrode layer (6) preferably includes a second winding (22) of the inductor (11). The electronic device (10) is suitable for use at high frequencies.
摘要翻译：电子器件（10）包括电容器（12）和电感器（11），并且具有非平面化表面（2）的基板（1）上。这在电感器（11）的绕组（21）中具有至少1微米的厚度并且具有平坦化的上表面（81）。电容器的上电极（32）存在于第二电极层（6）中，并且具有与基板（1）间隔开比下层（6）的上表面（81）更大的距离的下表面（82）电极（31）。第二电极层（6）优选地包括电感器（11）的第二绕组（22）。电子设备（10）适合在高频下使用。

8. 发明申请

WO2003017479A3 ELECTRONIC DEVICE AND METHOD OF TESTING AND OF MANUFACTURING 审中-公开
公开(公告)号：WO2003017479A3
公开(公告)日：2003-02-27
申请号：PCT/IB2002/003230
申请日：2002-08-14
申请人： KONINKLIJKE PHILIPS ELECTRONICS N.V. , VAN BEEK, Jozef, T., M. , RIJKS, Theodoor, G., S., M. , MATTERS-KAMMERER, Marion, K. , VAN ESCH, Henricus, A.
发明人： VAN BEEK, Jozef, T., M. , RIJKS, Theodoor, G., S., M. , MATTERS-KAMMERER, Marion, K. , VAN ESCH, Henricus, A.
IPC分类号： H03H7/01
摘要： The electronic device (10) comprises a capacitor (12) and an inductor (11) and is present on a substrate (1) with an unplanarized surface (2). This is realized in winding (21) of the inductor (11) has a thickness of at least 1 micron and has a planarized upper surface (81). The upper electrode (32) of the capacitor is present in a second electrode layer (6) and has a lower surface (82) which is spaced from the substrate (1) by a larger distance than the upper surface (81) of the lower electrode (31). The second electrode layer (6) preferably includes a second winding (22) of the inductor (11). The electronic device (10) is suitable for use at high frequencies.

9. 发明申请

WO2005043572A1 RADIO-FREQUENCY MICROELECTROMECHANICAL SYSTEMS AND A METHOD OF MANUFACTURING SUCH SYSTEMS 审中-公开
标题翻译：无线电频率微电子系统及其制造方法
公开(公告)号：WO2005043572A1
公开(公告)日：2005-05-12
申请号：PCT/IB2004/052201
申请日：2004-10-26
申请人： KONINKLIJKE PHILIPS ELECTRONICS N.V. , DEN TOONDER, Jacob, M., J. , VAN DIJKEN, Auke, R. , RIJKS, Theodoor, G., S., M. , VAN BEEK, Jozef, T., M.
发明人： DEN TOONDER, Jacob, M., J. , VAN DIJKEN, Auke, R. , RIJKS, Theodoor, G., S., M. , VAN BEEK, Jozef, T., M.
IPC分类号： H01H59/00
CPC分类号： B81B3/0072 , B81B2203/0118 , H01H1/0036 , H01H59/0009 , H01H2001/0052 , Y10T428/31678
摘要： An RF MEMS device comprising one or more free-standing thin films configured for motion in response to actuation or stimulation, the one or more thin films comprising an alloy of aluminum and magnesium, and optionally one or more further materials. The resultant thin film has improved hardness and reduced creep relative to conventional thin films.
摘要翻译： RF MEMS器件包括被配置为响应于致动或刺激而运动的一个或多个独立的薄膜，所述一个或多个薄膜包括铝和镁的合金以及任选的一种或多种其它材料。所得薄膜相对于常规薄膜具有改善的硬度和降低的蠕变。

10. 发明申请

WO2005015373A2 A TOUCH SENSITIVE DISPLAY 审中-公开
标题翻译：触摸敏感显示
公开(公告)号：WO2005015373A2
公开(公告)日：2005-02-17
申请号：PCT/IB2004/051366
申请日：2004-08-03
申请人： KONINKLIJKE PHILIPS ELECTRONICS N.V. , DESTURA, Galileo, J., A. , CORTIE, Rogier, H., M. , VAN BEEK, Jozef, T., M. , KEMMEREN, Antonius L, A., M.
发明人： DESTURA, Galileo, J., A. , CORTIE, Rogier, H., M. , VAN BEEK, Jozef, T., M. , KEMMEREN, Antonius L, A., M.
IPC分类号： G06F3/00
CPC分类号： G06F3/0412
摘要： A touch sensitive display comprises pixels (18), each of the pixels (18) have a pixel electrode (22). An optical state of a pixel (18) depends on a drive voltage (VD) supplied to the pixel electrode (22). A touch sensitive elements (S1) is arranged between the pixel electrode (22) and a further electrode (40;17). The touch sensitive element (S1) has an impedance dependent on a mechanical force applied to it.
摘要翻译：触敏显示器包括像素（18），每个像素（18）具有像素电极（22）。像素（18）的光学状态取决于提供给像素电极（22）的驱动电压（VD）。在像素电极（22）和另一电极（40; 17）之间布置有触敏元件（S1）。触敏元件（S1）的阻抗取决于施加到其上的机械力。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式