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    • 7. 发明申请
    • A SEMICONDUCTOR DEVICE AND A METHOD OF MANUFACTURING THEREOF
    • 一种半导体器件及其制造方法
    • WO2008056295A1
    • 2008-05-15
    • PCT/IB2007/054385
    • 2007-10-29
    • NXP B.V.HUMBERT, AurelieHOOFMAN, Romano
    • HUMBERT, AurelieHOOFMAN, Romano
    • H01L21/768H01L23/522H01L23/532
    • H01L21/7682H01L21/76825H01L21/76831H01L23/5222H01L23/53295H01L2924/0002H01L2924/09701H01L2924/00
    • The invention relates to a semiconductor device comprising: a substrate (1), the substrate (1) comprising a body (5), the body (5) having a surface, the substrate (1) being provided with an insulating layer (10) on the surface of the body (l); - a conductor (25) with insulating sidewall spacers (22) located in the insulating layer (10), the conductor (25) having a current-flow direction during operation, the conductor (25) having a first width, the insulating sidewall spacers (22) each having a second width being smaller than the first width of the conductor (25), the first width and the second width being measured in a direction perpendicular to the current-flow direction of the conductor (25) and parallel to said surface, the conductor (25) having a first top surface extending parallel to said surface, the insulating sidewall spacers (22) having a second top surface, and airgaps (30) located in the insulating layer (10) adjacent to the insulating sidewall spacers (22), characterized in that the first top surface coincides with the second top surface, and in that the airgaps (30) extend from the surface of the body (5) to said first and second top surface. The invention further relates to a method of manufacturing such a semiconductor device. The semiconductor device according to the invention enables a lower resistance of the conductor while still providing a tolerance for unlanded vias.
    • 本发明涉及一种半导体器件,包括:衬底(1),所述衬底(1)包括主体(5),所述主体(5)具有表面,所述衬底(1)设置有绝缘层(10) 在身体表面(l); - 导体(25),其具有位于所述绝缘层(10)中的绝缘侧壁间隔物(22),所述导体(25)在操作期间具有电流流动方向,所述导体(25)具有第一宽度,所述绝缘侧壁间隔件 (22),每个具有小于所述导体(25)的第一宽度的第二宽度,所述第一宽度和所述第二宽度在垂直于所述导体(25)的电流流动方向的方向上测量并平行于所述导体 所述导体(25)具有平行于所述表面延伸的第一顶表面,所述绝缘侧壁间隔件(22)具有第二顶表面,以及位于所述绝缘层(10)中邻近所述绝缘侧壁间隔件 (22),其特征在于,所述第一顶表面与所述第二顶表面重合,并且所述气隙(30)从所述主体(5)的表面延伸到所述第一和第二顶表面。 本发明还涉及一种制造这种半导体器件的方法。 根据本发明的半导体器件使得导体的电阻较低,同时仍然提供对未经过过孔的容差。
    • 8. 发明申请
    • SENSOR HAS COMBINED IN-PLANE AND PARALLEL-PLANE CONFIGURATION
    • 传感器组合在平面和平行平面配置中
    • WO2010029507A1
    • 2010-03-18
    • PCT/IB2009/053959
    • 2009-09-10
    • NXP B.V.HUMBERT, AurelieMERZ, Matthias
    • HUMBERT, AurelieMERZ, Matthias
    • G01N27/02G01N27/22
    • G01N27/223
    • A sensor senses a magnitude of a physical parameter of the sensor's environment. The sensor has first and second electrodes, and a material layer between them. The material has an electrical property, e.g., capacitance or resistance, whose value depends on the magnitude of the physical parameter. The first electrode is formed in a first layer, and the second electrode is formed in a second layer, different from the first layer. The first layer has a trench and an elevation next to the trench. The trench has a bottom wall and a side wall. The material is positioned on the bottom wall and on the side wall and on top of the elevation. The trench accommodates at least a part of the second electrode. The second electrode leaves exposed the material formed on top of the elevation.
    • 传感器感测传感器环境的物理参数的大小。 传感器具有第一和第二电极以及它们之间的材料层。 该材料具有电性能,例如电容或电阻,其值取决于物理参数的大小。 第一电极形成在第一层中,并且第二电极形成在与第一层不同的第二层中。 第一层在沟槽旁边具有沟槽和高度。 沟槽具有底壁和侧壁。 材料位于底壁和侧壁上以及高度的顶部。 沟槽容纳至少一部分第二电极。 第二个电极离开了形成在高程顶部的材料。