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1. 发明申请

WO2011145025A1 MICROPHONE 审中-公开
标题翻译：麦克风
公开(公告)号：WO2011145025A1
公开(公告)日：2011-11-24
申请号：PCT/IB2011/052068
申请日：2011-05-11
申请人： NXP B.V , REIMANN, Klaus , STEENEKEN, Peter G , VAN LEUKEN-PETERS, Linda , ROEST, Aarnoud L , WUNNICKE, Olaf , GOOSSENS, Martijn
发明人： REIMANN, Klaus , STEENEKEN, Peter G , VAN LEUKEN-PETERS, Linda , ROEST, Aarnoud L , WUNNICKE, Olaf , GOOSSENS, Martijn
IPC分类号： H04R23/00
CPC分类号： H04R23/008
摘要： A microphone comprises a planar substrate arrangement, an optical source provided over the substrate arrangement for emitting a light beam in a direction parallel to the substrate arrangement and a layer structure defining at least one optical cavity through which the light beam is directed, the cavity exposed to the sound pressure to be sensed. The light beam is directed to a target after passing through the cavity. Optical analysis is used for determining an optical property which is dependent on the pressure in the cavity.
摘要翻译：麦克风包括平面衬底布置，设置在衬底布置上用于沿平行于衬底布置的方向发射光束的光源以及限定光束被引导的至少一个光腔的层结构，腔暴露到要感测的声压。光束在通过空腔后被引导到目标。光学分析用于确定取决于空腔中的压力的光学性质。

2. 发明申请

WO2008152559A2 TUNABLE MEMS CAPACITOR 审中-公开
标题翻译：可控MEMS电容器
公开(公告)号：WO2008152559A2
公开(公告)日：2008-12-18
申请号：PCT/IB2008/052253
申请日：2008-06-09
申请人： NXP B.V. , STEENEKEN, Peter, G. , REIMANN, Klaus
发明人： STEENEKEN, Peter, G. , REIMANN, Klaus
IPC分类号： H03J5/24 , H01G5/16
CPC分类号： H01G5/16 , H01G5/013 , H01G5/0136 , H01G7/06 , H01G2005/02 , H03J5/248
摘要： A MEMS tunable capacitor comprises first and second opposing capacitor electrodes (10,12), wherein the second capacitor electrode (12) is movable by a MEMS switch to vary the capacitor dielectric spacing, and thereby tune the capacitance. A tunable dielectric material (14) and a non- tunable dielectric material are in series between the first and second electrodes. The tunable dielectric material occupies a dimension gd of the electrode spacing, and the non-tunable dielectric material occupies a dimension g of the electrode spacing. A third electrode (20) faces the movable second electrode (12) for electrically controlling tunable dielectric material. A controller is adapted to vary the capacitor dielectric spacing for a first continuous range of adjustment of the capacitance of the MEMS capacitor, and to tune the dielectric material (14) for a second continuous range of adjustment of the capacitance of the MEMS capacitor, thereby to provide a continuous analogue range of adjustment including the first and second ranges. This arrangement provides independent control of the MEMS function and the dielectric tuning function, and enables a continuous adjustability.
摘要翻译： MEMS可调谐电容器包括第一和第二相对电容器电极（10,12），其中第二电容器电极（12）可通过MEMS开关移动以改变电容器介电间距，从而调谐电容。可调电介质材料（14）和非可调电介质材料串联在第一和第二电极之间。可调电介质材料占电极间距的尺寸gd，不可调电介质材料占电极间距的尺寸g。第三电极（20）面向可动第二电极（12），用于电控制可调电介质材料。控制器适于改变用于MEMS电容器的电容的第一连续调节范围的电容器电介质间隔，并且调谐电介质材料（14）用于MEMS电容器的电容的第二连续调节范围，从而以提供包括第一和第二范围的连续模拟调节范围。这种布置提供了对MEMS功能和介质调谐功能的独立控制，并且实现了连续可调性。

3. 发明申请

WO2010106484A1 BOND FRAME INTEGRATED IN ELECTRONIC CIRCUIT 审中-公开
标题翻译：绑定在电子电路中的框架
公开(公告)号：WO2010106484A1
公开(公告)日：2010-09-23
申请号：PCT/IB2010/051111
申请日：2010-03-15
申请人： NXP B.V. , REIMANN, Klaus , LIU, Zidong , STEENEKEN, Peter,Gerard , WUNNICKE, Olaf , ROEST, Aarnoud, Laurens
发明人： REIMANN, Klaus , LIU, Zidong , STEENEKEN, Peter,Gerard , WUNNICKE, Olaf , ROEST, Aarnoud, Laurens
IPC分类号： H01L23/10 , B81B7/00 , H01L23/64 , H01L23/66
CPC分类号： H01L23/645 , B81B7/0077 , B81B7/02 , H01L23/10 , H01L23/66 , H01L2223/6677 , H01L2924/0002 , H01L2924/01079 , H01L2924/09701 , H01L2924/3011 , H01L2924/00
摘要： The invention relates to encapsulated integrated RF circuits comprising an integrated bond frame. Many integrated circuits need packaged for protection of the circuit or to connect the fine pitch of IC pins to the coarse pitch of a printed circuit board. It is known that passive components such as coils can be integrated into, e.g., lead-frame packages. Most MEMS (Micro Electro Mechanical Systems) require special packages, i.e., hermetic packages. Prominent examples are capacitive or galvanic MEMS switches for RF. A small and cost-effective package will lead to a wafer-scale package, where the MEMS wafer itself forms one part of the package. The other half can be another wafer that is bonded on the MEMS wafer, e.g., by eutectic bonding. The closed bond frame between the wafers forms an electrically coupled inductive element.
摘要翻译：本发明涉及包括集成结合框架的封装的集成RF电路。许多集成电路需要封装以保护电路或将IC引脚的精细间距连接到印刷电路板的粗略间距。已知诸如线圈的无源部件可以集成到例如引线框架封装中。大多数MEMS（微机电系统）需要特殊的封装，即密封封装。突出的例子是RF的电容或电流MEMS开关。一个小而具有成本效益的封装将导致晶片级封装，其中MEMS晶片本身构成封装的一部分。另一半可以是例如通过共晶接合结合在MEMS晶片上的另一个晶片。晶片之间的闭合键合框架形成电耦合的电感元件。

4. 发明申请

WO2010001344A3 INTEGRATING AND OPTIMIZING DIFFERENT FUNCTIONAL COMPONENTS ON A SINGLE SUBSTRATE HAVING LAYER IN COMMON 审中-公开
公开(公告)号：WO2010001344A3
公开(公告)日：2010-01-07
申请号：PCT/IB2009/052847
申请日：2009-06-30
申请人： NXP B.V. , KLEE, Mareike , RENDERS, Christina Adriana , LOK, Pieter , ROEST, Aarnoud Laurens , DEN DEKKER, Arnoldus , REIMANN, Klaus , STEENEKEN, Peter Gerard , WUNNICKE, Olaf
发明人： KLEE, Mareike , RENDERS, Christina Adriana , LOK, Pieter , ROEST, Aarnoud Laurens , DEN DEKKER, Arnoldus , REIMANN, Klaus , STEENEKEN, Peter Gerard , WUNNICKE, Olaf
IPC分类号： H03H9/05 , H01L21/00 , H01L27/00
摘要： The invention relates to a method of manufacturing a monolithic device comprising multiple process steps. The monolithic device comprises at least two different electrical or electromechanical functional components (GS, CS, TC1, TC2, HKC, BW, BWM, FBAR). Each respective electromechanical functional component is formed by a respective functional stack (FS1, FS2) comprising a plurality of layers. The at least two 5 functional components (GS...FBAR) have a first layer in common (DL, E1, E2, E3). The method comprises a step of: providing a first ranking of the functional components (GS...FBAR) for the first layer (DL, E1, E2, E3) which is based on a plurality of respective performance indicators for each respective one of the functional. The multiple process steps comprise a step of manufacturing the first layer (DL, E1, E2, E3) such that it is physically 10 and/or geometrically optimized for at least a single one of the functional components selected on the basis of a highest rank in the first ranking. The method in accordance with the invention provides for a monolithic integration of different functional components (GS...FBAR). In this method layers of the functional stack are reused, which saves process steps, and optimized for optimal performance of at least one of the functional components 15 (GS...FBAR) without jeopardizing the performance of the monolithic device to unacceptable levels. The invention further relates to a monolithic device which features a wider applicability than the known monolithic devices because the tunable and/or high-k dielectric layer in respective functional stacks can be better shared between the functional components.

5. 发明申请

WO2009153757A1 PIEZOELECTRIC BIMORPH SWITCH 审中-公开
标题翻译：压电二极管开关
公开(公告)号：WO2009153757A1
公开(公告)日：2009-12-23
申请号：PCT/IB2009/052617
申请日：2009-06-18
申请人： NXP B.V. , WUNNICKE, Olaf , REIMANN, Klaus
发明人： WUNNICKE, Olaf , REIMANN, Klaus
IPC分类号： H01H57/00 , H01L41/09
CPC分类号： H01H57/00 , H01L41/094
摘要： The present invention relates to a piezoelectric bimorph switch, specifically a cantilever (single clamped beam) switch, which can be actively opened and closed. Piezoelectric bimorph switch are known from the prior art. Such a switch may be regarded as an actuator. Actuators are regarded as a subdivision of transducers. They are devices, which transform an input signal (mainly an electrical signal) into motion. Electrical motors, pneumatic actuators, hydraulic pistons, relays, comb drive, piezoelectric actuators, thermal bimorphs, Digital Micromirror Devices and electroactive polymers are some examples of such actuators. The switch of the invention comprises piezoelectric stack layers (121, 122), which form a symmetrical stack, wherein an electric field is always applied in the same direction as the poling direction of the piezoelectric layers.
摘要翻译：本发明涉及一种压电双压电晶体开关，特别涉及一种可以被主动地打开和关闭的悬臂（单夹紧梁）开关。压电双压电晶体开关是从现有技术中已知的。这样的开关可以被认为是致动器。致动器被视为传感器的细分。它们是将输入信号（主要是电信号）变换为运动的装置。电动机，气动执行器，液压活塞，继电器，梳齿驱动器，压电致动器，热双压电晶片，数字微镜器件和电活性聚合物是这种致动器的一些例子。本发明的开关包括形成对称叠层的压电堆叠层（121,122），其中总是沿与压电层的极化方向相同的方向施加电场。

6. 发明申请

WO2010122487A1 MICROPHONE 审中-公开
标题翻译：麦克风
公开(公告)号：WO2010122487A1
公开(公告)日：2010-10-28
申请号：PCT/IB2010/051715
申请日：2010-04-20
申请人： NXP B.V. , LANGEREIS, Geert , VAN LIPPEN, Twan , ROOZEBOOM, Freddy , SUY, Hilco , REIMANN, Klaus , VAN BEEK, Jozef, Thomas, Martinus , AVOORT, Cas van der , WINGERDEN, Johannes, van , PHAN LE, Kim , GOOSSENS, Martijn , STEENEKEN, Peter, Gerard
发明人： LANGEREIS, Geert , VAN LIPPEN, Twan , ROOZEBOOM, Freddy , SUY, Hilco , REIMANN, Klaus , VAN BEEK, Jozef, Thomas, Martinus , AVOORT, Cas van der , WINGERDEN, Johannes, van , PHAN LE, Kim , GOOSSENS, Martijn , STEENEKEN, Peter, Gerard
IPC分类号： H04R19/00 , H04R19/04 , H04R31/00 , H04R7/18
CPC分类号： H04R19/005 , B81B3/0072 , B81B2201/0257 , B81B2203/0127 , H04R7/18 , H04R19/04 , H04R31/006
摘要： A microphone comprises a substrate (20), a microphone membrane (10) defining an acoustic input surface and a backplate (11) supported with respect to the membrane with a fixed spacing between the backplate (11) and the membrane (10). A microphone periphery area comprises parallel corrugations (24) in the membrane (10) and backplate (11). By using the same corrugated suspension for both the membrane and the backplate, the sensitivity to body noise is optimally suppressed.
摘要翻译：麦克风包括基板（20），限定声输入表面的麦克风膜（10）和相对于膜支撑的背板（11），所述背板（11）在背板（11）和膜（10）之间具有固定的间隔。麦克风外围区域包括膜（10）和背板（11）中的平行波纹（24）。通过对膜和背板使用相同的波纹悬挂，对身体噪声的敏感性被最佳地抑制。

7. 发明申请

WO2009004558A2 THIN FILM DETECTOR FOR PRESENCE DETECTION 审中-公开
标题翻译：薄膜检测器用于存在检测
公开(公告)号：WO2009004558A2
公开(公告)日：2009-01-08
申请号：PCT/IB2008/052610
申请日：2008-06-30
申请人： KONINKLIJKE PHILIPS ELECTRONICS N. V. , KLEE, Mareike , REIMANN, Klaus , SREEDHARAN NAIR, Biju, K. , DELNOIJ, Roger, P., A. , BOOTS, Henri, M., J. , RENDERS, Christina, A. , WUNNICKE, Olaf , REEFMAN, Derk , DIRKSEN, Peter , DEKKER, Ronald , VAN ESCH, Harry , DE WILD, Marco , MAUCZOK, Ruediger , VAN HEESCH, Chris , PASVEER, Willem, F. , KNIBBE, Engel, J. , BREEN, Remco, A., H.
发明人： KLEE, Mareike , REIMANN, Klaus , SREEDHARAN NAIR, Biju, K. , DELNOIJ, Roger, P., A. , BOOTS, Henri, M., J. , RENDERS, Christina, A. , WUNNICKE, Olaf , REEFMAN, Derk , DIRKSEN, Peter , DEKKER, Ronald , VAN ESCH, Harry , DE WILD, Marco , MAUCZOK, Ruediger , VAN HEESCH, Chris , PASVEER, Willem, F. , KNIBBE, Engel, J. , BREEN, Remco, A., H.
IPC分类号： H01L41/22 , H01L41/314
CPC分类号： B06B1/0603 , B06B1/0292 , G08B13/1645 , H01L27/20 , H01L41/0973 , H01L41/314 , Y10T29/42
摘要： A transducer (800) is provided where a membrane (830) is formed over a front substrate (615); and a piezoelectric layer (820) is formed over the membrane (830) at an active portion (821) and peripheral portions located adjacent the active portion (821). A patterned conductive layer including first and second electrodes (840, 845) is formed over the piezoelectric layer (820). Further, a back substrate structure is provided having supports (822, 824) located at the peripheral portions adjacent the active portion (821). The height (826) of the supports (822, 824) is greater than a combined height (828) of the patterned piezoelectric layer and the patterned conductive layer. Many transducers may be connected to form an array, where a controller may be provided for controlling the array, such as steering a beam of the array, and processing signals received by the array, for presence or motion detection and/or imaging, for example.
摘要翻译：提供换能器（800），其中膜（830）形成在前基板（615）上方; 并且在有源部分（821）和靠近有效部分（821）的周边部分之间在膜（830）上形成压电层（820）。包括第一和第二电极（840,845）的图案化导电层形成在压电层（820）上方。此外，背面基板结构设置有位于与活动部分（821）相邻的周边部分处的支撑件（822,824）。支撑件（822,824）的高度（826）大于图案化压电层和图案化导电层的组合高度（828）。可以连接多个换能器以形成阵列，其中可以提供用于控制阵列的控制器，例如控制阵列的光束，以及处理由阵列接收的信号，用于存在或运动检测和/或成像，例如。

8. 发明申请

WO2010010505A1 SYSTEM FOR CHARGE RECYCLING 审中-公开
标题翻译：充电回收系统
公开(公告)号：WO2010010505A1
公开(公告)日：2010-01-28
申请号：PCT/IB2009/053137
申请日：2009-07-20
申请人： NXP B.V. , REIMANN, Klaus , STEENEKEN, Peter, Gerard , KLEE, Mareike
发明人： REIMANN, Klaus , STEENEKEN, Peter, Gerard , KLEE, Mareike
IPC分类号： H02M3/18 , H02M3/07
CPC分类号： H02M3/07 , H02M3/18
摘要： The present application relates to a system for charge recycling. The present application relates also to a method for charge recycling and a handheld device, in particular, a multi-media handheld device. The system comprises at least one power supply device. The system comprises a first capacitive element and at least a second capacitive element. The first capacitive element and the second capacitive element are chargeable by the power supply device. The first capacitive element and the second capacitive element are connectable to the power supply device. At least one of the first capacitive element and the second capacitive element is formed as an actuation capacitive element. The system comprises at least a first switching element configured to connect the first capacitive element and the second capacitive element with each other such that at least one part of the charge on the actuation capacitive element is recyclable.
摘要翻译：本申请涉及一种充电回收系统。本申请还涉及一种用于电荷回收的方法和手持设备，特别是多媒体手持设备。该系统包括至少一个电源装置。该系统包括第一电容性元件和至少第二电容元件。第一电容元件和第二电容元件可由电源装置充电。第一电容元件和第二电容元件可连接到电源装置。第一电容元件和第二电容元件中的至少一个形成为致动电容元件。该系统包括至少第一开关元件，其被配置为将第一电容元件和第二电容元件彼此连接，使得致动电容元件上的电荷的至少一部分可再循环。

9. 发明申请

WO2010049864A2 GENERATING AND EXPLOITING AN ASYMMETRIC CAPACITANCE HYSTERESIS OF FERROELECTRIC MIM CAPACITORS 审中-公开
标题翻译：发生和开发铁电MIM电容器的非对称电容滞后
公开(公告)号：WO2010049864A2
公开(公告)日：2010-05-06
申请号：PCT/IB2009/054704
申请日：2009-10-24
申请人： NXP B.V. , ROEST, Aarnoud, Laurens , KLEE, Mareike , MAUCZOK, Rudiger, Gunter , REIMANN, Klaus , JOEHREN, Michael
发明人： ROEST, Aarnoud, Laurens , KLEE, Mareike , MAUCZOK, Rudiger, Gunter , REIMANN, Klaus , JOEHREN, Michael
IPC分类号： H01L27/02 , G11C11/56 , H01L27/115
CPC分类号： H01L27/0251 , G11C11/22 , G11C11/221 , H01L27/11502 , H01L28/55
摘要： The present invention relates to an electric component comprising at least one first MIM capacitor having a ferroelectric insulator with a dielectric constant of at least 100 between a first capacitor electrode of a first electrode material and a second capacitor electrode of a second electrode material. The first and second electrode materials are selected such that the first MIM capacitor exhibits, as a function of a DC voltage applicable between the first and second electrodes, an asymmetric capacitance hysteresis that lets the first MIM capacitor, in absence of the DC voltage, assume one of at least two possible distinct capacitance values, in dependence on a polarity of a switching voltage last applied to the capacitor, the switching voltage having an amount larger than a threshold-voltage amount. The invention is applicable for ESD sensors, memories and high-frequency devices.
摘要翻译：本发明涉及包括至少一个第一MIM电容器的电子元件，该电容器具有在第一电极材料的第一电容器电极和第二电容器电极之间具有至少100的介电常数的铁电绝缘体的第二电极材料。第一和第二电极材料被选择为使得第一MIM电容器根据可应用于第一和第二电极之间的DC电压呈现不对称电容滞后，其使得第一MIM电容器在没有DC电压的情况下假定依赖于最后施加到电容器的开关电压的极性，至少两个可能不同的电容值中的一个，开关电压具有大于阈值电压量的量。本发明适用于ESD传感器，存储器和高频器件。

10. 发明申请

WO2009153754A9 MEMS RESONATOR FOR FILTERING AND MIXING 审中-公开
公开(公告)号：WO2009153754A9
公开(公告)日：2009-12-23
申请号：PCT/IB2009/052614
申请日：2009-06-18
申请人： NXP B.V. , STEENEKEN, Peter, Gerard , VAN BEEK, Jozef, T.M , REIMANN, Klaus
发明人： STEENEKEN, Peter, Gerard , VAN BEEK, Jozef, T.M , REIMANN, Klaus
IPC分类号： H03D7/00
摘要： A method of operating a micro-electromechanical system, comprising a resonator; an actuation electrode; and a first detection electrode, to filter and mix a plurality of signals. The method comprises applying a first alternating voltage signal to the actuation electrode, wherein an actuation force is generated having a frequency bandwidth that is greater than and includes a resonant bandwidth of a mechanical frequency response of the resonator, and wherein a displacement of the resonator is produced which is filtered by the mechanical frequency response and varies a value of an electrical characteristic of the first detection electrode. The method also comprises applying a second alternating voltage signal to the first detection electrode, wherein the second voltage signal is mixed with the varying value to produce a first alternating current signal. The first alternating current signal is detected at the first detection electrode.

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