专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

WO2011107604A1 ILLUMINATION METHODS AND DEVICES FOR PARTIALLY COHERENT ILLUMINATION 审中-公开
标题翻译：用于部分相干照明的照明方法和装置
公开(公告)号：WO2011107604A1
公开(公告)日：2011-09-09
申请号：PCT/EP2011/053339
申请日：2011-03-04
申请人： MICRONIC MYDATA AB , LUBEREK, Jarek
发明人： LUBEREK, Jarek
IPC分类号： G03F7/20
CPC分类号： G03F7/70425 , G03F7/70116 , G03F7/70583
摘要： The technology disclosed relates to a partially coherent illuminators.In particular, it relates to a partially coherent illuminator that directs laser radiation across multiple areas of an illumination pupil. In some circumstances, this reduces spatial and/or temporal coherence of the laser radiation. It must be used with a continuous laser to provide partially coherent illumination from a coherent laser. It can be combined with a workpiece tracker that effectively freezes the workpiece and extends the time that laser radiation can be applied to expose a pattern stamp on the work piece or, it can be used with a stepper platform, without a tracker.A dynamically controllable aperture architecture is a by product of the technology disclosed.
摘要翻译：所公开的技术涉及部分相干的照明器。特别地，其涉及将激光辐射引导到照明瞳孔的多个区域上的部分相干照明器。在某些情况下，这降低了激光辐射的空间和/或时间相干性。必须使用连续激光来提供来自相干激光的部分相干照明。它可以与工件跟踪器组合，有效地冻结工件，并延长激光辐射可以施加的时间，以露出工件上的图案印章，或者可以与步进平台一起使用，而不需要跟踪器。可动态控制光圈架构是公开的技术的产物。

2. 发明申请

WO2012116995A1 ADAPTIVE OPTICS DEVICE AND METHOD 审中-公开
标题翻译：自适应光学器件和方法
公开(公告)号：WO2012116995A1
公开(公告)日：2012-09-07
申请号：PCT/EP2012/053377
申请日：2012-02-28
申请人： MICRONIC MYDATA AB , LUBEREK, Jarek
发明人： LUBEREK, Jarek
IPC分类号： G02B26/08
CPC分类号： G02B26/0825 , G02B26/06
摘要： The present invention describes a method and adaptive optics device inform of an assembly comprising a first deformable mirror, or membrane (201), which is coupled to a first cavity (208) comprised in a hermetically closed cavity, and a second deformable mirror (203) or membrane coupled to a second cavity (211) of the same hermetically closed cavity, wherein the deformable membrane coupled to the second cavity is configured to be used in order to balance or compensate for a change of volume or pressure in the first cavity.
摘要翻译：本发明描述了一种方法和自适应光学装置，其通知包括第一可变形反射镜或膜（201）的组件，所述第一可变形反射镜或膜（201）联接到包括在密封空腔中的第一空腔（208）和第二可变形反射镜（203））或耦合到相同气密封闭空腔的第二空腔（211）的膜，其中耦合到第二腔的可变形膜被配置为用于平衡或补偿第一腔中的体积或压力的变化。

3. 发明申请

WO2007050022A2 WRITING APPARATUSES AND METHODS 审中-公开
标题翻译：写作手段和方法
公开(公告)号：WO2007050022A2
公开(公告)日：2007-05-03
申请号：PCT/SE2006/001213
申请日：2006-10-26
申请人： MICRONIC LASER SYSTEMS AB , STIBLERT, Lars , SANDSTROM, Torbjorn , LUBEREK, Jarek , LOCK, Tomas
发明人： STIBLERT, Lars , SANDSTROM, Torbjorn , LUBEREK, Jarek , LOCK, Tomas
IPC分类号： G03F7/20
CPC分类号： G03F7/24 , B41J2/442 , G02F1/1303 , G02F2203/12 , G03F7/70275 , G03F7/70291 , G03F7/70358 , G03F7/70366 , G03F7/70383 , G03F7/70391 , G03F7/704 , G03F7/70425 , G03F7/70783 , G03F7/70791 , H04N1/06 , H04N1/0607 , H04N1/0628 , H04N1/0664 , H04N1/0671 , H05K1/0393 , H05K3/0082
摘要： Patterns are written on workpieces, such as, glass sheets and/or plastic sheets used in, for example, electronic display devices such as LCDs. The workpiece may be larger than about 1500 mm may be used. An optical writing head with a plurality of writing units may be used. The workpiece and the writing head may be moved relative to one another to provide oblique writing.
摘要翻译：图案写在工件上，例如用于例如LCD等电子显示装置中的玻璃板和/或塑料片。可以使用工件大于约1500mm。可以使用具有多个写入单元的光学写入头。工件和书写头可以相对于彼此移动以提供斜写。

4. 发明申请

WO2009003912A1 FOURIER PLANE ANALYSIS AND REFINEMENT OF SLM CALIBRATION 审中-公开
标题翻译：傅立叶计算机分析与精简SLM校准
公开(公告)号：WO2009003912A1
公开(公告)日：2009-01-08
申请号：PCT/EP2008/058186
申请日：2008-06-26
申请人： MICRONIC LASER SYSTEMS AB , LUBEREK, Jarek
发明人： LUBEREK, Jarek
IPC分类号： G02B26/08 , G02B27/46 , G03F7/20
CPC分类号： G03F7/70291 , G02B27/46 , G03F7/70191 , G03F7/70283 , G03F7/70516
摘要： The present disclosure relates to phase-sensitive iterative calibration of an SLM system. In particular, it relates to selecting among local calibrations when there is more than one calibration that satisfies a calibration intensity criteria. It utilizes information available before Fourier filtering, from non-zeroth order diffraction components to counter drift among alternative local calibrations.
摘要翻译：本公开涉及SLM系统的相敏迭代校准。具体地，涉及当满足校准强度标准的多于一个的校准时，在局部校准中进行选择。它利用傅里叶滤波之前的可用信息，从非零阶衍射分量到备选局部校准之间的反相漂移。

5. 发明申请

WO2010100270A1 METHOD AND APPARATUS FOR STATISTICAL ILLUMINATION 审中-公开
标题翻译：用于统计照明的方法和装置
公开(公告)号：WO2010100270A1
公开(公告)日：2010-09-10
申请号：PCT/EP2010/052862
申请日：2010-03-05
申请人： MICRONIC LASER SYSTEMS AB , LUBEREK, Jarek , SANDSTRÖM, Torbjörn
发明人： LUBEREK, Jarek , SANDSTRÖM, Torbjörn
IPC分类号： G03F7/20
CPC分类号： G01B11/303 , G03F7/70291 , G03F7/70366 , G03F7/70433 , G03F7/70508 , G03F7/70516 , G03F7/70591 , G03F7/70783
摘要： The technology disclosed relates to an illumination source including numerous laser diodes. In particular, it relates to extending the duty cycle and/or reducing the frequency of component replacement by detecting failure of one or more individual laser diodes and compensating for the failure, without replacing the laser diodes. The technology disclosed can be used in cases of catastrophic laser diode failure by changing the power of remaining laser diodes to restore illumination to the coherence function similar to the pre-failure illumination field. Particular aspects of the technology disclosed are described in the claims, specification and drawings.
摘要翻译：所公开的技术涉及包括许多激光二极管的照明源。特别地，它涉及通过检测一个或多个单个激光二极管的故障并补偿故障来延长占空比和/或降低部件更换的频率，而无需更换激光二极管。所公开的技术可以用于灾难性激光二极管故障的情况下，通过改变剩余的激光二极管的功率来恢复照射到类似于故障前照明场的相干功能。所公开的技术的特定方面在权利要求，说明书和附图中描述。

6. 发明申请

WO2007098935A3 PLATFORMS, APPARATUSES, SYSTEMS AND METHODS FOR PROCESSING AND ANALYZING SUBSTRATES 审中-公开
公开(公告)号：WO2007098935A3
公开(公告)日：2007-09-07
申请号：PCT/EP2007/001725
申请日：2007-02-28
申请人： MICRONIC LASER SYSTEMS AB , SANDSTRÖM, Torbjörn , STIBLERT, Lars , LUBEREK, Jarek , LOCK, Tomas
发明人： SANDSTRÖM, Torbjörn , STIBLERT, Lars , LUBEREK, Jarek , LOCK, Tomas
IPC分类号： G03F7/20 , H05K3/00
摘要： Devices and methods for manufacturing displays, solar panels and other devices using larger size workpieces are provided. The workpiece is rolled into a cylinder, thereby reducing the physical size by a factor of 3 in one dimension. The stages on which the workpieces are rolled have a cylindrical shape, which allows a more robust and/or compact movement of the glass, reduced machine weight. The workpieces are relatively thin, more flexible, and are rolled onto a cylinder with a diameter of about 1 meter.

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式