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1. 发明申请

WO2014140047A2 METHOD AND DEVICE FOR WRITING PHOTOMASKS WITH REDUCED MURA ERRORS 审中-公开
标题翻译：用减少MURA错误写入光子的方法和装置
公开(公告)号：WO2014140047A2
公开(公告)日：2014-09-18
申请号：PCT/EP2014054750
申请日：2014-03-11
申请人： MICRONIC MYDATA AB
发明人： SANDSTRÖM TORBJÖRN
IPC分类号： G03F1/42
CPC分类号： G03F1/42 , G03F1/76 , G03F7/70358 , G03F7/70383 , G03F7/704 , G03F7/70425 , G03F7/70466 , G03F7/70583 , G03F7/70775 , G03F9/7011 , G03F9/708
摘要： The problem of mura in large area photomasks is solved or at least reduced by setting up a writing system to write a pattern with high accuracy and with the optical axes essentially parallel to the movement axes of the stage, then writing photomasks in two passes with the substrate rotated to different angles on the stage. The angle between the orientation of the first and second pass is larger than about 10 degrees, larger than about 20 degrees or larger than about 35 degrees and it can be approximately 10 degrees, approximately 50 degrees, approximately 60 degrees or approximately 90 degrees. The substrate is physically rotated on the stage and aligned with high accuracy after the rotation and the data driving the first and second exposure passes are derived from the first input data specification but processed according to the known oblique angles, so that the second pass is accurately overlaid on the first pass.
摘要翻译：通过设置写入系统以高精度写入图案并且光轴基本上平行于平台的移动轴来解决或至少减少了大面积光掩模中的mura的问题，然后将光掩模写入两次通过中衬底在舞台上旋转到不同的角度。第一和第二通过的取向之间的角度大于约10度，大于约20度或大于约35度，并且其可以为大约10度，大约50度，大约60度或大约90度。衬底物理地在舞台上旋转并且在旋转之后以高精度对准并且数据驱动第一和第二曝光通过从第一输入数据规范导出，但是根据已知的倾斜角度进行处理，使得第二遍准确重叠在第一遍。

2. 发明申请

WO2014139568A1 METHOD AND DEVICE FOR JETTING DROPLETS 审中-公开
标题翻译：用于喷射滴液的方法和装置
公开(公告)号：WO2014139568A1
公开(公告)日：2014-09-18
申请号：PCT/EP2013/055182
申请日：2013-03-13
申请人： MICRONIC MYDATA AB
发明人： BERGSTRÖM, Andreas , ESKÅNG, Eric , BERGSTRÖM, Johan , DAHLBERG, Martin
IPC分类号： H05K3/12 , B23K3/06 , B41J2/04 , B05C11/10 , H05K3/30 , H05K3/32 , H05K3/34 , H05K13/04 , B05B12/08
CPC分类号： B23K3/0638 , B05C5/02 , B05C11/1007 , B05C11/1034 , B23K3/0623 , B41J2/14 , B41J2002/14354 , B41J2002/14483 , H05K3/125 , H05K3/305 , H05K3/321 , H05K3/3484 , H05K3/3489 , H05K13/0469 , H05K2203/013 , H05K2203/163
摘要： An ejector (1) for jetting droplets (22) of viscous media onto a substrate (23) is disclosed. The ejector comprises a jetting nozzle (2) having a nozzle space (3) and a nozzle outlet (4), and an impacting device (6) for impacting a volume of the viscous medium in the nozzle space such that droplets of viscous medium is jetted from the nozzle space through the nozzle outlet towards the substrate. The ejector also comprise a sensor arrangement (5) arranged after the jetting nozzle in the jetting direction, wherein the sensor arrangement is adapted to detect a jetted droplet of viscous medium passing thereby.
摘要翻译：公开了一种用于将粘性介质的液滴（22）喷射到衬底（23）上的喷射器（1）。喷射器包括具有喷嘴空间（3）和喷嘴出口（4）的喷射喷嘴（2）和用于冲击喷嘴空间中的粘性介质的体积的冲击装置（6），使得粘性介质的液滴为从喷嘴空间通过喷嘴出口朝向基板喷射。喷射器还包括沿喷射方向布置在喷射喷嘴之后的传感器装置（5），其中传感器装置适于检测通过的粘性介质的喷射液滴。

3. 发明申请

WO2012035416A3 APPARATUS FOR GENERATING PATTERNS ON WORKPIECES 审中-公开
标题翻译：用于生成工作模式的装置
公开(公告)号：WO2012035416A3
公开(公告)日：2012-05-10
申请号：PCT/IB2011002150
申请日：2011-09-15
申请人： MICRONIC MYDATA AB , WAHLSTEN MIKAEL , GUSTAFSSON PER-ERIK
发明人： WAHLSTEN MIKAEL , GUSTAFSSON PER-ERIK
IPC分类号： H01L21/68 , H01L21/67 , H01L21/683 , H05K13/04
CPC分类号： H05K13/0404 , H01L21/67132 , H01L21/67144 , H01L21/681 , H01L21/6838 , H05K13/0413 , H05K13/08 , H05K2203/0528 , Y10T29/53 , Y10T29/53061 , Y10T29/53178
摘要： A pick-and-place tool configured to pick and place at least one die on a workpiece includes a mounting head. The mounting head includes a die position determining unit configured to one of measure and detect an actual position of at least one die during a time between the placement of the at least one die on the workpiece and the picking up of a subsequent die for placement on the workpiece.
摘要翻译：配置成在工件上拾取和放置至少一个模具的拾取和放置工具包括安装头。所述安装头包括模具位置确定单元，所述模具位置确定单元被配置为在放置所述工件上的所述至少一个模具和拾取后续模具之间的时间期间测量和检测至少一个模具的实际位置中的一个，工件。

4. 发明申请

WO2011107601A1 1.5D SLM FOR LITHOGRAPHY 审中-公开
标题翻译： 1.5D SLM用于LITHOGRAPHY
公开(公告)号：WO2011107601A1
公开(公告)日：2011-09-09
申请号：PCT/EP2011/053335
申请日：2011-03-04
申请人： MICRONIC MYDATA AB , SANDSTRÖM, Torbjörn
发明人： SANDSTRÖM, Torbjörn
IPC分类号： G03F7/20
CPC分类号： G03F7/70291 , G02B26/0808 , G03F7/70583
摘要： This invention relates to an improved micro lithographic writer that sweeps a modulated pattern across the surface of a workpiece. The SLM disclosed works in a diffractive mode with a continuous or quasi-continuous radiation source. It uses a long and narrow SLM and takes advantage of diffractive effects along the narrow axis of the SLM to improve writing characteristics along that axis.
摘要翻译：本发明涉及一种改进的微型光刻写入器，其通过工件的表面扫描调制图案。所公开的SLM以具有连续或准连续辐射源的衍射模式工作。它使用长而窄的SLM，并利用沿着SLM的窄轴的衍射效应来改善沿该轴的写入特性。

5. 发明申请

WO2011104374A1 METHOD AND APPARATUS FOR PERFORMING PATTERN ALIGNMENT 审中-公开
标题翻译：用于执行图案对齐的方法和装置
公开(公告)号：WO2011104374A1
公开(公告)日：2011-09-01
申请号：PCT/EP2011/052866
申请日：2011-02-25
申请人： MICRONIC MYDATA AB , WAHLSTEN, Mikael , GUSTAFSSON, Per-Erik
发明人： WAHLSTEN, Mikael , GUSTAFSSON, Per-Erik
IPC分类号： G03F7/20 , G03F9/00
CPC分类号： G03F9/7003 , G03F7/70383 , H05K3/4679
摘要： A method for patterning a workpiece in a direct write machine in the manufacturing of a multilayer stack, wherein a first circuit pattern (1304) comprising patterns for connection points is transformed according to determined fitting tolerances to fit to connection points of a second circuit pattern (1306) and to circuit pattern(s) of specific features such as random placed dies, or group of dies, on or in the workpiece. The second layer may be a previously formed layer or a layer to be formed on the same workpiece or on a different workpiece for the stack. Pattern data associated with selected die is transformed into adjusted circuit pattern data using the transformation defined by the transformed positions such that the circuit pattern is fitted to the selected die(s).
摘要翻译：一种用于在制造多层堆叠中的直接写入机器中对工件进行图案化的方法，其中包括用于连接点的图案的第一电路图案（1304）根据确定的配合公差被变换以适合于第二电路图案的连接点 1306）以及在工件上或工件中的特定特征（例如随机放置的模具或一组模具）的电路图案。第二层可以是预先形成的层或要形成在相同工件上的层或者用于堆叠的不同工件上的层。与所选择的管芯相关联的模式数据使用由变换的位置定义的变换被转换成调整的电路图案数据，使得电路图案被安装到所选择的管芯。

6. 发明申请

WO2014140046A3 MECHANICALLY PRODUCED ALIGNMENT FIDUCIAL METHOD AND ALIGNMENT SYSTEM 审中-公开
标题翻译：机械制备校准方法和对准系统
公开(公告)号：WO2014140046A3
公开(公告)日：2014-12-11
申请号：PCT/EP2014054748
申请日：2014-03-11
申请人： MICRONIC MYDATA AB
发明人： SANDSTRÖM TORBJÖRN
IPC分类号： G03F9/00 , G03F1/42
CPC分类号： G03F7/70775 , G03F1/42 , G03F9/708 , G03F9/7088
摘要： The technology disclosed relates to methods and systems that can be used to reduce visible artifacts know as mura. In particular, it relates to producing alignment marks by physically modifying appearance of a layer of exposure or radiation sensitive material on a workpiece, then using those alignment marks or transferred direct or inverted images of those marks to realign a writing coordinate system between exposure writing passes, following physical movement of the workpiece within the writing system. The physical modifications described include mechanically pressing a mark into the layer, using a laser to ash or ablate the layer, or applying an ink or other substance to the surface of the laser.
摘要翻译：所公开的技术涉及可用于减少知道的可见伪像的方法和系统。特别地，它涉及通过在工件上物理地改变曝光或辐射敏感材料层的外观来产生对准标记，然后使用那些对准标记或这些标记的传送的直接或反转图像来重新排列曝光写入通过之间的书写坐标系，在书写系统内的工件物理移动之后。所描述的物理修改包括使用激光将标记机械地压入层中，以将灰分或烧蚀层，或将油墨或其它物质施加到激光表面。

7. 发明申请

WO2014140193A3 DRIVER FOR ACOUSTOOPTIC MODULATOR AND MODULATION PRINCIPLE 审中-公开
标题翻译：激励调制器和调制原理的驱动程序
公开(公告)号：WO2014140193A3
公开(公告)日：2014-10-30
申请号：PCT/EP2014054988
申请日：2014-03-13
申请人： MICRONIC MYDATA AB
发明人： STENSTRÖM PONTUS , HARTMAN CARL , SANDSTRÖM TORBJÖRN
IPC分类号： G03F7/20
CPC分类号： G03F7/704
摘要： A laser writer for highly accurate patterning of devices, e.g. large area photomasks, with a numerical modulator which calculates instantaneous values of the modulator RF to be fed to the acoustooptic modulator. Further improvements allow increased resolution by phase control and reduced errors by reducing the RF power variations in the acoustooptic modulator.
摘要翻译：用于高精度图案化器件的激光写入器，例如具有数字调制器的数字调制器，其计算要馈送到声光调制器的调制器RF的瞬时值。进一步的改进允许通过相位控制增加分辨率，并通过降低声光调制器中的RF功率变化来减少误差。

8. 发明申请

WO2014140047A3 METHOD FOR WRITING PHOTOMASKS WITH REDUCED MURA ERRORS 审中-公开
公开(公告)号：WO2014140047A3
公开(公告)日：2014-09-18
申请号：PCT/EP2014/054750
申请日：2014-03-11
申请人： MICRONIC MYDATA AB
发明人： SANDSTRÖM, Torbjörn
IPC分类号： G03F9/00 , G03F7/20 , G03F1/42
摘要： The problem of mura in large area photomasks is solved or at least reduced by setting up a writing system to write a pattern with high accuracy and with the optical axes essentially parallel to the movement axes of the stage, then writing photomasks in two passes with the substrate rotated to different angles on the stage. The angle between the orientation of the first and second pass is larger than about 10 degrees, larger than about 20 degrees or larger than about 35 degrees and it can be approximately 10 degrees, approximately 50 degrees, approximately 60 degrees or approximately 90 degrees. The substrate is physically rotated on the stage and aligned with high accuracy after the rotation and the data driving the first and second exposure passes are derived from the first input data specification but processed according to the known oblique angles, so that the second pass is accurately overlaid on the first pass.

9. 发明申请

WO2014140046A2 MECHANICALLY PRODUCED ALIGNMENT FIDUCIAL METHOD AND DEVICE 审中-公开
标题翻译：机械制造对准的方法和装置
公开(公告)号：WO2014140046A2
公开(公告)日：2014-09-18
申请号：PCT/EP2014/054748
申请日：2014-03-11
申请人： MICRONIC MYDATA AB
发明人： SANDSTRÖM, Torbjörn
IPC分类号： G03F1/42
CPC分类号： G03F7/70775 , G03F1/42 , G03F9/708 , G03F9/7088
摘要： The technology disclosed relates to methods and systems that can be used to reduce visible artifacts know as mura. In particular, it relates to producing alignment marks by physically modifying appearance of a layer of exposure or radiation sensitive material on a workpiece, then using those alignment marks or transferred direct or inverted images of those marks to realign a writing coordinate system between exposure writing passes, following physical movement of the workpiece within the writing system. The physical modifications described include mechanically pressing a mark into the layer, using a laser to ash or ablate the layer, or applying an ink or other substance to the surface of the laser.
摘要翻译：所公开的技术涉及可用于减少知道的可见伪像的方法和系统。特别地，它涉及通过在工件上物理地改变曝光或辐射敏感材料层的外观来产生对准标记，然后使用那些对准标记或这些标记的传送的直接或反转图像来重新排列曝光写入通过之间的书写坐标系，在书写系统内的工件物理移动之后。所描述的物理修改包括使用激光将标记机械地压入层中，以将灰分或烧蚀层，或将油墨或其它物质施加到激光表面。

10. 发明申请

WO2013135731A3 METHOD AND DEVICE FOR AUTOMATIC STORAGE OF TAPE GUIDES 审中-公开
标题翻译：用于自动存储磁带指南的方法和装置
公开(公告)号：WO2013135731A3
公开(公告)日：2014-01-03
申请号：PCT/EP2013055050
申请日：2013-03-12
申请人： MICRONIC MYDATA AB
发明人： JACOBSSON NILS
IPC分类号： H05K13/00 , H05K13/08
CPC分类号： H05K13/0084 , B65D19/00 , B65D85/62 , B65G1/06 , H05K13/08
摘要： A system and method for surface mount assembly of PCBs, using an automated pick-and-place machine into which component tapes on reels are fed, uses component tape reels each of which has been pre-threaded into its appropriate tape guide and been stored as a reel/tape guide packet in an automated SMD storage tower, from which appropriate packets are retrieved for coupling to the pick-and-place machine.
摘要翻译：一种用于PCB的表面安装组装的系统和方法，使用卷筒上的部件带馈送到其中的自动拾取和放置机器，使用已经预螺纹连接到其适当的磁带引导件中的组件磁带卷轴并存储为在自动化SMD存储塔中的卷轴/磁带引导包，从其中检索适当的包以耦合到拾取和放置机器。

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