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    • 5. 发明申请
    • METHOD OF FORMING NON-VOLATILE RESISTANCE VARIABLE DEVICES AND METHOD OF FORMING A PROGRAMMABLE MEMORY CELL OF MEMORY CIRCUITRY
    • 形成非易失性电阻可变器件的方法和形成存储器电路的可编程存储器单元的方法
    • WO2003019691A2
    • 2003-03-06
    • PCT/US2002/027929
    • 2002-08-28
    • MICRON TECHNOLOGY, INC.
    • CAMPBELL, Kristy, A.MOORE, John, T.
    • H01L45/00
    • H01L45/1233H01L45/04H01L45/085H01L45/143H01L45/1616H01L45/1658H01L45/1683
    • A first conductive electrode material is formed on a substrate. Chalcogenide comprising material is formed thereover. The chalcogenide material comprises A x Se y . A silver comprising layer is formed over the chalcogenide material. The silver is irradiated effective to break a chalcogenide bond of the chalcogenide material at an interface of the silver comprising layer and chalcogenide material and diffuse at least some of the silver into the chalcogenide material. After the irradiating, the chalcogenide material outer surface is exposed to an iodine comprising fluid effective to reduce roughness of the chalcogenide material outer surface from what it was prior to the exposing. After the exposing, a second conductive electrode material is deposited over the chalcogenide material, and which is continuous and completely covering at least over the chalcogenide material, and the second conductive electrode material is formed into an electrode of the device.
    • 在基板上形成第一导电电极材料。 在其上形成包含硫属元素的材料。 硫族化物材料包括A> x y <。 在硫族化物材料上形成含银层。 银被照射有效地破坏硫族化物材料在含银层和硫族化物材料的界面处的硫属化物键,并将至少一些银扩散到硫族化物材料中。 在照射之后,硫族化物材料外表面暴露于含有碘的流体,其有效地减少了硫族化物材料外表面的暴露之前的粗糙度。 曝光后,将第二导电电极材料沉积在硫族化物材料上,并且至少在硫族化物材料上连续并完全覆盖,并且将第二导电电极材料形成为器件的电极。