会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 9. 发明申请
    • HIGH RESOLUTION SOLDER RESIST MATERIAL FOR SILICON BRIDGE APPLICATION
    • 用于硅桥应用的高分辨率焊料电阻材料
    • WO2018004822A1
    • 2018-01-04
    • PCT/US2017/030888
    • 2017-05-03
    • INTEL CORPORATION
    • ALUR, Siddharth K.LI, ShengJEN, Wei-Lun K.
    • H01L23/482H01L23/48H01L23/00
    • In accordance with disclosed embodiments, there are provided high resolution solder resist material for silicon bridge application. For instance, in accordance with one embodiment, there is a silicon bridge disclosed, the silicon bridge having therein a solder resist layer formed from a high resolution solder resist material; in which the solder resist layer includes a polymer material which hardens when exposed to light radiation; in which the solder resist layer further includes spherical particles; a plurality of vias patterned into the solder resist layer by a photolithography process, the plurality of vias forming a set of larger vias and a set of smaller vias patterned into the solder resist layer by the photolithography process, each of the larger vias being greater in size than each of the smaller vias, and further in which each of the smaller vias are less than half the size of any one of the larger vias; in which the larger vias and the smaller vias provide through-silicon vias (TSVs) interconnects through the solder resist layer electrically interfacing two or more functional semiconductor devices affixed to the silicon bridge; and the silicon bridge further having therein a copper layer positioned below the solder resist layer. Other related embodiments are disclosed.
    • 根据所公开的实施例,提供了用于硅桥应用的高分辨率阻焊剂材料。 例如,根据一个实施例,公开了一种硅桥,所述硅桥中具有由高分辨率阻焊材料形成的阻焊层; 其中阻焊层包括暴露于光辐射时硬化的聚合物材料; 其中阻焊层还包括球形颗粒; 通过光刻工艺图案化到阻焊层中的多个通孔,多个通孔形成一组较大的通孔和一组通过光刻工艺图案化到阻焊层中的较小的通孔,每个较大的通孔在 尺寸小于每个较小的通孔,并且进一步其中每个较小的通孔小于任何一个较大的通孔的尺寸的一半; 其中较大的通孔和较小的通孔提供贯穿硅通孔(TSV)互连穿过阻焊层,所述阻焊层电连接固定到硅桥的两个或更多个功能半导体器件; 并且硅桥还具有位于阻焊层下方的铜层。 披露了其他相关的实施例。