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    • 2. 发明申请
    • APPARATUS AND METHOD FOR COATING USING A HOT WIRE
    • 使用热丝涂装的装置和方法
    • WO2012126520A1
    • 2012-09-27
    • PCT/EP2011/054365
    • 2011-03-22
    • APPLIED MATERIALS, INC.BANGERT, StefanGUHR, WernerKELLER, StefanKÖNIG, Michael
    • BANGERT, StefanGUHR, WernerKELLER, StefanKÖNIG, Michael
    • C23C16/44
    • C23C16/448C23C16/44
    • A coating apparatus (700) is provided including: (i) a vacuum chamber (16) for coating a substrate (12) with coating material heated by a wire (14); and (ii) an actuator system (18) including a motorised drive (20). The actuator system is configured for tensioning the wire (14) during the coating. Furthermore, a method of manufacturing a coated substrate (12) is provided including: (i) tensioning a wire (14) by an actuator system (18) including a motorised drive; and (ii) coating the substrate (12) with a coating material (28), the coating being under vacuum conditions. The coating includes heating at least a portion (14a) of the wire (14) to an operating temperature for inducing a temperature increase in the coating material before the coating material is deposited over substrate (12).
    • 提供一种涂覆设备(700),包括:(i)用于通过由导线(14)加热的涂层材料涂覆基底(12)的真空室(16); 和(ii)包括电动驱动器(20)的致动器系统(18)。 致动器系统构造成在涂覆期间张紧线(14)。 此外,提供一种制造涂覆基板(12)的方法,包括:(i)通过包括电动驱动器的致动器系统(18)张紧导线(14); 和(ii)用涂料(28)涂覆基材(12),该涂层处于真空条件下。 所述涂层包括将所述金属丝(14)的至少一部分(14a)加热到在所述涂层材料沉积在基底(12)上之前引起涂层材料升温的操作温度。