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    • 4. 发明申请
    • FILLER CELLS FOR DESIGN OPTIMIZATION IN A PLACE-AND-ROUTE SYSTEM
    • 用于设计优化的填充电池在路线和路线系统中
    • WO2009055113A1
    • 2009-04-30
    • PCT/US2008/071589
    • 2008-07-30
    • SYNOPSYS, INC.LIN, Xi-weiLEE, Jyh-chwen, FrankPRAMANIK, Dipankar
    • LIN, Xi-weiLEE, Jyh-chwen, FrankPRAMANIK, Dipankar
    • H01L21/82H01L21/822H01L27/04
    • G06F17/50G06F17/5068H01L27/0207
    • A system and method are provided for laying out an integrated circuit design into a plurality of circuit layout cells having gaps therebetween, and inserting into each given one of at least a subset of the gaps, a corresponding filler cell selected from a predefined database in dependence upon a desired effect on a performance parameter of at least one circuit cell adjacent to the given gap. The circuit layout cells may be arranged in rows, and in some embodiments the selection of an appropriate filler cell for a given gap depends upon effects desired on a performance parameter of both circuit cells adjacent to the given gap. The predefined filler cells can include, for example, dummy diffusion regions, dummy poly lines, N- well boundary shifts and etch stop layer boundary shifts. In an embodiment, circuit layout cells can be moved in order to accommodate a selected filler cell.
    • 提供了一种系统和方法,用于将集成电路设计布置成具有间隙的多个电路布局单元,并且将至少一个子空间中的每个给定的一个插入到依赖于预定数据库的相应填充单元 对所述给定间隙相邻的至少一个电路单元的性能参数产生期望的影响。 电路布局单元可以排成行,并且在一些实施例中,用于给定间隙的适当填充单元的选择取决于与给定间隙相邻的两个电路单元的性能参数所期望的效果。 预定义的填充单元可以包括例如虚拟扩散区域,虚拟多线,N-阱边界位移和蚀刻停止层边界移位。 在一个实施例中,可以移动电路布局单元以便容纳选定的填充单元。
    • 8. 发明申请
    • MEMORY DEVICE WITH A TEXTURED LOWERED ELECTRODE
    • 具有纹理下降的电极的存储器件
    • WO2013016027A1
    • 2013-01-31
    • PCT/US2012/046634
    • 2012-07-13
    • INTERMOLECULAR, INC.PRAMANIK, Dipankar
    • PRAMANIK, Dipankar
    • H01L29/02
    • H01L45/1253H01L21/0332H01L21/32139H01L27/2463H01L45/08H01L45/1233H01L45/1273H01L45/146H01L45/16H01L45/1641
    • Embodiments of the invention generally relate to memory devices and methods for manufacturing such memory devices. In one embodiment, a method for forming a memory device with a textured electrode is provided and includes forming a silicon oxide layer on a lower electrode disposed on a substrate, forming metallic particles on the silicon oxide layer, wherein the metallic particles are separately disposed from each other on the silicon oxide layer. The method further includes etching between the metallic particles while removing a portion of the silicon oxide layer and forming troughs within the lower electrode, removing the metallic particles and remaining silicon oxide layer by a wet etch process while revealing peaks separated by the troughs disposed on the lower electrode, forming a metal oxide film stack within the troughs and over the peaks of the lower electrode, and forming an upper electrode over the metal oxide film stack.
    • 本发明的实施例一般涉及用于制造这种存储器件的存储器件和方法。 在一个实施例中,提供了一种用于形成具有纹理电极的存储器件的方法,包括在设置在衬底上的下电极上形成氧化硅层,在氧化硅层上形成金属颗粒,其中金属颗粒分开设置 彼此在氧化硅层上。 该方法还包括在金属颗粒之间蚀刻,同时去除氧化硅层的一部分并在下电极内形成槽,通过湿法蚀刻工艺除去金属颗粒和剩余的氧化硅层,同时显露由设置在 下电极,在槽内和下电极的峰上形成金属氧化物膜堆叠,并在金属氧化物膜堆叠上形成上电极。