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    • 7. 发明申请
    • MEMORY DEVICE WITH A TEXTURED LOWERED ELECTRODE
    • 具有纹理下降的电极的存储器件
    • WO2013016027A1
    • 2013-01-31
    • PCT/US2012/046634
    • 2012-07-13
    • INTERMOLECULAR, INC.PRAMANIK, Dipankar
    • PRAMANIK, Dipankar
    • H01L29/02
    • H01L45/1253H01L21/0332H01L21/32139H01L27/2463H01L45/08H01L45/1233H01L45/1273H01L45/146H01L45/16H01L45/1641
    • Embodiments of the invention generally relate to memory devices and methods for manufacturing such memory devices. In one embodiment, a method for forming a memory device with a textured electrode is provided and includes forming a silicon oxide layer on a lower electrode disposed on a substrate, forming metallic particles on the silicon oxide layer, wherein the metallic particles are separately disposed from each other on the silicon oxide layer. The method further includes etching between the metallic particles while removing a portion of the silicon oxide layer and forming troughs within the lower electrode, removing the metallic particles and remaining silicon oxide layer by a wet etch process while revealing peaks separated by the troughs disposed on the lower electrode, forming a metal oxide film stack within the troughs and over the peaks of the lower electrode, and forming an upper electrode over the metal oxide film stack.
    • 本发明的实施例一般涉及用于制造这种存储器件的存储器件和方法。 在一个实施例中,提供了一种用于形成具有纹理电极的存储器件的方法,包括在设置在衬底上的下电极上形成氧化硅层,在氧化硅层上形成金属颗粒,其中金属颗粒分开设置 彼此在氧化硅层上。 该方法还包括在金属颗粒之间蚀刻,同时去除氧化硅层的一部分并在下电极内形成槽,通过湿法蚀刻工艺除去金属颗粒和剩余的氧化硅层,同时显露由设置在 下电极,在槽内和下电极的峰上形成金属氧化物膜堆叠,并在金属氧化物膜堆叠上形成上电极。