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    • 3. 发明申请
    • MICROWAVE POWER DELIVERY SYSTEM FOR PLASMA REACTORS
    • 用于等离子体反应器的微波功率输送系统
    • WO2012084658A1
    • 2012-06-28
    • PCT/EP2011/072822
    • 2011-12-14
    • ELEMENT SIX LIMITEDWORT, Christopher, John, HowardBRANDON, John, Robert
    • WORT, Christopher, John, HowardBRANDON, John, Robert
    • C23C16/27C23C16/511H01J37/32H01P5/04H01P5/20
    • H01J37/32229C23C16/274C23C16/511C23C16/54H01J37/32192H01J37/32256H01J37/32266H01J2237/3321H01P5/20H01P5/222
    • A microwave power delivery system for supplying microwave power to a plurality of microwave plasma reactors (8), the microwave power delivery system comprising: a tuner (14) configured to be coupled to a microwave source (4) and configured to match impedance of the plurality of microwave plasma reactors to that of the microwave source; and a waveguide junction (18) coupled to the tuner and configured to guide microwaves to and from the plurality of microwave plasma reactors, wherein the waveguide junction comprises four waveguide ports including a first port coupled to the tuner, second and third ports configured to be coupled to respective microwave plasma reactors, and a fourth port coupled to a microwave sink (20), wherein the waveguide junction is configured to evenly split microwave power input from the tuner through the first port between the second and third ports for providing microwave power to respective microwave plasma reactors, wherein the waveguide junction is configured to decouple the second and third ports thereby preventing any reflected microwaves from one of the microwave plasma reactors from feeding across the waveguide junction directly into another microwave plasma reactor causing an imbalance, wherein the waveguide junction is further configured to feed reflected microwaves received back through the second and third ports which are balanced in terms of magnitude and phase to the tuner such that they can be reflected by the tuner and re-used, and wherein the waveguide junction is further configured to feed excess reflected power which is not balanced through the fourth port into the microwave sink.
    • 一种用于向多个微波等离子体反应器(8)提供微波功率的微波功率输送系统,所述微波功率输送系统包括:调谐器(14),其被配置为耦合到微波源(4)并且被配置为使所述微波功率输出系统 多个微波等离子体反应器; 以及波导结(18),其耦合到所述调谐器并且被配置为向所述多个微波等离子体反应器引导微波,其中所述波导结包括四个波导端口,所述波导端口包括耦合到所述调谐器的第一端口,所述第二端口和所述第三端口被配置为 耦合到相应的微波等离子体反应器,以及耦合到微波吸收器(20)的第四端口,其中所述波导结被配置为将从所述调谐器输入的微波功率均匀地分开通过所述第二和第三端口之间的第一端口,以提供微波功率 各个微波等离子体反应器,其中波导结被配置为使第二和第三端口去耦,从而防止来自微波等离子体反应器之一的任何反射的微波直接穿过波导结直接进入另一个引起不平衡的微波等离子体反应器,其中波导结 进一步构造成供给反向收回的反射的微波 gh第二和第三端口,其在幅度和相位方面与调谐器平衡,使得它们可以被调谐器反射并重新使用,并且其中波导结还被配置为馈送不平衡的多余的反射功率 第四口进入微波槽。
    • 7. 发明申请
    • A MICROWAVE PLASMA REACTOR FOR MANUFACTURING SYNTHETIC DIAMOND MATERIAL
    • 用于制造合成金刚石材料的微波等离子体反应器
    • WO2012084660A1
    • 2012-06-28
    • PCT/EP2011/072824
    • 2011-12-14
    • ELEMENT SIX LIMITEDBRANDON, John, RobertCULLEN, Alexander, LambWILLIAMS, Stephen, DavidDODSON, Joseph, MichaelWILMAN, Jonathan, JamesWORT, Christopher, John, Howard
    • BRANDON, John, RobertCULLEN, Alexander, LambWILLIAMS, Stephen, DavidDODSON, Joseph, MichaelWILMAN, Jonathan, JamesWORT, Christopher, John, Howard
    • H01J37/32C23C16/511
    • H01J37/32458C23C16/274C23C16/511H01J37/32192H01J37/32284
    • A microwave plasma reactor for manufacturing synthetic diamond material via chemical vapour deposition, the microwave plasma reactor comprising: a microwave generator configured to generate microwaves at a frequency f; a plasma chamber comprising a base, a top plate, and a side wall extending from said base to said top plate defining a resonance cavity for supporting a microwave resonance mode, wherein the resonance cavity has a central rotational axis of symmetry extending from the base to the top plate, and wherein the top plate is mounted across said central rotational axis of symmetry; a microwave coupling configuration for feeding microwaves from the microwave generator into the plasma chamber; a gas flow system for feeding process gases into the plasma chamber and removing them therefrom; and a substrate holder disposed in the plasma chamber and comprising a supporting surface for supporting a substrate on which the synthetic diamond material is to be deposited in use; wherein the resonance cavity is configured to have a height, as measured from the base to the top plate of the plasma chamber, which supports a TM 011 resonant mode between the base and the top plate at said frequency f, and wherein the resonance cavity is further configured to have a diameter, as measured at a height less than 50% of the height of the resonance cavity as measured from the base, which satisfies the condition that a ratio of the resonance cavity height / the resonance cavity diameter is in the range 0.3 to 1.0.
    • 一种用于通过化学气相沉积制造合成金刚石材料的微波等离子体反应器,所述微波等离子体反应器包括:微波发生器,被配置为以频率f产生微波; 等离子体室,包括基底,顶板和从所述底座延伸到所述顶板的侧壁,所述侧壁限定用于支撑微波共振模式的谐振腔,其中所述谐振腔具有从所述底座延伸到对称的中心旋转对称轴线 顶板,并且其中顶板穿过所述中心旋转对称轴线安装; 用于将微波从微波发生器馈送到等离子体室中的微波耦合配置; 用于将工艺气体进料到等离子体室中并从中除去它们的气体流动系统; 以及衬底保持器,其设置在所述等离子体室中,并且包括支撑表面,所述支撑表面用于支撑在使用中沉积所述合成金刚石材料的基底; 其中所述谐振腔被配置为具有从所述等离子体室的所述基板到所述顶板测量的高度,所述高度在所述频率f处支撑所述基座和所述顶板之间的TM011谐振模式,并且其中所述谐振腔进一步 被配置为具有在从底部测量的高度小于谐振腔的高度的50%的高度处测量的直径,其满足谐振腔高度/谐振腔直径的比率在0.3范围内的条件 到1.0。