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1. 发明申请

WO2004107412A2 WORK-PIECE TREATMENT SYSTEM HAVING LOAD LOCK AND BUFFER 审中-公开
标题翻译：具有负载锁定和缓冲器的波浪处理系统
公开(公告)号：WO2004107412A2
公开(公告)日：2004-12-09
申请号：PCT/US2004/016074
申请日：2004-05-21
申请人： AXCELIS TECHNOLOGIES INC. , MITCHELL, Robert , WEED, Allan , GUELER, Richard
发明人： MITCHELL, Robert , WEED, Allan , GUELER, Richard
IPC分类号： H01L21/00
CPC分类号： H01L21/67763 , H01L21/67213 , H01L21/67745 , Y10S414/139 , Y10S414/141
摘要： A transfer system for use with a tool for treating a work-piece at sub-atmospheric pressure such as an ion implanter for implanting silicon wafers. An enclosure defines a low pressure region for treatment of work-pieces placed at a work-piece treatment station within the low pressure region. Multiple work-piece isolation load locks transfer work-pieces, one or two at a time, from a higher pressure region to the lower pressure for treatment and back to said higher pressure subsequent to said treatment. A first robot transfers work-pieces within the low pressure region from the load locks to a treatment station within the low pressure region. Multiple other robots positioned outside the low pressure region transfers work-pieces to and from the multiple work-piece isolation load locks from a source of said work-pieces prior to treatment and to a destination of said work-pieces after said treatment.
摘要翻译：一种用于处理亚大气压下的工件的工具的转移系统，例如用于植入硅晶片的离子注入机。外壳限定了用于处理放置在低压区域内的工件处理站的工件的低压区域。多个工件隔离负载锁将工件一次一个或两个从较高压力区域传递到较低压力以进行处理，并在所述处理之后返回到所述较高压力。第一机器人将低压区域内的工件从负载锁转移到低压区域内的处理站。定位在低压区域之外的多个其它机器人在处理之前将工件从多个工件隔离负载锁转移到所述工件的源并在所述处理之后传送到所述工件的目的地。

2. 发明申请

WO2008070003A2 HIGH THROUGHPUT SERIAL WAFER HANDLING END STATION 审中-公开
标题翻译：高吞吐量串行晶圆处理终端站
公开(公告)号：WO2008070003A2
公开(公告)日：2008-06-12
申请号：PCT/US2007/024698
申请日：2007-11-30
申请人： AXCELIS TECHNOLOGIES, INC. , FERRARA, Joseph , MITCHELL, Robert
发明人： FERRARA, Joseph , MITCHELL, Robert
IPC分类号： H01L21/00 , H01L21/687
CPC分类号： H01L21/67213 , C23C14/48 , H01L21/67201 , H01L21/67265 , H01L21/67745
摘要： An ion implantation apparatus, system, and method are provided for transferring a plurality of workpieces between vacuum and atmospheric pressures, wherein an alignment mechanism is operable to align a plurality of workpieces for generally simultaneous transportation to a dual-workpiece load lock chamber. The alignment mechanism comprises a characterization device, an elevator, and two vertically-aligned workpiece supports for supporting two workpieces. First and second atmospheric robots are configured to generally simultaneously transfer two workpieces at a time between load lock modules, the alignment mechanism, and a FOUP. Third and fourth vacuum robots are configured to transfer one workpiece at a time between the load lock modules and a process module.
摘要翻译：提供了一种用于在真空和大气压力之间传送多个工件的离子注入设备，系统和方法，其中对齐机构可操作以将多个工件对齐以用于通常同时传送到双重工件加载锁定室。对准机构包括表征装置，升降器和用于支撑两个工件的两个垂直对齐的工件支撑件。第一大气机器人和第二大气机器人被配置为一次同时传送两个工件，在加载锁定模块，对齐机构和FOUP之间。第三台和第四台真空机器人配置为每次在加载锁模块和加工模块之间传送一个工件。

3. 发明申请

WO2008021340A2 WORKPIECE HANDLING SCAN ARM FOR ION IMPLANTATION SYSTEM 审中-公开
标题翻译：用于离子植入系统的工作处理扫描臂
公开(公告)号：WO2008021340A2
公开(公告)日：2008-02-21
申请号：PCT/US2007/017942
申请日：2007-08-13
申请人： AXCELIS TECHNOLOGIES, INC. , BECKEL, Donovan , EIRIKSSON, Ari , MITCHELL, Robert , PHARAND, Michel , LAFONTAINE, Marvin , PUROHIT, Ashwin , WEED, Steve , ARSENAULT, Wayne , PATHAK, Shantanu
发明人： EIRIKSSON, Ari , MITCHELL, Robert , PHARAND, Michel , LAFONTAINE, Marvin , PUROHIT, Ashwin , WEED, Steve , ARSENAULT, Wayne , PATHAK, Shantanu
CPC分类号： H01L21/6831 , H01L21/68764
摘要： An ion implantation apparatus, system, and method are provided for connecting and disconnecting a workpiece holder from a scan arm. A twist head is provided, wherein an electrostatic chuck is operable to be mounted, wherein one or more rotating and non-rotating members associated with one or more of the twist head and electrostatic chuck have one or more dynamic fluid seals associated therewith. The electrostatic chuck is further operable to be removed from the twist head without disconnecting the one or more dynamic fluid seals.
摘要翻译：提供离子注入装置，系统和方法用于将工件保持器与扫描臂连接和断开。提供了一种扭转头，其中可操作地安装静电卡盘，其中与一个或多个扭转头和静电卡盘相关联的一个或多个旋转和非旋转构件具有与其相关联的一个或多个动态流体密封件。静电卡盘还可操作以从扭转头移除而不断开一个或多个动态流体密封件。

4. 发明申请

WO2010011252A1 METHOD AND APPARATUS FOR MEASUREMENT OF BEAM ANGLE IN ION IMPLANTATION 审中-公开
标题翻译：用于测量离子植入中的光束角的方法和装置
公开(公告)号：WO2010011252A1
公开(公告)日：2010-01-28
申请号：PCT/US2009/003743
申请日：2009-06-23
申请人： AXCELIS TECHNOLOGIES, INC. , MITCHELL, Robert , VANDERBERG, Bo
发明人： MITCHELL, Robert , VANDERBERG, Bo
IPC分类号： H01J37/317 , H01J37/147 , H01J37/304
CPC分类号： H01J37/1471 , H01J37/304 , H01J37/3171 , H01J2237/24507 , H01J2237/24528 , H01J2237/24578
摘要： An ion beam angle detection apparatus (440), comprising a linear drive assembly (460) fixedly attached to a moveable profiler assembly (450), wherein the profiler assembly comprises, a profiler having a profiler aperture (454) formed within a profiler top plate (455) and a profiler sensor assembly, a moveable angle mask assembly (446) comprising a moveable angle mask with a mask aperture (448), wherein the angle mask assembly is non-fixedly attached to the profiler assembly, the mask aperture is movable relative to the profiler aperture by energizing an mask linear drive (464) fixedly attached to the profiler assembly and the profiler aperture is movable through a length greater than the elongated length of the ion beam (456).
摘要翻译：一种离子束角度检测装置（440），其包括固定地连接到可移动轮廓仪组件（450）的线性驱动组件（460），其中所述轮廓仪组件包括：轮廓仪，其具有形成在轮廓仪顶板内的轮廓仪孔（455）和轮廓仪传感器组件，可移动角度掩模组件（446），其包括具有掩模孔（448）的可移动角度掩模，其中所述角度掩模组件不固定地附接到所述轮廓仪组件，所述掩模孔可移动相对于轮廓仪孔径，通过激励固定地附接到轮廓仪组件的掩模线性驱动器（464），并且轮廓仪孔径可移动通过大于离子束（456）的细长长度的长度。

5. 发明申请

WO2005057632A1 UMBILICAL CORD FACILITIES CONNECTION FOR AN ION BEAM IMPLANTER 审中-公开
标题翻译：用于离子束植入物的脐带设备连接
公开(公告)号：WO2005057632A1
公开(公告)日：2005-06-23
申请号：PCT/US2004/040508
申请日：2004-12-03
申请人： AXCELIS TECHNOLOGIES INC. , MITCHELL, Robert , RYAN, Kevin
发明人： MITCHELL, Robert , RYAN, Kevin
IPC分类号： H01L21/00
CPC分类号： H01L21/68764 , H01J37/3171 , H01J2237/2001 , H01L21/67069 , H01L21/67109 , H01L21/6831 , H01L21/68792
摘要： An ion beam implanter includes an ion beam source for generating an ion beam moving along a beam line and a vacuum or implantation chamber wherein a workpiece is positioned to intersect the ion beam for ion implantation of a surface of the workpiece by the ion beam. The ion beam implanter further includes a workpiece support structure (100) coupled to the implantation chamber and supporting the workpiece (24). The workpiece support structure includes a chuck (202) including a rotatable pedestal (204) for supporting the workpiece (24). The workpiece support structure further includes a first rotatable reel (262) coupled to and rotatable with the pedestal and a flexible, hollow cord carrying facilities such as coolant lines and electrical power conductors coupled to the first rotatable reel such that, as the pedestal is rotated in a first direction, a length of the flexible cord that is wrapped around the first reel increases and, as the pedestal is rotated in an opposite direction, a length of the flexible cord that is wrapped around the first reel decreases.
摘要翻译：离子束注入机包括用于产生沿着束线移动的离子束的离子束源和真空或注入室，其中工件被定位成与离子束相交，用于通过离子束离子注入工件的表面。离子束注入机还包括耦合到注入室并支撑工件（24）的工件支撑结构（100）。工件支撑结构包括一个包括用于支撑工件（24）的可旋转底座（204）的卡盘（202）。工件支撑结构还包括联接到基座上并与其可旋转的第一可旋转卷轴（262）和柔性的中空绳索承载设施，例如冷却剂管线和耦合到第一可旋转卷轴的电力导体，使得当基座旋转时在第一方向上，卷绕在第一卷轴上的柔性绳的长度增加，并且当基座沿相反的方向旋转时，卷绕在第一卷轴上的柔性绳的长度减小。

6. 发明申请

WO2004077480A2 ADJUSTABLE IMPLANTATION ANGLE WORKPIECE SUPPORT STRUCTURE FOR AN ION BEAM IMPLANTER UTILIZING A LINEAR SCAN MOTOR 审中-公开
标题翻译：使用线性扫描电机的离子束植入物的可调植入角度工作支撑结构
公开(公告)号：WO2004077480A2
公开(公告)日：2004-09-10
申请号：PCT/US2004/005201
申请日：2004-02-20
申请人： AXCELIS TECHNOLOGIES INC. , MITCHELL, Robert
发明人： MITCHELL, Robert
IPC分类号： H01J
CPC分类号： H01J37/20 , H01J37/3171 , H01J2237/202
摘要： An ion beam implanter includes an ion beam source for generating an ion beam moving along a beam line and a vacuum or implantation chamber wherein a workpiece is positioned to intersect the ion beam for ion implantation of a surface of the workpiece by the ion beam. The ion beam implanter further includes a workpiece support structure coupled to the implantation chamber and supporting the workpiece. The workpiece support structure includes a rotation member rotatably affixed to the implantation chamber. Rotation of the rotation member with respect to the implantation chamber changes an implantation angle of the workpiece with respect to the portion of the ion beam beam line within the implantation chamber. The workpiece support structure further includes a translation member disposed within the implantation chamber, movably coupled to the rotation member and supporting the workpiece for linear movement along a path of travel. The translation member includes a linear motor.
摘要翻译：离子束注入机包括用于产生沿着束线移动的离子束的离子束源和真空或注入室，其中工件被定位成与离子束相交，用于通过离子束离子注入工件的表面。离子束注入机还包括耦合到注入室并支撑工件的工件支撑结构。工件支撑结构包括可旋转地固定到植入室的旋转构件。旋转构件相对于注入室的旋转改变了工件相对于植入室内的离子束束线的部分的注入角度。工件支撑结构还包括设置在注入室内的平移构件，其可移动地联接到旋转构件并且支撑工件以沿着行进路线线性移动。平移构件包括线性电动机。

7. 发明申请

WO2008070004A2 HIGH THROUGHPUT WAFER NOTCH ALIGNER 审中-公开
标题翻译：高通量WAFER NOTCH对准器
公开(公告)号：WO2008070004A2
公开(公告)日：2008-06-12
申请号：PCT/US2007/024699
申请日：2007-11-30
申请人： AXCELIS TECHNOLOGIES, INC. , MITCHELL, Robert , FERRARA, Joseph
发明人： MITCHELL, Robert , FERRARA, Joseph
IPC分类号： H01L21/00 , H01L21/68
CPC分类号： H01L21/681 , H01L21/67265 , H01L21/67745
摘要： An ion implantation apparatus, system, and method are provided for a transferring a plurality of workpieces between vacuum and atmospheric pressures, wherein an alignment mechanism is operable to align a plurality of workpieces for generally simultaneous transportation to a dual-workpiece load lock chamber. The alignment mechanism comprises a characterization device, an elevator, and two vertically-aligned workpiece supports for supporting two workpieces. First and second atmospheric robots are configured to generally simultaneously transfer two workpieces at a time between load lock modules, the alignment mechanism, and a FOUP. Third and fourth vacuum robots are configured to transfer one workpiece at a time between the load lock modules and a process module.
摘要翻译：提供一种用于在真空和大气压之间传送多个工件的离子注入装置，系统和方法，其中对准机构可操作以对准多个工件，以便大体上同时传送到双工件加载锁定室。对准机构包括表征装置，电梯和用于支撑两个工件的两个垂直对齐的工件支撑件。第一和第二大气机器人被配置为一般在负载锁定模块，对准机构和FOUP之间同时传送两个工件。第三和第四真空机器人被配置为在加载锁模块和处理模块之间一次传送一个工件。

8. 发明申请

WO2008130777A1 RECORDATION DEVICE FOR RAIL CAR INSPECTIONS 审中-公开
标题翻译：轨道车辆检查记录装置
公开(公告)号：WO2008130777A1
公开(公告)日：2008-10-30
申请号：PCT/US2008/057997
申请日：2008-03-24
申请人： GENERAL ELECTRIC COMPANY , LOGAN, Prescott , DAVENPORT, David , HERSHEY, John , BHOTIKA, Rahul , MITCHELL, Robert , ANDARAWIS, Emad , WELLES, Kenneth , WETZEL, Robert, Alan
发明人： LOGAN, Prescott , DAVENPORT, David , HERSHEY, John , BHOTIKA, Rahul , MITCHELL, Robert , ANDARAWIS, Emad , WELLES, Kenneth , WETZEL, Robert, Alan
IPC分类号： B61L17/00 , B61L27/00 , G07C5/00
CPC分类号： B61L17/00 , B61L27/0094 , G07C1/20 , G07C3/14
摘要： A device for conducting rail car inspections including an inspection module, an imaging module, a scanner module, a location module, a printer module and a communication module.
摘要翻译：一种用于进行轨道车辆检查的装置，包括检查模块，成像模块，扫描仪模块，位置模块，打印机模块和通信模块。

9. 发明申请

WO2007056857A1 REVERSIBLE SAW TOOTH 审中-公开
标题翻译：可反复锯齿
公开(公告)号：WO2007056857A1
公开(公告)日：2007-05-24
申请号：PCT/CA2006/001873
申请日：2006-11-16
申请人： LES ÉQUIPMENTS PRENBEC INC. , MACLENNAN, Charles, D. , PALFY, Nick , RIOUX, Denis , MITCHELL, Robert
发明人： MACLENNAN, Charles, D. , PALFY, Nick , RIOUX, Denis , MITCHELL, Robert
IPC分类号： B23D61/06 , B23C5/02 , B23C5/20 , B23D63/00
CPC分类号： B23D61/065 , B23C5/207 , B23C2200/085 , B23C2200/086 , B23C2200/164 , B23C2200/165 , B23C2200/361 , B23C2210/166 , B23C2240/32 , B23D65/00 , B27B33/02 , B27B33/144 , B28D1/122 , B28D1/125 , Y10T83/04 , Y10T83/9319 , Y10T83/9329 , Y10T83/9331 , Y10T83/9362 , Y10T83/9464 , Y10T407/23
摘要： A replaceable saw tooth (10) for a rotary cutting machine. The saw tooth comprises more than two cutting edges (34) on each of two opposed faces (26,28) thereof. More specifically, the saw tooth may comprise a body having two cutting faces (26,28) disposed opposite each other and spaced apart by at least four side faces (30,32) which are each parallel to an opposite one of the side faces. The side faces (30) are parallel to a central axis (40) extending between the two cutting faces. Four cutting edges (34) are defined between the side faces (30,32) and each of the two cutting faces (26,28).
摘要翻译：一种用于旋转切割机的可更换锯齿（10）。锯齿在其两个相对面（26,28）中的每一个上包括多于两个的切削刃（34）。更具体地说，锯齿可以包括一个主体，该主体具有彼此相对设置并且分开由至少四个侧面（30,32）隔开的切割面（26,28），它们各自平行于相对的一个侧面。侧面（30）平行于在两个切割面之间延伸的中心轴线（40）。四个切割边缘（34）被限定在侧面（30,32）和两个切割面（26,28）中的每一个之间。

10. 发明申请

WO2004062653A3 THE USE OF ESTROGEN RECEPTOR ALPHA MODULATORS FOR THE TREATMENT OF MULTIPHE SCLEROSIS 审中-公开
公开(公告)号：WO2004062653A3
公开(公告)日：2004-07-29
申请号：PCT/US2004/000037
申请日：2004-01-05
申请人： WYETH , ELLOSO, M., Merle , MITCHELL, Robert , HARNISH, Douglas, C. , ADELMAN, Steven, J.
发明人： ELLOSO, M., Merle , MITCHELL, Robert , HARNISH, Douglas, C. , ADELMAN, Steven, J.
IPC分类号： A61K31/00
摘要： The present invention provides methods of treating an autoimmune pathology in a mammal, comprising administering an agent with estrogen receptor a agonist activity in particular a selective estrogen receptor modulator, to the mammal in an amount sufficient to decrease production of TH-1 and/or TH-2 cytokines. Also provided is a method of selecting compounds useful for the treatment of multiple sclerosis, comprising selecting a compound which has estrogen receptor a agonist activity.

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