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1. 发明申请

WO2010144551A2 CARBON NANOTUBE-BASED SOLAR CELLS 审中-公开
标题翻译：基于碳纳米管的太阳能电池
公开(公告)号：WO2010144551A2
公开(公告)日：2010-12-16
申请号：PCT/US2010037937
申请日：2010-06-09
申请人： APPLIED MATERIALS INC , NALAMASU OMKARAM , GAY CHARLES , PUSHPARAJ VICTOR L , SINGH KAUSHAL K , VISSER ROBERT J , FOAD MAJEED A , HOFMANN RALF
发明人： NALAMASU OMKARAM , GAY CHARLES , PUSHPARAJ VICTOR L , SINGH KAUSHAL K , VISSER ROBERT J , FOAD MAJEED A , HOFMANN RALF
IPC分类号： H01L31/042
CPC分类号： H01L31/022425 , B82Y10/00 , H01L31/0322 , H01L31/03529 , H01L31/0384 , H01L31/0749 , H01L51/0048 , H01L51/4213 , Y02E10/541 , Y02P70/521
摘要： Solar cells are provided with carbon nanotubes (CNTs) which are used: to define a micron/sub-micron geometry of the solar cells; and/or as charge transporters for efficiently removing charge carriers from the absorber layer to reduce the rate of electron-hole recombination in the absorber layer. A solar cell may comprise: a substrate; a multiplicity of areas of metal catalyst on the surface of the substrate; a multiplicity of carbon nanotube bundles formed on the multiplicity of areas of metal catalyst, each bundle including carbon nanotubes aligned roughly perpendicular to the surface of the substrate; and a photoactive solar cell layer formed over the carbon nanotube bundles and exposed surfaces of the substrate, wherein the photoactive solar cell layer is continuous over the carbon nanotube bundles and the exposed surfaces of the substrate. The photoactive solar cell layer may be comprised of amorphous silicon p/i/n thin films; although, concepts of the present invention are also applicable to solar cells with absorber layers of microcrystalline silicon, SiGe, carbon doped microcrystalline silicon, CIS, CIGS, CISSe and various p-type II-VI binary compounds and ternary and quaternary compounds.
摘要翻译：太阳能电池提供有碳纳米管（CNT），其用于限定太阳能电池的微米/亚微米几何形状; 和/或作为电荷转运体，用于从吸收层有效去除电荷载体以降低吸收层中电子 - 空穴复合的速率。太阳能电池可以包括：基底; 在基材表面上的金属催化剂的多个区域; 形成在金属催化剂的多个区域上的多个碳纳米管束，每个束包括大致垂直于基板的表面排列的碳纳米管; 以及形成在所述碳纳米管束和所述基板的露出表面上的光活性太阳能电池层，其中所述光活性太阳能电池层在所述碳纳米管束和所述基板的暴露表面上连续。光电太阳能电池层可以由非晶硅p / i / n薄膜组成; 尽管本发明的概念也适用于具有微晶硅，SiGe，碳掺杂微晶硅，CIS，CIGS，CISSe和各种p型II-VI二元化合物和三元和四元化合物的吸收层的太阳能电池。

2. 发明申请

WO2011119611A3 DIELECTRIC DEPOSITION USING A REMOTE PLASMA SOURCE 审中-公开
标题翻译：用远离等离子体源的介质沉积
公开(公告)号：WO2011119611A3
公开(公告)日：2011-12-22
申请号：PCT/US2011029433
申请日：2011-03-22
申请人： APPLIED MATERIALS INC , HOFMANN RALF , FOAD MAJEED A
发明人： HOFMANN RALF , FOAD MAJEED A
IPC分类号： C23C14/34 , C23C14/35 , C23C14/50
CPC分类号： C23C14/3407 , C23C14/0036 , C23C14/06 , C23C14/354 , H01J37/32357 , H01J37/34 , H05H1/46 , H05H2001/4667
摘要： A sputter deposition system comprises a vacuum chamber including a vacuum pump for maintaining a vacuum in the vacuum chamber, a gas inlet for supplying process gases to the vacuum chamber, a sputter target and a substrate holder within the vacuum chamber, and a plasma source attached to the vacuum chamber and positioned remotely from the sputter target, the plasma source being configured to form a high density plasma beam extending into the vacuum chamber. The plasma source may include a rectangular cross-section source chamber, an electromagnet, and a radio frequency coil, wherein the rectangular cross-section source chamber and the radio frequency coil are configured to give the high density plasma beam an elongated ovate cross-section. Furthermore, the surface of the sputter target may be configured in a non-planar form to provide uniform plasma energy deposition into the target and/or uniform sputter deposition at the surface of a substrate on the substrate holder. The sputter deposition system may include a plasma spreading system for reshaping the high density plasma beam for complete and uniform coverage of the sputter target.
摘要翻译：溅射沉积系统包括真空室和等离子体源，真空室包括用于保持真空室中的真空的真空泵，用于向真空室供应处理气体的气体入口，溅射靶和在真空室内的基板保持器，到真空室并且远离溅射靶定位，等离子体源被配置为形成延伸到真空室中的高密度等离子体束。等离子体源可以包括矩形横截面源室，电磁体和射频线圈，其中矩形横截面源室和射频线圈被配置为给高密度等离子体束提供细长的卵形横截面。此外，溅射靶材的表面可以以非平面形式构造，以在基板支架上的基板表面处提供均匀的等离子体能量沉积到靶材和/或均匀的溅射沉积。溅射沉积系统可以包括等离子体扩散系统，用于整形高密度等离子体束以完全且均匀地覆盖溅射靶。

3. 发明申请

WO2009117229A3 COAXIAL MICROWAVE ASSISTED DEPOSITION AND ETCH SYSTEMS 审中-公开
标题翻译：同轴微波辅助沉积和蚀刻系统
公开(公告)号：WO2009117229A3
公开(公告)日：2009-11-12
申请号：PCT/US2009035325
申请日：2009-02-26
申请人： APPLIED MATERIALS INC , STOWELL MICHAEL W , KRISHNA NETY , HOFMANN RALF , GRIFFITH JOE
发明人： STOWELL MICHAEL W , KRISHNA NETY , HOFMANN RALF , GRIFFITH JOE
IPC分类号： C23C16/511 , C23C14/22 , H01L21/203 , H01L21/205 , H01L21/302
CPC分类号： H05H1/46 , C23C14/34 , C23C14/345 , C23C14/3485 , C23C16/511 , C23C16/515 , H01J37/32091 , H01J37/321 , H01J37/32192 , H01J37/3222 , H01J37/3408
摘要： Disclosed are systems for achieving improved film properties by introducing additional processing parameters, such as a movable position for the microwave source and pulsing power to the microwave source, and extending the operational ranges and processing windows with the assistance of the microwave source. A coaxial microwave antenna is used for radiating microwaves to assist in physical vapor deposition (PVD) or chemical vapor deposition (CVD) systems. The system may use a coaxial microwave antenna inside a processing chamber, with the antenna being movable between a substrate and a plasma source, such as a sputtering target, a planar capacitively generated plasma source, or an inductively coupled source. In a special case when only a microwave plasma source is present, the position of the microwave antenna is movable relative to a substrate. The coaxial microwave antenna adjacent to the plasma source can assist the ionization more homogeneously and allow substantially uniform deposition over large areas.
摘要翻译：公开了通过引入诸如用于微波源的可移动位置和对微波源的脉冲功率的附加处理参数以及在微波源的辅助下延伸操作范围和处理窗口来实现改进的膜性质的系统。同轴微波天线用于辐射微波以辅助物理气相沉积（PVD）或化学气相沉积（CVD）系统。该系统可以在处理室内使用同轴微波天线，天线可在基板和等离子体源之间移动，诸如溅射靶，平面电容产生的等离子体源或电感耦合源。在仅存在微波等离子体源的特殊情况下，微波天线的位置可相对于基板移动。与等离子体源相邻的同轴微波天线可以更均匀地帮助电离并且允许在大面积上的基本均匀的沉积。

4. 发明申请

WO2011056403A3 SHADOW MASK ALIGNMENT AND MANAGEMENT SYSTEM 审中-公开
标题翻译：阴影遮罩对齐和管理系统
公开(公告)号：WO2011056403A3
公开(公告)日：2011-09-29
申请号：PCT/US2010053067
申请日：2010-10-18
申请人： APPLIED MATERIALS INC , KWAK BYUNG-SUNG LEO , BANGERT STEFAN , HOFMANN RALF , KOENIG MICHAEL
发明人： KWAK BYUNG-SUNG LEO , BANGERT STEFAN , HOFMANN RALF , KOENIG MICHAEL
IPC分类号： H01M10/04 , H01G9/025 , H01M6/18 , H01M10/0562
CPC分类号： H01M6/40 , C23C14/042 , H01M4/02 , H01M4/13 , H01M4/139 , H01M4/5825 , H01M4/621 , H01M4/623 , H01M4/663 , H01M2004/028 , Y02E60/122 , Y10T29/49002 , Y10T29/5313
摘要： A magnetic handling assembly for thin-film processing of a substrate, a system and method for assembling and disassembling a shadow mask to cover a top of a workpiece for exposure to a processing condition. The assembly may include a magnetic handling carrier and a shadow mask disposed over, and magnetically coupled to, the magnetic handling carrier to cover a top of a workpiece that is to be disposed between the shadow mask and the magnetic handling carrier when exposed to a processing condition. A system includes a first chamber with a first support to hold the shadow mask, a second support to hold a handling carrier, and an alignment system to align the shadow mask a workpiece to be disposed between the carrier and shadow mask. The first and second supports are moveable relative to each other.
摘要翻译：一种用于基板的薄膜处理的磁性处理组件，一种组装和拆卸荫罩以覆盖工件的顶部以暴露于处理条件的系统和方法。所述组件可以包括磁性处理载体和设置在所述磁性处理载体上并且磁性耦合到所述磁性处理载体的阴影掩模，以在暴露于处理时覆盖将要设置在所述阴影掩模和所述磁性处理载体之间的工件的顶部条件。一种系统包括具有用于保持荫罩的第一支撑件的第一腔室，用于保持搬运载体的第二支撑件以及用于将荫罩工件对准以设置在载体和荫罩之间的对准系统。第一和第二支撑件可相对于彼此移动。

5. 发明申请

WO2010118149A3 SULFURIZATION OR SELENIZATION IN MOLTEN (LIQUID) STATE FOR THE PHOTOVOLTAIC APPLICATIONS 审中-公开
标题翻译：用于光伏应用的液体（液体）状态的硫化或放电
公开(公告)号：WO2010118149A3
公开(公告)日：2011-01-20
申请号：PCT/US2010030262
申请日：2010-04-07
申请人： APPLIED MATERIALS INC , SINGH KAUSHAL K , HOFMANN RALF , KRISHNA NETY M
发明人： SINGH KAUSHAL K , HOFMANN RALF , KRISHNA NETY M
IPC分类号： H01L31/042 , H01L31/18
CPC分类号： H01L21/02568 , C23C14/025 , C23C14/165 , C23C14/185 , C23C14/5866 , H01L21/02551 , H01L21/02565 , H01L21/02614 , H01L31/0322 , Y02E10/541
摘要： A method of forming a solar cell incorporating a compound semiconductor is provided. The compound semiconductor is generally of the "II/VI" variety, and is formed by depositing one or more group II elements in a vapor deposition process, and then contacting the deposited layer with a liquid bath of the group VI elements. The liquid bath may comprise a pure element or a mixture of elements. The contacting is performed under a non-reactive atmosphere, or vacuum, and any fugitive vapors may be captured by a cold trap and recycled. The substrate may be subsequently annealed to remove any excess of the group VI elements, which may be similarly recycled.
摘要翻译：提供一种形成包含化合物半导体的太阳能电池的方法。化合物半导体通常为“II / VI”，并且通过在气相沉积工艺中沉积一个或多个II族元素，然后使沉积层与VI族元素的液槽接触而形成。液体浴可以包含纯元素或元素的混合物。接触在非反应性气氛或真空下进行，并且任何逸出的蒸气可能被冷阱捕获并再循环。可以随后将基材退火以除去任何过量的可以类似地再循环的VI族元素。

6. 发明申请

WO2007121336A3 RELIABLE FUEL CELL ELECTRODE DESIGN 审中-公开
标题翻译：可靠的燃料电池电极设计
公开(公告)号：WO2007121336A3
公开(公告)日：2008-05-29
申请号：PCT/US2007066596
申请日：2007-04-13
申请人： APPLIED MATERIALS INC , WEIDMAN TIMOTHY W , ARMSTRONG KARL J , EAGLESHAM DAVID J , KRISHNA NETY , HOFMANN RALF , STEWART MICHAEL P
发明人： WEIDMAN TIMOTHY W , ARMSTRONG KARL J , EAGLESHAM DAVID J , KRISHNA NETY , HOFMANN RALF , STEWART MICHAEL P
IPC分类号： H01M4/00
CPC分类号： H01M4/8867 , C23C28/321 , C23C28/322 , C23C28/34 , C23C28/3455 , H01M4/8817 , H01M4/92 , H01M8/0206 , H01M8/021 , H01M8/023 , H01M8/0236 , H01M8/0245 , H01M8/086 , H01M8/1004 , Y02P70/56
摘要： The present invention generally relates to the creation of fuel cell components and the method of forming the various fuel cell components that have an improved lifetime, lower production cost and improved process performance. The invention generally includes treating or conditioning a substrate surface by depositing a material layer, or layers, having good adhesion to the substrate, low electrical resistivity (high conductivity) and has good resistance to chemical attack during the operation of fuel cell. The substrate may be, for example, a fuel cell part, a conductive plate, a separator plate, a bipolar plate or an end plate, among others. In one embodiment, the substrate surface is treated or conditioned by exposing at least a portion of it to a gas or liquid comprising ruthenium tetroxide.
摘要翻译：本发明一般涉及燃料电池部件的制造和形成具有改善的寿命，降低生产成本和改进工艺性能的各种燃料电池部件的方法。本发明通常包括通过沉积对基材具有良好粘附性的材料层或低层电阻（高导电性）并且在燃料电池操作期间具有良好的抗化学侵蚀性能来处理或调理基材表面。基板可以是例如燃料电池部件，导电板，隔板，双极板或端板等。在一个实施方案中，通过将其至少一部分暴露于包含四氧化钌的气体或液体来处理或调理基底表面。

7. 发明申请

WO2008005892A3 NANOCRYSTAL FORMATION 审中-公开
标题翻译：纳米结构
公开(公告)号：WO2008005892A3
公开(公告)日：2008-12-18
申请号：PCT/US2007072577
申请日：2007-06-29
申请人： APPLIED MATERIALS INC , KRISHNA NETY M , HOFMANN RALF , SINGH KAUSHAL K , ARMSTRONG KARL J
发明人： KRISHNA NETY M , HOFMANN RALF , SINGH KAUSHAL K , ARMSTRONG KARL J
IPC分类号： H01L21/28 , H01L29/76
CPC分类号： H01L21/28273 , H01L29/42332 , H01L29/7881
摘要： In one embodiment, a method for forming a metallic nanocrystalline material on a substrate is provided which includes exposing a substrate to a pretreatment process, forming a tunnel dielectric layer on the substrate, exposing the substrate to a post-treatment process, forming a metallic nanocrystalline layer on the tunnel dielectric layer, and forming a dielectric capping layer on the metallic nanocrystalline layer. The method further provides forming the metallic nanocrystalline layer having a nanocrystalline density of at least about 5OE012 cm-2, preferably, at least about 8OE012 cm-2. In one example, the metallic nanocrystalline layer contains platinum, ruthenium, or nickel. In another embodiment, a method for forming a multi-layered metallic nanocrystalline material on a substrate is provided which includes forming a plurality of bi-layers, wherein each bi-layer contains an intermediate dielectric layer deposited on a metallic nanocrystalline layer. Some of the examples include 10, 50, 100, 200, or more bi-layers.
摘要翻译：在一个实施例中，提供了一种在衬底上形成金属纳米晶体材料的方法，其包括将衬底暴露于预处理工艺，在衬底上形成隧道电介质层，将衬底暴露于后处理工艺，形成金属纳米晶体并在所述金属纳米晶层上形成介电覆盖层。该方法进一步提供形成金属纳米晶层，其纳米晶密度为至少约50E012cm -2，优选为至少约80O12 cm -2。在一个实例中，金属纳米晶层包含铂，钌或镍。在另一个实施例中，提供了一种在衬底上形成多层金属纳米晶体材料的方法，其包括形成多个双层，其中每个双层包含沉积在金属纳米晶层上的中间介电层。一些示例包括10,50,100,200或更多的双层。

8. 发明申请

WO03061316A9 RADIO COMMUNICATION SYSTEM 审中-公开
标题翻译：无线电通信系统
公开(公告)号：WO03061316A9
公开(公告)日：2004-11-11
申请号：PCT/EP0300409
申请日：2003-01-16
申请人： SIEMENS AG , AUTH ELISABETH , DRESSLER HANS-JOACHIM , GERWENS ANDREAS , HOFMANN RALF , RIEDLINGER ROLAND , ROESCH MARKUS
发明人： AUTH ELISABETH , DRESSLER HANS-JOACHIM , GERWENS ANDREAS , HOFMANN RALF , RIEDLINGER ROLAND , ROESCH MARKUS
IPC分类号： H04B7/26 , H04W88/10 , H04W92/12 , H04Q7/30
CPC分类号： H04W88/10 , H04B7/2621 , H04W92/12
摘要： A base station (Nbi) is provided in a radio communication system by means of which first communication connections and second communication connections are transmitted. A first radio network controller (RNC1) is provided, by means of which the first communication connections are transmitted and also a second radio network controller (RNC2), by means of which the second communication connections are transmitted. The base station (Nbi) comprises a common high frequency component (Hfi) which processes signals for the first communication connections and signals for the second communication connections. The signals of the first communication connections and the second communication connections are transmitted across an air gap at different carrier frequencies and can be sent by different carriers (B1, B2).
摘要翻译：在无线电通信系统中，基站（NBI）被设置，通过第一通信链路和第二通信链路被路由。它是（RNC1）设置，在其被引导在第一通信链路和第二无线网络控制器（RNC2），通过该传递所述第二通信链路的第一无线网络控制器。基站（NBI）具有共同的高频部分（HFI），处理所述第二通信连接的第一通信的连接和信号的信号。所述第一通信连接和所述第二通信连接的信号与不同的载波频率通过空中接口发送，并且可以由不同的运营商（B1，B2）来介导。

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