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1. 发明申请

WO2014032192A1 PROCESSING ARRANGEMENT WITH TEMPERATURE CONDITIONING ARRANGEMENT AND METHOD OF PROCESSING A SUBSTRATE 审中-公开
标题翻译：温度调节装置的加工布置及其加工方法
公开(公告)号：WO2014032192A1
公开(公告)日：2014-03-06
申请号：PCT/CH2013/000148
申请日：2013-08-22
申请人： OC OERLIKON BALZERS AG
发明人： ROHRMANN, Hartmut , KRATZER, Martin
IPC分类号： H01L21/67
CPC分类号： H01L21/68735 , C23C14/14 , C23C14/325 , C23C14/34 , C23C14/50 , H01J37/3426 , H01J2237/332 , H01L21/67109 , H01L21/67115
摘要： A substrate processing arrangement exhibits a thermal cavity with two reflective surfaces and a carbon heater for effectively heating substrates to temperatures of 750°C and more. It has been shown, that even substrates with low absorption properties in the infrared part of the spectrum (glas, silicon, sapphire) can be effectively heated by "sandwiching" a substrate and a heating element between two reflective surfaces, which can be established by a mirror and the target of a PVD source.
摘要翻译：基板处理装置显示具有两个反射表面的热腔和用于有效地将基板加热到750℃以上的温度的碳加热器。已经表明，即使在光谱的红外部分（玻璃，硅，蓝宝石）中具有低吸收特性的基板可以通过在两个反射表面之间“夹持”基板和加热元件来有效地加热，这可以通过镜子和PVD光源的目标。

2. 发明申请

WO2013189935A1 PVD APPARATUS FOR DIRECTIONAL MATERIAL DEPOSITION, METHODS AND WORKPIECE 审中-公开
标题翻译：用于方向材料沉积的PVD装置，方法和工作
公开(公告)号：WO2013189935A1
公开(公告)日：2013-12-27
申请号：PCT/EP2013/062637
申请日：2013-06-18
申请人： OC OERLIKON BALZERS AG
发明人： WEICHART, Jürgen
IPC分类号： C23C14/22 , C23C14/50 , C23C14/34
CPC分类号： C23C14/3492 , C23C14/34 , C23C14/35 , C23C14/505 , H01J37/3423
摘要： The present invention is related to directional material deposition in physical vapor deposition (PVD) technology. In particular, the invention concerns PVD apparatus, which comprises : - a vacuum tight outer vessel accommodating a material source, - at least two substrates arranged to define a substrate plane spaced apart from said material source, - said substrates facing the material source with a surface to be treated. The diameter of this material source is smaller, in particular significantly smaller, than the diameter of any of the substrates. This way a narrow angular distribution and a high level of uniformity is achieved at low substrate temperature.
摘要翻译：本发明涉及物理气相沉积（PVD）技术中的定向材料沉积。特别地，本发明涉及PVD装置，其包括： - 容纳材料源的真空密封外容器， - 至少两个基板，其布置成限定与所述材料源间隔开的基板平面， - 所述基板面向材料源，具有待处理的表面。该材料源的直径比任何基底的直径小，特别是明显小。这样，在低的基板温度下实现了窄的角分布和高的均匀度。

3. 发明申请

WO2011092027A1 SPUTTERING TARGET 审中-公开
标题翻译：飞溅目标
公开(公告)号：WO2011092027A1
公开(公告)日：2011-08-04
申请号：PCT/EP2011/000394
申请日：2011-01-28
申请人： OC OERLIKON BALZERS AG , FRIEDLI, Hanspeter , ROHRMANN, Hartmut
发明人： FRIEDLI, Hanspeter , ROHRMANN, Hartmut
IPC分类号： C23C14/34
CPC分类号： C23C14/3407 , H01J37/3408 , H01J37/3452 , H01J37/3461
摘要： To provide, in a magnetron sputtering apparatus for coating a substrate with a material of high magnetic permeability, for a sufficient trapping field of at least 24 kA/m (300 Oe) field strength above a target surface a target assembly- consists of target plates (34, 33, 32) separated by through-going slits (35, 36) which the magnetic field must cross and to a support plate (31) consisting of copper to which the backside of the target is fixed. In order to avoid any release of material from the support plate and deposition of the same on the substrate each of the slits (35, 36) is shaped in such a way that there is no line-of -sight connection between the gap at the target surface and the support plate (31) at the backside of the target through the slit, the latter having, e.g., two sections which are perpendicular to the target surface, one ending at the target surface and the other at the support plate, and which are laterally offset and connected by a third section which is parallel to the target surface. Magnetic field strength in the slits (35, 36) is kept below 64 kA/m (800 Oe) to prevent the formation of plasma there.
摘要翻译：为了在用于涂覆具有高磁导率的材料的基板的磁控溅射装置中提供在目标表面上方至少24kA / m（300Oe）场强的足够的捕获场，目标组件由目标板组成（34,33,32）由磁场必须穿过的穿过狭缝（35,36）分开，并且由固定有靶的背面的铜组成的支撑板（31）分开。为了避免材料从支撑板的任何释放和其在衬底上的沉积，每个狭缝（35,36）上的每个狭缝（35,36）的形状是这样的，使得在目标表面和支撑板（31）通过狭缝位于靶的背面，后者具有例如垂直于目标表面的两个部分，一个在目标表面处终止，另一个在支撑板处，其横向偏移并且通过与目标表面平行的第三部分连接。狭缝（35,36）中的磁场强度保持在64kA / m（800Oe）以下，以防止在那里形成等离子体。

4. 发明申请

WO2010106012A3 METHOD OF INLINE MANUFACTURING A SOLAR CELL PANEL 审中-公开
标题翻译：线性制造太阳能电池板的方法
公开(公告)号：WO2010106012A3
公开(公告)日：2011-06-03
申请号：PCT/EP2010053273
申请日：2010-03-15
申请人： OC OERLIKON BALZERS AG , VOSER STEPHAN , RATTUNDE OLIVER , DUBS MARTIN , FEISTRITZER GERALD , WUESTENHAGEN VOLKER , DOVIDS GERHARD
发明人： VOSER STEPHAN , RATTUNDE OLIVER , DUBS MARTIN , FEISTRITZER GERALD , WUESTENHAGEN VOLKER , DOVIDS GERHARD
IPC分类号： H01L31/18
CPC分类号： H01L31/18 , H01L21/67173 , H01L21/67196 , H01L21/67201 , H01L21/67207
摘要： Throughput of manufacturing thin-film solar panels by inline technique is made substantially independent from the time extent of different surface treatment steps by accordingly subdividing treatment steps in sub-steps performed in inline subsequent treatment stations. Treatment duration in each of the subsequent treatment stations is equal (t).
摘要翻译：通过在线技术制造薄膜太阳能电池板的生产量通过相应地在后续处理站中执行的子步骤中的处理步骤进行分割而与不同的表面处理步骤的时间范围基本上独立。每个后续治疗站的治疗持续时间相等（t）。

5. 发明申请

WO2010105967A2 VACUUM TREATMENT APPARATUS 审中-公开
标题翻译：真空处理设备
公开(公告)号：WO2010105967A2
公开(公告)日：2010-09-23
申请号：PCT/EP2010/053140
申请日：2010-03-11
申请人： OC OERLIKON BALZERS AG , VOSER, Stephan , DOVIDS, Gerhard
发明人： VOSER, Stephan , DOVIDS, Gerhard
IPC分类号： H01L21/00
CPC分类号： H01L21/67736 , H01L21/67201 , H01L21/67748 , H01L21/67751 , Y10S414/139
摘要： A transport arrangement (100) for bi-directionally transporting substrates towards and from a load lock (5) comprises a first substrate handler (1) swivelable about a first axis (A 1 ) and with at least two first substrate carriers (1a, 1b). A second substrate handler (20) swivelable about a second axis (A 20 ) comprises at least four second substrate carriers (20a to 20d). First and second substrate carriers are mutually aligned respectively in one position of their respective swiveling trajectory paths as one of the first substrate carriers is aligned with one of the second substrate carriers and the other of the first substrate carriers is aligned with the load lock (5). The first substrate carriers (1a, 1b) are movable towards and from the load lock (5) once aligned there with and thereby form respectively external valves of the load lock (5).
摘要翻译：用于将基板双向运送到负载锁（5）的传送装置（100）包括可围绕第一轴线（A1）可旋转的第一基板处理器（1）和至少两个第一基板载体（1a，1b）。围绕第二轴线（A20）可旋转的第二衬底处理器（20）包括至少四个第二衬底支架（20a至20d）。第一和第二基板载体分别在它们各自的旋转轨迹路径的一个位置上相互对准，因为第一基板载体之一与第二基板载体中的一个对准，并且第一基板载体中的另一个与负载锁定（5 ）。第一基板载体（1a，1b）可以朝向和离开装载锁（5）移动，一旦与其对准，从而分别形成加载锁（5）的外部阀。

6. 发明申请

WO2009071667A1 REACTIVE SPUTTERING WITH HIPIMS 审中-公开
标题翻译：反应溅射与HIPIMS
公开(公告)号：WO2009071667A1
公开(公告)日：2009-06-11
申请号：PCT/EP2008/066898
申请日：2008-12-05
申请人： OC OERLIKON BALZERS AG , WEICHART, Jürgen , KADLEC, Stanislav , ELGHAZZALI, Mohamed
发明人： WEICHART, Jürgen , KADLEC, Stanislav , ELGHAZZALI, Mohamed
IPC分类号： H01J37/34 , C23C14/34
CPC分类号： H01J37/3408 , C23C14/0036 , C23C14/0094 , C23C14/046 , H01J37/3405 , H01J37/3467
摘要： A method and apparatus for sputter depositing an insulation layer onto a surface of a cavity formed in a substrate and having a high aspect ratio is provided. A target formed at least in part from a material to be included in the insulation layer and the substrate are provided in a substantially enclosed chamber defined by a housing. A plasma is ignited within the substantially enclosed chamber and a magnetic field is provided adjacent to a surface of the target to at least partially contain the plasma adjacent to the surface of the target. A voltage is rapidly increased to repeatedly establish high-power electric pulses between a cathode and an anode. An average power of the electric pulses is at least 0.1 kW, and can optionally be much greater. An operational parameter of the sputter deposition is controlled to promote sputter depositing of the insulation layer in a transition mode between a metallic mode and a reactive mode.
摘要翻译：提供了一种用于将绝缘层溅射沉积到形成在衬底中并且具有高纵横比的空腔的表面上的方法和装置。至少部分地由要包括在绝缘层和基板中的材料形成的靶设置在由壳体限定的基本封闭的腔室中。等离子体在基本封闭的室内点燃，并且邻近靶的表面提供磁场以至少部分地包含邻近靶的表面的等离子体。电压迅速升高以在阴极和阳极之间反复建立大功率的电脉冲。电脉冲的平均功率为至少0.1kW，并且可以可选地大得多。控制溅射沉积的操作参数以促进绝缘层在金属模式和反应模式之间的过渡模式中的溅射沉积。

7. 发明申请

WO2008129010A3 TEST EQUIPMENT FOR AUTOMATED QUALITY CONTROL OF THIN FILM SOLAR MODULES 审中-公开
标题翻译：用于自动质量控制薄膜太阳能模块的测试设备
公开(公告)号：WO2008129010A3
公开(公告)日：2009-03-26
申请号：PCT/EP2008054762
申请日：2008-04-18
申请人： OC OERLIKON BALZERS AG , KLUTH OLIVER , SPRINGER JIRI , MOHR MICHAEL , HUEGLI ANDREAS
发明人： KLUTH OLIVER , SPRINGER JIRI , MOHR MICHAEL , HUEGLI ANDREAS
IPC分类号： G01R31/26
CPC分类号： G01R31/2808 , H02S50/10
摘要： Provided is a method and test system (26) for identifying a defective region of a photovoltaic cell from among a plurality of photovoltaic cells (12) collectively forming a thin film solar module (10). A probe (28) includes a plurality of test fingers (30) arranged to be simultaneously placed adjacent to an electric contact provided to different regions of photovoltaic cells. A light source (42) emits light to be converted by the photovoltaic cells into the electrical output during testing. A measurement circuit (36) measures a property of the electrical output received from the different regions of the photovoltaic cells and transmits a measured value signal indicative of the property measured by the measurement circuit. And a control unit (38) receives the measured value signal and generates a visible display (40) indicating that at least one of the different regions of the solar module is a defective region based at least in part on the measured value signal, and also indicates a location of the defective region on the solar module.
摘要翻译：提供了一种用于从共同形成薄膜太阳能模块（10）的多个光伏电池（12）中识别光伏电池的缺陷区域的方法和测试系统（26）。探针（28）包括多个测试指（30），其布置成与设置在光伏电池的不同区域的电触点相邻地同时放置。在测试期间，光源（42）发射由光伏电池转换成电输出的光。测量电路（36）测量从光伏电池的不同区域接收的电输出的特性，并传送指示由测量电路测量的特性的测量值信号。并且控制单元（38）接收测量值信号，并且至少部分地基于测量值信号产生指示太阳能模块的不同区域中的至少一个是缺陷区域的可见显示器（40），并且还表示太阳能模块上的缺陷区域的位置。

8. 发明申请

WO2009027476A2 A THIN-FILM SOLAR CELL SYSTEM AND METHOD AND APPARATUS FOR MANUFACTURING A THIN-FILM SOLAR CELL 审中-公开
标题翻译：薄膜太阳能电池系统以及用于制造薄膜太阳能电池的方法和设备
公开(公告)号：WO2009027476A2
公开(公告)日：2009-03-05
申请号：PCT/EP2008/061316
申请日：2008-08-28
申请人： OC OERLIKON BALZERS AG , SPRINGER, Jiri
发明人： SPRINGER, Jiri
IPC分类号： H01L31/18 , H01L27/142
CPC分类号： H01L21/3043 , B23K26/02 , B23K26/40 , B23K2203/172 , H01L31/046 , H01L31/0463 , Y02E10/50
摘要： A method for manufacturing a thin-film solar cell includes providing a first conducting layer on a substrate that has an area at least 0.75 m 2 . The first conducting layer is located in a deposition portion of the area. An ultraviolet laser beam is applied through a lens to the first conducting layer. Portions of the first conducting layer are scribed form a trench through the layer. The lens focuses the beam and has a focal length at least 100 mm. The focused beam includes an effective portion effective for the scribing and an ineffective portion ineffective for the scribing. The substrate sags and the first conducting layer remains in the effective portion of the focused beam across the area during the step of applying. One or more active layers are provided on the first conducting layer. A second conducting layer is provided on the one or more active layers.
摘要翻译：用于制造薄膜太阳能电池的方法包括在面积至少为0.75m 2的衬底上提供第一导电层。第一导电层位于该区域的沉积部分中。紫外激光束通过透镜施加到第一导电层。划刻第一导电层的部分形成穿过该层的沟槽。镜头聚焦光束，焦距至少为100毫米。聚焦光束包括对划线有效的有效部分和对划线无效的无效部分。在施加步骤期间，衬底下垂并且第一导电层保留在横过该区域的聚焦光束的有效部分中。在第一导电层上提供一个或多个有源层。在一个或多个有源层上提供第二导电层。

9. 发明申请

WO2008129010A9 TEST EQUIPMENT FOR AUTOMATED QUALITY CONTROL OF THIN FILM SOLAR MODULES 审中-公开
标题翻译：用于自动质量控制薄膜太阳能模块的测试设备
公开(公告)号：WO2008129010A9
公开(公告)日：2009-01-08
申请号：PCT/EP2008054762
申请日：2008-04-18
申请人： OC OERLIKON BALZERS AG , KLUTH OLIVER , SPRINGER JIRI , MOHR MICHAEL , HUEGLI ANDREAS
发明人： KLUTH OLIVER , SPRINGER JIRI , MOHR MICHAEL , HUEGLI ANDREAS
IPC分类号： G01R31/28
CPC分类号： G01R31/2808 , H02S50/10
摘要： Provided is a method and test system for identifying a defective region of a photovoltaic cell from among a plurality of photovoltaic cells collectively forming a thin film solar module. A probe includes a plurality of test fingers arranged to be substantially simultaneously placed adjacent to an electric contact provided to different regions of one or more of the plurality of photovoltaic cells, and each of the test fingers is to receive an electrical output from the different regions of the one or more photovoltaic cells. A light source emits light to be converted by the photovoltaic cells into the electrical output during testing. A measurement circuit measures a property of the electrical output received from the different regions of the photovoltaic cells and transmits a measured value signal indicative of the property measured by the measurement circuit. And a control unit receives the measured value signal and generates a visible display indicating that at least one of the different regions of the solar module is a defective region based at least in part on the measured value signal, and also indicates a location of the defective region on the solar module.
摘要翻译：本发明提供一种从共同形成薄膜太阳能模块的多个光伏电池中识别光伏电池的缺陷区域的方法和测试系统。探针包括布置成基本上同时放置在多个光伏电池中的一个或多个的不同区域上的电触点附近的多个测试指，并且每个测试指状物将接收来自不同区域的电输出的一个或多个光伏电池。在测试期间，光源发射由光伏电池转换成电输出的光。测量电路测量从光伏电池的不同区域接收的电输出的特性，并传送指示由测量电路测量的性质的测量值信号。并且控制单元接收测量值信号，并且至少部分地基于测量值信号产生指示太阳能模块的不同区域中的至少一个是缺陷区域的可见显示，并且还指示有缺陷的位置太阳能模块上的区域。

10. 发明申请

WO2008113466A1 FARBRAD MIT INDIVIDUELLEN AUSWUCHTMASSEN ENTLANG EINER FÜHRUNG 审中-公开
标题翻译：个别平衡块沿导向色轮
公开(公告)号：WO2008113466A1
公开(公告)日：2008-09-25
申请号：PCT/EP2008/001635
申请日：2008-02-29
申请人： OC OERLIKON BALZERS AG , JANICEK, Emil
发明人： JANICEK, Emil
IPC分类号： G02B7/00 , G01M1/36
CPC分类号： G02B26/008 , G01M1/36 , G03B11/00 , G03B33/08 , H04N9/3114 , H04N9/3141
摘要： Die vorliegende Erfindung bezieht sich auf ein Farbrad mit Auswuchtvorrichtung. Die Auswuchtvorrichtung umfasst eine kreisrunde Führung und daran angeordnet zumindest zwei entlang der Führung bewegliche Auswuchtmassen. Die Beweglichkeit der Auswuchtmassen ist derart eingeschränkt, dass sie sich unter ihrem Eigengewicht nicht bewegen. Die Erfindung betrifft ebenfalls ein Verfahren zum Auswuchten des Farbrades, anfangs werden gemäß diesem Verfahren die Auswuchtmassen an der Führung angeordnet dergestalt, dass der Schwerpunkt des durch sie gebildeten Auswuchtmassensystems auf der Rotationsachse des Farbrades zu liegen kommt.Dann wird die Umwucht gemessen und die Position bestimmt an die der Schwerpunkt des Auswuchtmassensystems zur bestimmten Position verschoben indem die Auswuchtmassen entlang der Führung verschoben werden.
摘要翻译：本发明涉及一种彩色轮平衡器。所述平衡装置包括一圆形引导和设置在其上的至少两个平衡块沿导向移动。平衡质量的移动性受到限制，使得它们不会在自身重量下移动。本发明还涉及一种方法，用于平衡所述色轮，最初在引导所述平衡块是这样布置在根据该方法是，由它们形成的Auswuchtmassensystems kommt.Dann趴在色轮的旋转轴线的聚焦测量，则不平衡和位置用于通过沿引导平衡质量错开一定位置Auswuchtmassensystems的重心移动。

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