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1. 发明申请

WO2010056435A3 TRANSDUCER WITH DECOUPLED SENSING IN MUTUALLY ORTHOGONAL DIRECTIONS 审中-公开
标题翻译：在正交方向上解耦的传感器
公开(公告)号：WO2010056435A3
公开(公告)日：2010-07-08
申请号：PCT/US2009059499
申请日：2009-10-05
申请人： FREESCALE SEMICONDUCTOR INC , LIN YIZHEN , MCNEIL ANDREW C
发明人： LIN YIZHEN , MCNEIL ANDREW C
IPC分类号： B81B7/02 , B81C1/00
CPC分类号： G01P15/125 , G01P15/18 , G01P2015/0814 , G01P2015/082 , G01P2015/0831
摘要： A microelectromechanical systems (MEMS) transducer (90) is adapted to sense acceleration in mutually orthogonal directions (92, 94, 96). The MEMS transducer (90) includes a proof mass (100) suspended above a substrate (98) by an anchor system (116). The anchor system (116) pivotally couples the proof mass (100) to the substrate (98) at a rotational axis (132) to enable the proof mass (100) to rotate about the rotational axis (132) in response to acceleration in a direction (96). The proof mass (100) has an opening (112) extending through it. Another proof mass (148) resides in the opening (112), and another anchor system (152) suspends the proof mass (148) above the surface (104) of the substrate (98). The anchor system (152) enables the proof mass (148) to move substantially parallel to the surface (104) of the substrate (98) in response to acceleration in at least another direction (92, 94).
摘要翻译：微机电系统（MEMS）换能器（90）适于感测相互正交的方向（92,94,96）上的加速度。 MEMS换能器（90）包括通过锚固系统（116）悬挂在衬底（98）上方的检验质量块（100）。锚定系统116在旋转轴线132处将检测质量块100枢转地连接到基板98以使得检测质量块100能够响应于检测质量块100中的加速度而围绕旋转轴线132旋转。方向（96）。检测质量块（100）具有穿过其延伸的开口（112）。另一个检验质量（148）驻留在开口（112）中，另一个锚定系统（152）将检测质量（148）悬挂在衬底（98）的表面（104）上方。响应于在至少另一个方向（92,94）上的加速度，锚定系统（152）使得检测质量块（148）能够基本平行于衬底（98）的表面（104）移动。

2. 发明申请

WO2010056435A2 TRANSDUCER WITH DECOUPLED SENSING IN MUTUALLY ORTHOGONAL DIRECTIONS 审中-公开
标题翻译：传感器在异常正交方向上具有解耦感测功能
公开(公告)号：WO2010056435A2
公开(公告)日：2010-05-20
申请号：PCT/US2009/059499
申请日：2009-10-05
申请人： FREESCALE SEMICONDUCTOR INC. , LIN, Yizhen , MCNEIL, Andrew C.
发明人： LIN, Yizhen , MCNEIL, Andrew C.
IPC分类号： B81B7/02 , B81C1/00
CPC分类号： G01P15/125 , G01P15/18 , G01P2015/0814 , G01P2015/082 , G01P2015/0831
摘要： A microelectromechanical systems (MEMS) transducer (90) is adapted to sense acceleration in mutually orthogonal directions (92, 94, 96). The MEMS transducer (90) includes a proof mass (100) suspended above a substrate (98) by an anchor system (116). The anchor system (116) pivotally couples the proof mass (100) to the substrate (98) at a rotational axis (132) to enable the proof mass (100) to rotate about the rotational axis (132) in response to acceleration in a direction (96). The proof mass (100) has an opening (112) extending through it. Another proof mass (148) resides in the opening (112), and another anchor system (152) suspends the proof mass (148) above the surface (104) of the substrate (98). The anchor system (152) enables the proof mass (148) to move substantially parallel to the surface (104) of the substrate (98) in response to acceleration in at least another direction (92, 94).
摘要翻译：微机电系统（MEMS）传感器（90）适于感测相互正交的方向上的加速度（92,94,96）。 MEMS换能器（90）包括通过锚系统（116）悬挂在基板（98）上方的检验质量块（100）。锚定系统（116）在旋转轴线（132）处将证明物质（100）枢转地联接到基底（98），以使得证明物质（100）能够响应于旋转轴线（132）中的加速而围绕旋转轴线（132）旋转方向（96）。证明物质（100）具有延伸通过其的开口（112）。另一个检验质量块（148）位于开口（112）中，另一个锚定系统（152）将校准物质（148）悬挂在衬底（98）的表面（104）上方。锚系统（152）使得证明物质（148）响应于至少另一方向（92,94）上的加速，基本上平行于基底（98）的表面（104）移动。

3. 发明申请

WO2008045660A2 SENSOR HAVING FREE FALL SELF-TEST CAPABILITY AND METHOD THEREFOR 审中-公开
标题翻译：传感器具有自由衰减自检功能及其方法
公开(公告)号：WO2008045660A2
公开(公告)日：2008-04-17
申请号：PCT/US2007/078636
申请日：2007-09-17
申请人： FREESCALE SEMICONDUCTOR INC. , UEDA, Akihiro , MCNEIL, Andrew C.
发明人： UEDA, Akihiro , MCNEIL, Andrew C.
IPC分类号： G01P15/125
CPC分类号： G01P21/00 , G01P15/0891 , G01P15/125 , G01P15/18 , G01P2015/082 , G01P2015/0831 , G11B19/043
摘要： A transducer (20) includes a movable element (24), a self-test actuator (22), and a sensing element (56, 58). The sensing element (56, 58) detects movement of the movable element (24) from a first position (96) to a second position (102) along an axis perpendicular to a plane of the sensing element (56, 58). The second position (102) results in an output signal (82) that simulates a free fall condition. A method (92) for testing a protection feature of a device (70) having the transducer (20) entails moving the movable element (24) to the first position (102) to produce a negative gravitational force detectable at the sensing element (56, 68), applying a signal (88) to the actuator (22) to move the movable element (24) to the second position (102) by the electrostatic force (100) , and ascertaining an enablement of the protection feature in response to the simulated free fall.
摘要翻译：传感器（20）包括可移动元件（24），自检致动器（22）和感测元件（56,58）。感测元件（56,58）沿着垂直于感测元件（56,58）的平面的轴线检测可动元件（24）从第一位置（96）到第二位置（102）的移动。第二位置（102）产生模拟自由落体状态的输出信号（82）。用于测试具有换能器（20）的装置（70）的保护特征的方法（92）需要将可移动元件（24）移动到第一位置（102）以产生在感测元件（56）处可检测到的负重力，68），通过静电力（100）将信号（88）施加到致动器（22）以将可移动元件（24）移动到第二位置（102），并且确定响应于模拟自由落体。

4. 发明申请

WO2009145963A1 CAPACITIVE SENSOR WITH STRESS RELIEF THAT COMPENSATES FOR PACKAGE STRESS 审中-公开
标题翻译：具有应力消耗的电容传感器，用于包装应力补偿
公开(公告)号：WO2009145963A1
公开(公告)日：2009-12-03
申请号：PCT/US2009/036755
申请日：2009-03-11
申请人： FREESCALE SEMICONDUCTOR INC. , LIN, Yizhen , MCNEIL, Andrew, C.
发明人： LIN, Yizhen , MCNEIL, Andrew, C.
IPC分类号： B81B3/00 , B81B7/00 , G01L1/14 , B81C1/00 , H01L29/84
CPC分类号： H01L27/1203 , G01P15/125 , G01P21/00 , G01P2015/0831 , H01L28/40 , H01L28/60 , Y10T29/49002
摘要： A microelectromechanical systems (MEMS) capacitive sensor (52) includes a movable element (56) pivotable about a rotational axis (68) offset between ends (80, 84) thereof. A static conductive layer (58) is spaced away from the movable element (56) and includes electrode elements (62, 64). The movable element (56) includes a section (74) between the rotational axis (68) and one end (80) that exhibits a length (78). The movable element (56) further includes a section (76) between the rotational axis (68) and the other end (84) that exhibits a length (82) that is less than the length (78) of the section (74). The section (74) includes slots (88) extending through movable element (56) from the end (80) toward the rotational axis (68). The slots (88) provide stress relief in section (74) that compensates for package stress to improve sensor performance.
摘要翻译：微电子机械系统（MEMS）电容传感器（52）包括可围绕其端部（80,84）之间偏移的旋转轴线（68）枢转的可移动元件（56）。静电导电层（58）与可动元件（56）间隔开并且包括电极元件（62,64）。可移动元件（56）包括在旋转轴线（68）和呈现长度（78）的一端（80）之间的部分（74）。可移动元件（56）还包括在旋转轴线（68）和另一端（84）之间的部分（76），该部分具有小于部分（74）的长度（78）的长度（82）。部分（74）包括从端部（80）朝向旋转轴线（68）延伸穿过可移动元件（56）的槽（88）。槽（88）在部分（74）中提供应力释放，其补偿包装应力以改善传感器性能。

5. 发明申请

WO2006083376A1 Z-AXIS ACCELEROMETER WITH AT LEAST TWO GAP SIZES AND TRAVEL STOPS DISPOSED OUTSIDE AN ACTIVE CAPACITOR AREA 审中-公开
标题翻译： Z轴式增速器具有至少两个GAP尺寸和旅行车间，处于有源电容器区域外
公开(公告)号：WO2006083376A1
公开(公告)日：2006-08-10
申请号：PCT/US2005/043206
申请日：2005-11-30
申请人： FREESCALE SEMICONDUCTOR, INC. , MCNEIL, Andrew C.
发明人： MCNEIL, Andrew C.
IPC分类号： G01P15/00
CPC分类号： G01P15/125 , G01P2015/0831
摘要： An accelerometer (10) includes a pair of conductive plates (36, 38) fixedly mounted on a substrate (12) surface, a structure coupled to the substrate surface and suspended above the conductive plates, and at least one protective shield (44, 46) mounted on the substrate surface. The structure includes two regions (28, 30) of differing total moments disposed above a respective conductive plate and separated by a flexure axis (26) about which the structure rotates during an acceleration normal to the substrate, each region (28, 30) having a substantially planar outer surface and an inner surface having a first corrugation (32, 34) formed thereon. For each of the two regions, an inner gap exists between the first corrugation and an opposing conductive plate, and an outer gap exists between the substantially planar outer surface and the opposing conductive plate, the outer gap being larger than the inner gap. The at least one protective shield (44, 46) is placed apart from either of the conductive plates (36, 38).
摘要翻译：加速度计（10）包括固定地安装在基板（12）表面上的一对导电板（36,38），耦合到基板表面并悬挂在导电板上方的结构，以及至少一个保护屏蔽）安装在基板表面上。该结构包括设置在相应导电板上方并由弯曲轴线（26）分开的不同总力矩的两个区域（28,30），所述弯曲轴线（26）围绕该弯曲轴线（26）在垂直于衬底的加速中旋转，每个区域（28,30）具有基本平坦的外表面和形成有第一波纹（32,34）的内表面。对于两个区域中的每一个，在第一波纹和相对的导电板之间存在内部间隙，并且在基本平坦的外表面和相对的导电板之间存在外部间隙，外部间隙大于内部间隙。所述至少一个保护屏蔽（44,46）被放置成与所述导电板（36,38）中的任一个隔开。

6. 发明申请

WO2004097895A2 A METHOD OF ADDING MASS TO MEMS STRUCTURES 审中-公开
标题翻译：将质量添加到MEMS结构的方法
公开(公告)号：WO2004097895A2
公开(公告)日：2004-11-11
申请号：PCT/US2004011867
申请日：2004-04-16
申请人： FREESCALE SEMICONDUCTOR INC , MCNEIL ANDREW C , LI GARY , O'BRIEN GARY J
发明人： MCNEIL ANDREW C , LI GARY , O'BRIEN GARY J
IPC分类号： B32B9/00 , B32B15/04 , C23F1/00 , G01P3/00 , G01P9/04 , G01P15/08 , H01L20060101 , H01L
CPC分类号： B81B3/0078 , B81B2201/025 , G01P15/08 , G01P15/0802 , G01P15/0888 , G01P2015/0814 , Y10T428/24917
摘要： A proof mass (11) for a MEMS device is provided herein. The proof mass comprises a base (13) comprising a semiconductor material, and at least one appendage (15) adjoined to said base by way of a stem (21). The appendage (15) comprises a metal (17) or other such material that may be disposed on a semiconductor material (19). The metal increases the total mass of the proof mass (11) as compared to a proof mass of similar dimensions made solely from semiconductor materials, without increasing the size of the proof mass. At the same time, the attachment of the appendage (15) by way of a stem (21) prevents stresses arising from CTE differentials in the appendage from being transmitted to the base, where they could contribute to temperature errors.
摘要翻译：本文提供了用于MEMS器件的检测质量（11）。检测质量块包括一个包括半导体材料的基底（13）和至少一个通过杆（21）与所述底座邻接的附属物（15）。附件（15）包括可以设置在半导体材料（19）上的金属（17）或其他这样的材料。与仅由半导体材料制成的类似尺寸的检验质量相比，金属与总体质量（11）相比增加，而不增加检测质量。同时，通过杆（21）附接附件（15）可防止附件中产生的CTE差异的应力传输到基座，在那里它们可能导致温度误差。

7. 发明申请

WO2009145967A1 SEMICONDUCTOR DEVICE WITH REDUCED SENSITIVITY TO PACKAGE STRESS 审中-公开
标题翻译：具有降低对包装应力敏感性的半导体器件
公开(公告)号：WO2009145967A1
公开(公告)日：2009-12-03
申请号：PCT/US2009/037266
申请日：2009-03-16
申请人： FREESCALE SEMICONDUCTOR INC. , MCNEIL, Andrew, C. , GEISBERGER, Aaron, A. , KOURY, Daniel, N. , LI, Gary, G.
发明人： MCNEIL, Andrew, C. , GEISBERGER, Aaron, A. , KOURY, Daniel, N. , LI, Gary, G.
IPC分类号： B81B1/00 , B81B3/00 , B81B7/00
CPC分类号： B81B3/0072 , B81B2201/0235 , B81B2203/0109 , B81B2203/0136 , G01P1/006 , G01P15/0802 , G01P15/125 , G01P15/18 , G01P2015/0814 , G01P2015/082
摘要： A microelectromechanical systems (MEMS) sensor (52) includes a substrate (62) a movable element (58) spaced apart from the substrate (62), suspension anchors (66, 68, 70, 72) formed on the substrate (62), and compliant members (74) interconnecting the movable element (58) with the suspension anchors. The MEMS sensor (52) further includes fixed fingers (76) and fixed finger anchors (78) attaching the fixed fingers (76) to the substrate (62). The movable element (58) includes openings (64). At least one of the suspension anchors resides in at least one of the multiple openings (64) and pairs (94) of the fixed fingers (76) reside in other multiple openings (64). The MEMS sensor (52) is symmetrically formed, and a location of the fixed finger anchors (78) defines an anchor region (103) within which the suspension anchors (66, 68, 70, 72) are positioned.
摘要翻译：微机电系统（MEMS）传感器（52）包括基板（62），与基板（62）间隔开的可移动元件（58），形成在基板（62）上的悬挂锚固件（66,68,70,72）以及将可移动元件（58）与悬挂锚固件互连的柔性构件（74）。 MEMS传感器（52）还包括将固定指状物（76）附接到基底（62）的固定指状物（76）和固定指状锚（78）。可移动元件（58）包括开口（64）。悬挂锚中的至少一个驻留在多个开口（64）中的至少一个中，固定指状物（76）的对（94）位于其它多个开口（64）中。 MEMS传感器（52）对称地形成，并且固定指状物锚定件（78）的位置限定了锚定区域（103），悬挂锚固件（66,68,70,72）定位在锚固区域内。

8. 发明申请

WO2008045660A3 SENSOR HAVING FREE FALL SELF-TEST CAPABILITY AND METHOD THEREFOR 审中-公开
标题翻译：具有自由落体自测能力的传感器及其方法
公开(公告)号：WO2008045660A3
公开(公告)日：2008-09-12
申请号：PCT/US2007078636
申请日：2007-09-17
申请人： FREESCALE SEMICONDUCTOR INC , UEDA AKIHIRO , MCNEIL ANDREW C
发明人： UEDA AKIHIRO , MCNEIL ANDREW C
IPC分类号： G01P15/125 , G01P21/00
CPC分类号： G01P21/00 , G01P15/0891 , G01P15/125 , G01P15/18 , G01P2015/082 , G01P2015/0831 , G11B19/043
摘要： A transducer (20) includes a movable element (24), a self-test actuator (22), and a sensing element (56, 58). The sensing element (56, 58) detects movement of the movable element (24) from a first position (96) to a second position (102) along an axis perpendicular to a plane of the sensing element (56, 58). The second position (102) results in an output signal (82) that simulates a free fall condition. A method (92) for testing a protection feature of a device (70) having the transducer (20) entails moving the movable element (24) to the first position (102) to produce a negative gravitational force detectable at the sensing element (56, 68), applying a signal (88) to the actuator (22) to move the movable element (24) to the second position (102) by the electrostatic force (100) , and ascertaining an enablement of the protection feature in response to the simulated free fall.
摘要翻译：换能器（20）包括可移动元件（24），自测致动器（22）和感测元件（56,58）。感测元件（56,58）检测可动元件（24）沿垂直于感测元件（56,58）的平面的轴线从第一位置（96）到第二位置（102）的移动。第二位置（102）导致模拟自由落体状态的输出信号（82）。用于测试具有换能器（20）的装置（70）的保护特征的方法（92）需要将可移动元件（24）移动到第一位置（102）以产生在感测元件（56）处可检测的负重力，通过静电力（100）向所述致动器（22）施加信号（88）以将所述可移动元件（24）移动到所述第二位置（102），并且响应于所述保护特征确定所述保护特征的启用模拟自由落体。

9. 发明申请

WO2008088644A1 DIFFERENTIAL CAPACITIVE SENSOR AND METHOD OF MAKING SAME 审中-公开
标题翻译：差分电容式传感器及其制造方法
公开(公告)号：WO2008088644A1
公开(公告)日：2008-07-24
申请号：PCT/US2007/087846
申请日：2007-12-18
申请人： FREESCALE SEMICONDUCTOR INC. , MCNEIL, Andrew, C. , LIN, Yizhen , MILLER, Todd, F.
发明人： MCNEIL, Andrew, C. , LIN, Yizhen , MILLER, Todd, F.
IPC分类号： G01R27/26
CPC分类号： G01P15/125 , G01P2015/0831
摘要： A differential capacitive sensor (50) includes a movable element (56) pivotable about a rotational axis (60). The movable element (56) includes first and second sections (94, 96). The first section (94) has an extended portion (98) distal from the rotational axis (60). A static layer (52) is spaced away from a first surface (104) of the moveable element (56), and includes a first actuation electrode (74), a first sensing electrode (64), and a third sensing electrode (66). A static layer (62) is spaced away from a second surface (106) of the moveable element (56) and includes a second actuation electrode (74), a second sensing electrode (70), and a fourth sensing electrode (72). The first and second electrodes (64, 70) oppose the first section (94), the third and fourth electrodes (66, 72) oppose the second section (96), and the first and second electrodes (68, 74) oppose the extended portion (98).
摘要翻译：差分电容传感器（50）包括可围绕旋转轴线（60）枢转的可移动元件（56）。可移动元件（56）包括第一和第二部分（94,96）。第一部分（94）具有远离旋转轴线（60）的延伸部分（98）。静电层（52）与可移动元件（56）的第一表面（104）间隔开，并且包括第一致动电极（74），第一感测电极（64）和第三感测电极（66）。静电层（62）与可移动元件（56）的第二表面（106）间隔开并且包括第二致动电极（74），第二感测电极（70）和第四感测电极（72）。第一和第二电极（64,70）与第一部分（94）相对，第三和第四电极（66,72）与第二部分（96）相对，并且第一和第二电极（68,74）与延伸的部分（98）。

10. 发明申请

WO2009020716A1 SYMMETRICAL DIFFERENTIAL CAPACITIVE SENSOR AND METHOD OF MAKING SAME 审中-公开
标题翻译：对称差分电容式传感器及其制造方法
公开(公告)号：WO2009020716A1
公开(公告)日：2009-02-12
申请号：PCT/US2008/068080
申请日：2008-06-25
申请人： FREESCALE SEMICONDUCTOR INC. , LIN, Yizhen , FUHRMANN, Marco , MCNEIL, Andrew, C.
发明人： LIN, Yizhen , FUHRMANN, Marco , MCNEIL, Andrew, C.
IPC分类号： G01P15/125 , G01P15/00 , G01J3/00
CPC分类号： G01P15/125 , G01P2015/0831
摘要： A symmetrical differential capacitive sensor (60) includes a movable element (66) pivotable about a geometrically centered rotational axis (70). The element (66) includes sections (86, 88). Each of the sections (86, 88) has a stop (94, 96) spaced equally away from the rotational axis (70). Each of the sections (86, 88) also has a different configuration (104, 108) of apertures (102, 106). The configurations (104, 108) of apertures (102, 106) create a mass imbalance between the sections (86, 88) so that the element (66) pivots about the rotational axis (70) in response to acceleration. The apertures (102, 106) also facilitate etch release during manufacturing and reduce air damping when the element (66) rotates. Apertures (126, 128) are formed in electrodes (78, 80) underlying the apertures (102, 106) to match the capacitance between the two sections (86, 88) of movable element (86) to provide the same bi-directional actuation capability.
摘要翻译：对称差分电容传感器（60）包括可围绕几何中心的旋转轴线（70）枢转的可移动元件（66）。元件（66）包括部分（86,88）。每个部分（86,88）具有与旋转轴线（70）等距离间隔的止挡件（94,96）。每个部分（86,88）还具有不同的孔（102,106）的构造（104,108）。孔（102,106）的构造（104,108）在各部分（86,88）之间产生质量不平衡，使得元件（66）响应加速度绕旋转轴线（70）枢转。孔（102,106）还有助于制造过程中的蚀刻释放，并且当元件（66）旋转时减小空气阻尼。孔径（126,128）形成在孔（102,106）下面的电极（78,80）中，以匹配可移动元件（86）的两个部分（86,88）之间的电容，以提供相同的双向致动能力。

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