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1. 发明申请

WO2008091722A1 METHOD AND APPARATUS FOR CLOSED LOOP OFFSET CANCELLATION 审中-公开
标题翻译：闭环闭环失效的方法和装置
公开(公告)号：WO2008091722A1
公开(公告)日：2008-07-31
申请号：PCT/US2008/050348
申请日：2008-01-07
申请人： FREESCALE SEMICONDUCTOR INC. , MILLER, Todd F. , FUHRMANN, Marco , KRAVER, Keith L.
发明人： MILLER, Todd F. , FUHRMANN, Marco , KRAVER, Keith L.
IPC分类号： G01P15/08
CPC分类号： G01P15/131 , G01P15/125
摘要： An apparatus (100, 200) and method (300) for sensing acceleration are provided. The method includes producing (305) a first signal in response to an acceleration sensed by a transducer, producing (310) a second signal based on the first signal, and actuating (315) the transducer in response to the second signal to remove offset in the transducer. The first signal represents the acceleration, and the second signal represents a low frequency component associated with an offset in the transducer. The apparatus (100) includes a transducer (102) producing a capacitance in response to the acceleration, a sensing system (104, 106, 108) producing a first signal from the capacitance representing the acceleration, and a compensation system (112, 110) coupled between the sensing system and transducer. The compensation system produces a second signal based on the first signal for substantially removing an offset of the transducer.
摘要翻译：提供了一种用于感测加速度的装置（100,200）和方法（300）。该方法包括响应于由换能器感测到的加速度产生（305）第一信号，基于第一信号产生（310）第二信号，以及响应于第二信号致动（315）换能器以去除偏移传感器。第一信号表示加速度，第二信号表示与换能器中的偏移相关联的低频分量。装置（100）包括响应于加速度产生电容的换能器（102），产生来自表示加速度的电容的第一信号的感测系统（104,106,108）和补偿系统（112,110）耦合在传感系统和传感器之间。补偿系统基于第一信号产生第二信号，用于基本上去除换能器的偏移。

2. 发明申请

WO2008088644A1 DIFFERENTIAL CAPACITIVE SENSOR AND METHOD OF MAKING SAME 审中-公开
标题翻译：差分电容式传感器及其制造方法
公开(公告)号：WO2008088644A1
公开(公告)日：2008-07-24
申请号：PCT/US2007/087846
申请日：2007-12-18
申请人： FREESCALE SEMICONDUCTOR INC. , MCNEIL, Andrew, C. , LIN, Yizhen , MILLER, Todd, F.
发明人： MCNEIL, Andrew, C. , LIN, Yizhen , MILLER, Todd, F.
IPC分类号： G01R27/26
CPC分类号： G01P15/125 , G01P2015/0831
摘要： A differential capacitive sensor (50) includes a movable element (56) pivotable about a rotational axis (60). The movable element (56) includes first and second sections (94, 96). The first section (94) has an extended portion (98) distal from the rotational axis (60). A static layer (52) is spaced away from a first surface (104) of the moveable element (56), and includes a first actuation electrode (74), a first sensing electrode (64), and a third sensing electrode (66). A static layer (62) is spaced away from a second surface (106) of the moveable element (56) and includes a second actuation electrode (74), a second sensing electrode (70), and a fourth sensing electrode (72). The first and second electrodes (64, 70) oppose the first section (94), the third and fourth electrodes (66, 72) oppose the second section (96), and the first and second electrodes (68, 74) oppose the extended portion (98).
摘要翻译：差分电容传感器（50）包括可围绕旋转轴线（60）枢转的可移动元件（56）。可移动元件（56）包括第一和第二部分（94,96）。第一部分（94）具有远离旋转轴线（60）的延伸部分（98）。静电层（52）与可移动元件（56）的第一表面（104）间隔开，并且包括第一致动电极（74），第一感测电极（64）和第三感测电极（66）。静电层（62）与可移动元件（56）的第二表面（106）间隔开并且包括第二致动电极（74），第二感测电极（70）和第四感测电极（72）。第一和第二电极（64,70）与第一部分（94）相对，第三和第四电极（66,72）与第二部分（96）相对，并且第一和第二电极（68,74）与延伸的部分（98）。

3. 发明申请

WO2007111611A1 METHODS AND APPARATUS FOR DIFFERENTIAL SIGNALING USING ABSOLUTE PRESSURE SENSORS 审中-公开
标题翻译：使用绝对压力传感器进行差分信号的方法和装置
公开(公告)号：WO2007111611A1
公开(公告)日：2007-10-04
申请号：PCT/US2006/011568
申请日：2006-03-29
申请人： FREESCALE SEMICONDUCTOR, INC. , SCHLARMANN, Mark E. , MILLER, Todd F.
发明人： SCHLARMANN, Mark E. , MILLER, Todd F.
IPC分类号： G01R19/00 , H03K5/22
CPC分类号： H03K5/24 , G01L9/12
摘要： A differential circuit (100) is configured to accept a differential excitation voltage (101) across its input terminals (102, 104) and, in conjunction with a pair of capacitive absolute pressure sensors (106, 108), is configured to produce a differential output (115). The excitation voltage (101) at one terminal (102) with respect to a common mode voltage is opposite in polarity from the voltage of the second terminal (104) with respect to the common mode voltage. In this way, absolute pressure sensors can be used in a way that achieves the benefits of differential circuits - e.g., high linearity and increased common mode noise rejection.
摘要翻译：差分电路（100）被配置为在其输入端子（102,104）之间接受差分激励电压（101），并且与一对电容绝对压力传感器（106,108）结合，以便产生差分输出（115）。一个端子（102）处的共模电压的激励电压（101）的极性与第二端子（104）的电压相对于共模电压相反。以这种方式，绝对压力传感器可以以实现差分电路的优点的方式使用，例如高线性度和增加的共模噪声抑制。

4. 发明申请

WO2010110989A3 VERTICALLY INTEGRATED MEMS ACCELERATION TRANSDUCER 审中-公开
标题翻译：垂直集成MEMS加速传感器
公开(公告)号：WO2010110989A3
公开(公告)日：2011-01-13
申请号：PCT/US2010025579
申请日：2010-02-26
申请人： FREESCALE SEMICONDUCTOR INC , LIN YIZHEN , MILLER TODD F , PARK WOO TAC
发明人： LIN YIZHEN , MILLER TODD F , PARK WOO TAC
IPC分类号： G01P15/125 , B81B7/00 , B81B7/02 , G01P15/08 , G01P15/097
CPC分类号： G01P15/0802 , B81B7/0074 , B81B2201/0235 , G01P15/125 , G01P15/18 , G01P2015/0814 , G01P2015/082 , G01P2015/0831 , G01P2015/0837 , G01P2015/0848 , G01P2015/0851 , G01P2015/0871 , G01P2015/088
摘要： A transducer (20) includes sensors (28, 30) that are bonded to form a vertically integrated configuration. The sensor (28) includes a proof mass (32) movably coupled to and spaced apart from a surface (34) of a substrate (36). The sensor (30) includes a proof mass (58) movably coupled to and spaced apart from a surface (60) of a substrate (56). The substrates (36, 56) are coupled with the surface (60) of substrate (56) facing the surface (34) of substrate (36). Thus, the proof mass (58) faces the proof mass (32). The sensors (28, 30) are fabricated separately and can be formed utilizing differing micromachining techniques. The sensors (28, 30) are subsequently coupled (90) utilizing a wafer bonding technique to form the transducer (20). Embodiments of the transducer (20) may include sensing along one, two, or three orthogonal axes and may be adapted to detect movement at different acceleration sensing ranges.
摘要翻译：传感器（20）包括被结合以形成垂直一体化构造的传感器（28,30）。传感器（28）包括可移动地联接到基板（36）的表面（34）并与之间隔开的检测质量块（32）。传感器（30）包括可移动地联接到衬底（56）的表面（60）并与其间隔开的校准质量块（58）。衬底（36,56）与衬底（56）的面向衬底（36）的表面（34）的表面（60）耦合。因此，证明物质（58）面向检验质量块（32）。传感器（28,30）分开制造并且可以利用不同的微加工技术来形成。传感器（28,30）随后利用晶片接合技术耦合（90）以形成换能器（20）。换能器（20）的实施例可以包括沿着一个，两个或三个正交轴的感测，并且可以适于检测不同加速度感测范围的运动。

5. 发明申请

WO2010110989A2 VERTICALLY INTEGRATED MEMS ACCELERATION TRANSDUCER 审中-公开
标题翻译：垂直集成MEMS加速传感器
公开(公告)号：WO2010110989A2
公开(公告)日：2010-09-30
申请号：PCT/US2010/025579
申请日：2010-02-26
申请人： FREESCALE SEMICONDUCTOR INC. , LIN, Yizhen , MILLER, Todd F. , PARK, Woo Tac
发明人： LIN, Yizhen , MILLER, Todd F. , PARK, Woo Tac
IPC分类号： G01P15/125 , G01P15/097 , G01P15/08 , B81B7/02 , B81B7/00
CPC分类号： G01P15/0802 , B81B7/0074 , B81B2201/0235 , G01P15/125 , G01P15/18 , G01P2015/0814 , G01P2015/082 , G01P2015/0831 , G01P2015/0837 , G01P2015/0848 , G01P2015/0851 , G01P2015/0871 , G01P2015/088
摘要： A transducer (20) includes sensors (28, 30) that are bonded to form a vertically integrated configuration. The sensor (28) includes a proof mass (32) movably coupled to and spaced apart from a surface (34) of a substrate (36). The sensor (30) includes a proof mass (58) movably coupled to and spaced apart from a surface (60) of a substrate (56). The substrates (36, 56) are coupled with the surface (60) of substrate (56) facing the surface (34) of substrate (36). Thus, the proof mass (58) faces the proof mass (32). The sensors (28, 30) are fabricated separately and can be formed utilizing differing micromachining techniques. The sensors (28, 30) are subsequently coupled (90) utilizing a wafer bonding technique to form the transducer (20). Embodiments of the transducer (20) may include sensing along one, two, or three orthogonal axes and may be adapted to detect movement at different acceleration sensing ranges.
摘要翻译：传感器（20）包括被结合以形成垂直一体化构造的传感器（28,30）。传感器（28）包括可移动地联接到基板（36）的表面（34）并与之间隔开的检测质量块（32）。传感器（30）包括可移动地联接到衬底（56）的表面（60）并与其间隔开的校准质量块（58）。衬底（36,56）与衬底（56）的面向衬底（36）的表面（34）的表面（60）耦合。因此，证明物质（58）面向检验质量块（32）。传感器（28,30）分开制造并且可以利用不同的微加工技术来形成。传感器（28,30）随后利用晶片接合技术耦合（90）以形成换能器（20）。换能器（20）的实施例可以包括沿着一个，两个或三个正交轴的感测，并且可以适于检测不同加速度感测范围的运动。

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