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1. 发明申请

WO2012044658A1 SYSTEM FOR AND METHOD OF FAST PULSE GAS DELIVERY 审中-公开
标题翻译：快速脉冲气体输送系统及方法
公开(公告)号：WO2012044658A1
公开(公告)日：2012-04-05
申请号：PCT/US2011/053614
申请日：2011-09-28
申请人： MKS INSTRUMENTS, INC. , DING, Junhua
发明人： DING, Junhua
IPC分类号： C23C16/52 , C23C16/455 , C23C16/448 , G05D7/06
CPC分类号： C23C16/52 , C23C16/448 , C23C16/45523 , C23C16/45561 , G05D7/0647 , Y10T137/0379 , Y10T137/0396 , Y10T137/2836 , Y10T137/2842 , Y10T137/2863
摘要： A system for and method of delivering pulses of a desired mass of gas to a tool is described. A system for delivering pulses of a desired mass of gas to a process chamber or tool, comprising: a gas delivery chamber; a first valve arranged so as to control the flow of gas into the gas delivery chamber; a second valve arranged so as control the flow of gas leaving the gas delivery chamber so that the gas can leave the gas delivery chamber in pulses, each of a selected mass as a function of the initial pressure of the gas in the gas delivery chamber and the duration of the respective pulse; and a pressure control arrangement configured and arranged so as to control the flow of gas into the gas delivery chamber so as to precharge the gas in the gas delivery chamber to an initial pressure set point prior to delivering the pulses of gas such that the variance of the starting pressure of the gas in the gas delivery chamber is controlled prior to delivering the pulses of gas, and the repeatability of the mass delivery is improved as a function of the duration of each of the pulses.
摘要翻译：描述了将期望质量的气体的脉冲输送到工具的系统和方法。一种用于将期望质量的气体的脉冲输送到处理室或工具的系统，包括：气体输送室; 第一阀，其布置成控制气体进入气体输送室的流动; 第二阀，其布置成控制离开气体输送室的气体流，使得气体可以以脉冲方式离开气体输送室，每个选定的质量作为气体输送室中的气体的初始压力的函数，以及相应脉冲的持续时间; 以及压力控制装置，其配置和布置成控制气体进入气体输送室的流量，以便在输送气体脉冲之前将气体输送室中的气体预充气到初始压力设定点，使得在输送气体脉冲之前控制气体输送室中的气体的起始压力，并且作为每个脉冲的持续时间的函数，质量传递的重复性得到改善。

2. 发明申请

WO2010059696A1 DUAL-MODE MASS FLOW VERIFICATION AND MASS FLOW DELIVERY SYSTEM AND METHOD 审中-公开
标题翻译：双模式大流量验证和大流量输送系统及方法
公开(公告)号：WO2010059696A1
公开(公告)日：2010-05-27
申请号：PCT/US2009/064948
申请日：2009-11-18
申请人： MKS INSTRUMENTS, INC. , DING, Junhua , ZARKAR, Kaveh
发明人： DING, Junhua , ZARKAR, Kaveh
IPC分类号： G01F1/00 , G01F11/00 , G01F23/14
CPC分类号： G01F25/0053 , G05D7/0647
摘要： A system performs mass flow delivery of a fluid, and also performs mass flow verification of the fluid. The system includes an inlet valve that controls flow of the fluid into a chamber, an outlet valve that controls flow of the fluid out of the chamber, a pressure transducer that measures the pressure of the fluid within the chamber, a temperature sensor that measures the temperature of the fluid within the chamber, and a controller. The controller is configured to control opening and closing of the inlet and outlet valves, using the measurements of the pressure and the temperature change within the chamber, so as to verify, when in a first mode, a measurement of the flow rate of the fluid by a device, and so as to deliver, when in a second mode, a desired amount of the fluid from the chamber into a processing facility.
摘要翻译：系统执行流体的质量流量传递，并且还执行流体的质量流量验证。该系统包括控制流体进入腔室的入口阀，控制流体离开腔室的出口阀，测量室内流体压力的压力传感器，测量腔室内流体温度的温度传感器室内流体的温度，以及控制器。控制器被配置成通过使用室内的压力和温度变化的测量来控制入口和出口阀的打开和关闭，以便在第一模式中验证流体的流量的测量并且当处于第二模式时，将从腔室流出的所需量的流体输送到处理设备中。

3. 发明申请

WO2008103503A1 GAS DELIVERY METHOD AND SYSTEM INCLUDING A FLOW RATIO CONTROLLER USING A MULTIPLE ANTISYMMETRIC OPTIMAL CONTROL ARRANGEMENT 审中-公开
标题翻译：包含流量比控制器的气体输送方法和系统，使用多种抗衡最佳控制装置
公开(公告)号：WO2008103503A1
公开(公告)日：2008-08-28
申请号：PCT/US2008/050834
申请日：2008-01-11
申请人： MKS INSTRUMENTS, INC. , DING, Junhua , ZARKAR, Kaveh, H.
发明人： DING, Junhua , ZARKAR, Kaveh, H.
IPC分类号： G05D11/13
CPC分类号： G05D11/132 , Y10T137/0363 , Y10T137/7761 , Y10T137/87314 , Y10T137/87772
摘要： The multiple antisymmetric optimal (MAO) control algorithm is disclosed for a gas delivery system including a flow ratio controller for dividing a single mass flow into multiple flow lines. In the MAO control algorithm, each flow line is provided with a flow sensor and a valve actively controlled by a SISO feedback controller combined with a linear saturator to achieve the targeted flow ratio set point. For optimal control performance, these SISO controller and linear saturators are substantial identical. It is proved that each valve control command is multiple antisymmetric to the summation of all other valve control commands. Therefore, the MAO control algorithm guarantees that there exists at least one valve at the allowable maximum open position at any moment, which achieves the optimal solution in terms of the maximum total valve conductance for a given set of flow ratio set points.
摘要翻译：公开了一种用于气体输送系统的多重反对称最优（MAO）控制算法，其包括用于将单个质量流分成多个流动管线的流量比控制器。在MAO控制算法中，每条流水线都配有一个流量传感器和一个由线性饱和器组合的SISO反馈控制器主动控制的阀门，以实现目标流量比设定点。为了获得最佳控制性能，这些SISO控制器和线性饱和器基本相同。证明每个阀门控制命令对所有其他阀门控制命令的求和都是反对称的。因此，MAO控制算法保证在任何时候在允许的最大打开位置存在至少一个阀，这对于给定的一组流量比设定点来说达到最大总阀电导的最优解。

4. 发明申请

WO2008070213A1 CONTROLLER GAIN SCHEDULING FOR MASS FLOW CONTROLLERS 审中-公开
标题翻译：大流量控制器的控制器增益调度
公开(公告)号：WO2008070213A1
公开(公告)日：2008-06-12
申请号：PCT/US2007/073328
申请日：2007-07-12
申请人： MKS INSTRUMENTS, INC. , DING, Junhua
发明人： DING, Junhua
IPC分类号： G01F1/68 , G01F15/00 , G01F25/00 , G05B13/04 , G05D7/06
CPC分类号： G01F1/68 , G01F15/005 , G01F25/0007 , G05B13/042 , G05D7/0635 , Y10T137/7759 , Y10T137/7761
摘要： A mass flow controller having a feedback controller gain, comprises: a sensor configured so as to sense the flow of fluid through controller; a valve arranged so as to adjust the flow of fluid through the controller; and a processor configured so as to controlling the valve as a function of the flow of fluid sensed by the sensor. The sensor and valve are arranged within a feedback system, and the processor updates the feedback controller gain in real time based on the ratio of at least one calibration gas parameter to at least one operating gas parameter, such that the closed loop transfer function of the feedback system remains substantially constant regardless of operating conditions so as to have a consistent control performance at different operation conditions from the calibration condition.
摘要翻译：具有反馈控制器增益的质量流量控制器包括：被配置为感测通过控制器的流体流动的传感器; 阀，其布置成调节流过所述控制器的流体; 以及处理器，其被配置为根据由所述传感器感测的流体的流动来控制所述阀。传感器和阀被布置在反馈系统内，并且处理器基于至少一个校准气体参数与至少一个操作气体参数的比率来实时更新反馈控制器增益，使得闭环传递函数无论操作条件如何，反馈系统保持基本恒定，以便在与校准条件不同的操作条件下具有一致的控制性能。

5. 发明申请

WO2007120406A1 MULTIPLE-CHANNEL FLOW RATIO CONTROLLER 审中-公开
标题翻译：多通道流量比控制器
公开(公告)号：WO2007120406A1
公开(公告)日：2007-10-25
申请号：PCT/US2007/005429
申请日：2007-03-01
申请人： MKS INSTRUMENTS, INC. , L'BASSI, Michael , DING, Junhua , D'ENTREMONT, David
发明人： L'BASSI, Michael , DING, Junhua , D'ENTREMONT, David
IPC分类号： G05B19/43 , G05D11/13
CPC分类号： G05D7/0664 , Y10T137/87877 , Y10T137/87885
摘要： A system for dividing a single mass flow into a plurality N of secondary flows includes an inlet configured to receive the single mass flow, a master FRC (flow ratio controller), and one or more slave FRCs. Each FRC is connected to the inlet and including at least one flow channel. The master FRC and the slave FRCs include in combination a total of N flow channels. Each flow channel i (i = 1,..., N) is connected to carry a corresponding one of the N secondary flows. In response to preselected ratio setpoints received from a host controller, the master FRC and the slave FRCs maintain ratios Q i / Q T (i = 1,..., N) between individual flow rates Qi (i = 1,..., N) and a total flow rate Q T at the preselected ratio set points.
摘要翻译：用于将单个质量流分成多个N个次流的系统包括构造成接收单个质量流的入口，主FRC（流量比控制器）和一个或多个从动FRC。每个FRC连接到入口并且包括至少一个流动通道。主FRC和从站FRC共包括N个流量通道。每个流路i（i = 1，...，N）被连接以携带N个二次流中的相应一个。响应于从主机控制器接收到的预选比率设定点，主FRC和从FRC保持比例Q i（i = 1，...，N ）在预选比率设定点处的个体流量Qi（i = 1，...，N）和总流量Q T T / T之间。

6. 发明申请

WO2007061608A9 VERTICAL MOUNT MASS FLOW SENSOR 审中-公开
公开(公告)号：WO2007061608A9
公开(公告)日：2007-09-07
申请号：PCT/US2006043013
申请日：2006-11-03
申请人： MKS INSTR INC , DING JUNHUA , L BASSI MICHAEL , ZARKAR KAVEH H
发明人： DING JUNHUA , L BASSI MICHAEL , ZARKAR KAVEH H
IPC分类号： G01F1/684
CPC分类号： G01F5/00 , G01F1/6847 , G05D7/0635
摘要： A thermal mass flow meter for measuring flow rate of a fluid includes a conduit that is configured to receive the fluid and that defines a primary flow path between an inlet and an outlet of the conduit. The conduit is bound at least in part by a sensor receiving surface. A thermal sensor tube has a thermal sensing portion that is mounted relative to the sensor receiving surface in a direction substantially perpendicular to both the primary flow path and the sensor receiving surface. When the thermal mass flow meter is mounted in a vertical direction so that fluid within the conduit flows in the vertical direction along the primary flow path, fluid within the sensor tube flows in a horizontal direction so as to substantially prevent thermal siphoning when the sensor tube is heated.

7. 发明申请

WO2013052364A1 METHOD OF AND APPARATUS FOR MULTIPLE CHANNEL FLOW RATIO CONTROLLER SYSTEM 审中-公开
标题翻译：多通道流量比控制系统的设计方法
公开(公告)号：WO2013052364A1
公开(公告)日：2013-04-11
申请号：PCT/US2012/057799
申请日：2012-09-28
申请人： MKS INSTRUMENTS, INC. , DING, Junhua
发明人： DING, Junhua
IPC分类号： C23C16/52 , C23C16/455 , G05D11/13 , H01L21/00
CPC分类号： C23C16/52 , C23C16/45561 , G05D7/0664 , Y10T137/2524 , Y10T137/2529
摘要： A four channel gas delivery system comprising: an inlet channel; four outlet channels; four flow sensors; four control valves, each valve being arranged so as to control the flow from the inlet channel through a corresponding one of the outlet channels; a flow ratio control system configured so as to control the flow from the inlet channel through the corresponding outlet channels so that the following flow ratios are controlled: (a) a first ratio of flows between the outlet channels of a first pair; (b) a second ratio of flows between the outlet channels of a second pair; and (c) a third ratio of flows between the first pair of outlet channels relative to the second pair of outlet channels; wherein the third ratio is controlled by generating at least one bias signal respectively applied to at least one pair of valves, the bias signal being a function of a predetermined set point of the third ratio and measured values of the third ratio.
摘要翻译：一种四通道气体输送系统，包括：入口通道; 四个出口渠道; 四个流量传感器; 四个控制阀，每个阀布置成控制从入口通道流过对应的一个出口通道的流量; 流量比控制系统，被配置为控制从入口通道流过对应出口通道的流量，从而控制以下流量比：（a）第一对出口通道之间的第一流量比; （b）第二对的出口通道之间的第二流量比; 和（c）第一对出口通道之间相对于第二对出口通道的第三流量比; 其中通过产生分别施加到至少一对阀的至少一个偏置信号来控制第三比率，偏置信号是第三比率的预定设定点和第三比率的测量值的函数。

8. 发明申请

WO2008014076A2 CRITICAL FLOW BASED MASS FLOW VERIFIER 审中-公开
标题翻译：基于关键流量的大流量验证器
公开(公告)号：WO2008014076A2
公开(公告)日：2008-01-31
申请号：PCT/US2007/072186
申请日：2007-06-27
申请人： MKS INSTRUMENTS, INC. , DING, Junhua , ZARKAR, Kaveh , SHAJLL, Ali , SMITH, Daniel, Alexander
发明人： DING, Junhua , ZARKAR, Kaveh , SHAJLL, Ali , SMITH, Daniel, Alexander
CPC分类号： G01F25/0038 , G01F25/0053
摘要： A flow verifier for verifying measurement by a fluid delivery device under test (DUT) includes a chamber configured to receive a flow of the fluid from the DUT, at least one temperature sensor to provide gas temperature in the chamber, at least one pressure transducer to provide gas pressure in the chamber, and a critical flow nozzle located upstream of the chamber along a flow path of the fluid from the DUT to the chamber. The critical flow nozzle and the flow verification process are configured to maintain the flow rate of the fluid through the nozzle at the critical flow condition such that the flow rate through the nozzle is substantially constant and substantially insensitive to any variation in pressure within the chamber downstream of the nozzle. Therefore, the varying chamber pressure during the flow verification period has substantially no impact on the downstream pressure of the DUT, and the external volume between the flow verifier and the DUT is substantially irrelevant to the flow verification calculation.
摘要翻译：用于验证被测流体输送装置（DUT）的测量的流量检验器包括：腔室，被配置为从DUT接收流体流;至少一个温度传感器，用于在腔室中提供气体温度;至少一个压力传感器，在腔室中提供气体压力，以及临界流动喷嘴，其沿着流体从DUT到腔室的流动路径位于腔室的上游。临界流喷嘴和流量验证过程被配置为保持流体通过喷嘴处于临界流动状态的流速，使得通过喷嘴的流速基本上恒定，并且对腔室下游的任何压力变化基本上不敏感的喷嘴。因此，流动验证期间的变化室压力对DUT的下游压力基本上没有影响，并且流体验证器和DUT之间的外部体积与流动验证计算基本上无关。

9. 发明申请

WO2012116281A1 SYSTEM FOR AND METHOD OF FAST PULSE GAS DELIVERY 审中-公开
标题翻译：快速脉冲气体输送系统及方法
公开(公告)号：WO2012116281A1
公开(公告)日：2012-08-30
申请号：PCT/US2012/026519
申请日：2012-02-24
申请人： MKS INSTRUMENTS, INC. , DING, Junhua , L'BASSI, Michael L. , LEE, Tseng-Chung
发明人： DING, Junhua , L'BASSI, Michael L. , LEE, Tseng-Chung
IPC分类号： C23C16/52 , C23C16/455 , C23C16/448 , G05D7/06
CPC分类号： G05D7/0635 , Y10T137/8593
摘要： A system for delivering pulses of a desired mass of gas to a tool, comprising: a mass flow controller including flow sensor, a control valve and a dedicated controller configured and arranged to receive a recipe of a sequence of steps for opening and closing the control valve so as to deliver as sequence of gas pulses as a function of the recipe. The mass flow controller is configured and arranged so as to operate in either one of at least two modes: as a traditional mass flow controller (MFC) mode or in a pulse gas delivery (PGD) mode. Further, the dedicated controller is configured and arranged to delivery pulses of gas in accordance with anyone of three different types of pulse gas delivery processes: a time based pulse delivery process, a mole based pulse delivery process and a profile based pulse delivery process.
摘要翻译：一种用于将期望质量的气体脉冲输送到工具的系统，包括：质量流量控制器，包括流量传感器，控制阀和专用控制器，其被配置和布置成接收用于打开和关闭控制的一系列步骤的配方阀门，以作为配方的函数输送气体脉冲序列。质量流量控制器被配置和布置成以至少两种模式中的任一种操作：作为传统质量流量控制器（MFC）模式或脉冲气体输送（PGD）模式。此外，专用控制器被配置和布置成根据三种不同类型的脉冲气体输送过程中的任何一种来递送气体脉冲：基于时间的脉冲输送过程，基于摩尔的脉冲输送过程和基于分布的脉冲输送过程。

10. 发明申请

WO2012050866A1 METHOD OF AND APPARATUS FOR MULTIPLE-CHANNEL PULSE GAS DELIVERY SYSTEM 审中-公开
标题翻译：多通道脉冲气体输送系统的方法与装置
公开(公告)号：WO2012050866A1
公开(公告)日：2012-04-19
申请号：PCT/US2011/053618
申请日：2011-09-28
申请人： MKS INSTRUMENTS, INC. , DING, Junhua , BENEDICT, Scott , PISERA, Jaroslaw
发明人： DING, Junhua , BENEDICT, Scott , PISERA, Jaroslaw
IPC分类号： C23C16/52 , C23C16/455 , C23C16/448 , G05D7/06
CPC分类号： G05D7/0635 , C23C16/45523 , C23C16/45557 , G05D7/0623
摘要： A pulse gas delivery system for delivering a sequence of pulses of prescribed amounts of gases to a process tool, comprises: (a) a plurality of channels, each including (i) a gas delivery chamber; (ii) an inlet valve connected so as to control gas flowing into the corresponding gas delivery chamber; and (iii) an outlet valve connected so as to control the amount of gas flowing out of the corresponding gas delivery chamber; and (b) a dedicated multiple channel controller configured so as to control the inlet and outlet valves of each of the channels so that pulses of gases in prescribed amounts can be provided to the process tool in a predetermined sequence in accordance with a pulse gas delivery process.
摘要翻译：一种脉冲气体输送系统，用于将一定数量气体的脉冲序列传送到处理工具，包括：（a）多个通道，每个通道包括（i）气体输送室; （ii）入口阀，其连接以控制流入对应的气体输送室的气体; 和（iii）连接以控制从相应的气体输送室流出的气体量的出口阀; 和（b）专用多通道控制器，其被配置为控制每个通道的入口和出口阀，使得可以根据脉冲气体输送以预定顺序向处理工具提供规定量的气体脉冲处理。

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