基本信息:
- 专利标题： SYSTEM FOR AND METHOD OF FAST PULSE GAS DELIVERY
- 专利标题（中）：快速脉冲气体输送系统及方法
- 申请号：PCT/US2011/053614 申请日：2011-09-28
- 公开(公告)号：WO2012044658A1 公开(公告)日：2012-04-05
- 发明人： DING, Junhua
- 申请人： MKS INSTRUMENTS, INC. , DING, Junhua
- 申请人地址： 2 Tech Drive, Suite 201 Andover, Massachusetts 01810 US
- 专利权人： MKS INSTRUMENTS, INC.,DING, Junhua
- 当前专利权人： MKS INSTRUMENTS, INC.,DING, Junhua
- 当前专利权人地址： 2 Tech Drive, Suite 201 Andover, Massachusetts 01810 US
- 代理机构： KUSMER, Toby. H. et al.
- 优先权： US12/893,554 20100929
- 主分类号： C23C16/52
- IPC分类号： C23C16/52 ; C23C16/455 ; C23C16/448 ; G05D7/06
摘要：
A system for and method of delivering pulses of a desired mass of gas to a tool is described. A system for delivering pulses of a desired mass of gas to a process chamber or tool, comprising: a gas delivery chamber; a first valve arranged so as to control the flow of gas into the gas delivery chamber; a second valve arranged so as control the flow of gas leaving the gas delivery chamber so that the gas can leave the gas delivery chamber in pulses, each of a selected mass as a function of the initial pressure of the gas in the gas delivery chamber and the duration of the respective pulse; and a pressure control arrangement configured and arranged so as to control the flow of gas into the gas delivery chamber so as to precharge the gas in the gas delivery chamber to an initial pressure set point prior to delivering the pulses of gas such that the variance of the starting pressure of the gas in the gas delivery chamber is controlled prior to delivering the pulses of gas, and the repeatability of the mass delivery is improved as a function of the duration of each of the pulses.
摘要（中）：
描述了将期望质量的气体的脉冲输送到工具的系统和方法。 一种用于将期望质量的气体的脉冲输送到处理室或工具的系统，包括：气体输送室; 第一阀，其布置成控制气体进入气体输送室的流动; 第二阀，其布置成控制离开气体输送室的气体流，使得气体可以以脉冲方式离开气体输送室，每个选定的质量作为气体输送室中的气体的初始压力的函数，以及 相应脉冲的持续时间; 以及压力控制装置，其配置和布置成控制气体进入气体输送室的流量，以便在输送气体脉冲之前将气体输送室中的气体预充气到初始压力设定点，使得 在输送气体脉冲之前控制气体输送室中的气体的起始压力，并且作为每个脉冲的持续时间的函数，质量传递的重复性得到改善。