基本信息:
- 专利标题： DUAL-MODE MASS FLOW VERIFICATION AND MASS FLOW DELIVERY SYSTEM AND METHOD
- 专利标题（中）：双模式大流量验证和大流量输送系统及方法
- 申请号：PCT/US2009/064948 申请日：2009-11-18
- 公开(公告)号：WO2010059696A1 公开(公告)日：2010-05-27
- 发明人： DING, Junhua , ZARKAR, Kaveh
- 申请人： MKS INSTRUMENTS, INC. , DING, Junhua , ZARKAR, Kaveh
- 申请人地址： 2 Tech Drive, Suite 201 Andover, Massachusetts 01810 US
- 专利权人： MKS INSTRUMENTS, INC.,DING, Junhua,ZARKAR, Kaveh
- 当前专利权人： MKS INSTRUMENTS, INC.,DING, Junhua,ZARKAR, Kaveh
- 当前专利权人地址： 2 Tech Drive, Suite 201 Andover, Massachusetts 01810 US
- 代理机构： KUSMER, Toby H.
- 优先权： US12/273,234 20081118
- 主分类号： G01F1/00
- IPC分类号： G01F1/00 ; G01F11/00 ; G01F23/14
摘要：
A system performs mass flow delivery of a fluid, and also performs mass flow verification of the fluid. The system includes an inlet valve that controls flow of the fluid into a chamber, an outlet valve that controls flow of the fluid out of the chamber, a pressure transducer that measures the pressure of the fluid within the chamber, a temperature sensor that measures the temperature of the fluid within the chamber, and a controller. The controller is configured to control opening and closing of the inlet and outlet valves, using the measurements of the pressure and the temperature change within the chamber, so as to verify, when in a first mode, a measurement of the flow rate of the fluid by a device, and so as to deliver, when in a second mode, a desired amount of the fluid from the chamber into a processing facility.
摘要（中）：
系统执行流体的质量流量传递，并且还执行流体的质量流量验证。 该系统包括控制流体进入腔室的入口阀，控制流体离开腔室的出口阀，测量室内流体压力的压力传感器，测量腔室内流体温度的温度传感器 室内流体的温度，以及控制器。 控制器被配置成通过使用室内的压力和温度变化的测量来控制入口和出口阀的打开和关闭，以便在第一模式中验证流体的流量的测量 并且当处于第二模式时，将从腔室流出的所需量的流体输送到处理设备中。
IPC结构图谱:
| G | 物理 |
| --G01 | 测量；测试 |
| ----G01F | 容积、流量、质量流量或液位的测量；按容积进行测量 |
| ------G01F1/00 | 测量连续通过仪表的流体或流动固体材料的流量或质量流量 |